利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

75 条记录 (耗时 0.018 秒)

    Focused ion beam apparatus and method
    1.
    发明授权
    Focused ion beam apparatus and method 失效
    聚焦离子束装置及方法

    公开(公告)号：US5574280A

    公开(公告)日：1996-11-12

    申请号：US204468

    申请日：1994-03-01

    申请人： Toshiaki Fujii ,  Tatsuya Adachi

    发明人： Toshiaki Fujii ,  Tatsuya Adachi

    IPC分类号： H01J37/28 ,  G01Q90/00 ,  H01J37/305 ,  H01J37/31 ,  H01J37/317 ,  H01L21/265 ,  H01L21/306 ,  H01J37/30

    CPC分类号： H01L21/02052 ,  H01J37/3056 ,  H01J37/317 ,  H01J2237/31744 ,  H01J2237/31745

    摘要： A sample semiconductor device which is processed and/or observed with the focused liquid metal ion beam can be returned again to the manufacturing process in this invention. The metal ions used in this apparatus are generally Ga ions. Ga ions contaminate a semiconductor device and a semiconductor manufacturing apparatus by auto-doping. An area which is irradiated with a focused liquid metal ion is doped by the metal ions which are subsequently removed by irradiation with a gas ion beam or covered by hard fusing metal.

    摘要翻译： 用聚焦液态金属离子束进行加工和/或观察的半导体器件可再次返回到本发明的制造工艺中。 在该装置中使用的金属离子通常是Ga离子。 Ga离子通过自动掺杂污染半导体器件和半导体制造装置。 被聚焦液体金属离子照射的区域被金属离子掺杂，金属离子随后通过用气体离子束照射或被硬熔融金属覆盖而被去除。

    TEM sample equipped with an identifying function, focused ion beam device for processing TEM sample, and transmission electron microscope
    2.
    发明授权
    TEM sample equipped with an identifying function, focused ion beam device for processing TEM sample, and transmission electron microscope 有权
    具有识别功能的TEM样品，用于处理TEM样品的聚焦离子束装置和透射电子显微镜

    公开(公告)号：US07095024B2

    公开(公告)日：2006-08-22

    申请号：US10828001

    申请日：2004-04-20

    申请人： Tatsuya Adachi ,  Toshiaki Fujii ,  Masashi Iwatsuki ,  Mikio Naruse ,  Mike Hassel Shearer

    发明人： Tatsuya Adachi ,  Toshiaki Fujii ,  Masashi Iwatsuki ,  Mikio Naruse ,  Mike Hassel Shearer

    IPC分类号： H01J37/26 ,  H01J37/304

    CPC分类号： H01J37/3056 ,  B01L3/545 ,  B01L2300/021 ,  B01L2300/0822 ,  G01N1/32 ,  G01N2035/00772 ,  H01J37/304 ,  H01J2237/30416

    摘要： The problem of the present invention is to provide a TEM sample equipped with an identifying function for easily specifying a detailed TEM sample and to provide a system for handling the management of information relating to the TEM sample using the TEM when making observations that is constructed with the FIB device manufacturing the sample. The TEM sample of the present invention is written with a mark encoding information specifying the sample at a specified location of a peripheral part. Information relating to the sample filed taking sample specifying information as an index is supplied to a TEM as associated matter. The sample working FIB device and observation TEM device of the present invention are provided with a function enabling writing of information relating to the sample and images to the file during operation which is then read out and utilized on a display.

    摘要翻译： 本发明的问题是提供一种具有识别功能的TEM样品，用于容易地指定详细的TEM样品，并提供一个系统，用于当进行观察时使用TEM处理与TEM样品有关的信息的管理， FIB设备制造样品。 本发明的TEM样品用指定样品在周边部分的指定位置处的标记编码信息进行写入。 以采样指定信息为索引的样本提供的信息作为关联事项提供给TEM。 本发明的样品工作FIB装置和观察TEM装置具有能够在操作期间将关于样品和图像的信息写入文件的功能，然后在显示器上读出并利用该功能。

    Apparatus for processing and observing a sample
    3.
    发明授权
    Apparatus for processing and observing a sample 失效
    用于处理和观察样品的装置

    公开(公告)号：US06870161B2

    公开(公告)日：2005-03-22

    申请号：US10644696

    申请日：2003-08-20

    申请人： Tatsuya Adachi ,  Toshiaki Fujii ,  Hiroshi Sawaragi ,  Yasuhiko Sugiyama

    发明人： Tatsuya Adachi ,  Toshiaki Fujii ,  Hiroshi Sawaragi ,  Yasuhiko Sugiyama

    IPC分类号： G01N1/28 ,  H01J37/20 ,  H01J37/305 ,  G01N1/04 ,  H01J37/26

    CPC分类号： G01N1/286 ,  G01N2001/2873 ,  H01J37/20 ,  H01J37/3056 ,  H01J2237/2817 ,  H01J2237/31745

    摘要： An apparatus for processing and observing a sample has a sample stage for supporting a sample at a preselected location thereof, a focused ion beam irradiation system for irradiating the sample with a focused ion beam along an optical axis to cut out a portion from the sample, and a side entry stage disposed over the sample stage and extending slantingly with respect to the optical axis of the focused ion beam irradiated by the focused ion beam irradiation system. The side entry stage has a microscope sample holder for picking up the cut-out sample portion directly from the preselected location of the sample and for supporting the sample portion. The microscope sample holder is configured to be removed from the side entry stage while supporting the sample portion and to be connected to an entry stage of a microscope device for observing the sample portion.

    摘要翻译： 用于处理和观察样品的装置具有用于在预选位置处支撑样品的样品台，用于沿着光轴照射具有聚焦离子束的样品的聚焦离子束照射系统，以从样品中切出一部分， 以及设置在样品台上并相对于由聚焦离子束照射系统照射的聚焦离子束的光轴倾斜延伸的侧入口台。 侧进入台具有用于从样品的预选位置直接拾取切出的样品部分并用于支撑样品部分的显微镜样品架。 显微镜样品架被配置为在支撑样品部分的同时从侧入口台移除并连接到用于观察样品部分的显微镜装置的入口台。

    Electron microscope and specimen analyzing method
    4.
    发明授权
    Electron microscope and specimen analyzing method 有权
    电子显微镜和样品分析方法

    公开(公告)号：US08664598B2

    公开(公告)日：2014-03-04

    申请号：US12931411

    申请日：2011-01-28

    申请人： Masakatsu Hasuda ,  Atsushi Uemoto ,  Toshiaki Fujii ,  Junichi Tashiro

    发明人： Masakatsu Hasuda ,  Atsushi Uemoto ,  Toshiaki Fujii ,  Junichi Tashiro

    IPC分类号： H01J37/29

    CPC分类号： G01N23/225 ,  H01J37/28

    摘要： An electron microscope has a focused ion beam column positioned relative to an electron beam column so that the focused ion beam substantially perpendicularly intersects the electron beam. A backscattered electron detector is positioned relative to the focused ion beam column so that the direction normal to a detection plane of the backscattered electron detector is substantially perpendicular to the direction of the focused ion beam. The backscattered electron detector is configured and positioned to detect backscattered electrons released in a spread of at least about 70 degrees in width from the surface of the section by irradiation of the section with the electron beam 1a.

    摘要翻译： 电子显微镜具有相对于电子束柱定位的聚焦离子束柱，使得聚焦离子束基本上垂直于电子束相交。 反向散射电子检测器相对于聚焦离子束柱定位，使得垂直于后向散射电子检测器的检测平面的方向基本上垂直于聚焦离子束的方向。 背散射电子检测器被配置和定位成通过照射具有电子束1a的部分来检测从该部分的表面以宽度至少约70度的扩散中释放的反向散射电子。

    Container and loader for substrate
    5.
    发明授权
    Container and loader for substrate 有权
    用于基材的容器和装载机

    公开(公告)号：US08348583B2

    公开(公告)日：2013-01-08

    申请号：US10036802

    申请日：2001-12-21

    申请人： Toshiaki Fujii ,  Osamu Horita ,  Koji Ohyama ,  Toshiya Nakayama ,  Fumio Sakiya ,  Mineo Kinpara

    发明人： Toshiaki Fujii ,  Osamu Horita ,  Koji Ohyama ,  Toshiya Nakayama ,  Fumio Sakiya ,  Mineo Kinpara

    IPC分类号： B65G49/07

    CPC分类号： H01L21/67772

    摘要： A loader is provided, which is disposed in a low cleanliness room along a border between the low cleanliness room and a high cleanliness room, for transporting a dust free article between an inside of a container receiving the dust free article and the high cleanliness room, comprising a movable stage for mounting the container; an opening portion through which the dust free article is transported between the container and the high cleanliness room; a door for opening and closing the opening portion; a unifying means for unifying a cover of the container and the door when the container approaches the door; and a driving apparatus for moving the cover and the door unified within the loader to open and close the opening portion and the container.

    摘要翻译： 提供一种装载机，其设置在低洁净室和低洁净室之间的边界的低洁净室中，用于在容纳无尘物品的容器的内部和高洁净室之间运送无尘物品， 包括用于安装所述容器的可移动台; 开口部分，无尘物品通过该开口部分在容器和高洁净室之间输送; 用于打开和关闭开口部分的门; 用于当容器接近门时统一容器和门的盖的统一装置; 以及驱动装置，用于将盖和门一体地移动到装载机内，以打开和关闭开口部分和容器。

    APPARATUS FOR WORKING AND OBSERVING SAMPLES AND METHOD OF WORKING AND OBSERVING CROSS SECTIONS
    9.
    发明申请
    APPARATUS FOR WORKING AND OBSERVING SAMPLES AND METHOD OF WORKING AND OBSERVING CROSS SECTIONS 有权
    用于工作和观察样本的工具及其工作方法和观察截面

    公开(公告)号：US20080224198A1

    公开(公告)日：2008-09-18

    申请号：US12047013

    申请日：2008-03-12

    申请人： Toshiaki Fujii ,  Haruo Takahashi ,  Junichi Tashiro

    发明人： Toshiaki Fujii ,  Haruo Takahashi ,  Junichi Tashiro

    IPC分类号： G01N23/225

    CPC分类号： H01J37/3056 ,  G01N1/286 ,  H01J2237/31745

    摘要： The apparatus for working and observing samples comprises a sample plate on which a sample is to be placed; a first ion beam lens barrel capable of irradiating a first ion beam over a whole predetermined irradiation range at one time; a mask that can be arranged between the sample plate and the first ion beam lens barrel, and shields part of the first ion beam; mask-moving means capable of moving the mask; a charged particle beam lens barrel capable of scanning a focused beam of charged particles in the range irradiated with the first ion beam; and detection means capable of detecting a secondarily generated substance.

    摘要翻译： 用于工作和观察样品的装置包括样品板，样品板将放置在样品板上; 一次能够在整个预定照射范围内照射第一离子束的第一离子束透镜镜筒; 可以在样品板和第一离子束透镜筒之间布置的掩模，并且屏蔽第一离子束的一部分; 掩模移动装置，能够移动面罩; 带电粒子束透镜镜筒，其能够扫描在第一离子束照射的范围内的聚集的带电粒子束; 以及能够检测次要生成物质的检测装置。

    Skin preparations for external use
    10.
    发明授权
    Skin preparations for external use 有权
    外用皮肤准备

    公开(公告)号：US06939859B1

    公开(公告)日：2005-09-06

    申请号：US09937414

    申请日：2000-03-30

    申请人： Hironobu Murase ,  Toshiaki Fujii

    发明人： Hironobu Murase ,  Toshiaki Fujii

    IPC分类号： A01N43/04 ,  A01N43/16 ,  A61K31/35 ,  A61K31/70 ,  A61K31/7048 ,  A61P17/00 ,  A61P17/16 ,  A61P43/00 ,  C07H15/26 ,  C07H17/065

    CPC分类号： A61K8/602 ,  A61Q19/02 ,  A61Q19/08

    摘要： An dermatological agent for external use is disclosed which contains a chromanol glycoside represented by the following general formula (1) (wherein R1, R2, R3, and R4 which may be the same or different, each represent a hydrogen atom or a lower alkyl group, R5 represents a hydrogen atom, a lower alkyl group, or a lower acyl group, X represents a monosaccharic residue or an oligosaccharic residue optionally having the hydrogen atom of the hydroxyl group in the saccharic residue substituted with a lower alkyl group or a lower acyl group, n represents an integer in the range of 0-6, and m represents an integer in the range of 1-6). This is a novel dermatological agent for external use which excels in stability and percutaneous absorbency, manifests an effective action safely at a small application rate, and effectively prevents and cures the dermopathy. It is very useful as an agent for preventing and curing the disorders caused by the ultraviolet light, an agent for preventing and allaying the sedimentation of pigment in the skin, an agent for beautifying the skin in white, an agent for preventing the senescence of the skin, an agent for activating cells, an agent for preventing and curing the dermopathy, and a cosmetic preparation.

    摘要翻译： 公开了一种外用皮肤病药，其含有以下通式（1）表示的色原糊精糖苷（其中R 1，R 2，R 3，R 3， 和/或相同或不同的R 4各自表示氢原子或低级烷基，R 5表示氢原子，低级烷基 基团或低级酰基，X表示任选具有由低级烷基或低级酰基取代的糖残基中的羟基的氢原子的单糖残基或寡糖残基，n表示在 0-6，m表示1-6的整数。 这是一种外用的新型皮肤病学药剂，其稳定性和经皮吸收性优异，以小的施用率安全地显示出有效的作用，有效地防止并治愈了皮肤病。 作为用于预防和治疗由紫外线引起的疾病的药剂，用于预防和消除皮肤中色素沉淀的药剂，美白白皮肤剂，防止紫外线衰老的药剂是非常有用的 皮肤，活化细胞的药剂，用于预防和治愈皮肤病的药剂和化妆品制剂。