Abstract:
The present invention provides an inspection apparatus and inspection method. The inspection apparatus includes a stage mechanism for supporting an object under inspection. A spatial filter is provided in the detection optical system to inspect the object. A printer is used to print the results of the spatial filter. The spatial filter can be provided in the form of a Fourier transformed image.
Abstract:
An optical inspection unit inspects a surface of an object under inspection optically. A processing unit detects defects on the surface of the object under inspection and their features according to inspection results from the optical inspection unit, detects positions of the detected defects on the surface of the object under inspection, and classifies the detected defects according to their features. The processing unit selects the defects, on which a X-ray analysis should be performed, according to predetermined conditions about the features or the classification results of the defects. Alternatively, the processing unit displays the positions and the classification results of the defects, and an operator picks the defects, on which the X-ray analysis should be performed. A X-ray inspection unit performs the X-ray analyses on the selected or picked defects.
Abstract:
Carrier tapes, each carrying electronic circuitry parts at predetermined intervals on a carrier portion, are successively and continuously fed to a punching station from a tape feeding station with at least a pair of tape supply reels. While a carrier tape from a first supply reel is being fed to the punching station, a carrier tape from a second supply reel is set in a standby position. As soon as the carrier tape from the first supply reel is consumed to a last electronic part, a head end of the carrier tape from the second supply reel is spliced to a tail end of the carrier tape of the first supply reel by means of tape holder members located in the course of a tape supply route between the tape feeding station and the tape punching station, thereby make replacement of the tape supply reel quicker and easier.
Abstract:
An apparatus for inspecting foreign matter in repeated micro-miniature patterns formed upon a surface of an object to be inspected, comprising: an inspection light illuminating device for irradiating an inspection light directed upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; a scattered light detector for detecting scattered light of the inspection light being scattered upon the surface said object to be inspected; means for obtaining a first information related to a foreign matter attaching upon the surface of said object to be inspected, which is obtained on a basis of the detection of said scattered light by said scattered light detector; an illumination means for applying a bright field illumination upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; means for picking up the image of the foreign matter, under a bright field illumination by said illumination means; means for obtaining a second information related to said foreign matter, depending upon an image of said foreign matter, which is obtained on a basis of said picking up of the image by said image picking up means under the bright field illumination; and means for displaying said first information and said second information, both being related to said foreign matter, on a display screen thereof.
Abstract:
A memory test system can screen objects of tests accurately at low cost in quasi-operating conditions by utilizing a personal computer. The system utilizes a PC tester comprising a measurement PC unit that carries a memory module to be used as reference; a signal distribution unit for distributing the signal taken out from the measurement PC unit; a plurality of PFBs mounted with respective objected products to be observed simultaneously by using the signals distributed by the signal distribution unit; a display panel for displaying the current status of the test that is being conducted; a power source for producing the operating voltage of the system; and a control PC for controlling the selection of test parameters and various analytical operations. The PC tester is adapted to take out the signal from the chip set LSI on the PC mother board in the measurement PC unit to the individual memories on the memory module or the memory module per se and test them in quasi-operating conditions.
Abstract:
An apparatus for optically inspecting particles and/or defects correlates sizes of particles and/or defects to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.
Abstract:
From a supply reel which is set in position at an ACF (Anisotropic Concuctive Film) feeding station, an ACF tape having an ACF laminated on one side of a liner tape is drawn out by an ACF bonding means. At least two reel mount members are provided on a reel stand at the ACF feeding station to mount two ACF tape supply reels concurrently thereon. The reel stand is connected to a switch means thereby to switch the two reel mount members either to an operating or tape supplying position or a standby position. As soon as an ACF tape from a supply reel in the operating position is consumed completely, a fresh supply reel in the standby position is switched into the operating position to continue the supply of the ACF tape.
Abstract:
A testing apparatus of a magnetic recording medium for conducting a test on the magnetic recording medium by using reproduced data obtained through reproduction of the magnetic medium, including a plurality of conversion means for converting the reproduced data into digital data, holding means for holding the digital data converted by the plurality of conversion means, data processing means for performing a calculation process on the digital data held by the holding means in relation to a magnetic characteristic of the magnetic recording medium, and analysis processing means for performing an analysis to determine whether or not information obtained by the data processing means satisfies a certain condition.
Abstract:
An abrasive tape is supplied to a tape head by a tape supply unit and taken up from the tape head by a tape take-up unit. The tape head presses the abrasive tape against a surface of an object under polish, which is rotated by a rotating unit. A tape head pressuring unit utilizes a voice coil motor, for example. Since the tape head pressuring unit generates a pressuring force for pressuring the tape head using the electromagnetic force, it is able to set a minute pressuring force by controlling a drive signal, and to obtain the fine adjustment of the pressuring force easily by controlling the electric signal. Therefore, it becomes possible to press the abrasive tape against the surface of the object under polish with a desired low pressure.