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公开(公告)号：US4658143A
公开(公告)日：1987-04-14
申请号：US711824
申请日：1985-03-14
申请人： Katsumi Tokiguchi , Hidemi Koike , Noriyuki Sakudo , Osami Okada , Ken Ninomiya , Susumu Ozasa
发明人： Katsumi Tokiguchi , Hidemi Koike , Noriyuki Sakudo , Osami Okada , Ken Ninomiya , Susumu Ozasa
CPC分类号： H01J37/08 , H01J27/022 , H01J27/18
摘要： An ion source equipped with an ion beam exit slit for extracting ions from plasma generated in feed gas introduced into a discharge chamber, and with gas inlet or inlets for introducing the feed gas into the discharge chamber in close proximity of the ion beam exit slit. Ion extraction can be made stably without any deposit on the ion beam exit slit even when a boron halide is used as the feed gas. The effect of the ion source can be further enhanced by adding oxygen, hydrogen or gas of an oxygen-containing compound to the feed gas, and by using a microwave.
摘要翻译： 离子源配备有用于从引入到放电室的进料气体中产生的等离子体提取离子的离子束出口狭缝，以及用于将进料气体引入离子束出口狭缝附近的放电室的气体入口或入口。 即使使用卤化硼作为原料气体，也可以稳定地进行离子提取，而不会在离子束出口狭缝上沉积。 通过向原料气中加入含氧化合物的氧气，氢气或气体，以及使用微波可以进一步提高离子源的效果。
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公开(公告)号：US4801847A
公开(公告)日：1989-01-31
申请号：US763133
申请日：1985-07-29
申请人： Noriyuki Sakudo , Katsumi Tokiguchi , Hidemi Koike , Osami Okada , Norio Saito , Susumu Ozasa
发明人： Noriyuki Sakudo , Katsumi Tokiguchi , Hidemi Koike , Osami Okada , Norio Saito , Susumu Ozasa
CPC分类号： H05H7/02 , H01J37/3007 , H01J37/3171 , H05H7/18 , H05H9/00
摘要： A charged particle accelerator is provided with quadrupole electrodes with surfaces that are opposed to each other and are undulated, and with an external resonance circuit. The external resonance circuit consists of a capacitor formed by the opposing electrodes, a variable capacitor provided in parallel with said capacitor, and a coil. The resonance frequency is variable. A direct current and an alternating current may be applied in a superposed manner to the quadrupole electrodes. The thus constructed accelerator can be employed for an ion implanter to implant a heavy-current ion beam of several hundred KeV to several MeV.
摘要翻译： PCT No.PCT / JP84 / 00557 Sec。 371日期：1985年7月29日第 102（e）日期1985年7月29日PCT 1984年11月22日PCT公布。 公开号WO85 / 02489 日期：1985年6月6日。带电粒子加速器具有四极电极，四极电极具有彼此相对的并且起伏的表面，并具有外部谐振电路。 外部谐振电路包括由相对电极形成的电容器，与所述电容器并联设置的可变电容器和线圈。 共振频率是可变的。 直流电流和交流电可以叠加施加到四极电极。 这样构造的加速器可以用于离子注入机，以将几百KeV的大电流离子束注入几MeV。
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公开(公告)号：US4633138A
公开(公告)日：1986-12-30
申请号：US766393
申请日：1985-08-16
申请人： Katsumi Tokiguchi , Osami Okada , Noriyuki Sakudo , Hidemi Koike
发明人： Katsumi Tokiguchi , Osami Okada , Noriyuki Sakudo , Hidemi Koike
IPC分类号： G21K5/10 , H01J37/317 , H01L21/265 , G21K5/00 , H01J7/24
CPC分类号： H01J37/3171 , G21K5/10
摘要： In order to implant ions uniformly in a plurality of wafers, carriers, on which a plurality of wafers are mounted, are moved along a straight line one after another. An ion implanter comprises a beam sweep width controller for controlling the beam sweep width in such a manner that the area scanned with the ion beam by sweeping it coincides approximately with the shape of the wafers in which ions are to be implanted and a carrier speed controller for controlling the carrier speed, depending on the beam sweep width so that the dose of ions implanted in the wafers is uniform. The beam sweep width controller includes a detector for detecting the width of a wafer in which ions are being implanted in the one direction and a controller for varying the beam sweep width, depending on the width of the wafer thus detected. The carrier speed controller varies the carrier speed inversely proportionally to the width of the wafer thus detected.
摘要翻译： 为了将离子均匀地注入到多个晶片中，其上安装有多个晶片的载体沿着直线一个接一个地移动。 离子注入机包括用于以这样一种方式控制光束扫描宽度的光束扫描宽度控制器，其中通过扫描其被离子束扫描的区域大致与离子将被注入的晶片的形状重合，并且载波速度控制器 用于根据光束扫描宽度控制载体速度，使得植入晶片中的离子的剂量是均匀的。 光束扫描宽度控制器包括检测器，用于检测其中沿一个方向注入离子的晶片的宽度，以及用于根据检测到的晶片的宽度改变光束扫描宽度的控制器。 载波速度控制器将载波速度与所检测的晶片的宽度成反比地变化。
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公开(公告)号：US4629930A
公开(公告)日：1986-12-16
申请号：US517696
申请日：1983-07-27
申请人： Noriyuki Sakudo , Osami Okada , Susumu Ozasa , Katsumi Tokiguchi , Hidemi Koike , Shunroku Taya , Mitsunori Komatsumoto , Mitsuo Komatsu
发明人： Noriyuki Sakudo , Osami Okada , Susumu Ozasa , Katsumi Tokiguchi , Hidemi Koike , Shunroku Taya , Mitsunori Komatsumoto , Mitsuo Komatsu
CPC分类号： H01J27/16 , H01J27/022
摘要： A plasma ion source includes a discharge chamber in which a plasma is produced by plasma generator, with an acceleration electrode being disposed adjacent to the discharge chamber in order to extract ions from the produced plasma. A deceleration electrode is disposed adjacent to the acceleration electrode to decelerate the extracted ions, and a ground electrode is disposed adjacent to the deceleration electrode. An insulator container is disposed so as to surround the discharge chamber and the respective electrodes, and a shield ring electrode of ground potential is disposed in the vicinity of the deceleration electrode and along an inner wall surface of the insulator container in order to prevent any discharge from arising across the deceleration electrode and the ground electrode.
摘要翻译： 等离子体离子源包括其中由等离子体发生器产生等离子体的放电室，其中加速电极邻近放电室设置，以从所产生的等离子体中提取离子。 减速电极与加速电极相邻地设置，以使所提取的离子减速，并且接地电极与减速电极相邻配置。 绝缘体容器设置成围绕放电室和各个电极，并且将地电位的屏蔽环电极设置在减速电极附近并且沿着绝缘体容器的内壁表面设置，以防止任何放电 来自减速电极和接地电极。
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5.发明授权Microwave plasma source having improved switching operation from plasma ignition phase to normal ion extraction phase 失效微波等离子体源具有从等离子体点火阶段到正常离子提取阶段的改进的开关操作
公开(公告)号：US4543465A
公开(公告)日：1985-09-24
申请号：US517404
申请日：1983-07-26
申请人： Noriyuki Sakudo , Katsunobu Abe , Katsumi Tokiguchi , Hidemi Koike , Osami Okada
发明人： Noriyuki Sakudo , Katsunobu Abe , Katsumi Tokiguchi , Hidemi Koike , Osami Okada
IPC分类号： H01J27/16 , B23K10/00 , C23F4/00 , H01J37/08 , H01L21/302 , H01L21/3065 , B23K9/00 , H01J27/00
CPC分类号： B23K10/006
摘要： In a microwave plasma source, a discharge space supplied with a microwave electric field is supplied with a DC magnetic field. A material to be ionized is introduced into the discharge space to produce plasma, whereby ions are extracted through an ion extracting system. A switch is provided for effecting through switching operation the change-over of the magnetic field applied to the discharge space from the intensity for the ignition of plasma to the intensity for ion extraction in succession to completion of the plasma ignition.
摘要翻译： 在微波等离子体源中，向微波电场供给的放电空间被供给直流磁场。 将被离子化的材料引入放电空间以产生等离子体，从而通过离子提取系统提取离子。 提供了一种开关，用于通过切换操作，将施加到放电空间的磁场的转换从等离子体的点火强度切换到等离子体点火完成之后的离子提取强度。
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公开(公告)号：US4409520A
公开(公告)日：1983-10-11
申请号：US247072
申请日：1981-03-24
IPC分类号： H01J23/36 , H01J27/02 , H01J27/16 , H01J27/18 , H01J37/08 , H01L21/265 , H01J7/46 , H01J19/80
摘要： A microwave discharge ion source according to this invention comprises a microwave generator, a discharge chamber having ridged electrodes, and a waveguide connecting the microwave generator with the discharge chamber. This waveguide consists of a waveguide having no ridged electrode, and a waveguide having ridged electrodes. Further, a vacuum-sealing dielectric plate is disposed at an intermediate position or an end part of the waveguide having no ridged electrode. A space in the waveguide as extends from the vacuum-sealing dielectric plate to the discharge chamber is filled with a dielectric.As a result, the design and fabrication of the vacuum-sealing dielectric plate are facilitated, and a microwave discharge ion source of high performance is provided.
摘要翻译： 根据本发明的微波放电离子源包括微波发生器，具有脊状电极的放电室和将微波发生器与放电室连接的波导。 该波导由不具有脊状电极的波导和具有脊状电极的波导构成。 此外，真空密封电介质板设置在没有脊状电极的波导的中间位置或端部。 从真空密封电介质板延伸到放电室的波导中的空间填充有电介质。 结果，促进了真空密封电介质板的设计和制造，并且提供了高性能的微波放电离子源。
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公开(公告)号：US5053678A
公开(公告)日：1991-10-01
申请号：US323837
申请日：1989-03-15
IPC分类号： H01J27/18
CPC分类号： H01J27/18
摘要： A microwave ion source suitable for an apparatus which requires ions of an element of high reactivity such as oxygen, fluorine, etc., the microwave ion source being arranged to transmit microwaves between outer and inner conductors of a coaxial line. An ion extraction electrode is formed at least partly of a low magnetic permeability material while an acceleration electrode is formed of a high magnetic permeability material. The acceleration electrode is formed so as to have a structure in which a low magnetic permeability material of a certain thickness is stacked on the high magnetic permeability material at a plasma chamber side and openings of ion exit holes are formed in the portion of the low magnetic permeability material. A permanent magnet constituting a magnetic field generating means is provided to surround the microwave lead-in coaxial line. The direction of magnetization of the permanent magnet is made to coincide with the axial direction of the coaxial line. The end surface of the permanent magnet at the microwave lead-in side is coupled with the periphery of the high magnetic permeability material of the acceleration electrode through another high magnetic permeability material to form a magnetic path. The plasma chamber is formed of a dielectric insulator which transmits microwaves well. It is possible to realize an ion source in which ions can be extracted with a high electric field, and in which a high current ion beam can be extracted for a long time.
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公开(公告)号：US4393333A
公开(公告)日：1983-07-12
申请号：US215064
申请日：1980-12-10
摘要： A microwave plasma ion source according to the present invention is designed such that a microwave electric field and a magnetic field are applied to a discharge gas introduced into a discharge region, to form plasma, from which ions are extracted. The above magnetic field is formed by means of an electromagnet provided on the low-voltage side of ion extraction electrodes and a high-permeability member provided in that section which is on the side of a waveguide and which permits the microwaves to be propagated freely.
摘要翻译： 根据本发明的微波等离子体离子源被设计成使微波电场和磁场被施加到引入到放电区域的放电气体，形成从其中提取离子的等离子体。 上述磁场通过设置在离子提取电极的低压侧的电磁体和设置在该部分中的位于波导侧的高导磁性部件形成，并允许微波自由传播。
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公开(公告)号：US4316090A
公开(公告)日：1982-02-16
申请号：US154824
申请日：1980-05-30
摘要： A microwave plasma ion source according to this invention is characterized by the construction of the extracting electrode in contact with the discharge chamber. The electrode is divided into a part substantially exposed to a plasma and a remaining part which is not exposed to the plasma. Moreover, both these parts are held in a state in which they are electrically connected with each other.As a result, very little P or As deposits on the surface of the electrode, and a stable high-current ion beam can be supplied over a long period of time.
摘要翻译： 根据本发明的微波等离子体离子源的特征在于与放电室接触的提取电极的结构。 电极被分成基本上暴露于等离子体的部分和不暴露于等离子体的剩余部分。 此外，这两个部件保持在彼此电连接的状态。 结果，可以在长时间内供给在电极表面上沉积很少的P或As和稳定的高电流离子束。
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公开(公告)号：US4433228A
公开(公告)日：1984-02-21
申请号：US319987
申请日：1981-11-10
申请人： Shigeru Nishimatsu , Keizo Suzuki , Noriyuki Sakudo , Ken Ninomiya , Hidemi Koike , Osami Okada , Shinjiro Katagiri , Sadayuki Okudaira
发明人： Shigeru Nishimatsu , Keizo Suzuki , Noriyuki Sakudo , Ken Ninomiya , Hidemi Koike , Osami Okada , Shinjiro Katagiri , Sadayuki Okudaira
IPC分类号： H01J25/50 , H01J27/16 , H01J37/08 , H01J37/317 , H01J37/32 , H01L21/265 , H01L21/302 , H01L21/3065 , H05H1/46
CPC分类号： H01J37/32211 , H01J37/32192 , H01J37/32293
摘要： The microwave plasma source of this invention comprises a vacuum room which forms a discharging space with discharge gas introduced therein, a means for conducting the microwave to the discharging space so that the microwave electric field is provided in the discharging space, and a means for providing the magnetic field in the discharging space located on the microwave propagating path and made up of a permanent magnet which virtually propagates the microwave.
摘要翻译： 本发明的微波等离子体源包括形成放电空间的真空室，其中引入有放电气体，用于将微波传导到放电空间的装置，使得微波电场设置在放电空间中，以及用于提供 位于微波传播路径上的放电空间中的磁场，并由实际上传播微波的永磁体组成。
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