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    METHOD FOR DEPOSITING TUNGSTEN-CONTAINING LAYERS BY VAPOR DEPOSITION TECHNIQUES
    1.
    发明申请
    METHOD FOR DEPOSITING TUNGSTEN-CONTAINING LAYERS BY VAPOR DEPOSITION TECHNIQUES 有权
    通过蒸发沉积技术沉积含钨层的方法

    公开(公告)号：US20060264031A1

    公开(公告)日：2006-11-23

    申请号：US11461909

    申请日：2006-08-02

    申请人： Ming Xi ,  Ashok Sinha ,  Moris Kori ,  Alfred Mak ,  Xinliang Lu ,  Ken Lai ,  Karl Littau

    发明人： Ming Xi ,  Ashok Sinha ,  Moris Kori ,  Alfred Mak ,  Xinliang Lu ,  Ken Lai ,  Karl Littau

    IPC分类号： H01L21/4763

    CPC分类号： C23C16/0272 ,  C23C16/34 ,  C23C16/45525 ,  C23C16/45527 ,  C23C16/45561 ,  C30B25/02 ,  C30B25/14 ,  C30B29/38 ,  H01L21/28562 ,  H01L21/76843 ,  H01L21/76876

    摘要： In one embodiment, a method for forming a tungsten-containing material on a substrate is provided which includes forming a tungsten nucleation layer by sequentially exposing a substrate to a boron-containing gas and a tungsten-containing gas within a processing chamber during an atomic layer deposition process, and forming a tungsten bulk layer on the tungsten nucleation layer by exposing the substrate to a processing gas that contains the tungsten-containing gas and a reactive precursor gas within another processing chamber during a chemical vapor deposition process. In one example, the tungsten nucleation layer is deposited on a dielectric material, such as silicon oxide. In another example, the tungsten nucleation layer is deposited on a barrier material, such as titanium or titanium nitride. Other examples provide that the tungsten nucleation layer and the tungsten bulk layer are deposited in the same processing chamber.

    摘要翻译： 在一个实施例中，提供了一种用于在基板上形成含钨材料的方法，其包括通过在原子层中将衬底顺序地暴露于处理室内的含硼气体和含钨气体来形成钨成核层 通过在化学气相沉积工艺期间将衬底暴露于另一处理室内含有含钨气体和反应性前体气体的处理气体，在钨成核层上形成钨体层。 在一个实例中，钨成核层沉积在介电材料如氧化硅上。 在另一个实例中，钨成核层沉积在诸如钛或氮化钛的阻挡材料上。 其他实例提供了钨成核层和钨本体层沉积在相同的处理室中。

    Methods and apparatus for minimizing excess aluminum accumulation in CVD chambers
    5.
    发明授权
    Methods and apparatus for minimizing excess aluminum accumulation in CVD chambers 失效
    用于最小化CVD室中过多的铝积聚的方法和装置

    公开(公告)号：US5858464A

    公开(公告)日：1999-01-12

    申请号：US791131

    申请日：1997-02-13

    申请人： Karl Littau ,  Dashun S. Zhou ,  Alfred Mak ,  Ling Chen

    发明人： Karl Littau ,  Dashun S. Zhou ,  Alfred Mak ,  Ling Chen

    IPC分类号： C23C16/20 ,  C23C16/44 ,  H01L21/28 ,  H01L21/285 ,  H01L21/3205 ,  H01L23/52

    CPC分类号： H01L21/28556 ,  C23C16/4401 ,  C23C16/4404

    摘要： A method and apparatus for minimizing excess aluminum deposition that can build up inside a substrate processing chamber during an aluminum CVD substrate processing operation. The method of the present invention periodically introduces nitrogen into the processing chamber after aluminum CVD processing of at least a single wafer in order to minimize unwanted aluminum accumulation in various parts of the chamber. According to one embodiment, the present invention provides a method of minimizing excess metal deposition inside a substrate processing chamber after a substrate processing operation. The method includes the steps of introducing a nitrogen-containing passivating gas into a chamber after the substrate processing operation, and maintaining at least a portion of the chamber at a second temperature during the introducing step thereby reducing excess metal build up within the chamber. In preferred embodiments, the method is performed after removal of the substrate from the processing chamber. In other preferred embodiments, the second temperature ranges from about 200.degree.-300.degree. C.

    摘要翻译： 一种用于最小化在铝CVD衬底处理操作期间可以在衬底处理室内形成的多余铝沉积的方法和装置。 本发明的方法在对至少一个晶片进行铝CVD处理之后，将氮气周期性地引入处理室中，以便最小化腔室各部分中不希望的铝积聚。 根据一个实施例，本发明提供一种在衬底处理操作之后使衬底处理室内的多余金属沉积最小化的方法。 该方法包括以下步骤：在基板处理操作之后将含氮钝化气体引入室中，并且在引入步骤期间将室的至少一部分保持在第二温度，从而减少室内过量的金属积聚。 在优选的实施方案中，在从处理室中除去基材之后进行该方法。 在其它优选实施方案中，第二温度范围为约200-300℃

    Electrodialytic separation of CO2 gas from seawater
    6.
    发明授权
    Electrodialytic separation of CO2 gas from seawater 有权
    二氧化碳气体从海水中电渗析分离

    公开(公告)号：US09586181B2

    公开(公告)日：2017-03-07

    申请号：US13177421

    申请日：2011-07-06

    申请人： Matthew D. Eisaman ,  Karl Littau

    发明人： Matthew D. Eisaman ,  Karl Littau

    IPC分类号： B01D61/44 ,  C02F1/469 ,  C02F103/08

    CPC分类号： B01D61/445 ,  B01D2311/18 ,  B01D2311/2626 ,  B01D2311/2653 ,  C02F1/4693 ,  C02F2103/08 ,  C02F2201/4618 ,  Y02A20/134 ,  Y02C10/04 ,  Y02C10/06

    摘要： A method comprises flowing process solution and electrode solution into a BPMED apparatus, applying a voltage such that the process solution is acidified and basified and dissolved CO2 is generated, flowing the process solution out of the apparatus, and desorbing CO2 out of the process solution. A method for desorbing CO2 from an ocean comprises flowing seawater and electrode solution into a BPMED apparatus, applying a voltage such that dissolved CO2 is generated, flowing the seawater out of the apparatus, and desorbing CO2 out of the seawater. A method for producing a desalted solution and CO2 gas comprises flowing process solution and electrode solution into a BPMED apparatus that includes one or more three-compartment cells, applying a voltage such that the process solution is acidified, basified, and desalted, flowing the process solution out of the apparatus, and desorbing CO2 out of the process solution.

    摘要翻译： 一种方法包括将工艺溶液和电极溶液流入BPMED装置，施加电压使得工艺溶液酸化和碱化并产生溶解的CO 2，使工艺溶液流出设备，并将CO 2从工艺溶液中解吸出来。 从海洋中解吸CO 2的方法包括将海水和电极溶液流入BPMED装置，施加电压使得溶解的CO 2产生，将海水从设备中流出，并将CO 2从海水中解吸。 一种生产脱盐溶液和二氧化碳气体的方法包括将工艺溶液和电极溶液流入包括一个或多个三室电池的BPMED装置中，施加电压使得该工艺溶液被酸化，碱化和脱盐， 从设备中解出来，并将二氧化碳从工艺解决方案中解脱出来。

    ELECTRODIALYTIC SEPARATION OF CO2 GAS FROM SEAWATER
    7.
    发明申请
    ELECTRODIALYTIC SEPARATION OF CO2 GAS FROM SEAWATER 有权
    二氧化碳从海水中的电化学分离

    公开(公告)号：US20130008792A1

    公开(公告)日：2013-01-10

    申请号：US13177421

    申请日：2011-07-06

    申请人： Matthew D. Eisaman ,  Karl Littau

    发明人： Matthew D. Eisaman ,  Karl Littau

    IPC分类号： C02F1/469 ,  B01D61/44 ,  C02F103/08

    CPC分类号： B01D61/445 ,  B01D2311/18 ,  B01D2311/2626 ,  B01D2311/2653 ,  C02F1/4693 ,  C02F2103/08 ,  C02F2201/4618 ,  Y02A20/134 ,  Y02C10/04 ,  Y02C10/06

    摘要： A method comprises flowing process solution and electrode solution into a BPMED apparatus, applying a voltage such that the process solution is acidified and basified and dissolved CO2 is generated, flowing the process solution out of the apparatus, and desorbing CO2 out of the process solution. A method for desorbing CO2 from an ocean comprises flowing seawater and electrode solution into a BPMED apparatus, applying a voltage such that dissolved CO2 is generated, flowing the seawater out of the apparatus, and desorbing CO2 out of the seawater. A method for producing a desalted solution and CO2 gas comprises flowing process solution and electrode solution into a BPMED apparatus that includes one or more three-compartment cells, applying a voltage such that the process solution is acidified, basified, and desalted, flowing the process solution out of the apparatus, and desorbing CO2 out of the process solution.

    摘要翻译： 一种方法包括将工艺溶液和电极溶液流入BPMED装置，施加电压使得工艺溶液酸化和碱化并产生溶解的CO 2，使工艺溶液流出设备，并将CO 2从工艺溶液中解吸出来。 从海洋中解吸CO 2的方法包括将海水和电极溶液流入BPMED装置，施加电压使得溶解的CO 2产生，将海水从设备中流出，并将CO 2从海水中解吸。 一种生产脱盐溶液和二氧化碳气体的方法包括将工艺溶液和电极溶液流入包括一个或多个三室电池的BPMED装置中，施加电压使得该工艺溶液被酸化，碱化和脱盐， 从设备中解出来，并将二氧化碳从工艺解决方案中解脱出来。

    Heterojunction photovoltaic cell
    8.
    发明申请
    Heterojunction photovoltaic cell 失效
    异质结光伏电池

    公开(公告)号：US20060112985A1

    公开(公告)日：2006-06-01

    申请号：US11001330

    申请日：2004-12-01

    申请人： Thomas Hantschel ,  Karl Littau ,  Scott Elrod

    发明人： Thomas Hantschel ,  Karl Littau ,  Scott Elrod

    IPC分类号： H01L31/00

    CPC分类号： H01L31/1828 ,  H01L31/03529 ,  H01L31/073 ,  Y02E10/543 ,  Y02P70/521

    摘要： In accordance with one aspect of the present disclosure, a solar photovoltaic device is disclosed. The semiconductor material of the solar photovoltaic device is a heterostructure of two different binary compounds of the same metal. One or both of the two different binary compounds of the same metal are doped so that they have a conduction band edge offset of greater than about 0.4 eV. The binary compound acting as the optical absorbing material of the solar photovoltaic device has a bandgap of about 1.0 eV to about 1.8 eV.

    摘要翻译： 根据本公开的一个方面，公开了一种太阳能光伏器件。 太阳能光伏器件的半导体材料是相同金属的两种不同二元化合物的异质结构。 掺杂相同金属的两种不同二元化合物中的一种或两种，使得它们具有大于约0.4eV的导带边缘偏移。 用作太阳能光伏器件的光吸收材料的二元化合物具有约1.0eV至约1.8eV的带隙。

    Piezoelectric diaphragm structure with outer edge electrode
    9.
    发明申请
    Piezoelectric diaphragm structure with outer edge electrode 失效
    压电膜片结构，外缘电极

    公开(公告)号：US20050134153A1

    公开(公告)日：2005-06-23

    申请号：US10739478

    申请日：2003-12-18

    申请人： John Bachellerie ,  Steven Buhler ,  John Fitch ,  Meng Lean ,  Karl Littau

    发明人： John Bachellerie ,  Steven Buhler ,  John Fitch ,  Meng Lean ,  Karl Littau

    IPC分类号： H01L41/047 ,  H01L41/09

    CPC分类号： H01L41/0973 ,  H01L41/047

    摘要： A multi-electrode piezoelectric diaphragm structure includes a diaphragm, piezoelectric material located on the diaphragm, which is defined as having a first area, and a second area. The first area of the piezoelectric is poled in a first direction, and the second area of the piezoelectric is poled in a second direction. The poled first direction is in a Z-axis of the piezoelectric and the poled second direction is in a Radial axis of the piezoelectric. A first electrode is positioned in the first area, on the first surface, of the piezoelectric. A second electrode is positioned in the second area, on the first surface, of the piezoelectric. A third electrode is located on a second surface of the piezoelectric. The application of voltages to the first, second and third electrodes generates electric fields in the piezoelectric material resulting in actuation of the piezoelectric material, or the application of pressure or strain to the diaphragm generates electric potentials at the first, second and third electrodes.

    摘要翻译： 多电极压电膜结构包括隔膜，位于膜片上的压电材料，其被定义为具有第一区域，第二区域。 压电体的第一区域沿第一方向极化，并且压电体的第二区域在第二方向上极化。 极化的第一方向在压电体的Z轴上，并且极化的第二方向处于压电体的径向轴线。 第一电极位于压电体的第一表面的第一区域中。 第二电极位于压电体的第一表面的第二区域中。 第三电极位于压电体的第二表面上。 施加电压到第一，第二和第三电极在压电材料中产生电场，导致压电材料的致动，或施加压力或应变到隔膜在第一，第二和第三电极处产生电位。

    INTERDIGITATED ELECTRODE DEVICE
    10.
    发明申请
    INTERDIGITATED ELECTRODE DEVICE 有权
    间断电极器件

    公开(公告)号：US20120153211A1

    公开(公告)日：2012-06-21

    申请号：US12972384

    申请日：2010-12-17

    申请人： David K. Fork ,  Karl Littau

    发明人： David K. Fork ,  Karl Littau

    IPC分类号： H01B1/00 ,  H01M4/04

    CPC分类号： H01B1/00 ,  B29C47/0019 ,  B29C47/065 ,  B29C47/705 ,  B29C47/707 ,  H01G11/26 ,  H01G11/86 ,  H01M4/02 ,  H01M4/0411 ,  H01M4/8626 ,  H01M4/8864 ,  H01M12/06 ,  Y02E60/13 ,  Y02E60/50

    摘要： An electrode structure has a layer of at least two interdigitated materials, a first material being an electrically conductive material and a second material being an ionically conductive material, the materials residing co-planarly on a membrane in fluid form, at least one of the interdigitated materials forming a feature having an aspect ratio greater than one. A method of forming an electrode structure includes merging flows of an electrically conductive material and a second material in a first direction into a first combined flow, dividing the first combined flow in a second direction to produce at least two separate flows, each separate flow including flows of the electrically conductive material and the second material, merging the two separate flows into a second combined flow, repeating the merging and dividing flow as desired to produce a final combined flow, and depositing the final combined flow as an interdigitated structure in fluid form onto a substrate such that at least one of the materials forms a feature in the structure having an aspect ratio greater than one.

    摘要翻译： 电极结构具有至少两个交叉指向的材料层，第一材料是导电材料，第二材料是离子导电材料，该材料共同平面地位于流体形式的膜上，至少一个交叉指向 形成纵横比大于1的特征的材料。 形成电极结构的方法包括将第一方向上的导电材料和第二材料的流动合并成第一组合流，将第一组合流沿第二方向分开以产生至少两个单独的流，每个分离的流包括 导电材料和第二材料的流动，将两个分离的流合并成第二组合流，根据需要重复合并和分流以产生最终的组合流，并将最终的组合流作为交错结构沉积成流体形式 使得至少一种材料形成具有大于1的纵横比的结构中的特征。