RF RESONATORS AND FILTERS
    2.
    发明申请

    公开(公告)号:US20180278234A1

    公开(公告)日:2018-09-27

    申请号:US15468710

    申请日:2017-03-24

    申请人: Dror Hurwitz

    发明人: Dror Hurwitz

    IPC分类号: H03H9/58 H03H9/205 H01L23/00

    摘要: A filter package comprising an array of piezoelectric films sandwiched between an array of upper electrodes and lower electrodes: the individual piezoelectric films and the upper electrodes being separated by a passivation material; the lower electrode being coupled to an interposer with a first cavity between the lower electrodes and the interposer; the filter package further comprising a silicon wafer of known thickness attached over the upper electrodes with an array of upper cavities between the silicon wafer and a silicon cover; each upper cavity aligned with a piezoelectric film in the array of piezoelectric films, the upper cavities having side walls comprising the passivation material.