Infrared detector having active regions and isolating regions formed of
CdHgTe
    1.
    发明授权
    Infrared detector having active regions and isolating regions formed of CdHgTe 失效
    具有活性区域和由CdHgTe形成的隔离区域的红外探测器

    公开(公告)号:US5602414A

    公开(公告)日:1997-02-11

    申请号:US260791

    申请日:1994-06-16

    CPC分类号: H01L27/14649

    摘要: In a method for fabricating an infrared detector, initially, a CdHgTe layer of a first conductivity type is produced on a front surface of a semiconductor substrate, a plurality of spaced apart CdHgTe regions of a second conductivity type, opposite the first conductivity type, are produced at the surface of the first conductivity type CdHgTe layer, and part of the surface of the first conductivity type CdHgTe layer between the second conductivity type CdHgTe regions is selectively irradiated with a charged particle beam to evaporate Hg atoms from that part, whereby a CdHgTe separation region of the first conductivity type and having a Cd composition larger than that of the first conductivity type CdHgTe layer is produced penetrating through the first conductivity type CdHgTe layer and surrounding each of the second conductivity type CdHgTe regions. Therefore, a highly-integrated high-resolution infrared detector with no crosstalk between pixels is achieved.

    摘要翻译: 在红外线检测器的制造方法中,首先,在半导体基板的正面形成有与第一导电型相反的多个第二导电类型的间隔开的CdHgTe区域的第一导电型CdHgTe层, 在第一导电型CdHgTe层的表面产生,并且第二导电型CdHgTe区域之间的第一导电类型CdHgTe层的表面的一部分被带电粒子束选择性地照射,以从该部分蒸发Hg原子,由此CdHgTe 产生具有比第一导电型CdHgTe层的Cd组分大的第一导电类型的分离区,穿过第一导电型CdHgTe层并围绕每个第二导电型CdHgTe区。 因此,实现了在像素之间没有串扰的高度集成的高分辨率红外检测器。