Method of fabricating semiconductor device including forming epitaxial blocking layers by nitridation process
    1.
    发明授权
    Method of fabricating semiconductor device including forming epitaxial blocking layers by nitridation process 有权
    制造半导体器件的方法包括通过氮化处理形成外延阻挡层

    公开(公告)号:US08691642B2

    公开(公告)日:2014-04-08

    申请号:US13238611

    申请日:2011-09-21

    IPC分类号: H01L21/8238

    摘要: A method of fabricating a semiconductor device includes forming gate structures on PMOS and NMOS transistor regions of the semiconductor substrate, forming epitaxial blocking layers on source/drain regions of PMOS and NMOS transistor regions using a nitridation process, then selectively removing one of the epitaxial blocking layers, and using a SEG process to form an epitaxial layer on respective source/drain regions while shielding the other source/drain regions with a remaining epitaxial blocking layer.

    摘要翻译: 制造半导体器件的方法包括在半导体衬底的PMOS和NMOS晶体管区域上形成栅极结构,使用氮化工艺在PMOS和NMOS晶体管区域的源极/漏极区域上形成外延阻挡层,然后选择性地去除外延阻挡层 并且使用SEG工艺在相应的源极/漏极区域上形成外延层,同时用剩余的外延阻挡层屏蔽另一个源极/漏极区域。

    METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING EPITAXIAL BLOCKING LAYERS
    2.
    发明申请
    METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING EPITAXIAL BLOCKING LAYERS 有权
    使用外延阻挡层制造半导体器件的方法

    公开(公告)号:US20120077319A1

    公开(公告)日:2012-03-29

    申请号:US13238611

    申请日:2011-09-21

    IPC分类号: H01L21/8238

    摘要: A method of fabricating a semiconductor device includes forming gate structures on PMOS and NMOS transistor regions of the semiconductor substrate, forming epitaxial blocking layers on source/drain regions of PMOS and NMOS transistor regions using a nitridation process, then selectively removing one of the epitaxial blocking layers, and using a SEG process to form an epitaxial layer on respective source/drain regions while shielding the other source/drain regions with a remaining epitaxial blocking layer.

    摘要翻译: 制造半导体器件的方法包括在半导体衬底的PMOS和NMOS晶体管区域上形成栅极结构,使用氮化工艺在PMOS和NMOS晶体管区域的源极/漏极区域上形成外延阻挡层,然后选择性地去除外延阻挡层 并且使用SEG工艺在相应的源极/漏极区域上形成外延层,同时用剩余的外延阻挡层屏蔽另一个源极/漏极区域。

    Method of manufacturing semiconductor device
    3.
    发明授权
    Method of manufacturing semiconductor device 有权
    制造半导体器件的方法

    公开(公告)号:US08617991B2

    公开(公告)日:2013-12-31

    申请号:US13526960

    申请日:2012-06-19

    IPC分类号: H01L21/44

    摘要: A method of manufacturing a semiconductor device includes forming an interlayer dielectric film that has first and second trenches on first and second regions of a substrate, respectively, forming a first metal layer along a sidewall and a bottom surface of the first trench and along a top surface of the interlayer dielectric film in the first region, forming a second metal layer along a sidewall and a bottom surface of the second trench and along a top surface of the interlayer dielectric film in the second region, forming a first sacrificial layer pattern on the first metal layer such that the first sacrificial layer fills a portion of the first trench, forming a first electrode layer by etching the first metal layer and the second metal layer using the first sacrificial layer pattern, and removing the first sacrificial layer pattern.

    摘要翻译: 一种制造半导体器件的方法包括:在衬底的第一和第二区域上分别形成具有第一和第二沟槽的层间电介质膜,沿着第一沟槽的侧壁和底表面沿顶部形成第一金属层 在所述第一区域中的所述层间电介质膜的表面,沿着所述第二沟槽的侧壁和底表面沿着所述第二区域中的所述层间电介质膜的顶表面形成第二金属层,在所述第二区域中形成第一牺牲层图案 第一金属层,使得第一牺牲层填充第一沟槽的一部分,通过使用第一牺牲层图案蚀刻第一金属层和第二金属层形成第一电极层,以及去除第一牺牲层图案。

    Transistor structure of a semiconductor device
    4.
    发明授权
    Transistor structure of a semiconductor device 有权
    半导体器件的晶体管结构

    公开(公告)号:US08916936B2

    公开(公告)日:2014-12-23

    申请号:US13751570

    申请日:2013-01-28

    IPC分类号: H01L29/76

    摘要: A semiconductor device including: a first gate pattern disposed in a peripheral region of a substrate; a second gate pattern disposed in a cell region of the substrate; a first insulator formed on sidewalls of the first gate pattern; and a second insulator formed on sidewalls of the second gate pattern, wherein a dielectric constant of the first insulator is different from a dielectric constant of the second insulator, and wherein a height of the second insulator is greater than a height of the second gate pattern.

    摘要翻译: 一种半导体器件,包括:设置在衬底的周边区域中的第一栅极图案; 设置在所述基板的单元区域中的第二栅极图案; 形成在第一栅极图案的侧壁上的第一绝缘体; 以及形成在所述第二栅极图案的侧壁上的第二绝缘体,其中所述第一绝缘体的介电常数不同于所述第二绝缘体的介电常数,并且其中所述第二绝缘体的高度大于所述第二栅极图案的高度 。

    SEMICONDUCTOR DEVICE AND A METHOD FOR FABRICATING THE SAME
    5.
    发明申请
    SEMICONDUCTOR DEVICE AND A METHOD FOR FABRICATING THE SAME 有权
    半导体器件及其制造方法

    公开(公告)号:US20140054713A1

    公开(公告)日:2014-02-27

    申请号:US13751570

    申请日:2013-01-28

    IPC分类号: H01L27/088

    摘要: A semiconductor device including: a first gate pattern disposed in a peripheral region of a substrate; a second gate pattern disposed in a cell region of the substrate; a first insulator formed on sidewalls of the first gate pattern; and a second insulator formed on sidewalls of the second gate pattern, wherein a dielectric constant of the first insulator is different from a dielectric constant of the second insulator, and wherein a height of the second insulator is greater than a height of the second gate pattern.

    摘要翻译: 一种半导体器件,包括:设置在衬底的周边区域中的第一栅极图案; 设置在所述基板的单元区域中的第二栅极图案; 形成在第一栅极图案的侧壁上的第一绝缘体; 以及形成在所述第二栅极图案的侧壁上的第二绝缘体,其中所述第一绝缘体的介电常数不同于所述第二绝缘体的介电常数,并且其中所述第二绝缘体的高度大于所述第二栅极图案的高度 。

    Method and apparatus for managing digital rights of secure removable media
    7.
    发明授权
    Method and apparatus for managing digital rights of secure removable media 有权
    用于管理安全可移动媒体的数字权利的方法和装置

    公开(公告)号:US08683610B2

    公开(公告)日:2014-03-25

    申请号:US13566700

    申请日:2012-08-03

    IPC分类号: G06F7/04

    摘要: A terminal for managing digital rights of a memory card inserted into the terminal and has a processor and a memory, the digital rights allowing the terminal to access digital contents. The terminal includes a processor configured to manage a digital rights and to exchange information with the memory card, the information including a terminal ID and a memory card ID; perform a mutual authentication procedure with the memory card; receive, from a contents provider, a trigger message which indicates to the terminal that a digital rights for the memory card is prepared in the contents provider; if a parameter included in the trigger message does not indicate the memory card, perform a procedure for obtaining a digital rights for the terminal; and if a parameter included in the trigger message indicates the memory card, perform a procedure for requesting a digital rights for the memory card.

    摘要翻译: 一种用于管理插入终端中的存储卡的数字版权的终端,具有处理器和存储器,该数字版权允许终端访问数字内容。 终端包括处理器,被配置为管理数字版权并与存储卡交换信息,该信息包括终端ID和存储卡ID; 与存储卡执行相互认证程序; 从内容提供者接收触发消息,向终端指示在内容提供商中准备存储卡的数字版权; 如果包括在触发消息中的参数不指示存储卡,则执行用于获得终端的数字版权的过程; 并且如果包括在触发消息中的参数指示存储卡,则执行请求存储卡的数字版权的过程。

    Method for managing user domain in digital rights management and system thereof
    10.
    发明授权
    Method for managing user domain in digital rights management and system thereof 有权
    数字版权管理中的用户域管理方法及其系统

    公开(公告)号:US07930250B2

    公开(公告)日:2011-04-19

    申请号:US11760571

    申请日:2007-06-08

    IPC分类号: G06F21/00

    CPC分类号: G06F21/10

    摘要: A method for managing a specific domain (or user domain), for example leaving the domain by a specific device after fully returning a Rights Object (RO) taken by the specific device, instead of deactivating the RO, when leaving the specific domain, the method in which the device desiring to leave the specific domain moves its RO to another device desiring to join the specific domain and thereafter leaves the specific domain under the control of a Domain Authority/Domain Enforcement Agent (DA/DEA).

    摘要翻译: 一种用于管理特定域(或用户域)的方法,例如在完全返回特定设备所采用的权限对象(RO)之后由特定设备离开域,而不是在离开特定域时停用RO 方法,其中期望离开特定域的设备将其RO移动到希望加入特定域的另一个设备,然后将特定域保留在域授权/域强制代理(DA / DEA)的控制之下。