公开(公告)号：US08558859B2

公开(公告)日：2013-10-15

申请号：US13090971

申请日：2011-04-20

申请人： John H. Jerman ,  Sergei Govorkov

发明人： John H. Jerman ,  Sergei Govorkov

IPC分类号： B41J15/14 ,  B41J27/00

CPC分类号： B41J2/473 ,  B41J2/455 ,  B41J3/4075

摘要： A laser printer arranged to print a pixellated image on laser sensitive tape includes a carriage on which are arranged two laser-beam sources delivering separately modulated laser-beams and optics for focusing the beams on the tape. The tape is mounted on a tape drive which drives the tape incrementally in one direction. The carriage is translated over the tape in a direction perpendicular to the tape-drive direction, while the modulated beams are focused. Two rows of the pixellated image are drawn across the tape in this manner. The tape is then incremented and a further two rows are drawn.

摘要翻译： 布置成在激光敏感带上打印像素化图像的激光打印机包括一个滑架，两个激光束源配置有两个激光束源，分别调制激光束和光束，用于将光束聚焦在磁带上。 磁带安装在磁带驱动器上，以一个方向递增地驱动磁带。 滑架在垂直于磁带驱动方向的方向上在磁带上平移，而调制的光束被聚焦。 以这种方式将两行像素化图像画在磁带上。 然后将磁带递增，并绘制另外两行。

公开(公告)号：US08483249B1

公开(公告)日：2013-07-09

申请号：US13448108

申请日：2012-04-16

申请人： Sergei Govorkov ,  John H. Jerman

发明人： Sergei Govorkov ,  John H. Jerman

IPC分类号： H01S3/04

CPC分类号： H01S5/02272 ,  H01S5/02264 ,  H01S5/02423 ,  H01S5/02484 ,  H01S5/4025

摘要： A diode-laser bar package includes a diamond composite heat-sink on which is soft-solder bonded a copper-pad having an area much greater than that of the diode-laser bar. A constraining-block of a metal having a CTE matching that of the diode-laser bar is hard-solder bonded to the conductive pad. The constraining-block is configured such that the conductive pad in the region of the diode-laser bar has a CTE about equal to that of the constraining-block, and, accordingly, the diode-laser bar.

摘要翻译： 二极管激光棒封装包括金刚石复合散热器，软焊接在其上的铜焊盘的面积远大于二极管激光棒的面积。 具有与二极管激光棒的CTE匹配的CTE的金属的约束块被硬焊接到导电焊盘。 约束块被配置为使得二极管激光条区域中的导电焊盘具有大约等于约束块的导通焊盘，并且相应地具有二极管 - 激光条。

公开(公告)号：US20120268548A1

公开(公告)日：2012-10-25

申请号：US13090971

申请日：2011-04-20

申请人： John H. Jerman ,  Sergei Govorkov

发明人： John H. Jerman ,  Sergei Govorkov

IPC分类号： B41J2/47

CPC分类号： B41J2/473 ,  B41J2/455 ,  B41J3/4075

摘要： A laser printer arranged to print a pixellated image on laser sensitive tape includes a carriage on which are arranged two laser-beam sources delivering separately modulated laser-beams and optics for focusing the beams on the tape. The tape is mounted on a tape drive which drives the tape incrementally in one direction. The carriage is translated over the tape in a direction perpendicular to the tape-drive direction, while the modulated beams are focused. Two rows of the pixellated image are drawn across the tape in this manner. The tape is then incremented and a further two rows are drawn.

摘要翻译： 布置成在激光敏感带上打印像素化图像的激光打印机包括一个滑架，两个激光束源配置有两个激光束源，分别调制激光束和光束，用于将光束聚焦在磁带上。 磁带安装在磁带驱动器上，以一个方向递增地驱动磁带。 滑架在垂直于磁带驱动方向的方向上在磁带上平移，而调制的光束被聚焦。 以这种方式将两行像素化图像画在磁带上。 然后将磁带递增，并绘制另外两行。

公开(公告)号：US08611383B2

公开(公告)日：2013-12-17

申请号：US13093585

申请日：2011-04-25

申请人： Sergei Govorkov ,  Luis Spinelli

发明人： Sergei Govorkov ,  Luis Spinelli

IPC分类号： H01S5/024 ,  H01S5/183

CPC分类号： H01S5/02484 ,  B82Y20/00 ,  H01S3/109 ,  H01S5/0213 ,  H01S5/041 ,  H01S5/142 ,  H01S5/18361 ,  H01S5/18377 ,  H01S5/1838 ,  H01S5/34306

摘要： A gain-module for use in an OPS-laser includes a multilayer semiconductor gain-structure surmounting a multilayer compound mirror-structure. Within the multilayer compound mirror-structure is a relatively thick layer of diamond which serves as a heat-spreader.

摘要翻译： 用于OPS激光器的增益模块包括跨越多层复合镜结构的多层半导体增益结构。 在多层复合镜中，镜面结构是用作散热器的相对较厚的金刚石层。

公开(公告)号：US20070036194A1

公开(公告)日：2007-02-15

申请号：US11203734

申请日：2005-08-15

申请人： Sergei Govorkov ,  Luis Spinelli ,  R. Austin

发明人： Sergei Govorkov ,  Luis Spinelli ,  R. Austin

IPC分类号： H01S3/22 ,  H01S3/091 ,  H01S3/09

CPC分类号： H01S5/041 ,  B82Y20/00 ,  H01S5/0222 ,  H01S5/02296 ,  H01S5/024 ,  H01S5/141 ,  H01S5/183 ,  H01S5/3018 ,  H01S5/3045 ,  H01S5/327 ,  H01S5/347

摘要： In an optically pumped semiconductor laser including a semiconductor laser heterostructure, energy of high-energy electrons of an electron beam is converted by excimer formation and dissociation in a gas into ultraviolet (UV) radiation. The ultraviolet radiation is used to optically pump the heterostructure. Materials of the heterostructure may include II-VI compounds, oxides, or diamond. Both surface-emitting and edge-emitting heterostructures may be optically pumped by the UV radiation.

摘要翻译： 在包括半导体激光异质结构的光泵浦半导体激光器中，电子束的高能电子的能量通过准分子的形成和气体中的解离转化成紫外（UV）辐射。 使用紫外线辐射来泵浦异质结构。 异质结构的材料可以包括II-VI化合物，氧化物或金刚石。 表面发射和边缘发射异质结构都可以通过UV辐射被光泵浦。

公开(公告)号：US06717973B2

公开(公告)日：2004-04-06

申请号：US09883097

申请日：2001-06-13

申请人： Dirk Basting ,  Sergei Govorkov ,  Juergen Kleinschmidt ,  Peter Lokai ,  Uwe Stamm

发明人： Dirk Basting ,  Sergei Govorkov ,  Juergen Kleinschmidt ,  Peter Lokai ,  Uwe Stamm

IPC分类号： H01S320

CPC分类号： H01S3/225 ,  B23K26/12 ,  B23K26/128 ,  B23K26/705 ,  G01J1/4257 ,  G03F7/70025 ,  G03F7/70558 ,  G03F7/70808 ,  H01S3/0014 ,  H01S3/0315 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/08059 ,  H01S3/1062 ,  H01S3/134 ,  H01S3/137 ,  H01S3/2258

摘要： A F2-laser includes a discharge chamber filled with a gas mixture including molecular fluorine for generating a spectral emission in a wavelength range between 157 nm and 158 nm including a primary line and a secondary line, multiple electrodes coupled with a power supply circuit for producing a pulsed discharge to energize the molecular fluorine, a resonator including the discharge chamber and an interferometric device for generating a laser beam having a bandwidth of less than 1 pm, and a wavelength monitor coupled in a feedback loop with a processor for monitoring a spectral distribution of the laser beam. The processor controls an interferometric spectrum of the interferometric device based on the monitored spectral distribution such that sidebands within the spectral distribution are substantially minimized.

摘要翻译： F2激光器包括填充有包括分子氟的气体混合物的放电室，用于在包括初级线和次级线的157nm和158nm之间的波长范围内产生光谱发射，多个电极与用于生产的电源电路 用于激发分子氟的脉冲放电，包括放电室的谐振器和用于产生具有小于1ms的带宽的激光束的干涉仪，以及耦合在反馈环路中的波长监测器，用于监测光谱分布 的激光束。 处理器基于监测的光谱分布来控制干涉测量装置的干涉光谱，使得光谱分布内的边带基本上最小化。

公开(公告)号：US06243406B1

公开(公告)日：2001-06-05

申请号：US09418052

申请日：1999-10-14

申请人： Peter Heist ,  Matthias Kramer ,  Jürgen Kleinschmidt ,  Sergei Govorkov

发明人： Peter Heist ,  Matthias Kramer ,  Jürgen Kleinschmidt ,  Sergei Govorkov

IPC分类号： H01S322

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/22 ,  H01S3/225 ,  H01S3/2258

摘要： A gas mixture of a gas discharge laser such as an excimer or molecular fluorine laser is stabilized. The gas mixture of the laser includes a constituent halogen containing molecular species such as F2 or HCl which is subject to depletion from an initial optimum concentration. When the gas mixture is energized by a pulsed discharge circuit, the amplified spontaneous emission (ASE) signal is monitored. The status of the gas mixture is determined based on the monitored ASE signal. Stimulated emission is preferably filtered or blocked for more precise ASE signal monitoring. The gas mixture is preferably replenished using small halogen injections, total pressure adjustments and mini and partial gas replacements based on the evolving gas mixture status determined from the monitored ASE signal. Another parameter may be monitored such as the driving voltage to indicate the status of another system specification such as alignment or degradation of resonator optics, synchronization of optical components, contamination within the resonator or purge conditions for a F2-laser enclosure.

摘要翻译： 诸如准分子或分子氟激光器之类的气体放电激光器的气体混合物是稳定的。 激光的气体混合物包括含有分子物质如F2或HCl的组分卤素，其从初始最佳浓度消耗。 当气体混合物通过脉冲放电电路通电时，监测放大的自发发射（ASE）信号。 基于被监测的ASE信号确定气体混合物的状态。 刺激的发射优选地被过滤或阻挡以用于更精确的ASE信号监测。 气体混合物优选使用小型卤素注射，总压力调节和基于从监测的ASE信号确定的演变气体混合物状态的微小和部分气体替代物来补充。 可以监视另一参数，例如驱动电压以指示另一系统规范的状态，例如谐振器光学器件的对准或退化，光学部件的同步，谐振器内的污染物或用于F2激光器外壳的吹扫条件。

公开(公告)号：US20070115535A1

公开(公告)日：2007-05-24

申请号：US11654780

申请日：2007-01-18

申请人： Sergei Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

发明人： Sergei Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

IPC分类号： H01S3/00

CPC分类号： G03F7/7055 ,  H01S3/0057 ,  H01S3/0835 ,  H01S3/235

摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

摘要翻译： 包括在MOPA配置中的系统的深UV（DUV）准分子激光系统中使用的光学部件的寿命可以通过降低入射在这些部件上的脉冲的强度来增加。 在一种方法中，输出脉冲可以被“拉伸”，以便降低脉冲的峰值功率。 可以使用脉冲拉伸部件，其可以安装在具有水平光束路径的激光外壳外部，以便提供对激光系统占地面积具有最小影响的延迟线。 水平光束路径还可以使包含高功率光束的臂中的光学部件的数量最小化。 分束棱镜可以与延迟线一起使用，以避免涂层的快速退化，否则暴露于强烈的UV光束。 棱镜可以在延迟线中扩展光束，以便最小化光束强度和由于反射引起的损耗。

公开(公告)号：US20070070302A1

公开(公告)日：2007-03-29

申请号：US11238202

申请日：2005-09-29

申请人： Sergei Govorkov ,  Luis Spinelli

发明人： Sergei Govorkov ,  Luis Spinelli

IPC分类号： G03B21/26

CPC分类号： G03B21/2033 ,  G02B26/0808 ,  G02B26/105 ,  G02B27/48 ,  H04N9/3132

摘要： A projection display including a one-dimensional light modulator includes an optical arrangement for projecting light from a laser onto the modulator in the form of a line of light. Light from the laser is divided to create in effect a two-dimensional array of mutually incoherent light sources. Light from one axis of the array is projected onto the modulator to form the length of the line of light and light from the other axis of the array is projected onto the modulator to form the width of the line of light. Division of the light is accomplished without the use of any moving component.

摘要翻译： 包括一维光调制器的投影显示器包括用于以光线形式将来自激光的光投射到调制器上的光学装置。 将来自激光器的光分割成实际上产生相互不相干的光源的二维阵列。 将来自阵列的一个轴的光投影到调制器上以形成光线的长度，并且将来自阵列的另一个轴的光投影到调制器上以形成光线的宽度。 光的分割是在不使用任何移动部件的情况下完成的。

公开(公告)号：US20050169341A1

公开(公告)日：2005-08-04

申请号：US10713583

申请日：2003-11-14

申请人： Hubertus Bergmann ,  Spencer Merz ,  Gongxue Hua ,  Sergei Govorkov

发明人： Hubertus Bergmann ,  Spencer Merz ,  Gongxue Hua ,  Sergei Govorkov

IPC分类号： H01S3/097 ,  H01S3/225

CPC分类号： H01S3/097 ,  H01S3/225

摘要： An oil-free pulser design can be used to produce an excimer or molecular fluorine laser system that is lighter, cheaper to produce, and simpler than existing systems. Such designs allow a relatively low DC voltage to be applied to a main transformer, allowing the pulser to be run without oil cooling. This relatively low voltage can be increased to the necessary voltage level, such as on the order to 12 kV to 15 kV, needed to drive the laser system. This transference can be accomplished using standard components, such as a pair of capacitor elements that are pulse-charged in parallel, but can be discharged in series following a reversal of charge on one of the capacitor elements.

摘要翻译： 无油脉冲发生器设计可用于生产更轻，生产成本更低，比现有系统简单的准分子或分子氟激光系统。 这样的设计允许将相对较低的DC电压施加到主变压器，允许脉冲发生器在没有油冷却的情况下运行。 该相对低的电压可以增加到驱动激光系统所需的所需电压水平，例如达到12kV至15kV。 可以使用诸如并联脉冲充电的一对电容器元件之类的标准组件来实现该转移，但是可以在其中一个电容器元件上的电荷反转之后串联放电。