公开(公告)号：US06888139B2

公开(公告)日：2005-05-03

申请号：US10402977

申请日：2003-04-01

申请人： Ruriko Tsuneta ,  Masanari Koguchi ,  Isao Nagaoki ,  Hiroyuki Kobayashi

发明人： Ruriko Tsuneta ,  Masanari Koguchi ,  Isao Nagaoki ,  Hiroyuki Kobayashi

IPC分类号： H01J37/20 ,  G01N23/225 ,  G21K7/00 ,  H01J37/147 ,  H01J37/21 ,  H01J37/22 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/26 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/221 ,  H01J2237/2487 ,  Y10S977/869 ,  Y10S977/881

摘要： The present invention provides an analysis of displacement by calculating the phase variance image P′ (k, l) between Fourier transformed images of paired images S1 (n, m) and S2 (n, m) to determine the center of gravity of δ peak appearing on the invert Fourier transform image of the images. The present invention provides numerous advantages such as a precision of displacement analysis of a fraction of pixel to thereby allow to improve the precision of focal analysis, or reduced number of pixels required to achieve the same precision, evaluation of reliability of the analysis by using the δ peak intensity, influence of varying background reduced by using a phase variance component. The improved performance by the present invention allows any operator skilled or not to achieve a best focusing.

摘要翻译： 本发明通过计算配对图像S 1（n，m）和S 2（n，m）的傅立叶变换图像之间的相位差图像P'（k，l）来确定重心的位置，来提供位移分析 在图像的反转傅立叶变换图像上出现Δ峰。 本发明提供许多优点，例如像素的一部分的位移分析的精度，从而允许提高焦点分析的精度，或者减少实现相同精度所需的像素数量，通过使用 δ峰强度，通过使用相位方差分量减小了变化背景的影响。 通过本发明的改进的性能允许任何操作者熟练或不能实现最佳聚焦。

公开(公告)号：US06570156B1

公开(公告)日：2003-05-27

申请号：US09571976

申请日：2000-05-16

申请人： Ruriko Tsuneta ,  Masanari Koguchi ,  Isao Nagaoki ,  Hiroyuki Kobayashi

发明人： Ruriko Tsuneta ,  Masanari Koguchi ,  Isao Nagaoki ,  Hiroyuki Kobayashi

IPC分类号： G21K700

CPC分类号： H01J37/26 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/221 ,  H01J2237/2487 ,  Y10S977/869 ,  Y10S977/881

摘要： An autoadjusting electron microscope in which an image processor derives a third image constituting an analysis image from first and second images of a specimen by Fourier-transforming the first and second images to produce Fourier-transformed first and second images, computing a phase variant image from the Fourier-transformed first and second images, and Fourier-transforming or inverse Fourier-transforming the phase variant image to obtain the third image. A computer determines an amount of displacement between the first image and the second image based on a peak appearing in the third image. An identifier determines whether a consistency between the first image and the second image is within a predetermined range based on a magnitude of the peak appearing in the third image. A transformer transforms results obtained by the computer and the identifier into an amount of defocus of an electron lens relative to the specimen.

摘要翻译： 一种自动调整电子显微镜，其中图像处理器通过对第一和第二图像进行傅立叶变换来产生构图分析图像的第一图像和第二图像，以产生经傅立叶变换的第一和第二图像，计算来自 傅里叶变换的第一和第二图像，以及傅里叶变换或逆傅里叶变换相变图像以获得第三图像。 计算机基于出现在第三图像中的峰值来确定第一图像和第二图像之间的位移量。 标识符基于出现在第三图像中的峰值的大小来确定第一图像和第二图像之间的一致性是否在预定范围内。 变压器将由计算机和标识符获得的结果转换成电子透镜相对于样本的散焦量。

公开(公告)号：US07633064B2

公开(公告)日：2009-12-15

申请号：US11773840

申请日：2007-07-05

申请人： Ruriko Tsuneta ,  Masanari Koguchi ,  Hiromi Inada

发明人： Ruriko Tsuneta ,  Masanari Koguchi ,  Hiromi Inada

IPC分类号： H01J37/153

CPC分类号： H01J37/1475 ,  G06T5/006 ,  H01J37/153 ,  H01J37/222 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/1526 ,  H01J2237/1536 ,  H01J2237/221 ,  H01J2237/28 ,  H01J2237/2802 ,  H01J2237/2818 ,  H01J2237/2826 ,  H01J2237/3045

摘要： An electric charged particle beam microscope measures a geometric distortion at an arbitrary magnification with high precision, and corrects the geometric distortion. A geometric distortion at a first magnification is measured as an absolute distortion based on a standard specimen having a cyclic structure. A microscopic structure specimen is photographed at a geometric distortion measured first magnification and at a geometric distortion unmeasured second magnification. The image at the first magnification is equally transformed to the second magnification to generate a scaled image. The geometric distortion at the second magnification is measured as a relative distortion based on the scaled image. The absolute distortion at the second magnification is obtained on the basis of the absolute distortion at the first magnification and the relative distortion at the second magnification. Subsequently, the second magnification is replaced with the first magnification, and the relative distortion measurement is repeated.

摘要翻译： 带电粒子束显微镜可以高精度地测量任意倍率的几何畸变，校正几何失真。 基于具有循环结构的标准样品，测量第一倍率下的几何失真作为绝对变形。 以几何失真测量的第一放大倍率和几何失真未测量的第二倍率拍摄微观结构样本。 将第一放大倍率下的图像等效地变换为第二放大率以生成缩放图像。 第二倍率下的几何畸变被测量为基于缩放图像的相对失真。 基于第一倍率下的绝对失真和第二倍率下的相对失真，获得第二放大倍率下的绝对失真。 随后，用第一倍率代替第二倍率，并重复相对失真测量。

公开(公告)号：US07372051B2

公开(公告)日：2008-05-13

申请号：US11189897

申请日：2005-07-27

申请人： Ruriko Tsuneta ,  Hiromi Inada ,  Masanari Koguchi ,  Takahito Hashimoto

发明人： Ruriko Tsuneta ,  Hiromi Inada ,  Masanari Koguchi ,  Takahito Hashimoto

IPC分类号： G21K7/00 ,  H01J37/26

CPC分类号： H01J37/265 ,  G01N23/22 ,  H01J37/222 ,  H01J37/263 ,  H01J2237/223 ,  H01J2237/24592 ,  H01J2237/2823 ,  H01J2237/2826

摘要： Magnification errors are reduced in the required range of magnification in electric charged particle beam application apparatuses and critical dimension measurement instruments. To achieve this, a first image, whose magnification for the specimen is actually measured, is recorded, a second image, whose magnification for the specimen is unknown, is recorded, and the magnification of the second image for the first image is analyzed by using image analysis. Thereby, the magnification of the second image for the specimen is actually measured. Then, magnification is actually measured in the whole range of magnification by repeating the magnification analysis described above by taking the second image as the first image. Actually measuring the magnification of images for the specimen in the whole range of magnification and calibrating the same permits a reduction of magnification errors by a digit.

摘要翻译： 在带电粒子束施加装置和关键尺寸测量仪器中，放大误差在所需的放大倍率范围内减小。 为了实现这一点，记录实际测量样本的放大倍数的第一图像，记录其样本的放大倍数未知的第二图像，并且通过使用第一图像来分析第一图像的第二图像的放大率 图像分析。 由此，实际测定第2图像的放大率。 然后，通过将第二图像作为第一图像重复上述的倍率分析，实际上在整个放大倍数中进行倍率测量。 实际上，在整个放大倍率范围内测量样本的图像的放大倍率，可以通过数字缩小倍数误差。

公开(公告)号：US07372029B2

公开(公告)日：2008-05-13

申请号：US11806120

申请日：2007-05-30

申请人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

发明人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

IPC分类号： G21K7/00 ,  G01N23/00

CPC分类号： H01J37/1474 ,  H01J37/2955 ,  H01J2237/1501 ,  H01J2237/221 ,  H01J2237/2802

摘要： A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.

摘要翻译： 扫描透射电子显微镜，用于扫描样品上的一次电子束，通过检测器检测来自样品的透射电子，并形成透射电子的图像。 扫描透射电子显微镜包括能够将透射电子束切换到光轴预定量的电子光学系统，以及用于基于发射的电子相对于检测器的位移来确定量的确定单元 通过扫描一次电子束。

公开(公告)号：US08334519B2

公开(公告)日：2012-12-18

申请号：US11745769

申请日：2007-05-08

申请人： Shiano Ono ,  Masanari Koguchi ,  Ruriko Tsuneta

发明人： Shiano Ono ,  Masanari Koguchi ,  Ruriko Tsuneta

IPC分类号： G01F23/00 ,  G21K5/08 ,  G21K5/10

CPC分类号： H01J37/28 ,  G01R31/307 ,  H01J37/04 ,  H01J37/20 ,  H01J37/3056 ,  H01J2237/2008 ,  H01J2237/24564 ,  H01J2237/2594 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

摘要： In a specimen analyzing apparatus such as a transmission electron microscope for analyzing the structure, composition and electron state of an observing specimen in operation by applying external voltage to the specimen to be observed, a specimen support (mesh) including a mesh electrode connectable to external voltage applying portions of the specimen and a specimen holder including a specimen holder electrode connectable to the mesh electrode and current inlet terminals as well are provided. Voltage is applied externally of the specimen analyzing apparatus to the external voltage applying portions of the specimen through the medium of the specimen holder electrode and mesh electrode.

摘要翻译： 在透射电子显微镜等的试样分析装置中，通过对待观察的试样施加外部电压来分析观察试样的结构，组成和电子状态，包括可连接到外部的网状电极的试样支架（网状物） 提供了试样的电压施加部分和包括可连接到网状电极和电流引入端子的样本保持器电极的试样保持器。 通过样本保持器电极和网状电极的介质，将样本分析装置外部的电压施加到试样的外部电压施加部。

公开(公告)号：US07227144B2

公开(公告)日：2007-06-05

申请号：US11328173

申请日：2006-01-10

申请人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

发明人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

IPC分类号： G21K7/00

CPC分类号： H01J37/1474 ,  H01J37/2955 ,  H01J2237/1501 ,  H01J2237/221 ,  H01J2237/2802

摘要： A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this transmitted-electron-beam position change appears in accompaniment with a primary-electron-beam position change on a specimen caused by a scanning coil. First, control over the scanning coil is digitized. Moreover, while being synchronized with a digital control signal resulting from this digitization, values in a de-scanning table registered in a FM(2) are outputted to the de-scanning coil. Here, the de-scanning table is created as follows: Diffraction images before and after activating the scanning coil and the de-scanning coil are photographed using a camera. Then, based on a result acquired by analyzing a resultant displacement quantity of the diffraction images by the image processing, the de-scanning table is created.

摘要翻译： 扫描透射电子显微镜，其增强用于消除电子检测器上的透射电子束位置变化的去扫描线圈的校正精度。 这里，这种透射电子束位置变化伴随着由扫描线圈引起的样品上的一次电子束位置变化。 首先，对扫描线圈的控制被数字化。 此外，在与由该数字化产生的数字控制信号同步的同时，在FM（2）中登记的去扫描表中的值被输出到去扫描线圈。 这里，如下创建去扫描台：使用相机拍摄激活扫描线圈和去扫描线圈之前和之后的衍射图像。 然后，基于通过图像处理分析衍射图像的合成位移量获得的结果，生成去扫描表。

公开(公告)号：US20060151701A1

公开(公告)日：2006-07-13

申请号：US11328173

申请日：2006-01-10

申请人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

发明人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

IPC分类号： G21K7/00

CPC分类号： H01J37/1474 ,  H01J37/2955 ,  H01J2237/1501 ,  H01J2237/221 ,  H01J2237/2802

摘要： A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this transmitted-electron-beam position change appears in accompaniment with a primary-electron-beam position change on a specimen caused by a scanning coil. First, control over the scanning coil is digitized. Moreover, while being synchronized with a digital control signal resulting from this digitization, values in a de-scanning table registered in a FM (2) are outputted to the de-scanning coil. Here, the de-scanning table is created as follows: Diffraction images before and after activating the scanning coil and the de-scanning coil are photographed using a camera. Then, based on a result acquired by analyzing a resultant displacement quantity of the diffraction images by the image processing, the de-scanning table is created.

摘要翻译： 扫描透射电子显微镜，其增强用于消除电子检测器上的透射电子束位置变化的去扫描线圈的校正精度。 这里，这种透射电子束位置变化伴随着由扫描线圈引起的样品上的一次电子束位置变化。 首先，对扫描线圈的控制被数字化。 此外，在与由该数字化产生的数字控制信号同步的同时，在FM（2）中登记的去扫描表中的值被输出到去扫描线圈。 这里，如下创建去扫描台：使用相机拍摄激活扫描线圈和去扫描线圈之前和之后的衍射图像。 然后，基于通过图像处理分析衍射图像的合成位移量获得的结果，生成去扫描表。

公开(公告)号：US6051834A

公开(公告)日：2000-04-18

申请号：US126432

申请日：1998-07-30

申请人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Todokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Ruriko Tsuneta ,  Kuniyasu Nakamura ,  Kensuke Sekihara ,  Jun Motoike

发明人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Todokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Ruriko Tsuneta ,  Kuniyasu Nakamura ,  Kensuke Sekihara ,  Jun Motoike

IPC分类号： H01J37/26 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J2237/226 ,  H01J2237/2802 ,  H01J2237/2807

摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen are carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. A scanning transmission electron microscope has an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons.

摘要翻译： 通过电子显微镜高速准确地进行薄膜样品中的原子排列和原子物质的三维观察，该电子显微镜测量从试样以高角度发射的电子。 扫描透射电子显微镜具有电子检测装置，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 这些光子是电子 - 空穴对的1000倍。

公开(公告)号：US20080283748A1

公开(公告)日：2008-11-20

申请号：US12003374

申请日：2007-12-21

申请人： Takao Matsumoto ,  Ruriko Tsuneta ,  Masanari Koguchi

发明人： Takao Matsumoto ,  Ruriko Tsuneta ,  Masanari Koguchi

IPC分类号： G21K7/00

CPC分类号： H01J37/26 ,  H01J37/20 ,  H01J2237/2001 ,  H01J2237/202 ,  H01J2237/2482 ,  H01J2237/2802

摘要： An electron microscope for simultaneously adjusting the tilt, rotation and temperature of the specimen, and rapidly heating a desired localized section of the specimen. Specimen holders support the specimen on one side, and contain a space on the other side. A laser beam mechanism for heating the vicinity of the specimen irradiates a focused laser beam onto the specimen from this space. The output from a light position sensor installed in the specimen holders is utilized to adjust the irradiation position of the focused laser beam by controlling a fine motion mechanism for inputting light into the vicinity of the specimen stand.

摘要翻译： 电子显微镜，用于同时调整样品的倾斜，旋转和温度，并快速加热样品的所需局部截面。 样品支架一侧支撑样品，另一面包含一个空间。 用于加热试样附近的激光束机构将聚焦的激光束从该空间照射到试样上。 通过控制用于将光输入到试样台附近的微细运动机构，安装在试样架上的光位置传感器的输出用于调整聚焦激光束的照射位置。