公开(公告)号：US07095596B2

公开(公告)日：2006-08-22

申请号：US10535475

申请日：2003-10-09

申请人： Peter Schmollngruber ,  Ingo Herrmann ,  Henrik Siegle ,  Hartmut Kittel ,  Paul Farber ,  Ulrich May

发明人： Peter Schmollngruber ,  Ingo Herrmann ,  Henrik Siegle ,  Hartmut Kittel ,  Paul Farber ,  Ulrich May

IPC分类号： G11B5/33 ,  G11B5/127

CPC分类号： B82Y25/00 ,  G01R33/093

摘要： A magnetoresistive sensor element is provided, having a magnetoresistive layer system which, in top view, is at least regionally striated. The sensor element operates on the basis of the GMR effect and is constructed according to the spin valve principle, the striated layer system featuring a reference layer having a direction of magnetization substantially uninfluenced by a direction of an outer magnetic field acting on it. During operation, the sensor element provides a measuring signal which changes as a function of a measurement angle between the component of the field strength of the outer magnetic field lying in the plane of the layer system, and the direction of magnetization, and from which this measurement angle is able to be ascertained. In addition, observed in a top view of the striated layer system, the angle between the direction of magnetization in the absence of the outer magnetic field and the longitudinal direction of the striated layer system is set in such a way that in response to an influence of the outer magnetic field having a defined field strength, which is selected from a predefined work interval, the angle error of the layer system, as a function of this angle and the field strength, is minimal.

摘要翻译： 提供了一种磁阻传感器元件，具有磁阻层系统，其在顶视图中至少是区域性条纹化的。 传感器元件基于GMR效应进行操作，并且根据自旋阀原理构造，具有参考层的条纹层系统具有基本上不受作用在其上的外部磁场的方向的磁化方向的磁化方向。 在操作期间，传感器元件提供测量信号，该测量信号根据位于层系统的平面中的外部磁场的场强的分量与磁化方向之间的测量角度而变化，并且由此 可以确定测量角度。 此外，在条纹层系统的俯视图中观察到，在没有外磁场的磁化方向与条纹层系统的纵向方向之间的角度被设定为响应于影响 具有定义的场强的外部磁场，其从预定义的工作间隔中选择，层系统的角度误差作为该角度和场强的函数是最小的。

公开(公告)号：US07312609B2

公开(公告)日：2007-12-25

申请号：US10523252

申请日：2003-06-27

申请人： Peter Schmollngruber ,  Ingo Herrmann ,  Henrik Siegle ,  Hartmut Kittel ,  Paul Farber ,  Ulrich May

发明人： Peter Schmollngruber ,  Ingo Herrmann ,  Henrik Siegle ,  Hartmut Kittel ,  Paul Farber ,  Ulrich May

IPC分类号： G01R33/09 ,  G01R33/02 ,  G01B7/30

CPC分类号： B82Y25/00 ,  F01L1/00 ,  F01L2101/00 ,  F01L2820/041 ,  G01R33/093

摘要： A GMR sensor element is proposed, having a rotationally symmetrical positioning of especially eight GMR resistor elements which are connected to each other to form two Wheatstone's full bridges. This GMR sensor element is especially suitable for use in an angle sensor for the detection of the absolute position of the camshaft or the crankshaft in a motor vehicle, particularly in the case of a camshaft-free engine having electrical or electrohydraulic valve timing, of a motor position of an electrically commutated motor, or of detection of a windshield wiper position, or in the steering angle sensor system in motor vehicles.

摘要翻译： 提出了一种GMR传感器元件，具有特别是八个GMR电阻元件的旋转对称定位，它们彼此连接以形成两个惠斯通的全桥。 该GMR传感器元件特别适用于用于检测机动车辆中的凸轮轴或曲轴的绝对位置的角度传感器，特别是在具有电动或电动液压阀定时的无凸轮轴发动机的情况下 电动换向马达的电机位置，或者检测挡风玻璃刮水器位置，或者在机动车辆的转向角传感器系统中。

公开(公告)号：US20060103381A1

公开(公告)日：2006-05-18

申请号：US10523252

申请日：2003-06-27

申请人： Peter Schmollngruber ,  Ingo Herrmann ,  Henrik Siegle ,  Hartmut Kittel ,  Paul Farber ,  Ulrich May

发明人： Peter Schmollngruber ,  Ingo Herrmann ,  Henrik Siegle ,  Hartmut Kittel ,  Paul Farber ,  Ulrich May

IPC分类号： G01B7/30

CPC分类号： B82Y25/00 ,  F01L1/00 ,  F01L2101/00 ,  F01L2820/041 ,  G01R33/093

摘要： A GMR sensor element is proposed, having a rotationally symmetrical positioning of especially eight GMR resistor elements which are connected to each other to form two Wheatstone's full bridges. This GMR sensor element is especially suitable for use in an angle sensor for the detection of the absolute position of the camshaft or the crankshaft in a motor vehicle, particularly in the case of a camshaft-free engine having electrical or electrohydraulic valve timing, of a motor position of an electrically commutated motor, or of detection of a windshield wiper position, or in the steering angle sensor system in motor vehicles.

摘要翻译： 提出了一种GMR传感器元件，具有特别是八个GMR电阻元件的旋转对称定位，它们彼此连接以形成两个惠斯通的全桥。 该GMR传感器元件特别适用于用于检测机动车辆中的凸轮轴或曲轴的绝对位置的角度传感器，特别是在具有电动或电动液压阀定时的无凸轮轴发动机的情况下 电动换向马达的电机位置，或者检测挡风玻璃刮水器位置，或者在机动车辆的转向角传感器系统中。

公开(公告)号：US20060152218A1

公开(公告)日：2006-07-13

申请号：US10535475

申请日：2003-10-09

申请人： Peter Schmollngruber ,  Ingo Herrmann ,  Henrik Siegle ,  Hartmut Kittel ,  Paul Farber ,  Ulrich May

发明人： Peter Schmollngruber ,  Ingo Herrmann ,  Henrik Siegle ,  Hartmut Kittel ,  Paul Farber ,  Ulrich May

IPC分类号： G01R33/02

CPC分类号： B82Y25/00 ,  G01R33/093

摘要： A magnetoresistive sensor element is provided, having a magnetoresistive layer system which, in top view, is at least regionally striated. The sensor element operates on the basis of the GMR effect and is constructed according to the spin valve principle, the striated layer system featuring a reference layer having a direction of magnetization substantially uninfluenced by a direction of an outer magnetic field acting on it. During operation, the sensor element provides a measuring signal which changes as a function of a measurement angle between the component of the field strength of the outer magnetic field lying in the plane of the layer system, and the direction of magnetization, and from which this measurement angle is able to be ascertained. In addition, observed in a top view of the striated layer system, the angle between the direction of magnetization in the absence of the outer magnetic field and the longitudinal direction of the striated layer system is set in such a way that in response to an influence of the outer magnetic field having a defined field strength, which is selected from a predefined work interval, the angle error of the layer system, as a function of this angle and the field strength, is minimal.

摘要翻译： 提供了一种磁阻传感器元件，具有磁阻层系统，其在顶视图中至少是区域性条纹化的。 传感器元件基于GMR效应进行操作，并且根据自旋阀原理构造，具有参考层的条纹层系统具有基本上不受作用在其上的外部磁场的方向的磁化方向的磁化方向。 在操作期间，传感器元件提供测量信号，该测量信号根据位于层系统的平面中的外部磁场的场强的分量与磁化方向之间的测量角度而变化，并且由此 可以确定测量角度。 此外，在条纹层系统的俯视图中观察到，在没有外磁场的磁化方向与条纹层系统的纵向方向之间的角度被设定为响应于影响 具有定义的场强的外部磁场，其从预定义的工作间隔中选择，层系统的角度误差作为该角度和场强的函数是最小的。

公开(公告)号：US07548060B2

公开(公告)日：2009-06-16

申请号：US10564245

申请日：2005-01-07

申请人： Ingo Herrmann ,  Paul Farber ,  Ulrich May ,  Christian Bauer ,  Birgit Vogelgesang

发明人： Ingo Herrmann ,  Paul Farber ,  Ulrich May ,  Christian Bauer ,  Birgit Vogelgesang

IPC分类号： G01R33/02 ,  G01R33/09

CPC分类号： G01R33/022 ,  G01D5/147 ,  G01P3/487

摘要： A magnetic sensor system (1) is provided that contains sensor elements (5, 6) that are sensitive to magnetic fields, the electrical properties of said sensor elements being modifiable according to a magnetic field that can be influenced by a mobile, passive transmitter element (8). The magnetic sensor system (1) includes two sensor elements (5, 6) in a gradiometer system, each of which is assigned to one of two permanent magnets (2, 3) having a predetermined separation. In terms of their dimensions, separation and position relative to the sensor elements (5, 6), the permanent magnets (2, 3) are located such that the offset of the output signal of the sensor elements (5, 6) is minimized in the gradiometer system.

摘要翻译： 提供了一种磁传感器系统（1），其包含对磁场敏感的传感器元件（5,6），所述传感器元件的电性能可根据可被移动的被动发射器元件 （8）。 磁传感器系统（1）包括在梯度计系统中的两个传感器元件（5,6），每个传感器元件分配给具有预定间隔的两个永磁体（2,3）中的一个。 在它们的尺寸，相对于传感器元件（5,6）的分离和位置方面，定位永磁体（2,3），使得传感器元件（5,6）的输出信号的偏移被最小化 梯度计系统。

公开(公告)号：US20070290678A1

公开(公告)日：2007-12-20

申请号：US10564245

申请日：2005-01-07

申请人： Ingo Herrmann ,  Paul Farber ,  Ulrich May ,  Christian Bauer ,  Birgit Vogelgesang

发明人： Ingo Herrmann ,  Paul Farber ,  Ulrich May ,  Christian Bauer ,  Birgit Vogelgesang

IPC分类号： G01B7/30 ,  G01R33/022 ,  G01R33/09

CPC分类号： G01R33/022 ,  G01D5/147 ,  G01P3/487

摘要： A magnetic sensor system (1) is provided that contains sensor elements (5, 6) that are sensitive to magnetic fields, the electrical properties of said sensor elements being modifiable according to a magnetic field that can be influenced by a mobile, passive transmitter element (8). The magnetic sensor system (1) includes two sensor elements (5, 6) in a gradiometer system, each of which is assigned to one of two permanent magnets (2, 3) having a predetermined separation. In terms of their dimensions, separation and position relative to the sensor elements (5, 6), the permanent magnets (2, 3) are located such that the offset of the output signal of the sensor elements (5, 6) is minimized in the gradiometer system.

摘要翻译： 提供了一种磁传感器系统（1），其包含对磁场敏感的传感器元件（5,6），所述传感器元件的电性能可根据可被移动的被动发射器元件 （8）。 磁传感器系统（1）包括在梯度计系统中的两个传感器元件（5,6），每个传感器元件分配给具有预定间隔的两个永磁体（2,3）中的一个。 在它们的尺寸，相对于传感器元件（5,6）的分离和位置方面，定位永磁体（2,3），使得传感器元件（5,6）的输出信号的偏移被最小化 梯度计系统。

公开(公告)号：US08492850B2

公开(公告)日：2013-07-23

申请号：US12308200

申请日：2007-04-27

申请人： Gerhard Lammel ,  Hubert Benzel ,  Matthias Illing ,  Franz Laermer ,  Silvia Kronmueller ,  Paul Farber ,  Simon Armbruster ,  Ralf Reichenbach ,  Christoph Schelling ,  Ando Feyh

发明人： Gerhard Lammel ,  Hubert Benzel ,  Matthias Illing ,  Franz Laermer ,  Silvia Kronmueller ,  Paul Farber ,  Simon Armbruster ,  Ralf Reichenbach ,  Christoph Schelling ,  Ando Feyh

IPC分类号： H01L27/088

CPC分类号： H01L21/02008 ,  H01L21/02381 ,  H01L21/02529 ,  H01L21/02573 ,  H01L21/02601 ,  H01L21/02612 ,  H01L21/02656 ,  H01L21/02658 ,  H01L21/02667 ,  H01L33/346

摘要： A method for producing a silicon substrate, including the steps of providing a silicon substrate having an essentially planar silicon surface, producing a porous silicon surface having a plurality of pores, in particular having macropores and/or mesopores and/or nanopores, applying a filling material that is to be inserted into the silicon, which has a diameter that is less than a diameter of the pores, inserting the filling material into the pores and removing the excess filling material form the silicon surface, if necessary, and tempering the silicon substrate that is furnished with the filling material that has been filled into the pores, at a temperature between ca. 1000° C. and ca. 1400° C., in order to close the generated pores again and to enclose the filling material.

摘要翻译： 一种制造硅衬底的方法，包括以下步骤：提供具有基本平坦的硅表面的硅衬底，产生具有多个孔的多孔硅表面，特别是具有大孔和/或介孔和/或纳米孔， 要插入硅的材料，其直径小于孔的直径，如果需要，将填充材料插入孔中并除去多余的填充材料形成硅表面，并回火硅衬底 配备有已经填充到孔中的填充材料，温度约为 1000℃和约 1400℃，以便再次闭合所产生的孔并包围填充材料。

公开(公告)号：US09316703B2

公开(公告)日：2016-04-19

申请号：US14005983

申请日：2012-02-23

申请人： Frank Schatz ,  Paul Farber ,  Stefan Weiss ,  Gerhard Lammel ,  Fouad Bennini

发明人： Frank Schatz ,  Paul Farber ,  Stefan Weiss ,  Gerhard Lammel ,  Fouad Bennini

IPC分类号： G01R33/18 ,  G01R33/04 ,  G01R33/02 ,  G01R15/14 ,  G01R33/05

CPC分类号： G01R33/02 ,  G01R15/148 ,  G01R33/04 ,  G01R33/05 ,  G01R33/18

摘要： An apparatus for measuring a magnetic field is described, which comprises a core and an exciter coil for remagnetizing the core material. The remagnetizable core material is embodied as a layer or as multiple layers disposed at a distance from one another, and the core has a maximum total extension G where 2.5 mm≧G≧0.2 mm, a ratio of length to width that is greater than or equal to a value of twenty, and a thickness D where 2 μm≧D≧0.2 μm. Also described is a corresponding method for measuring a magnetic field.

摘要翻译： 描述了一种用于测量磁场的装置，其包括用于使芯材重新磁化的芯和励磁线圈。 可再磁化的芯材料被实施为层或彼此间隔一定距离的多层，并且芯具有最大总延伸度G，其中2.5mm≥G≥0.2mm，长度与宽度的比率大于或等于 等于二十的值，厚度D为2μm≥D≥0.2μm。 还描述了用于测量磁场的相应方法。

公开(公告)号：US20090236610A1

公开(公告)日：2009-09-24

申请号：US12282842

申请日：2007-03-09

申请人： Gerhard Lammel ,  Hubert Benzel ,  Matthias Illing ,  Franz Laermer ,  Silvia Kronmueller ,  Paul Farber ,  Simon Armbruster ,  Ralf Reichenbach ,  Christoph Schelling ,  Ando Feyh

发明人： Gerhard Lammel ,  Hubert Benzel ,  Matthias Illing ,  Franz Laermer ,  Silvia Kronmueller ,  Paul Farber ,  Simon Armbruster ,  Ralf Reichenbach ,  Christoph Schelling ,  Ando Feyh

IPC分类号： H01L29/24 ,  H01L21/04

CPC分类号： H01L21/228 ,  H01L21/02378 ,  H01L21/02381 ,  H01L21/02532 ,  H01L21/02658 ,  H01L21/02667 ,  H01L21/223 ,  H01L21/225 ,  H01L21/324

摘要： A method for manufacturing a semiconductor structure is provided which includes the following operations: supplying a crystalline semiconductor substrate, providing a porous region adjacent to a surface of the semiconductor substrate, introducing a dopant into the porous region from the surface, and thermally recrystallizing the porous region into a crystalline doping region of the semiconductor substrate whose doping type and/or doping concentration and/or doping distribution are/is different from those or that of the semiconductor substrate. A corresponding semiconductor structure is likewise provided.

摘要翻译： 提供了一种制造半导体结构的方法，其包括以下操作：提供晶体半导体衬底，提供与半导体衬底的表面相邻的多孔区域，从表面引入掺杂剂到多孔区域中，并将多孔 区域形成半导体衬底的掺杂类型和/或掺杂浓度和/或掺杂分布/不同于半导体衬底或/或掺杂分布的晶体掺杂区域。 同样提供相应的半导体结构。

公开(公告)号：US20120126352A1

公开(公告)日：2012-05-24

申请号：US13291278

申请日：2011-11-08

申请人： Hans-Peter Baer ,  Paul Farber ,  Stefan Weiss ,  Lutz Rauscher

发明人： Hans-Peter Baer ,  Paul Farber ,  Stefan Weiss ,  Lutz Rauscher

IPC分类号： H01L29/82 ,  H01L21/50 ,  H01L21/78

CPC分类号： H01L24/94 ,  H01L24/05 ,  H01L24/16 ,  H01L24/48 ,  H01L24/81 ,  H01L24/85 ,  H01L2224/02313 ,  H01L2224/02371 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05569 ,  H01L2224/05571 ,  H01L2224/131 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/48091 ,  H01L2224/48106 ,  H01L2224/48227 ,  H01L2224/81801 ,  H01L2224/85186 ,  H01L2224/94 ,  H01L2924/00014 ,  H01L2924/10253 ,  H01L2224/0231 ,  H01L2924/014 ,  H01L2924/00012 ,  H01L2924/00 ,  H01L2224/05552 ,  H01L2224/45099

摘要： A semiconductor chip having contact surfaces on an upper side parallel to the wafer plane has terminal pads on a terminal-pad side perpendicular to the upper side, each terminal pad being conductively connected to an assigned contact surface. This allows vertical mounting of the chip on a substrate and contacting with the aid of customary bonding techniques. A manufacturing method and two mounting methods are described.

摘要翻译： 在平行于晶片平面的上侧具有接触表面的半导体芯片在垂直于上侧的端子焊盘侧具有端子焊盘，每个端子焊盘导电地连接到分配的接触表面。 这允许将芯片垂直安装在基板上并借助常规的接合技术进行接触。 描述制造方法和两种安装方法。