公开(公告)号：US6029679A

公开(公告)日：2000-02-29

申请号：US708325

申请日：1996-09-05

申请人： Katsuhiro Ota ,  Haruo Itoh ,  Akio Saito ,  Katsuhiko Itoh ,  Michimasa Funabashi

发明人： Katsuhiro Ota ,  Haruo Itoh ,  Akio Saito ,  Katsuhiko Itoh ,  Michimasa Funabashi

IPC分类号： B08B6/00 ,  B08B17/02 ,  C25F1/00 ,  C25F3/30 ,  C25F5/00

CPC分类号： B08B6/00 ,  B08B17/02

摘要： By employing a cleaning method wherein a substrate such as Si wafer is covered with a film having electrostatic repulsive force or a substance capable of controlling a zeta potential so as to prevent or remarkably reduce adhesion of fine particles present in a cleaning solution or etching solution, electronic parts can be produced in higher yield and lower cost.

摘要翻译： 通过采用其中诸如Si晶片的衬底被具有静电排斥力的膜或能够控制ζ电位的物质覆盖以便防止或显着降低存在于清洁溶液或蚀刻溶液中的微粒的粘附的清洁方法， 可以以更高的产量和更低的成本生产电子部件。

公开(公告)号：US5747387A

公开(公告)日：1998-05-05

申请号：US519399

申请日：1995-08-25

申请人： Koutarou Koizumi ,  Sukeyoshi Tsunekawa ,  Kazuhiko Kawai ,  Maki Shimoda ,  Katsuhiko Itoh ,  Haruo Itoh ,  Akio Saito

发明人： Koutarou Koizumi ,  Sukeyoshi Tsunekawa ,  Kazuhiko Kawai ,  Maki Shimoda ,  Katsuhiko Itoh ,  Haruo Itoh ,  Akio Saito

IPC分类号： G03F7/42 ,  H01L21/027 ,  H01L21/302 ,  H01L21/304 ,  H01L21/306 ,  H01L21/3065 ,  H01L21/311 ,  H01L21/00

CPC分类号： H01L21/02043 ,  G03F7/42 ,  H01L21/31138 ,  Y10S438/906

摘要： According to the present invention, the surface of the sample is cleaned with water immediately after ashing of the resist the quality of which has been changed through ion implantation by ozone-containing gas, or ozone-containing gas and ultraviolet ray, or the sample is cleaned with water without being exposed to the atmosphere after ashing, thereby allowing the number of residues to be reduced to 1/100, decreasing the load in cleaning process by solution, cutting down the semiconductor device production cost and improving the semiconductor device productivity.

摘要翻译： 根据本发明，在通过含臭氧气体或含臭氧气体和紫外线的离子注入改变了质量的抗蚀剂灰化后，样品的表面立即被清洗，或者样品是 在灰化后不用暴露于大气中，用水清洗，从而使残留物数减少到+ E，fra 1/100 + EE，减少溶液清洗过程中的负荷，减少半导体器件的生产成本，改善 半导体器件的生产率。

公开(公告)号：US5979475A

公开(公告)日：1999-11-09

申请号：US430429

申请日：1995-04-28

申请人： Takao Satoh ,  Haruo Itoh ,  Hitoshi Oka ,  Yoichi Takahara ,  Akio Saito

发明人： Takao Satoh ,  Haruo Itoh ,  Hitoshi Oka ,  Yoichi Takahara ,  Akio Saito

IPC分类号： H01L21/00 ,  H01L21/683 ,  B08B3/02

CPC分类号： H01L21/67017 ,  H01L21/6838

摘要： A highly clean fluid treatment system having a small system volume is provided by using a Bernoulli holder to accomplish stable holding of a specimen in a simple configuration. A holder having a specimen hold face formed almost the same as a specimen or having a Bernoulli effect producing region and a region surrounding the Bernoulli region made of a specific combination of materials is used and fluid supply sources are connected to the holder for supplying one or more fluids containing a treatment agent of a specimen. Since a force for inhibiting a position shift occurs on the end face of the specimen 10, stable specimen holding is enabled. The space between the specimen and the holder where treatment is executed is narrow and fluid always flows from the treatment space to the outside. Therefore, the fluid treatment system of a small volume producing high treatment efficiency and minimizing the chances of recontamination of the specimen can be provided.

摘要翻译： 通过使用伯努利支架提供具有小系统体积的高度清洁的流体处理系统，以简单的配置实现样品的稳定保持。 使用具有与样本几乎相同或具有伯努利效应产生区域和由特定材料组合的伯努利区域周围的区域的样本保持面的保持器，并且流体供应源连接到保持器，用于供应一个或 含有样品处理剂的更多液体。 由于在试样10的端面发生用于抑制位移的力，因此能够进行稳定的试样保持。 试样与执行处理的保持器之间的空间狭窄，液体总是从处理空间流向外部。 因此，可以提供小体积的流体处理系统，其产生高的处理效率并最小化试样的再污染机会。

公开(公告)号：US5196702A

公开(公告)日：1993-03-23

申请号：US824857

申请日：1991-12-11

申请人： Kazutaka Tsuji ,  Tadaaki Hirai ,  Yukio Takasaki ,  Haruo Itoh ,  Tetshuhiko Takahashi ,  Kenichi Okajima

发明人： Kazutaka Tsuji ,  Tadaaki Hirai ,  Yukio Takasaki ,  Haruo Itoh ,  Tetshuhiko Takahashi ,  Kenichi Okajima

IPC分类号： H04N5/32

CPC分类号： H04N5/32

摘要： An optically reading type photo-sensor for reading out an information signal of a signal light with a signal reading light includes a first photoconductor (101) and a second photoconductor (102) interposed between two electrodes (104 and 105); an intermediate region (103) disposed between those two photoconductors for storing and recombining carriers; and an optical source (107) for emitting a signal reading light for uninformalizing the potential in said second photoconductor (102), whereby a successive signal reading can be accomplished without any special preparations for the incidence of the signal light. The photo-sensor can be applied to a variety of imaging devices.

摘要翻译： PCT No.PCT / JP88 / 01073 Sec。 371日期1989年8月21日 102（e）日期1989年8月21日PCT提交1988年10月21日PCT公布。 出版物WO89 / 04063 用于读出具有信号读取光的信号光的信息信号的光学读取型光电传感器包括插入在两个电极（104和105）之间的第一感光体（101）和第二感光体（102） ）; 设置在这两个光电导体之间的用于存储和重组载体的中间区域（103） 以及用于发射用于对所述第二光电导体（102）中的电位进行非正规化的信号读取光的光源（107），由此可以在不对信号光的入射进行任何特别准备的情况下实现连续的信号读取。 光电传感器可以应用于各种成像设备。

公开(公告)号：US4937454A

公开(公告)日：1990-06-26

申请号：US273572

申请日：1988-11-21

申请人： Haruo Itoh ,  Toshikazu Shimada ,  Shin-ichi Muramatsu ,  Tetsuhiko Takahashi ,  Hiroshi Takeuchi

发明人： Haruo Itoh ,  Toshikazu Shimada ,  Shin-ichi Muramatsu ,  Tetsuhiko Takahashi ,  Hiroshi Takeuchi

IPC分类号： G01T1/20 ,  G01J1/02 ,  G01T1/24 ,  H01L31/0224 ,  H01L31/0232 ,  H01L31/0272 ,  H01L31/09 ,  H01L31/10 ,  H01L31/105

CPC分类号： H01L31/02322 ,  H01L31/022466 ,  H01L31/0272 ,  H01L31/1055

摘要： In a radiation detector having a scintillator and a photodiode in combination, an amorphous silicon diode of a refractive index of 3.5 or below is used for a photodector to have a decreased junction capacitance. This shifts the spectral sensitivity characteristic of the photodetector toward the short wavelength side, thus providing a low-noise, high-sensitivity radiation detector matched well with the emission spectrum of the scintillator.

摘要翻译： 在具有闪烁体和光电二极管的放射线检测器中，折射率为3.5以下的非晶硅二极管用于光电转换器以具有降低的结电容。 这将光电检测器的光谱灵敏度特性转移到短波长侧，从而提供与闪烁体的发射光谱良好匹配的低噪声，高灵敏度的辐射探测器。

公开(公告)号：US06488121B2

公开(公告)日：2002-12-03

申请号：US09752516

申请日：2001-01-03

申请人： Haruo Itoh

发明人： Haruo Itoh

IPC分类号： F16N734

CPC分类号： F16H57/0458 ,  F16N7/34

摘要： In order to provide method of atomizing lubricant at a constant rate in a lubricant atomizer irrespective of the kinds of lubricant and the working conditions, the lubricant atomizer includes a compressed air valve having two branches on its downstream side, which one of two branches is connected to a Venturi mechanism, and the other branch is connected to a constant lubricant supplying pump. Compressed air is fed from the compressed air valve to the Venturi mechanism and to the constant lubricant-supplying pump, thus drawing the air from a sight dome while the compressed air is flowing in the Venturi mechanism. Lubricant is pumped to the sight dome via a constant lubricant supplying conduit, allowing the lubricant to fall in the center of the Venturi mechanism in the form of droplets. Then, compressed air is mixed with lubricant droplets to form fog of atomized lubricant in the pressurized oil vessel, allowing atomized lubricant to condense into lubricant droplets in the atomized-and-condensed lubricant coexistent space of the pressurized oil vessel, and at the same time allowing the lubricant droplets to fall down on the bottom of the pressurized oil vessel.

公开(公告)号：US4710832A

公开(公告)日：1987-12-01

申请号：US658440

申请日：1984-10-05

申请人： Haruo Itoh

发明人： Haruo Itoh

IPC分类号： H04N5/781 ,  G11B5/596 ,  G11B21/10 ,  G11B27/34 ,  H04N5/783

CPC分类号： G11B5/59611 ,  G11B27/34

摘要： A tracking system for a rotary magnetic recording medium includes a magnetic head for sensing signals on a plurality of tracks formed on the recording medium such that a beginning and an end of recording align with each other, a head feeding unit for transporting the magnetic head to a position where a desired one of the tracks is located, and a control unit for controlling the head feeding unit to effect tracking. The control unit includes an operational unit for sampling a signal sensed by the head in response to a rotation of the recording medium at a plurality of sampling points, and adds the sampled values with predetermined weights. Based on a result of the weighted addition, the control unit performs a tracking control.

摘要翻译： 用于旋转磁记录介质的跟踪系统包括用于感测形成在记录介质上的多个轨道上的信号的磁头，使得记录的开始和结束彼此对准，磁头馈送单元，用于将磁头传送到 所述轨道所需的位置所在的位置以及用于控制所述头部进给单元进行跟踪的控制单元。 控制单元包括操作单元，用于响应于在多个采样点处的记录介质的旋转来对由头读取的信号进行采样，并且以预定的权重添加采样值。 基于加权相加的结果，控制单元执行跟踪控制。

公开(公告)号：US4642412A

公开(公告)日：1987-02-10

申请号：US759961

申请日：1985-07-29

申请人： Shinichi Muramatsu ,  Toshikazu Shimada ,  Sunao Matsubara ,  Haruo Itoh ,  Nobuo Nakamura

发明人： Shinichi Muramatsu ,  Toshikazu Shimada ,  Sunao Matsubara ,  Haruo Itoh ,  Nobuo Nakamura

IPC分类号： H01L31/04 ,  H01L31/042 ,  H01L25/02 ,  H01L27/14

CPC分类号： H01L31/02024 ,  Y10S136/291

摘要： A plurality of photovoltaic devices (e.g., solar cells) connect with each other and form a photo-electric conversion apparatus. The photovoltaic devices concerned are so connected with each other that when a given pattern of light is irradiated upon the photo-electric conversion apparatus concerned, the electrical output generated when the whole of it is irradiated is smaller than that generated when some parts of it are irradiated. Since an electronic system equipped with this apparatus as a power supply can be designed to work when the apparatus is irradiated with such a pattern of light that irradiates only a part of the apparatus, an electronic system having such an identifying faculty can be made easily.Further, an apparatus like this type may be made by connecting the elements of this apparatus in series or in reverse direction to form units, and by connecting this plurality of units in series and/or in parallel.

摘要翻译： 多个光电器件（例如，太阳能电池）彼此连接并形成光电转换设备。 所涉及的光电器件彼此连接，当给定的光模式照射到所涉及的光电转换装置时，当其整个照射时产生的电输出小于其一些部分产生的电输出 照射。 由于配备有该设备作为电源的电子系统可以被设计成当用仅照射设备的一部分的这种模式照射设备时工作，可以容易地制造具有这样的识别人员的电子系统。 此外，这种类型的装置可以通过将该装置的元件串联或反向连接来形成单元，并且通过串联和/或并联连接多个单元来进行。

公开(公告)号：US4533831A

公开(公告)日：1985-08-06

申请号：US477375

申请日：1983-03-21

申请人： Haruo Itoh ,  Katsumi Tokiguchi ,  Terunori Warabisako ,  Tadashi Saitoh ,  Takashi Tokuyama

发明人： Haruo Itoh ,  Katsumi Tokiguchi ,  Terunori Warabisako ,  Tadashi Saitoh ,  Takashi Tokuyama

IPC分类号： H01J37/147 ,  H01J37/317 ,  H01L21/223 ,  H01L21/265 ,  G01N23/00

CPC分类号： H01L21/2236 ,  H01J37/3171

摘要： A non-mass-analyzed ion implantation process wherein two or more species of ions of the same polarity having greatly different ion masses are generated from a compound source material, the ions are accelerated under the application of an electric field, and the accelerated ions are scanned under the application of a magnetic field so as to be implanted into a target at a distribution profile which varies with the species of ions. An ion implantation apparatus can be simplified. A large ion beam current with a large spot size can be used and ions can be implanted to the target at a large dose within a short time. Especially, the non-mass-analyzed ion implantation is advantageously utilized for production of solar batteries.

摘要翻译： 一种非质量分析的离子注入方法，其中从化合物源材料产生具有极大不同离子质量的相同极性的两种或更多种离子，在施加电场的情况下离子被加速，加速的离子是 在施加磁场的情况下进行扫描，以便以离子种类变化的分布轮廓将其植入靶中。 离子注入装置可以简化。 可以使用具有大光斑尺寸的大离子束电流，并且可以在短时间内以大剂量将离子注入靶。 特别地，非质量分析的离子注入有利地用于生产太阳能电池。

公开(公告)号：US08448118B2

公开(公告)日：2013-05-21

申请号：US13032059

申请日：2011-02-22

申请人： Richard S. Graf ,  Haruo Itoh ,  Wai Ling Chung-Maloney

发明人： Richard S. Graf ,  Haruo Itoh ,  Wai Ling Chung-Maloney

IPC分类号： G06F17/50

CPC分类号： H01L24/03 ,  H01L24/06 ,  H01L24/48 ,  H01L24/49 ,  H01L2224/04042 ,  H01L2224/05553 ,  H01L2224/05554 ,  H01L2224/0603 ,  H01L2224/06051 ,  H01L2224/06179 ,  H01L2224/4813 ,  H01L2224/4911 ,  H01L2224/49171 ,  H01L2924/00014 ,  H01L2224/45099 ,  H01L2224/05599

摘要： Solutions for determining intra-die wirebond pad placement locations in an integrated circuit (IC) die are disclosed. In one embodiment, a method includes generating a dividing band in the IC die, the dividing band dividing the IC die into a first region and a second region; determining a voltage (IR) drop across the first region and the second region; comparing the IR drops across the regions; and in response to the IR drops being substantially unequal, moving the dividing band, determining new IR drops across the regions, and comparing the new IR drops until the IR drops are substantially equal. The dividing band may provide desired locations for intra-die wirebond pads.

摘要翻译： 公开了用于确定集成电路（IC）裸片中的管芯内焊盘放置位置的解决方案。 在一个实施例中，一种方法包括在IC管芯中产生分割带，将IC芯片划分成第一区域和第二区域; 确定穿过所述第一区域和所述第二区域的电压（IR）下降; 比较区域内的红细胞滴; 并且响应于IR滴基本上不相等，移动分割带，确定跨越该区域的新IR滴，并且比较新的IR滴直到IR下降基本相等。 分割带可为芯片内键合焊盘提供所需的位置。