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    Photosensitive polymer including fluorine, resist composition containing the same and patterning method using the resist composition
    3.
    发明授权
    Photosensitive polymer including fluorine, resist composition containing the same and patterning method using the resist composition 有权
    包含氟的光敏聚合物，含有它们的抗蚀剂组合物和使用抗蚀剂组合物的图案化方法

    公开(公告)号：US06933096B2

    公开(公告)日：2005-08-23

    申请号：US10719651

    申请日：2003-11-21

    申请人： Kwang-Sub Yoon ,  Ki-Yong Song

    发明人： Kwang-Sub Yoon ,  Ki-Yong Song

    IPC分类号： G03F7/004 ,  G03F7/039 ,  C08F214/18

    CPC分类号： G03F7/0392 ,  G03F7/0046 ,  Y10S430/108

    摘要： A photosensitive polymer including fluorine, a resist composition containing the same and a patterning method for IC fabrication using the resist composition are provided. The photosensitive polymer having at least one selected from the group consisting of fluorine-substituted or unsubstituted alkyl ester, tetrahydropyranyl ester, tetrahydrofuranyl ester, nitrile, amide, carbonyl and hexafluoro alkyl having a hydrophilic group, and a trifluorovinyl derivative monomer as a repeating unit and having a weight average molecular weight of about 3,000 to about 100,000. The photosensitive polymer exhibits high transmittance for a light source of F2 (157 nm), high dry etching resistance, and has characteristics suitable to realize an unitrafine pattern size.

    摘要翻译： 提供了包含氟的光敏聚合物，含有它的抗蚀剂组合物和使用该抗蚀剂组合物的IC制造的图案化方法。 具有选自氟取代或未取代的烷基酯，四氢吡喃基酯，四氢呋喃基酯，腈，酰胺，羰基和具有亲水基团的六氟烷基中的至少一种的光敏聚合物和作为重复单元的三氟乙烯基衍生物单体， 重均分子量为约3,000至约100,000。 感光性聚合物对于F 2（157nm）的光源具有高透射率，具有高的耐干蚀刻性，并且具有适于实现单位图案尺寸的特性。

    An extended head pile with inside and outside reinforcement
    6.
    发明申请
    An extended head pile with inside and outside reinforcement 审中-公开
    一个扩展的头部桩与内部和外部加固

    公开(公告)号：US20090263197A1

    公开(公告)日：2009-10-22

    申请号：US11909206

    申请日：2006-05-22

    申请人： Ki-Yong Song ,  Yoon-Yong Song

    发明人： Ki-Yong Song ,  Yoon-Yong Song

    IPC分类号： E02D5/22

    CPC分类号： E02D5/48

    摘要： Disclosed herein is a head-extended pile with inside and outside reinforcements for supporting load of a structure. The head-extended pile includes a reinforcement part with the same length or area extending right and left with respect to a diameter of the pile provided at the front end of the pile so that a supporting force of the pile is increased, and a durability of the pile is improved by hammering after drilled piling. When the head-extended pile is applied according to the present invention, it improves the stability of proof stress of the pile and construction workability, and better economic efficiency is expected.

    摘要翻译： 本文公开了一种头部伸展的桩，其具有用于支撑结构的载荷的内部和外部加强件。 头部延伸桩包括具有相对于设置在桩的前端的桩的直径的左右相同的长度或面积的加强部分，使得桩的支撑力增加，并且耐久性 在打桩后锤击改善了桩。 当根据本发明应用头部延伸桩时，其提高了桩的抗压强度的稳定性和施工作业性，并且预期具有更好的经济效益。