Siloxane epoxy polymers for low-k dielectric applications
    2.
    发明申请
    Siloxane epoxy polymers for low-k dielectric applications 有权
    用于低k电介质应用的硅氧烷环氧聚合物

    公开(公告)号:US20050236695A1

    公开(公告)日:2005-10-27

    申请号:US10832515

    申请日:2004-04-27

    摘要: Semiconductor devices employing siloxane epoxy polymers as low-κ dielectric films are disclosed. The devices include a semiconductor substrate, one or more metal layers or structures and one or more dielectric films, wherein at least one dielectric film in the devices is a siloxane epoxy polymer. Use of siloxane epoxy polymers is advantageous, in part, because the polymers adhere well to metals and have dielectric constants as low as 1.8. Thus, the disclosed semiconductor devices offer much better performance than devices fabricated using conventional dielectric materials. Furthermore, the siloxane epoxy polymer dielectrics are fully curable at low temperatures, exhibit low leakage currents, and remain stable at temperatures greater than 400° C. making them particularly attractive for use in the semiconductor industry

    摘要翻译: 公开了使用硅氧烷环氧聚合物作为低k电介质膜的半导体器件。 这些器件包括半导体衬底,一个或多个金属层或结构以及一个或多个介电膜,其中器件中的至少一个电介质膜是硅氧烷环氧聚合物。 硅氧烷环氧聚合物的使用部分是有利的,因为聚合物很好地粘附到金属上并具有低至1.8的介电常数。 因此,所公开的半导体器件比使用常规电介质材料制造的器件提供更好的性能。 此外,硅氧烷环氧聚合物电介质在低温下是完全可固化的,表现出低的漏电流,并且在高于400℃的温度下保持稳定,使得它们在半导体工业中特别有吸引力

    Chemical treatment of material surfaces
    3.
    发明申请
    Chemical treatment of material surfaces 审中-公开
    化学处理材料表面

    公开(公告)号:US20050239295A1

    公开(公告)日:2005-10-27

    申请号:US10832629

    申请日:2004-04-27

    摘要: A method for treating the surfaces of materials to improve wettability and adhesion of subsequently deposited polymer layers is disclosed. Suitable materials for practice of the method include polymeric materials and silicon-containing materials is disclosed. The method involves contacting at least a portion of the surface of the material with an aqueous solution of sulfuric acid or phosphoric acid, followed by rinsing with water. After the acid treatment, the contact angle of the surface decreases, and subsequently deposited polymer coatings easily wet the material's surface and exhibit enhanced adhesion. The method may be used to fabricate useful structures, such as semiconductor structures, optical waveguide structures, and coated articles.

    摘要翻译: 公开了一种用于处理材料表面以改善随后沉积的聚合物层的润湿性和粘附性的方法。 用于实施该方法的合适材料包括聚合材料和含硅材料。 该方法包括将材料表面的至少一部分与硫酸或磷酸的水溶液接触,然后用水冲洗。 在酸处理后,表面的接触角减小,随后沉积的聚合物涂层容易使材料的表面湿润并表现出增强的附着力。 该方法可用于制造有用的结构,例如半导体结构,光波导结构和涂覆制品。

    Siloxane epoxy polymers for low-k dielectric applications
    6.
    发明授权
    Siloxane epoxy polymers for low-k dielectric applications 有权
    用于低k电介质应用的硅氧烷环氧聚合物

    公开(公告)号:US07019386B2

    公开(公告)日:2006-03-28

    申请号:US10832515

    申请日:2004-04-27

    IPC分类号: H01L23/58

    摘要: Semiconductor devices employing siloxane epoxy polymers as low-κ dielectric films are disclosed. The devices include a semiconductor substrate, one or more metal layers or structures and one or more dielectric films, wherein at least one dielectric film in the devices is a siloxane epoxy polymer. Use of siloxane epoxy polymers is advantageous, in part, because the polymers adhere well to metals and have dielectric constants as low as 1.8. Thus, the disclosed semiconductor devices offer much better performance than devices fabricated using conventional dielectric materials. Furthermore, the siloxane epoxy polymer dielectrics are fully curable at low temperatures, exhibit low leakage currents, and remain stable at temperatures greater than 400° C. making them particularly attractive for use in the semiconductor industry

    摘要翻译: 公开了使用硅氧烷环氧聚合物作为低k电介质膜的半导体器件。 这些器件包括半导体衬底,一个或多个金属层或结构以及一个或多个介电膜,其中器件中的至少一个电介质膜是硅氧烷环氧聚合物。 硅氧烷环氧聚合物的使用部分是有利的,因为聚合物很好地粘附到金属上并具有低至1.8的介电常数。 因此,所公开的半导体器件比使用常规电介质材料制造的器件提供更好的性能。 此外,硅氧烷环氧聚合物电介质在低温下是完全可固化的,表现出低的漏电流,并且在高于400℃的温度下保持稳定,使得它们在半导体工业中特别有吸引力

    Solventless, non-polluting radiation curable coatings
    10.
    发明授权
    Solventless, non-polluting radiation curable coatings 有权
    无溶剂,无污染的可辐射固化涂料

    公开(公告)号:US07285579B2

    公开(公告)日:2007-10-23

    申请号:US11079971

    申请日:2005-03-15

    IPC分类号: C08F2/46

    摘要: Solventless siloxane epoxy-based coating compositions for use on metals, plastics, wood, and glass are disclosed. The compositions are cationically curable in air by U.V. or by electron beam radiation. The siloxane epoxy coating compositions exhibit excellent film properties after curing, such as good adhesion, flexibility, and appearance. The coating compositions may be clear or may contain fillers, dyes, and pigments. A method for manufacturing a coated metal, plastic, wood, or glass substrate using the compositions is also disclosed, as well as the coated material manufactured by the method.

    摘要翻译: 公开了用于金属,塑料,木材和玻璃的无溶剂硅氧烷环氧基涂料组合物。 组合物在空气中可阳离子固化。 或通过电子束辐射。 硅氧烷环氧涂料组合物在固化后表现出优异的膜性能,例如良好的粘合性,柔韧性和外观。 涂料组合物可以是透明的或可以含有填料,染料和颜料。 还公开了使用该组合物制造涂覆的金属,塑料,木材或玻璃基板的方法,以及通过该方法制造的涂覆材料。