Multi-directional thermal actuator
    8.
    发明授权
    Multi-directional thermal actuator 失效
    多向导热器

    公开(公告)号:US06438954B1

    公开(公告)日:2002-08-27

    申请号:US09845188

    申请日:2001-04-27

    IPC分类号: F01B2910

    摘要: A micrometer sized multi-directional thermal actuator capable of repeatable and rapid displacement in a substantially horizontal direction, a substantially vertical direction, and/or a combination thereof. The multi-directional thermal actuator constructed on a surface of a substrate includes three or more beams each cantilevered from one or more anchors at a first end to extend generally parallel to the surface of the substrate. A member mechanically and electrically couples the distal ends of the beams. Application of current to a circuit comprising combinations of any two or more of the beams displaces the member in one of three or more non-parallel radial directions, respectively.

    摘要翻译: 一种千分尺尺寸的多方向热致动器,其能够在基本上水平的方向,基本上垂直的方向上重复和快速地移动,和/或它们的组合。 构造在基板的表面上的多向热致动器包括三个或更多个梁,每个梁在第一端处从一个或多个锚固件悬臂延伸,以大致平行于基板的表面延伸。 机械和电气耦合梁的远端的部件。 将电流施加到包括任何两个或更多个光束的组合的电路中,分别使构件在三个或更多个非平行的径向方向之一中移位。