公开(公告)号：US06607305B2

公开(公告)日：2003-08-19

申请号：US09873935

申请日：2001-06-04

申请人： Kevin J. Fischer ,  Henry Guckel ,  Yogesh B. Gianchandani

发明人： Kevin J. Fischer ,  Henry Guckel ,  Yogesh B. Gianchandani

IPC分类号： G02B638

CPC分类号： G02B6/358 ,  G02B6/3502 ,  G02B6/355 ,  G02B6/3572 ,  G02B6/3584 ,  H02N1/006

摘要： A micromechanical actuator includes a plunger, having two magnet heads spaced from each other and joined to move together, that is supported for linear movement on a substrate. A magnetic core is supported on the substrate and has gaps in the core adjacent to the heads of the plunger. At least one permanent magnet is mounted to the plunger to move with it and forms, with the core, first and second magnetic circuits for flux which pass through the first and second heads of the plunger. A coil is coupled to the magnetic core to provide flux to the core. When the coil is supplied with DC current in one direction, the flux from the coil opposes the flux from the permanent magnet in one of the gaps and augments the flux in the other gap, causing the plunger to move in the direction of the gap having the augmented flux. After the plunger has switched positions, the electrical current in the coil is turned off, leaving the plunger latched in its switched position due to the flux from the permanent magnet. Switching to the opposite position of the plunger is carried out by supplying current to the coil in the reverse direction, drawing the plunger to its opposite position.

公开(公告)号：US6133615A

公开(公告)日：2000-10-17

申请号：US59141

申请日：1998-04-13

申请人： Henry Guckel ,  Shamus P. McNamara

发明人： Henry Guckel ,  Shamus P. McNamara

IPC分类号： H01L27/146 ,  H01L31/068

CPC分类号： H01L27/14643 ,  H01L27/14601

摘要： Photodiode arrays are formed with close diode-to-diode spacing and minimized cross-talk between diodes in the array by isolating the diodes from one another with trenches that are formed between the photodiodes in the array. The photodiodes are formed of spaced regions in a base layer, each spaced region having an impurity type opposite to that of the base layer to define a p-n junction between the spaced regions and the base layer. The base layer meets a substrate at a boundary, with the substrate being much more heavily doped than the base layer with the same impurity type. The trenches extend through the base layer and preferably into the substrate. Minority carriers generated by absorption of light photons in the base layer can only migrate to an adjacent photodiode through the substrate. The lifetime and the corresponding diffusion length of the minority carriers in the substrate is very short so that all minority carriers recombine in the substrate before reaching an adjacent photodiode.

摘要翻译： 光电二极管阵列通过在阵列中的光电二极管之间形成的沟槽将二极管彼此隔离来形成具有紧密的二极管至二极管间隔并且使阵列中二极管之间的串扰最小化。 光电二极管在基层中由间隔开的区域形成，每个间隔区域具有与基层相反的杂质类型，以限定间隔区域和基层之间的p-n结。 基底层在边界处与基底相交，其中衬底比具有相同杂质类型的基底层重掺杂得多。 沟槽延伸通过基底层并且优选地延伸到基底中。 通过在基层中吸收光子而产生的少数载体只能通过基底迁移到相邻的光电二极管。 衬底中少数载流子的寿命和相应的扩散长度非常短，使得所有少数载流子在到达相邻光电二极管之前在衬底中重新结合。

公开(公告)号：US5808384A

公开(公告)日：1998-09-15

申请号：US869789

申请日：1997-06-05

申请人： Ned Tabat ,  Henry Guckel

发明人： Ned Tabat ,  Henry Guckel

IPC分类号： H02K33/00 ,  H02K15/00 ,  H02K57/00

CPC分类号： H02K33/00 ,  Y10S310/06

摘要： Micromechanical actuators capable of bidirectional and bistable operation can be formed on substrates using lithographic processing techniques. Bistable operation of the microactuator is obtained using a single coil and a magnetic core with a gap. A plunger having two magnetic heads is supported for back and forth linear movement with respect to the gap in the magnetic core, and is spring biased to a neutral position in which the two heads are on each side of the gap in the core. The single electrical coil is coupled to the core and is provided with electrical current to attract one of the heads toward the core by reluctance action to drive the plunger to a limit of travel in one direction. The current is then cut off and the plunger returns by spring action toward the gap, whereafter the current is reapplied to the coil to attract the other head of the plunger by reluctance action to drive the plunger to its other limit of travel. This process can be repeated at a time when switching of the actuator is required.

摘要翻译： 可以使用光刻处理技术在基板上形成能够双向和双向运行的微机械致动器。 使用单个线圈和具有间隙的磁芯获得微致动器的双稳态操作。 具有两个磁头的柱塞被支撑用于相对于磁芯中的间隙的往复线性运动，并且被弹簧偏置到中间位置，在该中间位置，两个磁头位于磁芯的间隙的每一侧上。 单个电线圈耦合到铁芯并且被提供有电流以通过磁阻作用来吸引其中一个磁头朝向磁芯，以将柱塞驱动到在一个方向上行进的极限。 然后将电流切断，并且柱塞通过弹簧作用向间隙返回，然后电流重新施加到线圈以通过磁阻作用吸引柱塞的另一个头部，以将柱塞驱动到其另一个行进限制。 在需要切换致动器时，可以重复该过程。

公开(公告)号：US5644177A

公开(公告)日：1997-07-01

申请号：US393432

申请日：1995-02-23

申请人： Henry Guckel ,  Jonathan L. Klein ,  Thomas L. Earles

发明人： Henry Guckel ,  Jonathan L. Klein ,  Thomas L. Earles

IPC分类号： F04B17/04 ,  F04B19/00 ,  H01H50/00 ,  H02K33/10 ,  H02K41/035 ,  H02K15/00 ,  H02K57/00

CPC分类号： F04B17/042 ,  F04B19/006 ,  H01H50/005 ,  H02K33/10 ,  H02K41/0352 ,  H02K99/00 ,  H01H2001/0078 ,  Y10S310/06

摘要： Micromechanical structures capable of actuation for purposes such as fluid flow control are formed on substrates in sizes in the range of one or two millimeters or less using micromechanical processing techniques. A magnetic core having a gap therein is fixed on the substrate, and a plunger is mounted by a spring for movement parallel to the substrate in response to the flux provided to the gap of the fixed core. An electrical coil wound around a mandrel is engaged to the fixed magnetic core such that flux is induced in the core when current is supplied to the coil, driving the plunger against the force of the spring. A micromechanical fluid control unit includes a metal frame structure formed by electrodeposition on a substrate with the inner wall of the frame having slots formed therein to admit a separator wall which divides the interior of the frame into separate chambers, with a cover secured over the top of the frame and the separator wall to seal the chambers. A plunger actuator can be mounted within the frame with fixed core sections extending through the walls of the frame, and with the mandrel and coil engaged to the fixed core sections outside of the frame to provide magnetic flux to a gap to actuate the plunger within the sealed enclosure.

摘要翻译： 使用微机械处理技术，能够致动用于例如流体流动控制的微机械结构在尺寸在一个或两个毫米或更小的范围内的基板上形成。 其中具有间隙的磁芯固定在基板上，并且响应于提供给固定芯的间隙的通量，通过弹簧安装柱塞以平行于基板移动。 缠绕在心轴上的电线圈与固定磁芯接合，使得当电流供应到线圈时，磁芯中引起磁通，抵抗弹簧的力驱动柱塞。 微机械流体控制单元包括通过电沉积在基底上而形成的金属框架结构，其中框架的内壁具有形成在其中的槽，以允许将框架内部分成分离的室的分隔壁，其顶盖固定在顶部 的框架和分离器壁以密封室。 柱塞致动器可以安装在框架内，固定的芯部分延伸穿过框架的壁，并且心轴和线圈与框架外部的固定芯部分接合，以向间隙提供磁通量，从而致动柱塞 密封外壳。

公开(公告)号：US5576147A

公开(公告)日：1996-11-19

申请号：US461983

申请日：1995-06-05

申请人： Henry Guckel ,  Todd R. Christenson ,  Kenneth Skrobis

发明人： Henry Guckel ,  Todd R. Christenson ,  Kenneth Skrobis

IPC分类号： G03F7/027 ,  B81B1/00 ,  B81C1/00 ,  G03F7/00 ,  G03F7/20 ,  G03F7/26 ,  G03F7/30 ,  G03F7/38 ,  G03F7/40 ,  H01L21/027 ,  H05K3/18

CPC分类号： G03F7/38 ,  B81C1/0038 ,  G03F7/00 ,  G03F7/0035 ,  B81C2201/0128 ,  B81C2201/0159 ,  B81C2201/019 ,  B81C2201/032 ,  Y10S430/168 ,  Y10T428/31504

摘要： In the formation of microstructures, a preformed sheet of photoresist, such as polymethylmethacrylate (PMMA), which is strain free, may be milled down before or after adherence to a substrate to a desired thickness. The photoresist is patterned by exposure through a mask to radiation, such as X-rays, and developed using a developer to remove the photoresist material which has been rendered susceptible to the developer. Micrometal structures may be formed by electroplating metal into the areas from which the photoresist has been removed. The photoresist itself may form useful microstructures, and can be removed from the substrate by utilizing a release layer between the substrate and the preformed sheet which can be removed by a remover which does not affect the photoresist. Multiple layers of patterned photoresist can be built up to allow complex three dimensional microstructures to be formed.

公开(公告)号：US5189777A

公开(公告)日：1993-03-02

申请号：US626581

申请日：1990-12-07

申请人： Henry Guckel ,  Todd R. Christenson

发明人： Henry Guckel ,  Todd R. Christenson

IPC分类号： G01L13/06 ,  B81B3/00 ,  G01L9/00 ,  G01L19/00 ,  H01L29/84 ,  H04R19/00

CPC分类号： G01L9/0042 ,  G01L19/0618 ,  G01L9/0055 ,  G01L9/0073 ,  H04R19/005 ,  Y10S430/168 ,  Y10T29/49103 ,  Y10T29/49812

摘要： Microminiature pressure transducers are formed on semiconductor substrates such as silicon and include a membrane which spans a cavity over the substrate, with the membrane being mounted to and sealed to the substrate at the peripheral edges of the membrane. The bottom of the cavity forms an overpressure stop to prevent over deflections of the membrane toward the substrate. An overpressure stop formed as a bridge of a material such as nickel extends above the membrane and is spaced therefrom to allow the membrane to deflect freely under normal pressure situations but prevent over deflections. The thickness of the polysilicon membrane and the spacing between the membrane and the overpressure stops is preferably in the range of 10 micrometers or less, and typically in the range of one micrometer. The overpressure stop bridge is formed utilizing deep X-ray lithography to form a well-defined bridge structure. The gap between the membrane and the bottom surface of the bridge is established with a sacrificial layer, such as a polyimide film, which dissolves in a solvent. The transducer is formed utilizing processing techniques which do not affect the performance of the membrane as a pressure sensor and which allow the substrate to have further micromechanical or microelectronic devices formed thereon.

公开(公告)号：US4996082A

公开(公告)日：1991-02-26

申请号：US350571

申请日：1989-05-11

申请人： Henry Guckel ,  David W. Burns

发明人： Henry Guckel ,  David W. Burns

IPC分类号： G01L9/00

CPC分类号： G01L9/0042

摘要： Sealed cavity structures suitable for use as pressure transducers are formed on a single surface of a semiconductor substrate (20) by, for example, deposit of a polycrystalline silicon layer (32) from silane gas over a relatively large silicon dioxide post (22) and smaller silicon dioxide ridges (27) leading outwardly from the post. The polysilicon layer is masked and etched to expose the outer edges of the ridges and the entire structure is then immersed in an etchant which etches the silicon dioxide forming the ridges and the post but not the substrate (20) of the deposited polysilicon layer (32). A cavity structure results in which channels (35) are left in place of the ridges and extend from communication with the atmosphere to the cavity (36) left in place of the post. The cavity (36) may be sealed off from the external atmosphere by a second vapor deposition of polysilicon or silicon nitride, which fills up and seals off the channels (35), or by exposing the substrate and the structure thereon to an oxidizing ambient which results in growth of silicon dioxide in the channels sufficient to seal off the channels. Deflection of the membrane spanning the cavity occurring as a result of pressure changes, may be detected, for example, by piezoresistive devices formed on the membrane.

摘要翻译： 通过例如在较大的二氧化硅柱（22）上沉积硅烷气体的多晶硅层（32），在半导体衬底（20）的单个表面上形成适合用作压力传感器的密封空腔结构，以及 较小的二氧化硅脊（27）从柱向外导出。 掩模和蚀刻多晶硅层以暴露脊的外边缘，然后将整个结构浸入蚀刻剂中，该蚀刻剂蚀刻形成脊和柱的二氧化硅而不是沉积的多晶硅层（32）的衬底（20） ）。 空腔结构导致通道（35）被置于脊之外并且与大气连通延伸到离开柱的空腔（36）。 空腔（36）可以通过第二次多晶硅或氮化硅气相沉积从外部空气中密封，多晶硅或氮化硅填充并密封通道（35），或通过将衬底及其结构暴露于氧化环境 导致通道中二氧化硅的生长足以密封通道。 可以例如通过形成在膜上的压阻器件来检测跨越由于压力变化而发生的空腔的膜的偏转。

公开(公告)号：US4744863A

公开(公告)日：1988-05-17

申请号：US855806

申请日：1986-04-24

申请人： Henry Guckel ,  David W. Burns

发明人： Henry Guckel ,  David W. Burns

IPC分类号： G01L9/00 ,  H01L21/306 ,  B05D7/22 ,  H01L29/84 ,  H01L41/08

CPC分类号： G01L9/0042 ,  Y10T29/49103

摘要： Sealed cavity structures suitable for use as pressure transducers are formed on a single surface of a semiconductor substrate (20) by, for example, deposit of a polycrystalline silicon layer (32) from silane gas over a relatively large silicon dioxide post (22) and smaller silicon dioxide ridges (27) leading outwardly from the post. The polysilicon layer is masked and etched to expose the outer edges of the ridges and the entire structure is then immersed in an etchant which etches the silicon dioxide forming the ridges and the post but not the substrate (20) or the deposited polysilicon layer (32). A cavity structure results in which channels (35) are left in place of the ridges and extend from communication with the atmosphere to the cavity (36) left in place of the post. The cavity (36) may be sealed off from the external atmosphere by a second vapor deposition of polysilicon or silicon nitride, which fills up and seals off the channels (35), or by exposing the substrate and the structure thereon to an oxidizing ambient which results in growth of silicon dioxide in the channels sufficient to seal off the channels. Deflection of the membrane spanning the cavity occurring as a result of pressure changes, may be detected, for example, by piezoresistive devices formed on the membrane.

摘要翻译： 通过例如在较大的二氧化硅柱（22）上沉积硅烷气体的多晶硅层（32），在半导体衬底（20）的单个表面上形成适合用作压力传感器的密封空腔结构，以及 较小的二氧化硅脊（27）从柱向外导出。 掩模和蚀刻多晶硅层以暴露脊的外边缘，然后将整个结构浸入蚀刻剂中，该蚀刻剂蚀刻形成脊和柱而不是衬底（20）或沉积的多晶硅层（32）的二氧化硅 ）。 空腔结构导致通道（35）被置于脊之外并且与大气连通延伸到离开柱的空腔（36）。 空腔（36）可以通过第二次多晶硅或氮化硅气相沉积从外部空气中密封，多晶硅或氮化硅填充并密封通道（35），或通过将衬底及其结构暴露于氧化环境 导致通道中二氧化硅的生长足以密封通道。 可以例如通过形成在膜上的压阻器件来检测跨越由于压力变化而发生的空腔的膜的偏转。

公开(公告)号：US4203128A

公开(公告)日：1980-05-13

申请号：US944637

申请日：1978-09-21

申请人： Henry Guckel ,  Steven T. Larsen

发明人： Henry Guckel ,  Steven T. Larsen

IPC分类号： F15C5/00 ,  F16K99/00 ,  G01L7/08 ,  G01L9/00 ,  H01G5/16 ,  H01L29/84 ,  H03H9/17 ,  H01L29/04 ,  H01L27/12 ,  H01L29/06

CPC分类号： H01L29/84 ,  F15C5/00 ,  F16K99/0001 ,  F16K99/0005 ,  F16K99/0015 ,  F16K99/0051 ,  G01L7/086 ,  G01L9/0073 ,  H01G5/16 ,  H03H9/171 ,  F16K2099/0074 ,  Y10T137/2213

摘要： The invention relates to thin silicon membranes formed in layers of silicon such as are normally utilized as substrates in the manufacture of integrated electronic circuits. The thin membranes constructed in accordance with the invention are capable of deformation by electrostatic forces and are applicable to a wide range of uses including the manufacture of solid state pressure sensors, resonant, and antenna structures, as well as electro-optical display elements. A processing technique is disclosed which is particularly adapted to forming membranes in silicon substrates in a manner which is compatible with the construction thereon of other integrated circuit components.

摘要翻译： 本发明涉及在硅层中形成的薄硅膜，其通常用作制造集成电子电路中的基板。 根据本发明构造的薄膜能够通过静电力变形，并且可应用于广泛的用途，包括制造固态压力传感器，共振和天线结构以及电光显示元件。 公开了一种处理技术，其特别适用于以与其它集成电路部件上的结构兼容的方式在硅衬底中形成膜。

公开(公告)号：US5327033A

公开(公告)日：1994-07-05

申请号：US998947

申请日：1992-12-30

申请人： Henry Guckel ,  Todd R. Christenson ,  Kenneth J. Skrobis

发明人： Henry Guckel ,  Todd R. Christenson ,  Kenneth J. Skrobis

IPC分类号： H02K29/00 ,  B81B5/00 ,  B81C1/00 ,  G03F7/00 ,  H02K15/02 ,  H02K15/08 ,  H02K19/10 ,  H02K21/14 ,  H02K49/06 ,  H02N11/00 ,  H02K15/00 ,  H02K57/00

CPC分类号： H02K49/06 ,  G03F7/00 ,  H02K15/02 ,  H02K15/08 ,  H02K19/103 ,  H02K21/14 ,  H02K99/00 ,  H02K2201/12 ,  Y10S310/06 ,  Y10T29/49009 ,  Y10T29/49012

摘要： Micromechanical devices are formed on a substrate using a sacrificial layer deep X-ray lithography process to produce a rotating microrotor which is driven magnetically. The rotor typically has a diameter of a few hundred microns or less and is formed as a free structure which is assembled onto a hub formed on a substrate. Stator pole pieces are formed on the substrate of a ferromagnetic material surrounding the rotor, and are also preferably formed by a deep X-ray lithography process followed by electroplating of a ferromagnetic material such as nickel. The stator pole pieces are supplied with magnetic flux, such as from a current flowing through a conductor surrounding the magnetic pole pieces which is integrated with the pole pieces on the substrate. Separate electromagnets can also be utilized to provide the magnetic flux to the pole pieces to provide a rotating magnetic field in the region of the rotor to drive the rotor.

摘要翻译： 使用牺牲层深X射线光刻工艺在衬底上形成微机械器件，以产生由磁性驱动的旋转微电机。 转子通常具有几百微米或更小的直径，并且形成为组装到形成在基底上的轮毂上的自由结构。 定子极片形成在围绕转子的铁磁材料的衬底上，并且还优选地通过深X射线光刻工艺形成，随后电镀诸如镍的铁磁材料。 定子极片被提供有磁通量，例如来自流过包围磁极片的导体的电流，磁极片与基片上的极片集成。 也可以使用单独的电磁铁来向极片提供磁通量，以在转子的区域中提供旋转磁场来驱动转子。