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    PROCESSING METHOD AND PLASMA PROCESSING DEVICE
    1.
    发明申请
    PROCESSING METHOD AND PLASMA PROCESSING DEVICE 失效
    处理方法和等离子体处理装置

    公开(公告)号：US20090004871A1

    公开(公告)日：2009-01-01

    申请号：US12199028

    申请日：2008-08-27

    申请人： Kenji MAEDA ,  Tomoyuki TAMURA ,  Hiroyuki KOBAYASHI ,  Kenetsu YOKOGAWA ,  Tadamitsu KANEKIYO

    发明人： Kenji MAEDA ,  Tomoyuki TAMURA ,  Hiroyuki KOBAYASHI ,  Kenetsu YOKOGAWA ,  Tadamitsu KANEKIYO

    IPC分类号： H01L21/3065

    CPC分类号： H01L21/67069 ,  H01J37/32082 ,  H01J37/32623 ,  H01J37/32706 ,  H01L21/31116 ,  H01L21/32136

    摘要： A plasma processing method using plasma includes steps of applying current to a coil and introducing gas into a processing chamber, applying a bias power that does not generate plasma, applying a source power to generate plasma so that a plasma density distribution is high above an outer circumference of a semiconductor wafer and low above a center of the semiconductor wafer, and forming a shape of a sheath layer having a positive ion space charge directly above the semiconductor wafer so as to be convex in an upper direction from the semiconductor wafer, thereby eliminating foreign particles trapped in a boundary of the sheath layer having a positive ion space charge directly above the semiconductor wafer, generating plasma for processing the semiconductor wafer under a condition different from the conditions of the previous steps.

    摘要翻译： 使用等离子体的等离子体处理方法包括以下步骤：向线圈施加电流并将气体引入处理室，施加不产生等离子体的偏置功率，施加源功率以产生等离子体，使得等离子体密度分布高于外部 半导体晶片的周围，并且低于半导体晶片的中心，并且在半导体晶片的正上方形成具有正离子空间电荷的鞘层的形状，以从半导体晶片向上方凸出，从而消除 杂质颗粒捕获在具有正离子空间电荷的鞘层的边界上，直接位于半导体晶片上方，产生用于在与前述步骤的条件不同的条件下处理半导体晶片的等离子体。

    METHOD FOR TRANSPORTING OBJECT TO BE PROCESSED IN SEMICONDUCTOR MANUFACTURING APPARATUS
    3.
    发明申请
    METHOD FOR TRANSPORTING OBJECT TO BE PROCESSED IN SEMICONDUCTOR MANUFACTURING APPARATUS 审中-公开
    运输半导体制造设备中要处理的物体的方法

    公开(公告)号：US20110194924A1

    公开(公告)日：2011-08-11

    申请号：US13090987

    申请日：2011-04-20

    申请人： Hiroyuki KOBAYASHI ,  Kenji MAEDA ,  Masaru IZAWA

    发明人： Hiroyuki KOBAYASHI ,  Kenji MAEDA ,  Masaru IZAWA

    IPC分类号： H01L21/677

    CPC分类号： H01L21/67748 ,  H01L21/67017 ,  H01L21/6719 ,  H01L21/67196

    摘要： In a semiconductor manufacturing apparatus including a processing chamber, means for supplying gas to the processing chamber, evacuating means for decompressing the processing chamber, a transport chamber, means for supplying gas to the transport chamber, and evacuating means for decompressing the transport chamber, the pressure in the processing chamber is 10 to 50 Pa, the pressure in the transport chamber is set to positive pressure to the processing chamber, the differential pressure between the processing chamber and the transport chamber is 10 Pa or less, and the flow rate of the gas supplied to the processing chamber is twice or more the flow rate of gas supplied to the transport chamber.

    摘要翻译： 在包括处理室的半导体制造装置中，向处理室供给气体的装置，用于对处理室进行减压的排气装置，输送室，向输送室供给气体的装置，以及用于使输送室减压的排气装置， 处理室中的压力为10〜50Pa，输送室内的压力被设定为处理室的正压，处理室与输送室之间的压差为10Pa以下，流量为 供给到处理室的气体是供给至运送室的气体的流量的两倍以上。

    PLASMA PROCESSING APPARATUS AND FOREIGN PARTICLE DETECTING METHOD THEREFOR
    4.
    发明申请
    PLASMA PROCESSING APPARATUS AND FOREIGN PARTICLE DETECTING METHOD THEREFOR 审中-公开
    等离子体处理装置和外来颗粒检测方法

    公开(公告)号：US20110146908A1

    公开(公告)日：2011-06-23

    申请号：US12696072

    申请日：2010-01-29

    申请人： Hiroyuki KOBAYASHI ,  Kenji Maeda

    发明人： Hiroyuki KOBAYASHI ,  Kenji Maeda

    IPC分类号： H01L21/306 ,  G06K9/00

    CPC分类号： H01J37/32981 ,  G06K9/00127 ,  H01J37/32192 ,  H01J37/32935

    摘要： The present invention provides a plasma processing apparatus including: a processing chamber; a gas exhaust unit for reducing the pressure of the inside of the processing chamber through a gas exhaust line; and a laser light source for allowing laser light to transmit through an exhaust gas flowing in the gas exhaust line; an I-CCD camera for detecting scattered light caused by foreign particles passing in the laser light; and a foreign particle determination and detection unit for detecting the foreign particles from an image measured by the I-CCD camera, wherein the foreign particle determination and detection unit determines that the foreign particles are detected from the measured image when plural pixels with signals having a predetermined intensity or larger are connected in a substantially straight line.

    摘要翻译： 本发明提供一种等离子体处理装置，包括：处理室; 气体排出单元，用于通过排气管线减小处理室内部的压力; 以及激光源，用于允许激光透过在排气管线中流动的废气; 用于检测由激光中的异物引起的散射光的I-CCD照相机; 以及外来粒子测定和检测单元，用于从由I-CCD照相机测量的图像中检测异物，其中当具有信号的多个像素具有异物粒子确定和检测单元时，异物确定和检测单元从测量图像确定检测到异物 预定强度或更大的连接在基本上直线上。

    VACUUM PROCESSING APPARATUS
    5.
    发明申请
    VACUUM PROCESSING APPARATUS 审中-公开
    真空加工设备

    公开(公告)号：US20100163181A1

    公开(公告)日：2010-07-01

    申请号：US12369767

    申请日：2009-02-12

    申请人： Hiroyuki KOBAYASHI ,  Kenji MAEDA ,  Masaru IZAWA ,  Makoto NAWATA ,  Shingo KIMURA

    发明人： Hiroyuki KOBAYASHI ,  Kenji MAEDA ,  Masaru IZAWA ,  Makoto NAWATA ,  Shingo KIMURA

    IPC分类号： H01L21/3065 ,  B05C11/00

    CPC分类号： H01L21/67201

    摘要： There is provided a vacuum processing apparatus including a valve whose opening degree can be set to any size and a control computer which automatically controls a depressurizing rate. The vacuum processing apparatus can reduce the number of foreign particles adhered to a sample to be processed in the lock chamber and can improve the throughput at the same time.

    摘要翻译： 提供了一种真空处理装置，其包括可以将开度设定为任意尺寸的阀，以及自动控制减压率的控制计算机。 真空处理装置可以减少在锁室中附着到待处理样品的异物的数量，并且可以同时提高生产量。

    SCREEN SHARING APPARATUS, SCREEN SHARING METHOD AND SCREEN SHARING PROGRAM
    6.
    发明申请
    SCREEN SHARING APPARATUS, SCREEN SHARING METHOD AND SCREEN SHARING PROGRAM 审中-公开
    屏幕共享设备，屏幕共享方法和屏幕共享程序

    公开(公告)号：US20130241803A1

    公开(公告)日：2013-09-19

    申请号：US13795178

    申请日：2013-03-12

    申请人： Hiroyuki KOBAYASHI

    发明人： Hiroyuki KOBAYASHI

    IPC分类号： G06F3/14

    CPC分类号： G06F3/1454 ,  G06F3/0485 ,  G06F3/1462

    摘要： A screen reception apparatus according to an exemplary aspect of the invention includes, a block image information storage unit that stores therein a plurality of block images resulting from segmentation of an entire image which is scrolled by software so that a display area, which is part of the entire image, is displayed on a first screen, as well as identifications of the respective block images, such that the block images and the identifications are correlated with each other; and an on-screen display unit that receives one of the identifications and display location within the first screen reads out from the block image information storage unit one of the block images corresponding to the received identification and, display the read out block image at the display location within the first screen.

    摘要翻译： 根据本发明的示例性方面的屏幕接收装置包括：块图像信息存储单元，其存储由软件滚动的整个图像的分割产生的多个块图像，使得显示区域是作为 整个图像被显示在第一屏幕上，以及各个块图像的标识，使得块图像和标识相互关联; 并且接收第一屏幕中的一个标识和显示位置的屏幕显示单元从块图像信息存储单元中读出与接收到的标识相对应的块图像之一，并在显示器上显示读出的块图像 位于第一屏幕内。

    IMAGE SELECTION DEVICE AND IMAGE SELECTING METHOD
    7.
    发明申请
    IMAGE SELECTION DEVICE AND IMAGE SELECTING METHOD 有权
    图像选择装置和图像选择方法

    公开(公告)号：US20120249826A1

    公开(公告)日：2012-10-04

    申请号：US13493152

    申请日：2012-06-11

    申请人： Hiroyuki KOBAYASHI ,  Kimitaka MURASHITA ,  Masayoshi SHIMIZU ,  Takehiro NAKAI

    发明人： Hiroyuki KOBAYASHI ,  Kimitaka MURASHITA ,  Masayoshi SHIMIZU ,  Takehiro NAKAI

    IPC分类号： H04N5/228 ,  H04N5/14

    CPC分类号： H04N5/23293 ,  G06K9/036 ,  G06T7/0002 ,  G06T2207/10016 ,  G06T2207/30168 ,  H04N5/23248 ,  H04N5/23254 ,  H04N5/77

    摘要： An image selection device includes: an image acquiring unit which acquires a plurality of shot images acquired by continuously shooting a subject; an area segmentation unit which segments an image area of the shot image into a motion area indicating different positions by a specified amount or more between two shot images and a non-motion area other than the motion area based on the two consecutive shot images in time series in the plurality of shot images; and a selection unit which selects at least one shot image from the plurality of shot images based on an amount of blur of an image in the non-motion area.

    摘要翻译： 图像选择装置包括：图像获取单元，其获取通过连续拍摄被摄体而获取的多个拍摄图像; 区域分割单元，其基于时间上的两个连续拍摄图像，将拍摄图像的图像区域分割成指示不同位置的运动区域，其在两拍摄图像与运动区域之间的非运动区域之间指定量以上 系列在多个拍摄图像中; 以及选择单元，其基于所述非运动区域中的图像的模糊量，从所述多个拍摄图像中选择至少一个拍摄图像。

    SEMICONDUCTOR INTEGRATED CIRCUIT
    8.
    发明申请
    SEMICONDUCTOR INTEGRATED CIRCUIT 有权
    半导体集成电路

    公开(公告)号：US20110215872A1

    公开(公告)日：2011-09-08

    申请号：US12833634

    申请日：2010-07-09

    申请人： Hiroyuki KOBAYASHI

    发明人： Hiroyuki KOBAYASHI

    IPC分类号： H03L7/00

    CPC分类号： H03L7/00

    摘要： A semiconductor integrated circuit includes: digitally controlled oscillators; a phase-data output unit; an integration processing unit; a filter unit; a multiplier (a first multiplier) that outputs, as an oscillator tuning word, a value obtained by multiplying an output signal subjected to time division from the filter unit with a predetermined coefficient; and an output selector (a tuning-word separating unit) that allocates the oscillator tuning word to the digitally controlled oscillators in synchronization with a reference frequency.

    摘要翻译： 半导体集成电路包括：数字控制振荡器; 相位数据输出单元; 一体化处理单元; 过滤器单元; 输出作为振荡器调谐字的乘法器（第一乘法器）将经过来自滤波器单元的时分的输出信号与预定系数相乘得到的值; 以及与参考频率同步地将振荡器调谐字分配给数字控制的振荡器的输出选择器（调谐字分离单元）。