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    Superconductive device manufacturing method
    2.
    发明授权
    Superconductive device manufacturing method 失效
    超导体制造方法

    公开(公告)号：US5904861A

    公开(公告)日：1999-05-18

    申请号：US622301

    申请日：1996-03-25

    申请人： Masahito Ban ,  Tsuyoshi Takenaka ,  Katsumi Suzuki ,  Youichi Enomoto

    发明人： Masahito Ban ,  Tsuyoshi Takenaka ,  Katsumi Suzuki ,  Youichi Enomoto

    IPC分类号： H01L39/24 ,  C23F1/00

    CPC分类号： H01L39/2467

    摘要： A superconductive device manufacturing method is disclosed, which can prevent the characteristic deterioration on the processed surface, reduce the number of process steps, and thereby shorten the manufacturing time. The superconductive device manufacturing method comprises the steps of: forming a YBCO film (301) on a substrate (201); forming a mask pattern (302) on the formed YBCO film (301); and etching the YBCO film (301) by use of the formed mask pattern (302) and a plasma including at least oxygen plasma.

    摘要翻译： 公开了一种可以防止加工面的特性劣化，减少加工工序数量，从而缩短制造时间的超导体制造方法。 超导器件制造方法包括以下步骤：在衬底（201）上形成YBCO膜（301）; 在形成的YBCO膜（301）上形成掩模图案（302）; 以及通过使用形成的掩模图案（302）和至少包括氧等离子体的等离子体来蚀刻YBCO膜（301）。

    Josephson junction in a wiring pattern of a superconductor oxide
    8.
    发明授权
    Josephson junction in a wiring pattern of a superconductor oxide 失效
    约瑟夫逊结在超导体氧化物的布线图中

    公开(公告)号：US5534715A

    公开(公告)日：1996-07-09

    申请号：US148277

    申请日：1993-11-08

    申请人： Christian Neumann ,  Katsumi Suzuki ,  Youichi Enomoto ,  Shoji Tanaka

    发明人： Christian Neumann ,  Katsumi Suzuki ,  Youichi Enomoto ,  Shoji Tanaka

    IPC分类号： H01L39/22 ,  H01L39/24

    CPC分类号： H01L39/2496

    摘要： A Josephson junction is disclosed which includes a substrate of a single crystal having a substantially flat surface, a wiring pattern of an oxide superconductor formed on the flat surface of the substrate, and an altered region formed having a width of 300 nm or less and formed in the wiring pattern to intersect the wiring pattern, the crystal orientations of the wiring pattern on both sides of the altered region being equal to each other. The Josephson junction may be prepared by a process including the steps of: (a) coating a surface of a substrate of a single crystal with a normal metal to form a protecting layer over the surface of the substrate; (b) irradiating a predetermined portion of the protecting layer with a focused ion beam so that an irradiated portion is formed in the substrate; (c) removing the protecting layer from the substrate; and (d) forming a wiring pattern of an oxide superconductor on the surface of the substrate from which the protecting layer has been removed such that the wiring pattern crosses the irradiated portion of the substrate, thereby forming an altered portion in the wiring pattern at a position above the irradiated portion.

    摘要翻译： 公开了一种约瑟夫逊结，其包括具有基本上平坦的表面的单晶的衬底，形成在衬底的平坦表面上的氧化物超导体的布线图案和形成为具有300nm或更小的宽度的改变区域 在与布线图案相交的布线图案中，改变区域两侧的布线图案的晶体取向彼此相等。 约瑟夫逊结可以通过包括以下步骤的方法来制备：（a）用普通金属涂覆单晶的衬底的表面以在衬底的表面上形成保护层; （b）用聚焦离子束照射保护层的预定部分，使得在基板中形成照射部分; （c）从衬底上去除保护层; 以及（d）在已经去除了保护层的基板的表面上形成氧化物超导体的布线图案，使得布线图案与基板的照射部分交叉，从而在布线图案中形成改变部分 位于照射部分上方。

    Superconductor mixer and phase control method therefor
    10.
    发明授权
    Superconductor mixer and phase control method therefor 失效
    超导体混合器及其相位控制方法

    公开(公告)号：US5920811A

    公开(公告)日：1999-07-06

    申请号：US876244

    申请日：1997-06-16

    申请人： Katsumi Suzuki ,  Youichi Enomoto ,  Shoji Tanaka

    发明人： Katsumi Suzuki ,  Youichi Enomoto ,  Shoji Tanaka

    IPC分类号： H01L39/22 ,  H03D7/12 ,  H04B1/28 ,  H04B1/26

    CPC分类号： H04B1/28 ,  H03D7/005

    摘要： In a superconductor mixer, a non-linear element is provided on a substrate. The non-linear element comprises at least one Josephson junction connected in series. An antenna pattern of superconductor, an intermediate frequency output pattern of superconductor, and a bias current pattern of superconductor are connected to the non-linear element. A signal high frequency wave (RF) and a local reference frequency wave (LO) are received by the antenna pattern and then absorbed in the non-linear element to obtain an intermediate frequency (IF) signal. Then, with applying a current to the series connected Josephson junction in the non-linear element from the bias current pattern, the intermediate frequency (IF) signal as a frequency signal of a difference between the signal high frequency wave (RF) and the local reference frequency wave (LO) is output to the intermediate frequency output pattern. At this time, by varying the current supplied from the bias current pattern, a phase of the output intermediate frequency (IF) signal is varied.

    摘要翻译： 在超导体混合器中，在衬底上提供非线性元件。 非线性元件包括至少一个串联连接的约瑟夫逊结。 超导体的天线图案，超导体的中频输出图案和超导体的偏置电流图案被连接到非线性元件。 信号高频（RF）和局部参考频率波（LO）由天线方向接收，然后被吸收在非线性元件中以获得中频（IF）信号。 然后，通过从偏置电流模式向非线性元件中的串联连接的约瑟夫逊结施加电流，将中频（IF）信号作为信号高频波（RF）与本地 参考频率波（LO）被输出到中频输出模式。 此时，通过改变从偏置电流模式提供的电流，改变输出中频（IF）信号的相位。