HYBRID COLORING METHODOLOGY FOR MULTI-PATTERN TECHNOLOGY
    4.
    发明申请
    HYBRID COLORING METHODOLOGY FOR MULTI-PATTERN TECHNOLOGY 审中-公开
    混合色彩方法多图案技术

    公开(公告)号:US20160370699A1

    公开(公告)日:2016-12-22

    申请号:US15182510

    申请日:2016-06-14

    CPC classification number: G03F1/70 G03F7/70433 G03F7/70466 G06F17/5068

    Abstract: In an aspect of the disclosure, a method, a computer-readable medium, and an apparatus for assigning feature colors for a multiple patterning process are provided. The apparatus receives integrated circuit layout information including a set of features and an assigned color of a plurality of colors for each feature of a first subset of features of the set of features. In addition, the apparatus performs color decomposition on a second subset of features to assign colors to features in the second subset of features. The second subset of features includes features in the set of features that are not included in the first subset of features with an assigned color.

    Abstract translation: 在本公开的一个方面,提供了一种方法,计算机可读介质和用于分配多个图案化处理的特征颜色的装置。 该装置接收集成电路布局信息,该信息包括一组特征的集合,以及针对特征集合的第一特征集的每个特征的多种颜色的分配颜色。 另外,该装置对特征的第二子集执行颜色分解,以将颜色分配给第二特征子集中的特征。 特征的第二子集包括不包括在具有分配颜色的特征的第一子集中的特征集合中的特征。

    CROSS-COUPLE IN MULTI-HEIGHT SEQUENTIAL CELLS FOR UNI-DIRECTIONAL M1
    9.
    发明申请
    CROSS-COUPLE IN MULTI-HEIGHT SEQUENTIAL CELLS FOR UNI-DIRECTIONAL M1 有权
    用于单向M1的多重顺序细胞中的交叉耦合

    公开(公告)号:US20160351490A1

    公开(公告)日:2016-12-01

    申请号:US14723357

    申请日:2015-05-27

    Abstract: A MOS device includes first, second, third, and fourth interconnects. The first interconnect extends on a first track in a first direction. The first interconnect is configured in a metal layer. The second interconnect extends on the first track in the first direction. The second interconnect is configured in the metal layer. The third interconnect extends on a second track in the first direction. The third interconnect is configured in the metal layer. The second track is parallel to the first track. The third interconnect is coupled to the second interconnect. The second and third interconnects are configured to provide a first signal. The fourth interconnect extends on the second track in the first direction. The fourth interconnect is configured in the metal layer. The fourth interconnect is coupled to the first interconnect. The first and fourth interconnects are configured to provide a second signal different than the first signal.

    Abstract translation: MOS器件包括第一,第二,第三和第四互连。 第一互连在第一方向上在第一轨道上延伸。 第一互连配置在金属层中。 第二互连在第一方向上在第一轨道上延伸。 第二互连配置在金属层中。 第三互连在第一方向上的第二轨道上延伸。 第三互连配置在金属层中。 第二条轨道平行于第一条轨道。 第三互连耦合到第二互连。 第二和第三互连被配置为提供第一信号。 第四互连在第一方向上在第二轨道上延伸。 第四互连配置在金属层中。 第四互连耦合到第一互连。 第一和第四互连配置成提供与第一信号不同的第二信号。

    DOUBLE PATTERNED STACKING TECHNIQUE
    10.
    发明申请
    DOUBLE PATTERNED STACKING TECHNIQUE 审中-公开
    双重图案堆叠技术

    公开(公告)号:US20150287709A1

    公开(公告)日:2015-10-08

    申请号:US14247214

    申请日:2014-04-07

    CPC classification number: H01L27/0207 H01L27/092

    Abstract: A double patterned CMOS device includes a first set of stacked transistors, a second set of stacked transistors, and a set of transistors. The first set of stacked transistors includes first and second transistors. The first transistor has a first transistor active region and the second transistor has a second transistor active region. The second set of stacked transistors is adjacent the first set of stacked transistors. The second set of stacked transistors includes third and fourth transistors. The third transistor has a third transistor active region and the fourth transistor has a fourth transistor active region. The set of transistors is adjacent the first set of stacked transistors. The set of transistors includes a fifth transistor. The fifth transistor has a fifth transistor active region. The first, second, third, and fourth transistor active regions satisfy certain distance relationships from each other.

    Abstract translation: 双重图案化CMOS器件包括第一组堆叠晶体管,第二组堆叠晶体管和一组晶体管。 第一组堆叠晶体管包括第一和第二晶体管。 第一晶体管具有第一晶体管有源区,而第二晶体管具有第二晶体管有源区。 第二组堆叠晶体管与第一组堆叠晶体管相邻。 第二组堆叠晶体管包括第三和第四晶体管。 第三晶体管具有第三晶体管有源区,第四晶体管具有第四晶体管有源区。 该组晶体管与第一组堆叠晶体管相邻。 晶体管组包括第五晶体管。 第五晶体管具有第五晶体管有源区。 第一,第二,第三和第四晶体管有源区域彼此满足一定的距离关系。

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