Method for forming a porous polishing pad
    2.
    发明申请
    Method for forming a porous polishing pad 有权
    形成多孔抛光垫的方法

    公开(公告)号:US20060226567A1

    公开(公告)日:2006-10-12

    申请号:US11398265

    申请日:2006-04-04

    CPC classification number: B29C70/66 B24D11/001 B29B7/726 B29B7/749 B29B7/90

    Abstract: The present invention provides a method of forming a chemical mechanical polishing pad comprising providing a polymeric matrix with fluid-filled unexpanded microspheres, curing the polymeric matrix and heating the polymeric matrix and the microspheres to expand the microspheres.

    Abstract translation: 本发明提供一种形成化学机械抛光垫的方法,包括提供具有流体填充的未膨胀微球的聚合物基质,固化聚合物基质并加热聚合物基质和微球体以膨胀微球体。

    Method for forming a striation reduced chemical mechanical polishing pad
    3.
    发明申请
    Method for forming a striation reduced chemical mechanical polishing pad 审中-公开
    形成条纹化学机械抛光垫的方法

    公开(公告)号:US20060108701A1

    公开(公告)日:2006-05-25

    申请号:US10996239

    申请日:2004-11-23

    Applicant: Allan Saikin

    Inventor: Allan Saikin

    Abstract: The present invention provides a method of forming a chemical mechanical polishing pad, providing a tank with polymeric materials and a storage silo with microspheres. Further, the method includes the step of providing a curative storage tank with curing agents. Further, the method includes delivering the polymeric materials and the microspheres to a premix prep tank and forming a pre-mixture of the polymeric materials and the microspheres. The method further includes the step of recirculating the pre-mixture until a desired bulk density is reached. The method further provides the steps of delivering the pre-mixture to a premix run tank, forming a mixture of the pre-mixture and the curing agents, pouring the mixture into a mold and cutting the mold into the polishing pad.

    Abstract translation: 本发明提供一种形成化学机械抛光垫的方法,为罐提供聚合材料和具有微球的储存仓。 此外,该方法包括向固化储罐提供固化剂的步骤。 此外,该方法包括将聚合物材料和微球体输送到预混料制备罐中并形成聚合物材料和微球体的预混合物。 该方法还包括使预混合物再循环直到达到所需体积密度的步骤。 该方法还提供将预混合物输送到预混合运行罐,形成预混合物和固化剂的混合物的步骤,将混合物倒入模具中并将模具切割成抛光垫。

    Process for the continuous performance of an anionic polymerization of lactams
    4.
    发明授权
    Process for the continuous performance of an anionic polymerization of lactams 失效
    LACTAMS的静电聚合的连续性能的方法

    公开(公告)号:US3793255A

    公开(公告)日:1974-02-19

    申请号:US22599772

    申请日:1972-02-14

    Applicant: HANDTMANN A

    Inventor: HANDTMANN A

    CPC classification number: B29B7/749 C08G69/18 C08G69/20

    Abstract: A PROCESS FOR THE CONTINUOUS PERFORMANCE OF AN ANIONIC POLYMERIZATION LACTANS IS DISCLOSED. IN THE PROCESS CATALYSTS SUCH AS LACTAM ALKALI OR ALKALINE EARTH METAL COMPOUNDS AND ACTIVATORS SUCH AS ACYLATED LACTAMS OR ACYLATABLE COMPOUNDS ARE MIXED WITH MOLTEN LACTAM IN THE PRESENCE OF NITROGEN. THE PROCESS IS CHARACTERIZED BY THE FACT THAT SIMULTANEOUSLY ONE PORTION OF MOLTEN LACTAM IS MIXED WITH AN ACTIVATOR AND A SECOND PORTION IS MICE IXED WITH A CATALYST,IN EACH CASE WITH EXCLUSION OF OXYGEN AND CONTINUOUS NITROGEN ACTION ON THE TWO MELTS,BEFORE EVENTUALLY BEING METERED VIA A SYPHON-LIKE SPIRAL TUBE SYSTEM UNDER THE SAME TEMPERATURE ACTION AS THE MELTS TO A MIXING DEVICE INTO WHICH THE TWO SPIRAL TUBE SYSTEMS DISCHARGE WHEREBY POLYMERIZATION TAKES PLACE. ALSO DISCLOSED IS APPARATUS FOR USE IN THE DESCRIBED PROCESS CHARACTERIZED BY TWO FIRST CONTAINERS FOR PREPARING THE TWO LACTAM MELT PARTIAL QUANTITIVES TO WHICH IS CONNECTED IN EACH CASE A SECOND CONTAINER FOR A CATALYST OR AN ACTIVATOR WHICH VIA SYNCHRONOUSLY OPERATING LIQUID PUMPS ARE EACH CONNECTED WITH A SYPHON-LIKE SPIRAL TUBE SYSTEM LEADING TO A MIXING DEVICE, WHEREBY ALL CONTAINERS ARE SEALED IN AN AIR-TIGHT MANNER AND PUMPS AND SPIRAL TUBE SYSTEM ARE HEATABLE AND WHEREIN A NITROGEN FEED AND DRAIN SYSTEM AND A STIRRER ARE PROVIDED.

    Method for forming a porous reaction injection molded chemical mechanical polishing pad
    7.
    发明授权
    Method for forming a porous reaction injection molded chemical mechanical polishing pad 有权
    形成多孔反应注塑化学机械抛光垫的方法

    公开(公告)号:US07399437B2

    公开(公告)日:2008-07-15

    申请号:US11398419

    申请日:2006-04-04

    Abstract: The present invention provides a method of forming a chemical mechanical polishing pad comprising, providing a tank with polymeric materials, providing a storage silo with microspheres and providing an isocyanate storage tank with isocyanates. The invention further provides delivering the polymeric materials and the microspheres to a premix prep tank, forming a pre-mixture of the polymeric materials and the microspheres, delivering the pre-mixture to a premix run tank and forming a mixture of the pre-mixture and the isocyanates. Further the invention provides injecting the mixture into a closed mold, curing the polishing pad in the mold and degassing at least one of the tank, isocyanate storage tank and the mold.

    Abstract translation: 本发明提供一种形成化学机械抛光垫的方法,其包括向罐提供聚合物材料,为储存仓提供微球,并向异氰酸酯储罐提供异氰酸酯。 本发明进一步提供了将聚合物材料和微球体递送到预混料制备罐,形成聚合物材料和微球体的预混合物,将预混合物输送到预混合槽中并形成预混合物和 异氰酸酯。 此外,本发明提供了将混合物注入封闭的模具中,固化模具中的抛光垫并且将罐,异氰酸酯储存罐和模具中的至少一个脱气。

    Method and apparatus for precision pumping, ratioing and dispensing of
work fluids
    9.
    发明授权
    Method and apparatus for precision pumping, ratioing and dispensing of work fluids 失效
    精密泵送,工作流体比例和分配的方法和装置

    公开(公告)号:US4921133A

    公开(公告)日:1990-05-01

    申请号:US399395

    申请日:1989-08-24

    Applicant: John O. Roeser

    Inventor: John O. Roeser

    CPC classification number: B29B7/749 F02B1/04

    Abstract: A pump/dispenser, ratioing/mixer dispenser apparatus and a method and apparatus for precision vacuum degassed dispensing of work liquids are presented. The pump/dispenser is a positive displacement high precision piston/cylinder constant flush type with piston smaller than chamber. The piston is advanced along its stroke in tiny repeatable adjustably programmable steps, the infinitely adjustable precision ratioing programmable mixing being provided when two such pumps are used. The vacuum degassed work liquids dispensing system features the creation and maintenance of a positive absolute pressure on the work liquid(s) when exiting the degassing chamber(s) to the dispensing outlet(s) whether moved along the flow path through the precision dispensing pump(s) or other types of pump(s). Available softwear and adjustable programmable precision hardwear of the system may be provided by a widely available personal computer. Further degassing is provided by dispensing in a vacuum.

    Abstract translation: 提出了一种泵/分配器,比例/混合器分配器装置以及用于工作液体的精密真空脱气分配的方法和装置。 泵/分配器是活塞小于室的正排量高精度活塞/缸恒定冲洗型。 活塞在其可重复可调整的可编程步骤中沿其行程前进,当使用两个这样的泵时,提供无限可调精度比的可编程混合。 真空脱气的工作液体分配系统的特征在于,当离开脱气室到分配出口时,在工作液体上产生和保持正的绝对压力,无论是沿流动路径移动通过精密分配泵 或其他类型的泵。 系统的可用软件和可调节可编程精密硬件可以由广泛可用的个人计算机提供。 通过在真空中分配来进一步提供脱气。

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