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27 条记录 (耗时 0.015 秒)

    Specimens rotating device
    1.
    发明授权
    Specimens rotating device 失效
    标本旋转装置

    公开(公告)号：US4599516A

    公开(公告)日：1986-07-08

    申请号：US472199

    申请日：1983-03-04

    申请人： Shunroku Taya ,  Takeshi Koike ,  Mitsuo Komatsu

    发明人： Shunroku Taya ,  Takeshi Koike ,  Mitsuo Komatsu

    IPC分类号： B01J19/00 ,  C30B31/22 ,  H01J37/317 ,  H01L21/00 ,  G21K5/08

    CPC分类号： H01L21/67017 ,  H01J37/3171

    摘要： A specimens rotating device including a cooling source located in the central portion of a rotary plate, and a plurality of specimens arranged in the peripheral portion of the rotary plate in a manner to surround the cooling source. A plurality of heat pipes are arranged between the cooling source and the specimens so that each heat pipe is secured at one end to the cooling source and at the other end to one of the specimens. Each heat pipe has a working fluid sealed therein and its one end is exposed in a cooling fluid in a channel in the cooling source. Upon rotation of the rotary plate, the specimens are rotated along with the rotary plate, and the working fluid in the heat pipes is shifted toward the specimens. The working fluid absorbs heat from the specimens and evaporates into vapor which quickly returns to the cooling source due to the difference in vapor pressure to condense into condensate by releasing the latent heat of evaporation into the cooling source which constantly receives a fresh supply of cooling fluid, to enable the heat from the specimens to be effectively released to outside.

    摘要翻译： 包括位于旋转板的中心部分的冷却源的试样旋转装置和以围绕冷却源的方式布置在旋转板的周边部分中的多个试样。 多个热管布置在冷却源和试样之间，使得每个热管的一端固定在冷却源上，另一端固定在一个试样上。 每个热管具有密封在其中的工作流体，并且其一端暴露在冷却源的通道中的冷却流体中。 在旋转板旋转时，试样与旋转板一起旋转，并且热管中的工作流体朝向试样移动。 工作流体从样品中吸收热量并蒸发成蒸气，由于蒸汽压力的差异而迅速返回到冷却源，通过将蒸发潜热释放到冷却源中冷凝成冷凝物，冷却源不断接收新鲜的冷却液供应 ，使得来自标本的热能有效地释放到外部。

    Plasma ion source
    2.
    发明授权
    Plasma ion source 失效
    等离子体离子源

    公开(公告)号：US4629930A

    公开(公告)日：1986-12-16

    申请号：US517696

    申请日：1983-07-27

    申请人： Noriyuki Sakudo ,  Osami Okada ,  Susumu Ozasa ,  Katsumi Tokiguchi ,  Hidemi Koike ,  Shunroku Taya ,  Mitsunori Komatsumoto ,  Mitsuo Komatsu

    发明人： Noriyuki Sakudo ,  Osami Okada ,  Susumu Ozasa ,  Katsumi Tokiguchi ,  Hidemi Koike ,  Shunroku Taya ,  Mitsunori Komatsumoto ,  Mitsuo Komatsu

    IPC分类号： H01J27/02 ,  H01J27/16 ,  H05H7/08

    CPC分类号： H01J27/16 ,  H01J27/022

    摘要： A plasma ion source includes a discharge chamber in which a plasma is produced by plasma generator, with an acceleration electrode being disposed adjacent to the discharge chamber in order to extract ions from the produced plasma. A deceleration electrode is disposed adjacent to the acceleration electrode to decelerate the extracted ions, and a ground electrode is disposed adjacent to the deceleration electrode. An insulator container is disposed so as to surround the discharge chamber and the respective electrodes, and a shield ring electrode of ground potential is disposed in the vicinity of the deceleration electrode and along an inner wall surface of the insulator container in order to prevent any discharge from arising across the deceleration electrode and the ground electrode.

    摘要翻译： 等离子体离子源包括其中由等离子体发生器产生等离子体的放电室，其中加速电极邻近放电室设置，以从所产生的等离子体中提取离子。 减速电极与加速电极相邻地设置，以使所提取的离子减速，并且接地电极与减速电极相邻配置。 绝缘体容器设置成围绕放电室和各个电极，并且将地电位的屏蔽环电极设置在减速电极附近并且沿着绝缘体容器的内壁表面设置，以防止任何放电 来自减速电极和接地电极。

    Monochromator and scanning electron microscope using the same
    3.
    发明授权
    Monochromator and scanning electron microscope using the same 失效

    公开(公告)号：US07022983B2

    公开(公告)日：2006-04-04

    申请号：US10751907

    申请日：2004-01-07

    申请人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

    发明人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

    IPC分类号： H01J37/05

    CPC分类号： H01J37/05 ,  H01J37/153 ,  H01J37/28

    摘要： An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.

    Monochromator and scanning electron microscope using the same
    5.
    发明授权
    Monochromator and scanning electron microscope using the same 有权
    单色器和扫描电子显微镜使用相同

    公开(公告)号：US07838827B2

    公开(公告)日：2010-11-23

    申请号：US11987018

    申请日：2007-11-26

    申请人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

    发明人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

    IPC分类号： H01J37/05

    CPC分类号： H01J37/05 ,  H01J37/153 ,  H01J37/28

    摘要： An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.

    摘要翻译： 本发明提供一种扫描电子显微镜，该扫描电子显微镜由能够高分辨率，单色化能量和降低色差的单色仪组成，而不会显着降低一次电子束的电流强度。 扫描电子显微镜安装有一对具有相反偏转方向的扇形磁场和电场，以聚焦电子束，然后通过狭缝限制能量宽度，并且安装相同形状的另一对扇形磁场和电场 在与包含狭缝的表面形成对称镜的位置处。 该结构用于抵消物点和对称镜位置的能量分散，并通过会聚透镜系统空间收缩点聚光点光束，提高扫描电子显微镜的图像分辨率。

    Electrostatic lens arrangement of multi-stages of multi-pole electrodes and mass spectrometer using the same
    7.
    发明授权
    Electrostatic lens arrangement of multi-stages of multi-pole electrodes and mass spectrometer using the same 失效
    使用多极电极和质谱仪的多级静电透镜布置

    公开(公告)号：US5291016A

    公开(公告)日：1994-03-01

    申请号：US9006

    申请日：1993-01-26

    申请人： Shunroku Taya

    发明人： Shunroku Taya

    IPC分类号： H01J49/42 ,  H01J37/12 ,  H01J49/06 ,  H05H7/22

    CPC分类号： H05H7/22 ,  H01J37/12 ,  H01J49/06 ,  H01J2237/04924

    摘要： An electrostatic lens arrangement of three stages of quadrupole electrodes comprising first, second and third stage electrostatic lens unit connected in series, each electrostatic lens unit including first, second, third and fourth electrode arranged around a circle surrounding a center axis of an ion beam passage with an equal interval of 90.degree. C., wherein the respective first, second, third and fourth electrodes for the first, second and third stage electrostatic lens unit are respectively supported by first, second, third and fourth common supporting rod along respective straight lines while electrically insulating each other.

    摘要翻译： 包括串联连接的第一，第二和第三级静电透镜单元的三级四极电极的静电透镜装置，每个静电透镜单元包括围绕离子束通道的中心轴的圆周布置的第一，第二，第三和第四电极 相等间隔为90摄氏度，其中用于第一，第二和第三级静电透镜单元的相应的第一，第二，第三和第三电极分别由第一，第二，第三和第四公共支撑杆沿着相应的直线 同时电绝缘。

    Monochromator and scanning electron microscope using the same
    8.
    发明授权
    Monochromator and scanning electron microscope using the same 有权
    单色器和扫描电子显微镜使用相同

    公开(公告)号：US07315024B2

    公开(公告)日：2008-01-01

    申请号：US11344529

    申请日：2006-02-01

    申请人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

    发明人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

    IPC分类号： G21K7/00 ,  G01N23/00

    CPC分类号： H01J37/05 ,  H01J37/153 ,  H01J37/28

    摘要： An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.

    摘要翻译： 本发明提供一种扫描电子显微镜，该扫描电子显微镜由能够高分辨率，单色化能量和降低色差的单色仪组成，而不会显着降低一次电子束的电流强度。 扫描电子显微镜安装有一对具有相反偏转方向的扇形磁场和电场，以聚焦电子束，然后通过狭缝限制能量宽度，并且安装相同形状的另一对扇形磁场和电场 在与包含狭缝的表面形成对称镜的位置处。 该结构用于抵消物点和对称镜位置的能量分散，并通过会聚透镜系统空间收缩点聚光点光束，提高扫描电子显微镜的图像分辨率。