Waveguide type photodetector and a method of fabricating the same
    3.
    发明授权
    Waveguide type photodetector and a method of fabricating the same 失效
    波导型光电检测器及其制造方法

    公开(公告)号:US5285514A

    公开(公告)日:1994-02-08

    申请号:US887806

    申请日:1992-05-26

    摘要: In a waveguide type photodetector for receiving and detecting a light guided thereinto, a groove is formed in a semiconductor substrate, a waveguide layer is formed on the semiconductor substrate, and a light absorbing layer for absorbing a light propagated through a waveguide in the waveguide layer is formed on the waveguide layer. The waveguide is formed as a three-dimensional waveguide formed in the waveguide layer due to the presense of the groove. The three-dimensional waveguide is maintained also under the light absorbing layer since the refractive index of a portion layered on the groove formed in the substrate is made large than that of portions other than this portion layered above the groove.

    摘要翻译: 在用于接收和检测被引导到其中的光的波导型光检测器中,在半导体衬底中形成沟槽,在半导体衬底上形成波导层,以及用于吸收通过波导层中的波导传播的光的光吸收层 形成在波导层上。 波导由于凹槽的出现而形成在波导层中形成的三维波导。 由于形成在基板上的凹槽上的部分的折射率比层叠在凹槽之上的部分以外的部分的折射率大,所以三维波导也保持在光吸收层的下方。

    Etching device for semiconductor wafers
    4.
    发明授权
    Etching device for semiconductor wafers 失效
    半导体晶圆蚀刻装置

    公开(公告)号:US4828644A

    公开(公告)日:1989-05-09

    申请号:US61197

    申请日:1987-06-15

    IPC分类号: H01L21/3063 C25F3/02

    CPC分类号: C25F3/02

    摘要: Work pieces are immersed in an etchant in a spaced contact free relationship with the electrodes of the system. The two electrodes are separated by a filter which prevents charge carrying particles dispersed in the etchant surrounding the electrode closest to the work pieces and which assume the same charge, from migrating to and contacting the more remote one. The etchant containing the particles is physically agitated whereby the distribution of the particles which transfer electrical energy to the work pieces and induce electrochemical etching thereof is unified.

    摘要翻译: 工件以与系统的电极间隔开的无接触的关系浸入蚀刻剂中。 两个电极被过滤器隔开,该过滤器防止分散在最靠近工件的电极周围的腐蚀剂中的电荷携带颗粒,并且承受相同的电荷,从而迁移到更接近工件的接触。 含有颗粒的蚀刻剂被物理搅动,由此将电能传递到工件并诱导其电化学蚀刻的颗粒的分布是统一的。

    Signal output and image forming apparatus with method of judging sheet type by impact detection
    7.
    发明授权
    Signal output and image forming apparatus with method of judging sheet type by impact detection 失效
    具有通过冲击检测判断纸张类型的方法的信号输出和图像形成装置

    公开(公告)号:US07583413B2

    公开(公告)日:2009-09-01

    申请号:US12049778

    申请日:2008-03-17

    IPC分类号: G06K15/02 H04N1/23 G01N3/30

    摘要: A signal output apparatus comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact. An apparatus for determining the type of sheet comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact, wherein the type of the sheet is determined based on the signal from the detection unit. An image forming apparatus comprises an impact applying unit applying an impact to a sheet from the outside thereof, and a detection unit outputting a signal by the impact. A method for determining the type of sheet comprises the steps of applying an impact to a sheet from the outside thereof, outputting a signal from a detection unit by the applying step, and determining the type of sheet based on the signal. An apparatus carries out the method for determining the type of sheet. An information output apparatus used in an image forming apparatus comprises an impact applying unit applying an impact to a target from the outside thereof, and a detection unit outputting information by the impact.

    摘要翻译: 信号输出装置包括从外部向片材施加冲击的冲击施加单元,以及通过冲击输出信号的检测单元。 用于确定片材类型的装置包括冲击施加单元,其从外部向片材施加冲击;以及检测单元,通过冲击输出信号,其中根据来自检测器的信号确定片材的类型 单元。 图像形成装置包括从外部向片材施加冲击的冲击施加单元和由冲击输出信号的检测单元。 用于确定片材类型的方法包括以下步骤:从外部对片材施加冲击,通过施加步骤从检测单元输出信号,以及基于该信号确定片材的类型。 一种装置执行用于确定片材类型的方法。 在图像形成装置中使用的信息输出装置包括从外部对目标施加冲击的冲击施加单元和通过冲击输出信息的检测单元。