公开(公告)号：US4968914A

公开(公告)日：1990-11-06

申请号：US328429

申请日：1989-03-24

申请人： Paul E. West ,  Arthur Young

发明人： Paul E. West ,  Arthur Young

IPC分类号： H01L41/09

CPC分类号： H02N2/023 ,  H02N2/028

摘要： The electromechanical translation apparatus includes a translation drive assembly driven by front and rear piezoelectric clamping members coupled together with central extension piezoelectric members, which negotiate an elongated stationary channel. The translation drive assembly may directly carry an object for precise linear positioning in one dimension, or may carry a movable channel which in turn may be translated along an axis perpendicular to the direction of the stationary channel, so that an object placed upon the movable channel can be precisely positioned in two dimensions.

摘要翻译： 机电平移装置包括由与中心延伸压电元件联接在一起的前后压电夹紧构件驱动的平移驱动组件，其协调细长的固定通道。 平移驱动组件可以直接承载物体以在一个维度上进行精确的直线定位，或者可以携带可移动通道，该可移动通道又可以沿着垂直于静止通道的方向的轴线平移，使得放置在可移动通道上的物体 可以精确定位在两个维度上。

公开(公告)号：US4952857A

公开(公告)日：1990-08-28

申请号：US328422

申请日：1989-03-24

申请人： Paul E. West ,  Wilfred P. Charette ,  Arthur Young

发明人： Paul E. West ,  Wilfred P. Charette ,  Arthur Young

IPC分类号： G01N27/00 ,  G01Q30/02 ,  G05B13/00

CPC分类号： G01Q10/065 ,  B82Y35/00 ,  Y10S977/851

摘要： The scanning micromechanical probe control system for controlling relative movement between a sensor probe and an adjacent sample surface includes a sensor probe for measuring a parameter which varies relative to the relative positioning of the probe and the adjacent surface adapted to generate an error signal indicating one of at least two discrete position conditions; an up/down counter for integrating the error signal and for generating an up/down count signal; and a position control servo for controlling the relative positioning of the probe and the surface responsive to the up/down count signal. An adaptive feedback control most preferably controls the rate of up/down positioning of the sensor probe and the rate of raster scanning of the probe relative to the target surface.

摘要翻译： 用于控制传感器探针和相邻样本表面之间的相对运动的扫描微机械探针控制系统包括用于测量参数的传感器探针，该参数相对于探针和相邻表面的相对位置而变化，适于产生指示 至少两个离散位置条件; 用于对误差信号进行积分并产生上/下计数信号的上/下计数器; 以及位置控制伺服，用于响应于上/下计数信号来控制探头和表面的相对定位。 自适应反馈控制最优选地控制传感器探针的上/下定位速率以及探针相对于目标表面的光栅扫描速率。

公开(公告)号：US20090070904A1

公开(公告)日：2009-03-12

申请号：US12214081

申请日：2008-06-16

申请人： Paul E. West ,  Richard S. Becker ,  Zhiqiang Peng

发明人： Paul E. West ,  Richard S. Becker ,  Zhiqiang Peng

IPC分类号： G01N13/10

CPC分类号： G01Q10/045 ,  G01Q60/38

摘要： A scanning probe microscope that is easy to use, inexpensive to manufacture, has a fast scan rate, and has a broad range of applications. The oscillating sensor has a high resonance frequency. Because an oscillator is used, alignment of a laser is not required. Further, probe approach and scanning can be achieved at much faster rates.

摘要翻译： 扫描探针显微镜易于使用，制造成本低，扫描速度快，并具有广泛的应用。 振荡传感器具有高谐振频率。 因为使用振荡器，不需要对准激光器。 此外，可以以更快的速率实现探测方法和扫描。

公开(公告)号：US4058766A

公开(公告)日：1977-11-15

申请号：US697858

申请日：1976-06-21

申请人： Ronald F. Vogel ,  Robert R. Boldt ,  Kevin D. McKee ,  Roy E. Resh ,  Paul E. West

发明人： Ronald F. Vogel ,  Robert R. Boldt ,  Kevin D. McKee ,  Roy E. Resh ,  Paul E. West

IPC分类号： G01N27/22 ,  G01R27/26

CPC分类号： G01R27/2623 ,  G01N27/228

摘要： As in prior testers, a capacitive cell in which material is placed to be tested is connected in a voltage divider circuit. However, signal generating means connected to the voltage divider applies voltages at different predetermined frequencies selected for the material being tested, and frequency selective means connected to the cell develop voltages at the applied frequencies having values dependent on the impedance of the filled cell at the respective frequencies. These voltages developed across the cell are applied to a computer that provides an output according to an equation that has been derived statistically from many samples of the material being tested for the substance or quality of the material being measured.

摘要翻译： 如在先前的测试器中，其中放置被测试材料的电容单元在分压器电路中连接。 然而，连接到分压器的信号发生装置施加针对被测试材料选择的不同预定频率的电压，并且连接到电池的频率选择装置以施加的频率产生具有取决于填充电池在相应的电池的阻抗的值的电压 频率 在整个电池上产生的这些电压被施加到计算机，该计算机根据已被测量材料的许多样品从被测材料的物质或质量统计学得出的等式提供输出。

公开(公告)号：US5441343A

公开(公告)日：1995-08-15

申请号：US127661

申请日：1993-09-27

申请人： Russell J. Pylkki ,  Marc Schuman ,  Paul E. West

发明人： Russell J. Pylkki ,  Marc Schuman ,  Paul E. West

IPC分类号： G01Q60/00 ,  G01N25/72 ,  G01K7/00 ,  G01B9/04 ,  G01K3/06 ,  G01N25/18

CPC分类号： G01Q60/58 ,  B82Y35/00 ,  G01N25/72 ,  Y10S977/852 ,  Y10S977/867

摘要： The scanning thermal probe microscope measures a thermal parameter such as thermal conductivity or temperature of surface contours of a specimen with a thermal sensor maintained in thermal communication with the surface of the specimen and maintained at a temperature different than that of the specimen. The thermal sensor is disposed on the free end of a cantilever arm in thermal communication with the probe. A thermal feedback bridge circuit can maintain the thermal sensor at a constant temperature by heating or cooling the sensor, and provides a signal for determining the heat transfer between the probe and the specimen. The cantilever arm includes first and second legs of electrically conductive material, and the thermal sensor comprises a narrowed portion of the conducting material having a relatively high temperature coefficient of resistance.

摘要翻译： 扫描热探针显微镜测量热参数，例如具有与样品表面热连通的热传感器的样品的表面轮廓的热导率或温度，并保持在与样​​品不同的温度。 热传感器设置在与探头热连通的悬臂的自由端上。 热反馈桥接电路可以通过加热或冷却传感器来将热传感器保持在恒定温度，并提供一个信号来确定探头和样品之间的传热。 悬臂包括导电材料的第一和第二支脚，并且热传感器包括具有相对高的电阻温度系数的导电材料的变窄部分。

公开(公告)号：US5406832A

公开(公告)日：1995-04-18

申请号：US86592

申请日：1993-07-02

申请人： Ronald C. Gamble ,  Paul E. West ,  Marc R. Schuman

发明人： Ronald C. Gamble ,  Paul E. West ,  Marc R. Schuman

IPC分类号： G01B21/30 ,  G01Q10/00 ,  G01Q10/06 ,  G01Q60/32 ,  G01B5/28 ,  G01N23/00

CPC分类号： G01Q10/06 ,  B82Y35/00 ,  Y10S977/85 ,  Y10S977/851

摘要： The synchronous sampling scanning force microscope includes a reflective cantilever arm having a free end which is oscillated at a frequency different from the resonance frequency of the cantilever arm. The motion of the oscillating cantilever arm is measured, to generate a deflection signal indicative of the amplitude of deflection or phase shift of the cantilever arm. Selected portions of cycles of the output signal are sampled, for generating output signal data indicative of deflection of the near and far excursions of the probe. The method and apparatus permit monitoring of compliance of the surface of the specimen by multiple sampling at a rate greater than the period of oscillation of the cantilever probe of the microscope.

摘要翻译： 同步采样扫描力显微镜包括反射悬臂，其具有以与悬臂的共振频率不同的频率振荡的自由端。 测量振荡悬臂的运动，以产生指示悬臂的偏转或相移幅度的偏转信号。 对输出信号的周期的选定部分进行采样，以产生指示探针的近距离和远距偏移的输出信号数据。 该方法和装置允许以大于显微镜的悬臂探头的振荡周期的速率进行多次采样来监测样品表面的顺应性。

公开(公告)号：US07253408B2

公开(公告)日：2007-08-07

申请号：US10931059

申请日：2004-08-31

申请人： Paul E. West

发明人： Paul E. West

IPC分类号： G01N13/16

CPC分类号： G01Q30/14 ,  G01Q70/02

摘要： An environmental cell for use with a scanning probe microscope includes a cell chamber, a probe mounted to the cell chamber, a puck selectively connected to the cell chamber, a sample holder selectively inserted in the puck, and a translation mechanism coupled to the sample holder to move the sample holder. Gasses or liquids may be introduced to the environmental cell through channels formed in either the puck, sample holder, or cell chamber.

摘要翻译： 与扫描探针显微镜一起使用的环境细胞包括细胞室，安装到细胞室的探针，选择性地连接到细胞室的圆盘，选择性地插入到圆盘中的样品架，以及连接到样品架的平移机构 移动样品架。 气体或液体可以通过在冰球，样品保持器或细胞室中形成的通道引入环境细胞。

公开(公告)号：US5510615A

公开(公告)日：1996-04-23

申请号：US478479

申请日：1995-06-07

申请人： Huddee Ho ,  Paul E. West

发明人： Huddee Ho ,  Paul E. West

IPC分类号： G01Q10/04 ,  G01Q30/02 ,  G01Q30/16 ,  G01Q30/18 ,  G01Q70/02 ,  H01J37/28 ,  H01J37/067

CPC分类号： G01Q30/02 ,  B82Y35/00 ,  G01Q30/18 ,  G01Q70/02 ,  H01J37/28 ,  H01J2237/2818 ,  Y10S977/86

摘要： The scanning probe microscope translation apparatus includes a scanning probe microscope for examining a specimen, with a specimen stage for mounting the specimen for examination by the scanning probe microscope, and a first translator mounted to the scanning probe microscope for translating the specimen stage relative to the scanning probe microscope. A support frame is dimensioned and adapted to be mounted in a specimen chamber of a scanning electron microscope, and a second translator is provided for scanning the scanning probe microscope relative to the support frame. The second translator is mounted on dual mass plates provided for isolating the scanning probe microscope from external vibrations, and suspension device are provided for suspending the mass plates from the support frame. A vacuum load lock system permits moving the scanning probe microscope, specimen stage, first translator, and mounting assembly into and out of the vacuum of the scanning electron microscope vacuum chamber.

摘要翻译： 扫描探针显微镜转印装置包括用于检查样本的扫描探针显微镜，具有用于通过扫描探针显微镜安装用于检查的样本的样本台和安装到扫描探针显微镜上的第一平移器，用于将样本台相对于 扫描探针显微镜。 支撑框架尺寸适于安装在扫描电子显微镜的样本室中，并且提供第二平移器用于相对于支撑框架扫描扫描探针显微镜。 第二个翻译器安装在双重质量板上，用于将扫描探针显微镜与外部振动隔离，并提供悬挂装置，用于将质量板从支撑架悬挂下来。 真空负载锁定系统允许将扫描探针显微镜，样品台，第一平移器和安装组件移入和移出扫描电子显微镜真空室的真空。

公开(公告)号：US5260622A

公开(公告)日：1993-11-09

申请号：US765082

申请日：1991-09-24

申请人： Paul E. West

发明人： Paul E. West

IPC分类号： H01L41/09 ,  H01L41/08

CPC分类号： H02N2/023 ,  H02N2/028

摘要： The electromechanical translation apparatus includes a translation drive assembly having front and rear drive leg members coupled together with central extension piezoelectric members, and piezoelectric clamping members which clamp the drive leg members between opposing bearing members of a lower base. The translation drive assembly may directly carry an object for precise positioning of the object, or may carry an upper movable base which in turn may be translated along an axis perpendicular to the direction of movement along the lower base, so that an object placed upon the upper movable base can be precisely positioned.

摘要翻译： 机电平移装置包括平移驱动组件，其具有与中心延伸压电部件联接在一起的前驱动支腿部件和后驱动支腿部件，以及将驱动支腿部件夹在下基板的相对轴承部件之间的压电夹紧部件。 平移驱动组件可以直接携带用于物体精确定位的物体，或者可以承载上部可移动基座，该上部可移动基座又可以沿着沿着下部基座的沿着移动方向的轴线平移，使得放置在 上可移动底座可以精确定位。

公开(公告)号：US4956817A

公开(公告)日：1990-09-11

申请号：US199008

申请日：1988-05-26

申请人： Paul E. West ,  Jamshid Jahanmir

发明人： Paul E. West ,  Jamshid Jahanmir

IPC分类号： G11B9/00 ,  G11B23/42 ,  G11C11/22

CPC分类号： G11B23/42 ,  G11B9/14 ,  G11B9/1445 ,  G11B9/1481 ,  G11C11/22 ,  B82Y10/00 ,  Y10S977/947

摘要： A high density computer memory which utilizes a probe operating with two degrees of freedom over a memory area, the probe location altered by drive systems incorporating piezoelectric elements arranged to drive the probe parallel to the plane of the memory surface. Sensors to provide an indication of the location of the probe independent of the drive system are provided. The memory system incorporates an underlying substrate upon which is deposited one of a variety of elements or compounds chosen to effect a change in physical-chemical properties when a data bit is written on the surface. The probe is moved over the surface at a distance which produces a current from Schottky or Field effect.

摘要翻译： 一种高密度计算机存储器，其利用在存储区域上以两个自由度操作的探针，所述探针位置由包含压电元件的驱动系统改变，所述驱动系统被布置成驱动探针平行于存储器表面的平面。 提供了传感器以提供独立于驱动系统的探针位置的指示。 存储系统包含下面的衬底，在其上沉积了当将数据位写在表面上时选择的多种元素或化合物之一来实现物理化学性质的变化。 探针以一定距离移动到表面上，该距离产生肖特基或场效应的电流。