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    Film Actuator Based Mems Device and Method
    1.
    发明申请
    Film Actuator Based Mems Device and Method 审中-公开
    基于薄膜执行器的存储器件和方法

    公开(公告)号：US20070256917A1

    公开(公告)日：2007-11-08

    申请号：US10570681

    申请日：2004-09-09

    申请人： Joachim Oberhammer ,  Goran Stemme

    发明人： Joachim Oberhammer ,  Goran Stemme

    IPC分类号： H01H59/00 ,  H01H11/00

    CPC分类号： H01H59/0009 ,  H01G5/18 ,  H01G5/40 ,  H01H2059/0045 ,  H01H2059/0072 ,  Y10T29/49105

    摘要： The present invention discloses a Micro-Electro-Mechanical systems (MEMS) device suitable for use in a range of applications from DC, such as switching electrical signal lines, to RF applications such as tunable capacitors and switches. In an embodiment of the invention, the device comprises a bottom substrate and a top substrate separated at a fixed distance from each other. Disposed between the substrates is a flexible S-shaped membrane having an electrode or an electrically conducting electrode layer with one end attached to the top substrate and the other end in contact with the bottom substrate. An electrically conducting contact block is attached to the underside of the membrane actuator for short circuiting a signal line when the switch is in the closed position. When a voltage is applied between the membrane and an electrode layer on the bottom substrate, the membrane is induced by electrostatic force to deflect in a rolling wave-like motion such that the contact block is displaced into contact with the signal line. The device can be actively opened when a voltage is applied between the membrane actuator and a electrode layer on the top substrate causing the contact block to displace upward breaking contact with the signal line. The MEMS switching device is applicable for use in a switch matrix board for automatically switching telephone lines or in RF applications in the form of a tunable capacitor.

    摘要翻译： 本发明公开了适用于从诸如切换电信号线的DC到可变电容器和开关等RF应用的一系列应用的微机电系统（MEMS）装置。 在本发明的一个实施例中，该装置包括底部基板和彼此隔开固定距离的顶部基板。 设置在基板之间的是具有电极或导电电极层的柔性S形膜，其一端连接到顶部基板，另一端与底部基板接触。 当开关处于闭合位置时，导电接触块附接到膜致动器的下侧，以使信号线短路。 当在膜和底部基板上的电极层之间施加电压时，通过静电力诱导膜以滚动波状的运动偏转，使得接触块移位成与信号线接触。 当膜致动器和顶部基板上的电极层之间施加电压时，该装置可以被主动地打开，导致接触块向上移动与信号线的断开接触。 MEMS开关器件适用于用于自动切换电话线或以可调电容器形式的RF应用的开关矩阵板。

    Adhesive sacrificial bonding of spatial light modulators
    2.
    发明申请
    Adhesive sacrificial bonding of spatial light modulators 有权
    空间光调制器的粘合剂牺牲粘合

    公开(公告)号：US20050052725A1

    公开(公告)日：2005-03-10

    申请号：US10654007

    申请日：2003-09-04

    申请人： Frank Niklaus ,  Goran Stemme

    发明人： Frank Niklaus ,  Goran Stemme

    IPC分类号： G02B26/00 ,  G02B26/08 ,  G02F1/00

    CPC分类号： G02B26/0841

    摘要： A method of combining components to form an integrated device, wherein at least one first component is provided on a first surface of a sacrificial substrate, and at least one second component is provided on a first surface of a non-sacrificial substrate. At least one support structure is formed on at least one of the first surfaces of the sacrificial substrate, and the non-sacrificial substrate, respectively, such that said at least one support structure is extended outwardly from at least one of the first surfaces. The sacrificial substrate carrying the first component, and the non-sacrificial substrate carrying the second component, respectively, are bonded, so that the first and second surfaces will be facing one another with a distance defined by a thickness of the support structure. At least a part of the sacrificial substrate is removed. The first component and second components are interconnected.

    摘要翻译： 一种组合部件以形成集成器件的方法，其中至少一个第一部件设置在牺牲衬底的第一表面上，并且至少一个第二部件设置在非牺牲衬底的第一表面上。 分别在牺牲基板和非牺牲基板的至少一个第一表面上形成至少一个支撑结构，使得所述至少一个支撑结构从至少一个第一表面向外延伸。 承载第一部件的牺牲基板和分别承载第二部件的非牺牲基板分别接合，使得第一和第二表面将彼此面对，由支撑结构的厚度限定的距离。 至少部分牺牲基板被去除。 第一组件和第二组件互连。

    Molded Micro-Needles
    3.
    发明申请
    Molded Micro-Needles 有权
    成型微针

    公开(公告)号：US20070255205A1

    公开(公告)日：2007-11-01

    申请号：US11661113

    申请日：2005-08-30

    申请人： Patrick Griss ,  Goran Stemme

    发明人： Patrick Griss ,  Goran Stemme

    IPC分类号： A61M37/00

    CPC分类号： B29C45/2628 ,  A61K9/0021 ,  A61M37/0015 ,  A61M2037/003 ,  A61M2037/0053 ,  B29C2045/0094 ,  B81B2201/055 ,  B81B2203/0361 ,  B81C99/0085 ,  B81C2201/034

    摘要： Method of hollow micro-projections having side walls and at least one opening in a side wall, by a molding technique. The hollow micro-projections are defined by a first, negative mold defining the exterior shape of the micro-projections and a second, positive mold defining the hollow interior shape of the micro-projections. The method includes injecting a moldable material into the space between the two molds, in a state where they have been brought together. The positive and negative molds each have an essentially cylindrical geometry. In the process of bringing the molds together, the mold halves are laterally off-set with respect to each other, such that the distance between an inner wall of the negative mold and the positive mold in the area, ranges from zero to a finite distance. Micro-projections and arrays of micro-projections are also disclosed.

    摘要翻译： 通过成型技术的具有侧壁和侧壁中的至少一个开口的中空微型突起的方法。 中空微突起由限定微突起的外部形状的第一负模具和限定微突起的中空内部形状的第二正模定义。 该方法包括将可模塑材料注入到两个模具之间的空间中，并将它们合并在一起。 正负模具各自具有基本上圆柱形的几何形状。 在将模具合在一起的过程中，半模相对于彼此横向偏移，使得阴模的内壁和该区域中的正模之间的距离从零到有限距离 。 还公开了微突起和微突起的阵列。

    Micromachined gas-filled chambers and method of microfabrication
    4.
    发明授权
    Micromachined gas-filled chambers and method of microfabrication 失效

    公开(公告)号：US6124145A

    公开(公告)日：2000-09-26

    申请号：US12660

    申请日：1998-01-23

    申请人： Goran Stemme ,  Edvard Kalvesten

    发明人： Goran Stemme ,  Edvard Kalvesten

    IPC分类号： B81B3/00 ,  B81B7/00 ,  G02B5/20 ,  G01R31/26 ,  H01L21/66

    CPC分类号： G02B5/202

    摘要： Micromachining, etching and bonding techniques are employed to fabricate hermetically sealed gas-filled chambers from silicon and/or glass wafers. The hermetically sealed gas-filled chambers have precise dimensions and are filled with a preselected concentration of gas, thus rendering exceptional performance for use as an optical gas filter. The first step involves etching one or more cavities or holes in one or more glass or silicon wafers. These wafers eventually become part of a chip assembly having one or more hermetically sealed gas-filled chambers after appropriate bonding procedures. Interfaces between aligned silicon wafers are bonded using fusion bonding techniques whereas interfaces between silicon and glass wafers are bonded using anodic bonding techniques. Bonding is accomplished in an over-pressured gas-filled bonding environment that contains a selected concentration of gas which is maintained at the bonding temperature in order to encapsulate a precise concentration of the gas within the micromachined cavity.

    Micromachined knife gate valve for high-flow pressure regulation applications
    5.
    发明申请
    Micromachined knife gate valve for high-flow pressure regulation applications 审中-公开
    用于高流量压力调节应用的微加工刀闸阀

    公开(公告)号：US20070090314A1

    公开(公告)日：2007-04-26

    申请号：US10559409

    申请日：2004-06-07

    申请人： Wouter Van Der Wijngaart ,  Goran Stemme ,  Anthony Ridgeway

    发明人： Wouter Van Der Wijngaart ,  Goran Stemme ,  Anthony Ridgeway

    IPC分类号： F16K31/02 ,  F16K31/06

    CPC分类号： F16K99/0001 ,  F15C5/00 ,  F16K99/0011 ,  F16K99/0044 ,  F16K99/0046 ,  F16K99/0048 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  Y10T137/87217

    摘要： The present invention discloses a microvalve for providing pneumatic-flow regulation suitable for use in microsystem applications that are operable using highly efficient actuation means for flow obstruction while being space efficient in design in a manner that is suitable for cost effective bullsk microfabrication. In an embodiment of the invention, the microvalve comprises a first substrate layer, a second layer disposed over the first substrate layer cooperating with the first substrate layer to form a channel through which the flow traverses and defines a direction of the flow. An obstruction element or knife gate is micromachined into the second layer such that it is pivotably attached and actuated with a bimorph actuator to displace the gate along a plane that is substantially perpendicular to the direction of the flow in order to controllably regulate the flow. In a further embodiment, a microsystem comprising the microvalve concept of the invention is microfabricated into an IP-converter for pneumatic high flow pressure control applications.

    摘要翻译： 本发明公开了一种用于提供适用于微系统应用中的气动流量调节的微型阀，其可以使用高效的用于流动阻塞的致动装置来操作，同时在适合于具有成本效益的牛排微细加工的方式中设计时具有空间效率。 在本发明的一个实施例中，微型阀包括第一衬底层，设置在与第一衬底层协作的第一衬底层上的第二层，以形成流体穿过的通道并限定流动的方向。 障碍元件或刀门微机械加工到第二层中，使得其可旋转地连接并用双压电晶片致动器致动，以沿着基本上垂直于流动方向的平面移位栅极，以便可控制地调节流量。 在另一个实施例中，包括本发明的微型阀概念的微系统被微加工成用于气动高流量压力控制应用的IP转换器。

    Miniaturised electrochemical sensor
    6.
    发明授权
    Miniaturised electrochemical sensor 有权
    小型电化学传感器

    公开(公告)号：US09304100B2

    公开(公告)日：2016-04-05

    申请号：US13744533

    申请日：2013-01-18

    申请人： Niclas Roxhed ,  Goran Stemme ,  Hithesh K. Gatty

    发明人： Niclas Roxhed ,  Goran Stemme ,  Hithesh K. Gatty

    IPC分类号： G01N27/404 ,  G01N33/497

    CPC分类号： G01N27/4045 ,  G01N33/497

    摘要： A miniaturised electrochemical sensor for detection of a component in a gas is provided. The sensor comprises a reference electrode, a counter electrode and a structure comprising a plurality of passages delineated by walls extending along the passages. A working electrode covers the walls of the structure and a layer of an ionomer covers at least part of the working electrode along the walls of the structure. The layer of ionomer is in ion conducting contact with the electrodes. The disclosure further relates to a method of fabricating a miniaturised electrochemical sensor and to a device for measuring content of NO in exhaled breath comprising such a miniaturised electrochemical sensor.

    摘要翻译： 提供了用于检测气体中的组分的小型化学电化学传感器。 传感器包括参比电极，对电极和包括沿着通道延伸的壁所描绘的多个通道的结构。 工作电极覆盖结构的壁，并且离子交换聚合物层沿着结构的壁覆盖工作电极的至少一部分。 离聚物层与电极离子导电接触。 本发明还涉及一种制造小型化学电化学传感器的方法和用于测量包含这种小型化学电化学传感器的呼出气体中的NO含量的装置。

    Displacement pump of the diaphragm type having fixed geometry flow control means
    7.
    发明授权
    Displacement pump of the diaphragm type having fixed geometry flow control means 失效
    具有固定几何形状流量控制装置的隔膜式位移泵

    公开(公告)号：US06203291B1

    公开(公告)日：2001-03-20

    申请号：US08834538

    申请日：1997-04-04

    申请人： Erik Stemme ,  Goran Stemme

    发明人： Erik Stemme ,  Goran Stemme

    IPC分类号： F04B1700

    CPC分类号： F04B53/1077 ,  F04B43/043 ,  Y10T137/2224

    摘要： A displacement pump with a pump housing containing a pump chamber of varying volume, the limiting walls of which includes a moveable portion or diaphragm, the movement and/or deformation of which varies the pump chamber volume. The pump chamber has a fluid inlet on the suction side of the pump and a fluid outlet on the pressure side. Both the fluid inlet and the fluid outlet, or possibly only one of them, includes a flow controlling element having one diffuser and one diffuser inlet which, for the same flow, has a larger pressure drop in one flow direction (the nozzle direction) than in the opposite flow direction (the diffuser direction). A drive element is coupled to the diaphragm, whereby the diaphragm can be caused to oscillate, so that the fluid volume in the pump chamber is caused to pulsate and thereby produce a net flow of fluid through the pump.

    摘要翻译： 一种具有泵壳体的容积泵，其包含不同体积的泵室，其限制壁包括可移动部分或隔膜，其移动和/或变形改变泵室容积。 泵室在泵的吸入侧具有流体入口，在压力侧具有流体出口。 流体入口和流体出口（或者可能只有其中一个）包括具有一个扩散器和一个扩散器入口的流量控制元件，其对于相同的流在一个流动方向（喷嘴方向）上具有较大的压降， 在相反的流动方向（扩散器方向）上。 驱动元件连接到隔膜上，由此可使隔膜振动，从而使得泵室中的流体体积发生脉动，从而产生通过泵的净流量。

    MICROMACHINED FLUID FLOW REGULATING DEVICE
    8.
    发明申请
    MICROMACHINED FLUID FLOW REGULATING DEVICE 有权
    微流控流体调节装置

    公开(公告)号：US20140207014A1

    公开(公告)日：2014-07-24

    申请号：US14157810

    申请日：2014-01-17

    申请人： Niclas Roxhed ,  Staffan Johansson ,  Goran Stemme ,  Hans Peter Starck Johnson

    发明人： Niclas Roxhed ,  Staffan Johansson ,  Goran Stemme ,  Hans Peter Starck Johnson

    IPC分类号： A61B5/087 ,  A61B5/08 ,  B81C1/00

    CPC分类号： A61B5/087 ,  A61B5/082 ,  A61B5/097 ,  A61B2562/028 ,  A61B2562/12

    摘要： A micromachined fluid flow regulating device is disclosed comprising a fluid flow channel, at least one flow orifice formed in the channel, defining an inlet portion of the channel upstream of the flow orifice, an outlet portion of the channel downstream of the flow orifice, the fluid having a flow direction from the inlet portion to the outlet portion of the channel. At least one piston is arranged upstream of the flow orifice, movably suspended in the channel by a spring means such that the piston is movable by the fluid in the flow direction of the fluid, towards the flow orifice, to regulate a fluid flow through the flow orifice. The disclosure further relates to the use of a micromachined flow regulating device in a breath analysis device and to a method of fabricating a flow regulating device.

    摘要翻译： 公开了一种微加工流体流量调节装置，其包括流体流动通道，形成在通道中的至少一个流动孔口，在流动孔口的上游限定通道的入口部分，流动孔下游的通道的出口部分， 流体具有从通道的入口部分到出口部分的流动方向。 至少一个活塞布置在流动孔口的上游，通过弹簧装置可移动地悬挂在通道中，使得活塞可以通过流体沿着流体的流动方向移动到流动孔口，以调节通过流体的流体流动 流量孔。 本发明还涉及在呼吸分析装置中使用微加工流量调节装置以及制造流量调节装置的方法。