METHOD FOR FABRICATING NANOANTENNA ARRAY, NANOANTENNA ARRAY CHIP AND STRUCTURE FOR LITHOGRAPHY
    1.
    发明申请
    METHOD FOR FABRICATING NANOANTENNA ARRAY, NANOANTENNA ARRAY CHIP AND STRUCTURE FOR LITHOGRAPHY 有权
    用于制作纳米诺纳纳阵列的方法,纳米级阵列芯片和结构图

    公开(公告)号:US20150146180A1

    公开(公告)日:2015-05-28

    申请号:US14253522

    申请日:2014-04-15

    Abstract: A method for fabricating a nanoantenna array may include forming a resist layer on a substrate, forming a focusing layer having a dielectric microstructure array on the resist layer, diffusing light one-dimensionally in a specific direction by using a linear diffuser, forming an anisotropic pattern on the resist layer by illuminating the light diffused by the linear diffuser on the focusing layer and the resist layer, depositing a material suitable for a plasmonic resonance onto the substrate and the resist layer on which the pattern is formed, and forming a nanoantenna array on the substrate by removing the resist layer and the material deposited on the resist layer. A light diffusing angle by the linear diffuser and a size of the dielectric microstructure are determined based on an aspect ratio of the pattern to be formed.

    Abstract translation: 制造纳米天线阵列的方法可以包括在基板上形成抗蚀剂层,在抗蚀剂层上形成具有电介质微结构阵列的聚焦层,通过使用线性漫射器在特定方向上一维地漫射光,形成各向异性图案 在抗蚀剂层上通过在聚焦层和抗蚀剂层上照射由线性扩散器扩散的光,将适合于等离子体激元谐振的材料沉积到衬底上并形成图案的抗蚀剂层上,并形成纳米天线阵列 通过去除抗蚀剂层和沉积在抗蚀剂层上的材料来形成衬底。 基于要形成的图案的纵横比来确定通过线性漫射器的光散射角和电介质微结构的尺寸。

    PLASMONIC NANO-COLOR COATING LAYER AND METHOD FOR FABRICATING THE SAME
    4.
    发明申请
    PLASMONIC NANO-COLOR COATING LAYER AND METHOD FOR FABRICATING THE SAME 有权
    等离子体纳米颜料涂层及其制造方法

    公开(公告)号:US20150116856A1

    公开(公告)日:2015-04-30

    申请号:US14219506

    申请日:2014-03-19

    Abstract: A plasmonic nano-color coating layer includes a composite layer including a plurality of metal particle layers and a plurality of matrix layers and having a periodic multilayer structure in which the metal particle layers and the matrix layers are alternately arranged, a dielectric buffer layer located below the composite layer, and a mirror layer located below the dielectric buffer layer, wherein the color of the plasmonic nano-color coating layer is determined based on a nominal thickness of the metal particle layer and a separation between the metal particle layers.

    Abstract translation: 等离子体激光纳米彩色涂层包括复合层,该复合层包括多个金属颗粒层和多个矩阵层,并且具有周期性多层结构,其中金属颗粒层和矩阵层交替布置,介质缓冲层位于下面 复合层和位于介质缓冲层下面的镜层,其中基于金属颗粒层的标称厚度和金属颗粒层之间的间隔来确定等离子体激元纳米彩色涂层的颜色。

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