公开(公告)号：US07763115B2

公开(公告)日：2010-07-27

申请号：US11133437

申请日：2005-05-20

申请人： Masanobu Hatanaka ,  Michio Ishikawa ,  Se-Ju Lim ,  Fumio Nakamura

发明人： Masanobu Hatanaka ,  Michio Ishikawa ,  Se-Ju Lim ,  Fumio Nakamura

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC分类号： C23C16/38 ,  C23C16/0236 ,  C23C16/34 ,  C23C16/44 ,  C23C16/4405 ,  C23C16/45525 ,  C23C16/45536 ,  C23C16/45551 ,  C23C16/54 ,  Y10S414/139

摘要： A vacuum film-forming apparatus comprising substrate stages; vacuum chamber-forming containers opposed to the stages; a means for moving the substrate between the stages; and gas-introduction means connected to every containers, wherein one of the stage and the container is ascended or descended towards the other to bring the upper face of the stage and the opening of the container into contact with one another so that vacuum chambers can be formed and that a raw gas and/or a reactant gas can be introduced into each space of the chamber through each gas-introduction means to carry out either the adsorption or reaction step for allowing the raw gas to react with the reactant gas. The apparatus permits the independent establishment of process conditions for the adsorption and reaction processes and the better acceleration of the reaction between raw and reactant gases to give a film having excellent quality and the apparatus can be manufactured at a low cost.

公开(公告)号：US20080202423A1

公开(公告)日：2008-08-28

申请号：US12111698

申请日：2008-04-29

申请人： Masanobu HATANAKA ,  Michio Ishikawa ,  Se-Ju Lim ,  Fumio Nakamura

发明人： Masanobu HATANAKA ,  Michio Ishikawa ,  Se-Ju Lim ,  Fumio Nakamura

IPC分类号： C23C16/50

CPC分类号： C23C16/38 ,  C23C16/0236 ,  C23C16/34 ,  C23C16/44 ,  C23C16/4405 ,  C23C16/45525 ,  C23C16/45536 ,  C23C16/45551 ,  C23C16/54 ,  Y10S414/139

摘要： A vacuum film-forming apparatus comprising substrate stages; vacuum chamber-forming containers opposed to the stages; a means for moving the substrate between the stages; and gas-introduction means connected to every containers, wherein one of the stage and the container is ascended or descended towards the other to bring the upper face of the stage and the opening of the container into contact with one another so that vacuum chambers can be formed and that a raw gas and/or a reactant gas can be introduced into each space of the chamber through each gas-introduction means to carry out either the adsorption or reaction step for allowing the raw gas to react with the reactant gas. The apparatus permits the independent establishment of process conditions for the adsorption and reaction processes and the better acceleration of the reaction between raw and reactant gases to give a film having excellent quality and the apparatus can be manufactured at a low cost.

摘要翻译： 一种包括基底台的真空成膜装置; 与阶段相对的真空室形成容器; 用于在所述级之间移动所述衬底的装置; 以及连接到每个容器的气体导入装置，其中所述平台和容器中的一个朝着另一个上升或下降以使所述台的上表面和所述容器的开口彼此接触，使得真空室可以 并且可以通过每个气体引入装置将原料气体和/或反应气体引入室的每个空间中，以进行用于使原料气体与反应气体反应的吸附或反应步骤。 该装置允许独立地建立用于吸附和反应过程的工艺条件，并且更好地加速原料气体和反应气体之间的反应，得到具有优良品质的膜，并且可以以低成本制造装置。

公开(公告)号：US20050268852A1

公开(公告)日：2005-12-08

申请号：US11133437

申请日：2005-05-20

申请人： Masanobu Hatanaka ,  Michio Ishikawa ,  Se-Ju Lim ,  Fumio Nakamura

发明人： Masanobu Hatanaka ,  Michio Ishikawa ,  Se-Ju Lim ,  Fumio Nakamura

IPC分类号： C23C14/00 ,  C23C16/00 ,  C23C16/02 ,  C23C16/34 ,  C23C16/38 ,  C23C16/44 ,  C23C16/455 ,  C23C16/54

CPC分类号： C23C16/38 ,  C23C16/0236 ,  C23C16/34 ,  C23C16/44 ,  C23C16/4405 ,  C23C16/45525 ,  C23C16/45536 ,  C23C16/45551 ,  C23C16/54 ,  Y10S414/139

摘要： A vacuum film-forming apparatus comprising substrate stages; vacuum chamber-forming containers opposed to the stages; a means for moving the substrate between the stages; and gas-introduction means connected to every containers, wherein one of the stage and the container is ascended or descended towards the other to bring the upper face of the stage and the opening of the container into contact with one another so that vacuum chambers can be formed and that a raw gas and/or a reactant gas can be introduced into each space of the chamber through each gas-introduction means to carry out either the adsorption or reaction step for allowing the raw gas to react with the reactant gas. The apparatus permits the independent establishment of process conditions for the adsorption and reaction processes and the better acceleration of the reaction between raw and reactant gases to give a film having excellent quality and the apparatus can be manufactured at a low cost.

摘要翻译： 一种包括基底台的真空成膜装置; 与阶段相对的真空室形成容器; 用于在所述级之间移动所述衬底的装置; 以及连接到每个容器的气体导入装置，其中所述平台和容器中的一个朝向另一个上升或下降以使所述台的上表面和所述容器的开口彼此接触，使得真空室可以 并且可以通过每个气体引入装置将原料气体和/或反应气体引入室的每个空间中，以进行用于使原料气体与反应气体反应的吸附或反应步骤。 该装置允许独立地建立用于吸附和反应过程的工艺条件，并且更好地加速原料气体和反应气体之间的反应，得到具有优良品质的膜，并且可以以低成本制造装置。

公开(公告)号：US07828900B2

公开(公告)日：2010-11-09

申请号：US12111698

申请日：2008-04-29

申请人： Masanobu Hatanaka ,  Michio Ishikawa ,  Se-Ju Lim ,  Fumio Nakamura

发明人： Masanobu Hatanaka ,  Michio Ishikawa ,  Se-Ju Lim ,  Fumio Nakamura

IPC分类号： C23C16/00 ,  C23C14/00 ,  C23F1/00 ,  H01L21/306

CPC分类号： C23C16/38 ,  C23C16/0236 ,  C23C16/34 ,  C23C16/44 ,  C23C16/4405 ,  C23C16/45525 ,  C23C16/45536 ,  C23C16/45551 ,  C23C16/54 ,  Y10S414/139

摘要： A vacuum film-forming apparatus comprising substrate stages; vacuum chamber-forming containers opposed to the stages; a means for moving the substrate between the stages; and gas-introduction means connected to every containers, wherein one of the stage and the container is ascended or descended towards the other to bring the upper face of the stage and the opening of the container into contact with one another so that vacuum chambers can be formed and that a raw gas and/or a reactant gas can be introduced into each space of the chamber through each gas-introduction means to carry out either the adsorption or reaction step for allowing the raw gas to react with the reactant gas. The apparatus permits the independent establishment of process conditions for the adsorption and reaction processes and the better acceleration of the reaction between raw and reactant gases to give a film having excellent quality and the apparatus can be manufactured at a low cost.

摘要翻译： 一种包括基底台的真空成膜装置; 与阶段相对的真空室形成容器; 用于在所述级之间移动所述衬底的装置; 以及连接到每个容器的气体导入装置，其中所述平台和容器中的一个朝着另一个上升或下降以使所述台的上表面和所述容器的开口彼此接触，使得真空室可以 并且可以通过每个气体引入装置将原料气体和/或反应气体引入室的每个空间中，以进行用于使原料气体与反应气体反应的吸附或反应步骤。 该装置允许独立地建立用于吸附和反应过程的工艺条件，并且更好地加速原料气体和反应气体之间的反应，得到具有优良品质的膜，并且可以以低成本制造装置。

公开(公告)号：US20090238968A1

公开(公告)日：2009-09-24

申请号：US11886600

申请日：2006-03-23

申请人： Masanobu Hatanaka ,  Yoshikazu Takahashi ,  Michio Ishikawa ,  Fumio Nakamura

发明人： Masanobu Hatanaka ,  Yoshikazu Takahashi ,  Michio Ishikawa ,  Fumio Nakamura

IPC分类号： B05D7/22 ,  C23C16/44 ,  C23C14/12

CPC分类号： C23C16/4402 ,  B05D1/60 ,  B05D7/22

摘要： The object of this invention is to provide a method for producing a component for vacuum apparatus and a resin coating forming apparatus capable of easily forming a resin coating on an internal flow path complex in shape.The resin coating forming apparatus (21) comprises a monomer vapor supplying unit (23), a vacuum pumping line (24) for transporting monomer vapor, a connection portion (24c) connectable with the internal flow path of a component (22A) provided on part of the vacuum pumping line (24), and a temperature adjusting unit (31) for depositing the monomer vapor onto the internal flow path of the component (22A) connected with the connection portion (24c) to form a resin coating. The above arrangement permits the formation of a uniform, high-coverage resin coating on the internal flow path of the component (22A) by merely exposing the internal flow path to monomer vapor.

摘要翻译： 本发明的目的是提供一种用于制造真空装置的部件的方法和能够容易地在内部流路复合体上形成树脂涂层的树脂涂层形成装置。 树脂涂层形成装置（21）包括单体蒸气供给单元（23），用于输送单体蒸气的真空泵送管线（24），可连接到设置在其上的部件（22A）的内部流路的连接部分（24c） 真空泵送管线（24）的一部分和用于将单体蒸气沉积到与连接部分（24c）连接的部件（22A）的内部流动路径上以形成树脂涂层的温度调节单元（31）。 上述布置允许通过仅将内部流动路径暴露于单体蒸气，在组件（22A）的内部流动路径上形成均匀的高覆盖率树脂涂层。

公开(公告)号：US08252113B2

公开(公告)日：2012-08-28

申请号：US11886600

申请日：2006-03-23

申请人： Masanobu Hatanaka ,  Yoshikazu Takahashi ,  Michio Ishikawa ,  Fumio Nakamura

发明人： Masanobu Hatanaka ,  Yoshikazu Takahashi ,  Michio Ishikawa ,  Fumio Nakamura

IPC分类号： C23C16/00 ,  C23C16/448 ,  C23C16/455 ,  C23C16/18 ,  C23C16/06

CPC分类号： C23C16/4402 ,  B05D1/60 ,  B05D7/22

摘要： The object of this invention is to provide a method for producing a component for vacuum apparatus and a resin coating forming apparatus capable of easily forming a resin coating on an internal flow path complex in shape.The resin coating forming apparatus (21) comprises a monomer vapor supplying unit (23), a vacuum pumping line (24) for transporting monomer vapor, a connection portion (24c) connectable with the internal flow path of a component (22A) provided on part of the vacuum pumping line (24), and a temperature adjusting unit (31) for depositing the monomer vapor onto the internal flow path of the component (22A) connected with the connection portion (24c) to form a resin coating. The above arrangement permits the formation of a uniform, high-coverage resin coating on the internal flow path of the component (22A) by merely exposing the internal flow path to monomer vapor.

摘要翻译： 本发明的目的是提供一种用于制造真空装置的部件的方法和能够容易地在内部流路复合体上形成树脂涂层的树脂涂层形成装置。 树脂涂层形成装置（21）包括单体蒸气供给单元（23），用于输送单体蒸气的真空泵送管线（24），可连接到设置在其上的部件（22A）的内部流路的连接部分（24c） 真空泵送管线（24）的一部分和用于将单体蒸气沉积到与连接部分（24c）连接的部件（22A）的内部流动路径上以形成树脂涂层的温度调节单元（31）。 上述布置允许通过仅将内部流动路径暴露于单体蒸气，在组件（22A）的内部流动路径上形成均匀的高覆盖率树脂涂层。

公开(公告)号：US20120031650A1

公开(公告)日：2012-02-09

申请号：US13273612

申请日：2011-10-14

申请人： Masanobu Hatanaka ,  Kanako Tsumagari ,  Michio Ishikawa

发明人： Masanobu Hatanaka ,  Kanako Tsumagari ,  Michio Ishikawa

IPC分类号： H05K1/00 ,  H05K3/30 ,  H01L21/768

CPC分类号： H01L21/28556 ,  C23C16/30 ,  C23C16/45542 ,  H01L21/28562 ,  H01L21/76829 ,  H01L21/76831 ,  H01L21/76843 ,  H01L21/76849 ,  Y10T29/49146 ,  Y10T29/49162

摘要： A method for manufacturing a semiconductor device that improves the reliability of a metal cap layer and productivity. The method includes an insulation layer step of superimposing an insulation layer(11) on a semiconductor substrate (2) including an element region (2b), a recess step of forming a recess (12) in the insulation layer (11), a metal layer step of embedding a metal layer (13) in the recess (12), a planarization step of planarizing a surface of the insulation layer (11) and a surface of the metal layer (13) to be substantially flush with each other, and a metal cap layer step of forming a metal cap layer (16) containing at least zirconium element and nitrogen element on the surface of the insulation layer (11) and the surface of the metal layer (13) after the planarization step.

摘要翻译： 一种用于制造提高金属盖层的可靠性和生产率的半导体器件的方法。 该方法包括在包括元件区域（2b）的半导体衬底（2）上叠加绝缘层（11）的绝缘层步骤，在绝缘层（11）中形成凹陷（12）的凹陷步骤，金属 在所述凹部（12）中嵌入金属层（13）的层叠工序，使所述绝缘层（11）的表面和所述金属层（13）的表面平坦化的平坦化工序， 在平坦化步骤之后，在所述绝缘层（11）的表面和所述金属层（13）的表面上形成至少含有锆元素和氮元素的金属覆盖层（16）的金属覆盖层工序。

公开(公告)号：US20100180819A1

公开(公告)日：2010-07-22

申请号：US12450265

申请日：2008-04-15

申请人： Masanobu Hatanaka ,  Osamu Irino ,  Michio Ishikawa

发明人： Masanobu Hatanaka ,  Osamu Irino ,  Michio Ishikawa

IPC分类号： C23C16/50 ,  C23C16/00 ,  C23C16/448 ,  C23C16/455

CPC分类号： C23C16/45565 ,  C23C16/30 ,  C23C16/38 ,  C23C16/452 ,  C23C16/45574 ,  H01J37/3244

摘要： In a film-forming apparatus in which two or more gases are used, a uniform film is formed. In a film-forming apparatus provided with a film-forming chamber and a shower head, the shower head is provided with a material gas diffusion chamber and a reactive gas diffusion chamber. A gas passage which communicates the material gas diffusion chamber and a material gas introduction pipe is constituted into multi-stages of one stage or more. Each stage has a gas passage represented by 2n-1 (where n is the number of stages). The first-stage gas passage has connected to the center thereof the material gas introduction pipe. Each of second-stage and subsequent-stage gas passages has connected to the center thereof connection holes which are provided on both ends of the previous-stage gas passages so as to be in communication with the previous-stage gas passages. Each of the final-stage gas passages is connected to the material gas diffusion chamber by connection holes formed on both ends of each of the gas passages.

摘要翻译： 在使用两种或更多种气体的成膜装置中，形成均匀的膜。 在设置有成膜室和喷淋头的成膜装置中，喷头设置有原料气体扩散室和反应性气体扩散室。 将原料气体扩散室和原料气体导入管连通的气体通路构成为一级以上的多级。 每级具有由2n-1表示的气体通道（其中n是级数）。 第一级气体通路与其中心连接有原料气体导入管。 第二级和后级气体通道中的每一个连接到设置在前级气体通道两端的中心连接孔，以便与前一级气体通道连通。 每个末级气体通过形成在每个气体通道两端的连接孔连接到原料气体扩散室。

公开(公告)号：US20100068891A1

公开(公告)日：2010-03-18

申请号：US12447533

申请日：2007-11-08

申请人： Masanobu Hatanaka ,  Michio Ishikawa ,  Kanako Tsumagari

发明人： Masanobu Hatanaka ,  Michio Ishikawa ,  Kanako Tsumagari

IPC分类号： H01L21/46

CPC分类号： C23C16/38 ,  C23C16/30 ,  C23C16/4554 ,  C23C16/45555 ,  C23C16/45565 ,  H01L21/28562 ,  H01L21/76843

摘要： A barrier film made of a ZrB2 film is formed by use of a coating apparatus provided with plasma generation means including a coaxial resonant cavity and a microwave supply circuit for exciting the coaxial resonant cavity, the coaxial resonant cavity including spaced apart conductors provided around the periphery of a nonmetallic pipe for reactive gas introduction, the coaxial resonant cavity having an inner height equal to an integer multiple of one-half of the exciting wavelength, the plasma generation means being constructed such that a gas injected from one end of the nonmetallic pipe is excited into a plasma state by a microwave when the gas is in a region of the nonmetallic pipe which is not covered with the conductors and such that the gas in the plasma state is discharged from the other end of the nonmetallic pipe.

摘要翻译： 由ZrB2膜制成的阻挡膜通过使用具有等离子体产生装置的涂覆装置形成，所述等离子体产生装置包括同轴谐振腔和用于激发同轴谐振腔的微波供应电路，所述同轴谐振腔包括设置在周边周围的间隔开的导体 的用于反应气体引入的非金属管，所述同轴谐振腔的内部高度等于所述激发波长的二分之一的整数倍，所述等离子体产生装置被构造成使得从所述非金属管的一端注入的气体为 当气体处于不被导体覆盖的非金属管的区域中并且等离子体状态的气体从非金属管的另一端排放时，通过微波激发成等离子体状态。

公开(公告)号：US08419854B2

公开(公告)日：2013-04-16

申请号：US12450265

申请日：2008-04-15

申请人： Masanobu Hatanaka ,  Osamu Irino ,  Michio Ishikawa

发明人： Masanobu Hatanaka ,  Osamu Irino ,  Michio Ishikawa

IPC分类号： C23C16/455 ,  C23C16/511 ,  C23F1/00 ,  H01L21/306 ,  C23C16/06 ,  C23C16/22

CPC分类号： C23C16/45565 ,  C23C16/30 ,  C23C16/38 ,  C23C16/452 ,  C23C16/45574 ,  H01J37/3244

摘要： In a film-forming apparatus in which two or more gases are used, a uniform film is formed. In a film-forming apparatus provided with a film-forming chamber and a shower head, the shower head is provided with a material gas diffusion chamber and a reactive gas diffusion chamber. A gas passage which communicates the material gas diffusion chamber and a material gas introduction pipe is constituted into multi-stages of one stage or more. Each stage has a gas passage represented by 2n-1 (where n is the number of stages). The first-stage gas passage has connected to the center thereof the material gas introduction pipe. Each of second-stage and subsequent-stage gas passages has connected to the center thereof connection holes which are provided on both ends of the previous-stage gas passages so as to be in communication with the previous-stage gas passages. Each of the final-stage gas passages is connected to the material gas diffusion chamber by connection holes formed on both ends of each of the gas passages.

摘要翻译： 在使用两种或更多种气体的成膜装置中，形成均匀的膜。 在设置有成膜室和喷淋头的成膜装置中，喷头设置有原料气体扩散室和反应性气体扩散室。 将原料气体扩散室和原料气体导入管连通的气体通路构成为一级以上的多级。 每级具有由2n-1表示的气体通道（其中n是级数）。 第一级气体通路与其中心连接有原料气体导入管。 第二级和后级气体通道中的每一个连接到设置在前级气体通道两端的中心连接孔，以便与前一级气体通道连通。 每个末级气体通过形成在每个气体通道两端的连接孔连接到原料气体扩散室。