Integrated biological sensing platform

    公开(公告)号:US11360045B2

    公开(公告)日:2022-06-14

    申请号:US16441672

    申请日:2019-06-14

    IPC分类号: G01N27/414 B01L3/00

    摘要: In an embodiment, a device includes: an electrode configured to change a contact angle of a liquid droplet above the electrode when a first voltage is applied to the electrode; a sensing film overlaying the electrode, wherein the electrode is configured for assessment of a state of the liquid droplet based on a second voltage sensed at the electrode; a reference electrode above the electrode, the reference electrode configured to provide a reference voltage; and a microfluidic channel between the electrode and the reference electrode, wherein the microfluidic channel is configured to manipulate the liquid droplet using the electrode.

    MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES AT DIFFERENT PRESSURES
    6.
    发明申请
    MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES AT DIFFERENT PRESSURES 有权
    微电子系统(MEMS)器件在不同的压力下

    公开(公告)号:US20160130137A1

    公开(公告)日:2016-05-12

    申请号:US14557513

    申请日:2014-12-02

    IPC分类号: B81B7/02 B81C1/00

    摘要: Some embodiments relate to multiple MEMS devices that are integrated together on a single substrate. A device substrate comprising first and second micro-electro mechanical system (MEMS) devices is bonded to a capping structure. The capping structure comprises a first cavity arranged over the first MEMS device and a second cavity arranged over the second MEMS device. The first cavity is filled with a first gas at a first gas pressure. The second cavity is filled with a second gas at a second gas pressure, which is different from the first gas pressure. A recess is arranged within a lower surface of the capping structure. The recess abuts the second cavity. A vent is arranged within the capping structure. The vent extends from a top of the recess to the upper surface of the capping structure. A lid is arranged within the vent and configured to seal the second cavity.

    摘要翻译: 一些实施例涉及在单个基板上集成在一起的多个MEMS器件。 包括第一和第二微机电系统(MEMS)装置的装置基板被结合到封盖结构。 封盖结构包括布置在第一MEMS器件上的第一腔和布置在第二MEMS器件上的第二腔。 第一腔体以第一气体压力填充第一气体。 第二腔体以与第一气体压力不同的第二气体压力填充第二气体。 凹口布置在封盖结构的下表面内。 凹槽邻接第二腔。 在封盖结构内设有排气口。 通气孔从凹槽的顶部延伸到封盖结构的上表面。 盖子布置在通气口内并构造成密封第二腔体。

    INTEGRATED BIOLOGICAL SENSING PLATFORM

    公开(公告)号:US20220299468A1

    公开(公告)日:2022-09-22

    申请号:US17826882

    申请日:2022-05-27

    IPC分类号: G01N27/414 B01L3/00

    摘要: In an embodiment, a device includes: an electrode configured to change a contact angle of a liquid droplet above the electrode when a first voltage is applied to the electrode; a sensing film overlaying the electrode, wherein the electrode is configured for assessment of a state of the liquid droplet based on a second voltage sensed at the electrode; a reference electrode above the electrode, the reference electrode configured to provide a reference voltage; and a microfluidic channel between the electrode and the reference electrode, wherein the microfluidic channel is configured to manipulate the liquid droplet using the electrode.