公开(公告)号：US06420266B1

公开(公告)日：2002-07-16

申请号：US09433605

申请日：1999-11-02

申请人： John Stephen Smith ,  Mark A. Hadley ,  Jay Tu

发明人： John Stephen Smith ,  Mark A. Hadley ,  Jay Tu

IPC分类号： H07L213065

CPC分类号： H01L21/78 ,  H01L21/6836 ,  H01L21/7806 ,  H01L24/24 ,  H01L24/82 ,  H01L24/95 ,  H01L27/156 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2224/24227 ,  H01L2224/95085 ,  H01L2224/95136 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01021 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01082 ,  H01L2924/10253 ,  H01L2924/12041 ,  H01L2924/12043 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15155 ,  H01L2924/15157 ,  H01L2924/15165 ,  H01L2924/15788 ,  H01L2924/00

摘要： Methods for forming elements having a predetermined shape and for assembling the elements. In one example of a method, each of the elements includes a functional component which is disposed on a first face of a first substrate. A layer representing a first portion of the first substrate at a second face of the first substrate is removed, leaving a second portion of the first substrate on the first substrate. The second portion is etched through a first patterned mask on a surface of the second portion. The plurality of elements is then released from the first substrate. The plurality of elements may then be combined with a fluid to form a slurry. In another example of a method, the first face is etched vertically in regions adjacent to the edges of the plurality of elements, and regions below the first face are etched laterally, and then the plurality of elements are released from the substrate. Other methods of creating elements having a predetermined shape are described, and methods of using and/or assembling these elements are also described.

摘要翻译： 用于形成具有预定形状并用于组装元件的元件的方法。 在方法的一个示例中，每个元件包括设置在第一基板的第一面上的功能部件。 在第一衬底的第二表面处移除代表第一衬底的第一部分的层，在第一衬底上留下第一衬底的第二部分。 第二部分通过第二部分的表面上的第一图案化掩模进行蚀刻。 然后，多个元件从第一基板释放。 然后可以将多个元件与流体组合以形成浆料。 在方法的另一个例子中，在与多个元件的边缘相邻的区域中垂直蚀刻第一面，并且第一面下方的区域被横向蚀刻，然后多个元素从基底释放。 描述了创建具有预定形状的元件的其它方法，并且还描述了使用和/或组装这些元件的方法。

公开(公告)号：US07172910B2

公开(公告)日：2007-02-06

申请号：US11169534

申请日：2005-06-28

申请人： Mark A. Hadley ,  Ann Chiang ,  Gordon S. W. Craig ,  Jeffrey Jay Jacobsen ,  John Stephen Smith ,  Jay Tu ,  Roger Green Stewart

发明人： Mark A. Hadley ,  Ann Chiang ,  Gordon S. W. Craig ,  Jeffrey Jay Jacobsen ,  John Stephen Smith ,  Jay Tu ,  Roger Green Stewart

IPC分类号： H01L21/00

CPC分类号： H01L27/1214 ,  G02F1/133305 ,  G02F1/1362 ,  H01L24/24 ,  H01L24/82 ,  H01L24/95 ,  H01L24/97 ,  H01L25/0753 ,  H01L25/50 ,  H01L29/0657 ,  H01L2224/24101 ,  H01L2224/24137 ,  H01L2224/24227 ,  H01L2224/76155 ,  H01L2224/7665 ,  H01L2224/82102 ,  H01L2224/95085 ,  H01L2224/95145 ,  H01L2224/97 ,  H01L2251/5338 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/10158 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/1306 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15155 ,  H01L2924/15165 ,  H01L2924/19041 ,  H01L2924/30105 ,  H01S5/0201 ,  H01L2224/82 ,  H01L2924/00

摘要： Apparatuses and methods for forming displays are claimed. One embodiment of the invention relates to forming an assembly using different sized blocks in either a flexible or rigid substrate.

摘要翻译： 要求保护用于形成显示器的装置和方法。 本发明的一个实施例涉及使用不同尺寸的块在柔性或刚性基底中形成组件。

公开(公告)号：US06927085B2

公开(公告)日：2005-08-09

申请号：US10611142

申请日：2003-06-30

申请人： Mark A. Hadley ,  Ann Chiang ,  Gordon S. W. Craig ,  Jeffrey Jay Jacobsen ,  John Stephen Smith ,  Jay Tu ,  Roger Green Stewart

发明人： Mark A. Hadley ,  Ann Chiang ,  Gordon S. W. Craig ,  Jeffrey Jay Jacobsen ,  John Stephen Smith ,  Jay Tu ,  Roger Green Stewart

IPC分类号： G02F1/1333 ,  G02F1/1362 ,  H01L21/00 ,  H01L21/20 ,  H01L21/77 ,  H01L21/84 ,  H01L23/13 ,  H01L25/065 ,  H01L29/06

CPC分类号： H01L27/1266 ,  G02F1/133305 ,  G02F1/1362 ,  H01L21/2007 ,  H01L21/67144 ,  H01L23/13 ,  H01L24/95 ,  H01L25/0655 ,  H01L27/1214 ,  H01L27/1218 ,  H01L29/0657 ,  H01L2224/95085 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/1306 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/15155 ,  H01L2924/15165 ,  H01L2924/19041 ,  Y10T29/53178 ,  H01L2924/15153 ,  H01L2924/00

摘要： Apparatuses and methods for forming displays are claimed. One embodiment of the invention relates to forming an assembly using different sized blocks in either a flexible or rigid substrate.

摘要翻译： 要求保护用于形成显示器的装置和方法。 本发明的一个实施例涉及使用不同尺寸的块在柔性或刚性基底中形成组件。

公开(公告)号：US06683663B1

公开(公告)日：2004-01-27

申请号：US09932409

申请日：2001-08-17

申请人： Mark A. Hadley ,  Ann Chiang ,  Gordon S. W. Craig ,  Jeffrey Jay Jacobsen ,  John Stephen Smith ,  Jay Tu ,  Roger Green Stewart

发明人： Mark A. Hadley ,  Ann Chiang ,  Gordon S. W. Craig ,  Jeffrey Jay Jacobsen ,  John Stephen Smith ,  Jay Tu ,  Roger Green Stewart

IPC分类号： G02F1136

CPC分类号： H01L27/1266 ,  G02F1/133305 ,  G02F1/1362 ,  H01L21/2007 ,  H01L21/67144 ,  H01L23/13 ,  H01L24/95 ,  H01L25/0655 ,  H01L27/1214 ,  H01L27/1218 ,  H01L29/0657 ,  H01L2224/95085 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/1306 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/15155 ,  H01L2924/15165 ,  H01L2924/19041 ,  Y10T29/53178 ,  H01L2924/15153 ,  H01L2924/00

摘要： Apparatuses and methods for forming displays are claimed. One embodiment of the invention relates to forming an assembly using different sized blocks in either a flexible or rigid substrate.

公开(公告)号：US06586338B2

公开(公告)日：2003-07-01

申请号：US10131541

申请日：2002-04-23

申请人： John Stephen Smith ,  Mark A. Hadley ,  Jay Tu

发明人： John Stephen Smith ,  Mark A. Hadley ,  Jay Tu

IPC分类号： H01L21302

CPC分类号： H01L21/78 ,  H01L21/6836 ,  H01L21/7806 ,  H01L24/24 ,  H01L24/82 ,  H01L24/95 ,  H01L27/156 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2224/24227 ,  H01L2224/95085 ,  H01L2224/95136 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01021 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01082 ,  H01L2924/10253 ,  H01L2924/12041 ,  H01L2924/12043 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15155 ,  H01L2924/15157 ,  H01L2924/15165 ,  H01L2924/15788 ,  H01L2924/00

摘要： Methods for forming elements having a predetermined shape and for assembling the elements. In one example of a method, each of the elements includes a functional component which is disposed on a first face of a first substrate. A layer representing a first portion of the first substrate at a second face of the first substrate is removed, leaving a second portion of the first substrate on the first substrate. The second portion is etched through a first patterned mask on a surface of the second portion. The plurality of elements is then released from the first substrate. The plurality of elements may then be combined with a fluid to form a slurry. In another example of a method, the first face is etched vertically in regions adjacent to the edges of the plurality of elements, and regions below the first face are etched laterally, and then the plurality of elements are released from the substrate. Other methods of creating elements having a predetermined shape are described, and methods of using and/or assembling these elements are also described.

公开(公告)号：US07967204B2

公开(公告)日：2011-06-28

申请号：US12248020

申请日：2008-10-08

申请人： Mark A. Hadley ,  Curt L. Carrender ,  John Stephen Smith ,  Gordon S. W. Craig

发明人： Mark A. Hadley ,  Curt L. Carrender ,  John Stephen Smith ,  Gordon S. W. Craig

IPC分类号： G06K7/08

CPC分类号： G06K19/07718 ,  G06K19/07749 ,  G06K19/07752 ,  G06K19/07756 ,  H01L23/66 ,  H01L24/19 ,  H01L24/24 ,  H01L24/83 ,  H01L24/95 ,  H01L24/97 ,  H01L25/50 ,  H01L29/0657 ,  H01L2223/6677 ,  H01L2224/04105 ,  H01L2224/20 ,  H01L2224/24227 ,  H01L2224/76155 ,  H01L2224/82102 ,  H01L2224/83136 ,  H01L2224/95085 ,  H01L2224/95122 ,  H01L2224/95136 ,  H01L2224/97 ,  H01L2924/00011 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/0102 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01055 ,  H01L2924/01057 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01077 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/10158 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15155 ,  H01L2924/15157 ,  H01L2924/15165 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/30107 ,  H01L2924/3011 ,  H01L2924/3025 ,  Y10T29/53178 ,  H01L2224/82 ,  H01L2224/83851 ,  H01L2924/00

摘要： A Radio Frequency Identification (RFID) device. The RFID device comprises an antenna assembly and a resonator assembly. The antenna assembly comprises a first substrate and an antenna element. The resonator assembly comprises a second substrate having an integrated circuit connected to a resonator loop. The first substrate and the second substrate are attached to one another. The integrated circuit electrically couples to the antenna element without a direct mechanical contact.

摘要翻译： 射频识别（RFID）设备。 RFID设备包括天线组件和谐振器组件。 天线组件包括第一基板和天线元件。 谐振器组件包括具有连接到谐振器回路的集成电路的第二衬底。 第一基板和第二基板彼此附接。 集成电路电耦合到天线元件而不直接机械接触。

公开(公告)号：US06623579B1

公开(公告)日：2003-09-23

申请号：US09432291

申请日：1999-11-02

申请人： John Stephen Smith ,  Mark A. Hadley ,  Gordon S. W. Craig ,  Frank Lowe

发明人： John Stephen Smith ,  Mark A. Hadley ,  Gordon S. W. Craig ,  Frank Lowe

IPC分类号： B05D312

CPC分类号： H01L24/32 ,  B82Y30/00 ,  H01L21/31122 ,  H01L21/32136 ,  H01L21/84 ,  H01L24/24 ,  H01L24/82 ,  H01L24/95 ,  H01L24/97 ,  H01L25/0655 ,  H01L25/50 ,  H01L27/1214 ,  H01L28/55 ,  H01L2224/24225 ,  H01L2224/24227 ,  H01L2224/32225 ,  H01L2224/73267 ,  H01L2224/95085 ,  H01L2224/95092 ,  H01L2224/95122 ,  H01L2224/95136 ,  H01L2224/95144 ,  H01L2224/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01082 ,  H01L2924/01084 ,  H01L2924/10158 ,  H01L2924/10253 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12043 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15155 ,  H01L2924/15157 ,  H01L2924/15165 ,  H01L2924/15788 ,  Y10S977/882 ,  Y10S977/883 ,  H01L2224/82 ,  H01L2924/00

摘要： Methods and apparatuses for assembling a structure onto a substrate. A method according to one aspect of the invention includes dispensing a slurry onto a substrate wherein the slurry includes a first plurality of elements, each of which is designed to mate with a receptor region on said substrate and each of which comprises a functional element, and wherein the slurry also includes a second plurality of elements which are not designed to mate with receptor regions on the substrate. Typically, these second plurality of elements help movement of the first plurality of elements. A method according to another aspect of the invention includes dispensing in a flow having a first direction a slurry onto a substrate, wherein the slurry includes a fluid and a plurality of elements, each of which is designed to mate with a receptor region on the substrate and each of which includes a functional element, and vibrating substrate in a second direction which is substantially perpendicular to the first direction. A method according to another aspect of the invention includes creating a slurry comprising of fluid and a plurality of elements, each of which is designed to mate with a receptor region on the substrate and each of which comprises a functional element, and projecting the slurry through a nozzle toward the substrate. In one particular implementation of this aspect, additional nozzles may be used to provide suction or additional fluid or additional slurry. A method according to another aspect of the invention includes dissolving a bonding agent into a solvent to create a fluid, dispensing a slurry onto a substrate, wherein the slurry includes the fluid and a plurality of elements each of which is designed to mate with a receptor region on the substrate and each of which comprises a functional element, and evaporating the solvent after each of the plurality of elements has mated with a corresponding receptor, wherein the bonding agent bonds each of the plurality of elements to the corresponding receptor region.

公开(公告)号：US06555408B1

公开(公告)日：2003-04-29

申请号：US09270157

申请日：1999-03-16

申请人： Jeffrey Jay Jacobsen ,  Mark A. Hadley ,  John Stephen Smith

发明人： Jeffrey Jay Jacobsen ,  Mark A. Hadley ,  John Stephen Smith

IPC分类号： H01L2100

CPC分类号： H01L27/14683 ,  G02F1/133305 ,  H01L21/2007 ,  H01L24/24 ,  H01L24/82 ,  H01L24/95 ,  H01L24/97 ,  H01L27/1214 ,  H01L27/1218 ,  H01L27/1266 ,  H01L27/3255 ,  H01L2221/68368 ,  H01L2224/24137 ,  H01L2224/24227 ,  H01L2224/95085 ,  H01L2224/97 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01042 ,  H01L2924/01074 ,  H01L2924/01084 ,  H01L2924/10158 ,  H01L2924/12041 ,  H01L2924/12044 ,  H01L2924/1306 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15155 ,  H01L2924/15165 ,  H01L2924/19041 ,  H01L2924/30105 ,  H01L2224/82 ,  H01L2924/00

摘要： A method of transferring elements to be used in an assembly by placing elements in regions of a template. In one example of a method, each of the elements includes a functional component. A template holding a plurality of elements is then pressed into the receiving substrate by attaching at least one side of the template holding the elements onto the receiving substrate.

摘要翻译： 通过将元素放置在模板的区域中来传送要用于组件中的元件的方法。 在方法的一个示例中，每个元件包括功能部件。 然后通过将保持元件的模板的至少一侧附着到接收基板上，将保持多个元件的模板压入接收基板。

公开(公告)号：US07141176B1

公开(公告)日：2006-11-28

申请号：US10206686

申请日：2002-07-25

申请人： John Stephen Smith ,  Mark A. Hadley ,  Gordon S. W. Craig ,  Paul F. Nealey

发明人： John Stephen Smith ,  Mark A. Hadley ,  Gordon S. W. Craig ,  Paul F. Nealey

IPC分类号： H01L21/00 ,  B44C1/22

CPC分类号： H01L24/32 ,  B82Y30/00 ,  H01L24/24 ,  H01L24/82 ,  H01L24/95 ,  H01L24/97 ,  H01L25/50 ,  H01L27/1214 ,  H01L29/66772 ,  H01L29/78603 ,  H01L29/78654 ,  H01L2224/24225 ,  H01L2224/24227 ,  H01L2224/73267 ,  H01L2224/95085 ,  H01L2224/95092 ,  H01L2224/95122 ,  H01L2224/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01082 ,  H01L2924/01084 ,  H01L2924/10158 ,  H01L2924/10253 ,  H01L2924/12041 ,  H01L2924/12043 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15155 ,  H01L2924/15165 ,  H01L2924/15788 ,  H01L2224/82 ,  H01L2924/00

摘要： Methods and apparatuses for assembling elements onto a substrate. The surfaces of the elements and/or the substrate are treated and the elements are dispensed over the substrate in a slurry. In one example of the invention, the substrate is exposed to a surface treatment fluid to create a surface on the substrate which has a selected one of a hydrophilic or a hydrophobic nature, and a slurry is dispensed over the substrate. The slurry includes a fluid and a plurality of elements (each of which includes a functional component). Each of the plurality of elements is designed to be received by a receptor region on the substrate. The dispensing of the slurry with the fluid occurs after the substrate is exposed to the surface treatment fluid, and the fluid is the selected one of a hydrophilic or a hydrophobic nature. In another example of the invention, a plurality of elements is exposed to a surface treatment fluid to create surfaces on the elements having a selected one of a hydrophilic or a hydrophobic nature. A slurry is dispensed over a substrate, wherein the slurry contains a fluid and the plurality of elements which are designed to be received by a plurality of receptor regions. The fluid is the selected one of a hydrophilic or hydrophobic nature. In another example of an aspect of the invention, a surfactant is used with a slurry having elements which are deposited onto receptor regions in a fluidic self assembly process. Other examples of methods are also described.

摘要翻译： 将元件组装到基板上的方法和装置。 元件和/或基底的表面被处理并且元件以浆料分配在基底上。 在本发明的一个实例中，将衬底暴露于表面处理流体，以在衬底上形成具有亲水或疏水性质选择的表面，并且将浆料分配在衬底上。 浆料包括流体和多个元件（每个元件包括功能部件）。 多个元件中的每一个被设计成由衬底上的受体区域接收。 浆料与流体的分配发生在基材暴露于表面处理流体之后，并且流体是亲水或疏水性质中选择的一种。 在本发明的另一个实例中，多个元件暴露于表面处理流体，以在具有亲水或疏水性质的选定元件的元件上产生表面。 将浆料分配在基材上，其中浆料包含流体，并且多个元件被设计为被多个受体区域接收。 流体是亲水或疏水性质中选出的一种。 在本发明的一个方面的另一个实例中，使用具有在流体自组装方法中沉积到受体区上的元素的浆料的表面活性剂。 还描述了其它方法的实例。

公开(公告)号：US07101502B2

公开(公告)日：2006-09-05

申请号：US10154899

申请日：2002-05-23

申请人： John Stephen Smith ,  Mark A. Hadley ,  Gordon S. W. Craig ,  Frank Lowe

发明人： John Stephen Smith ,  Mark A. Hadley ,  Gordon S. W. Craig ,  Frank Lowe

IPC分类号： B28B11/00

CPC分类号： H01L24/95 ,  B81C1/00357 ,  B81C1/00428 ,  B81C2201/019 ,  B82Y30/00 ,  G02F1/1362 ,  G02F2001/136295 ,  H01L21/0274 ,  H01L21/3065 ,  H01L21/3083 ,  H01L21/31144 ,  H01L21/4803 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/31 ,  H01L24/82 ,  H01L24/97 ,  H01L2224/24225 ,  H01L2224/24227 ,  H01L2224/32225 ,  H01L2224/95085 ,  H01L2224/95092 ,  H01L2224/95122 ,  H01L2224/95136 ,  H01L2224/95144 ,  H01L2224/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01082 ,  H01L2924/01084 ,  H01L2924/10158 ,  H01L2924/10253 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12043 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15155 ,  H01L2924/15157 ,  H01L2924/15165 ,  H01L2924/15788 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  Y10S977/883 ,  H01L2224/82 ,  H01L2924/00

摘要： Methods for forming openings having predetermined shapes in a substrate and apparatuses with these openings. The methods may be used to form assemblies which include the substrate with its openings and elements which are disposed in the openings. In one example of a method, each of the elements include an electrical component and are assembled into one of the openings by a fluidic self assembly process. In an particular example of a method to create such an opening, the substrate is etched through a first patterned mask and is later etched through a second patterned mask. Typically, the second patterned mask is aligned relative to the opening created by etching through the first patterned mask and has an area of exposure which is smaller than an area of exposure through the first patterned mask. In another example of a method, a photosensitive material is exposed through a patterned mask to oblique sources of light such that some of the light impinges into a first portion of the photosensitive material which is under the patterned mask, and the patterned mask and a second portion of the photosensitive material, which is under the patterned mask, is removed. In another example of a method, an opening in a first layer, which comprises silicon dioxide, is formed by depositing a second layer over the first layer and depositing a tungsten layer over the second layer. The tungsten and second layers are patterned to expose a portion of the first layer, and this portion is etched. Various apparatuses which may be made using these methods are also described.