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公开(公告)号:US20140270087A1
公开(公告)日:2014-09-18
申请号:US14207216
申请日:2014-03-12
发明人: Shang-hyeun PARK , Paul R. SCHWOEBEL , Il-hwan KIM , Do-yoon KIM , Yong-chul KIM , Chang-soo LEE , Tae-won JEONG
IPC分类号: H01J35/06
CPC分类号: H01J35/065 , A61B6/40 , A61B6/4064 , A61B6/4488 , B82Y30/00 , H01J1/304 , H01J1/90 , H01J3/021 , H01J3/38 , H01J19/24 , H01J19/42 , H01J19/44 , H01J35/045 , H01J35/06 , H01J2201/304 , H01J2201/30469 , H01J2201/3195 , H01J2203/0204 , H01J2203/0208 , H01J2203/0212 , H01J2203/0216 , H01J2203/0236 , H01J2235/06 , H01J2235/1212 , H01J2235/1291 , H01J2235/1295 , Y10S977/742 , Y10S977/939 , Y10S977/95
摘要: An x-ray generator includes a housing, a cathode block that is arranged in the housing and emits electrons via a field emission scheme, an anode block that is arranged in the housing and generates x-rays in response to the electrons emitted from the cathode block and collide with the anode block, and a heat sink block that contacts the cathode block and dissipates heat generated therein to an outside of the housing.
摘要翻译: X射线发生器包括壳体,阴极块,其布置在壳体中并经由场致发射方案发射电子;阳极块,布置在壳体中并响应于从阴极发射的电子产生X射线 阻挡并与阳极块碰撞,以及散热块,其接触阴极块并将其中产生的热量散发到壳体的外部。
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2.
公开(公告)号:US09847208B1
公开(公告)日:2017-12-19
申请号:US15233092
申请日:2016-08-10
发明人: Pavel Adamec
IPC分类号: H01J1/144 , H01J1/15 , H01J37/073 , H01J37/147 , H01J37/244 , H01J37/28
CPC分类号: H01J37/073 , H01J37/147 , H01J37/244 , H01J37/28 , H01J2203/0204
摘要: The present disclosure provides an electron beam device (500) for inspecting a sample (10) with an electron beam, comprising an electron beam source comprising a cold field emitter (100) for emitting an electron beam, electron beam optics for directing and focusing the electron beam onto the sample (10), and a detector device (540) for detecting secondary charged particles generated by impingement of the electron beam on the sample (10). The cold field emitter (100) includes an emitter tip (110), a base arrangement (120) configured for supporting the emitter tip (110) and comprising a first base element (122) and a second base element (124), and a filament (130) having at least a first filament portion (132) and a second filament portion (134) attaching the emitter tip (110) to the base arrangement (120), wherein the first filament portion (132) extends between the emitter tip (110) and the first base element (122) and the second filament portion (134) extends between the emitter tip (110) and the second base element (124), wherein a length (L) of each of the first filament portion (132) and the second filament portion (134) is 4 mm or less, and wherein a diameter of a cross-section of each of the first filament portion (132) and the second filament portion (134) is 0.13 mm or less.
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3.
公开(公告)号:US08237347B2
公开(公告)日:2012-08-07
申请号:US12959592
申请日:2010-12-03
申请人: Peng Liu , Duan-Liang Zhou , Pi-Jin Chen , Zhao-Fu Hu , Cai-Lin Guo , Bing-Chu Du , Shou-Shan Fan
发明人: Peng Liu , Duan-Liang Zhou , Pi-Jin Chen , Zhao-Fu Hu , Cai-Lin Guo , Bing-Chu Du , Shou-Shan Fan
CPC分类号: H01J3/021 , H01J9/148 , H01J29/481 , H01J31/127 , H01J2201/30469 , H01J2203/0204 , H01J2329/0455 , H01J2329/46
摘要: A field emission device includes an insulative substrate, an electron pulling electrode, a secondary electron emission layer, a first dielectric layer, a cathode electrode, and an electron emission layer. The electron pulling electrode is located on a surface of the insulative substrate. The secondary electron emission layer is located on a surface of the electron pulling electrode. The cathode electrode is located apart from the electron pulling electrode by the first dielectric layer. The cathode electrode has a surface oriented to the electron pulling electrode and defines a first opening as an electron output portion. The electron emission layer is located on the surface of the cathode electrode and oriented to the electron pulling electrode.
摘要翻译: 场致发射器件包括绝缘衬底,电子牵拉电极,二次电子发射层,第一介电层,阴极电极和电子发射层。 电子牵引电极位于绝缘基板的表面上。 二次电子发射层位于电子牵拉电极的表面上。 阴极通过第一介电层与电子牵拉电极分开。 阴极电极具有取向于电子牵引电极的表面,并且限定作为电子输出部分的第一开口。 电子发射层位于阴极表面并且定向到电子牵引电极。
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公开(公告)号:US07826594B2
公开(公告)日:2010-11-02
申请号:US12113726
申请日:2008-05-01
申请人: Yun Zou , Mark E. Vermilyea , Louis Paul Inzinna , Antonio Caiafa
发明人: Yun Zou , Mark E. Vermilyea , Louis Paul Inzinna , Antonio Caiafa
CPC分类号: H01J3/021 , H01J1/30 , H01J1/3048 , H01J3/027 , H01J35/065 , H01J35/14 , H01J2201/319 , H01J2203/0204 , H01J2235/062 , H01J2235/068
摘要: A system and method for addressing individual electron emitters in an emitter array is disclosed. The system includes an emitter array comprising a plurality of emitter elements arranged in a non-rectangular layout and configured to generate at least one electron beam and a plurality of extraction grids positioned adjacent to the emitter array, each extraction grid being associated with at least one emitter element to extract the at least one electron beam therefrom. The field emitter array system also includes a plurality of voltage control channels connected to the plurality of emitter elements and the plurality of extraction grids such that each of the emitter elements and each of the extraction grids is individually addressable. In the field emitter array system, the number of voltage control channels is equal to the sum of a pair of integers closest in value whose product equals the number of emitter elements.
摘要翻译: 公开了一种用于寻址发射极阵列中的各个电子发射体的系统和方法。 该系统包括发射器阵列,其包括以非矩形布局布置的多个发射体元件,并且被配置为产生至少一个电子束和邻近发射器阵列定位的多个提取栅格,每个提取栅格与至少一个 发射极元件从其中提取至少一个电子束。 场发射器阵列系统还包括连接到多个发射体元件和多个提取栅格的多个电压控制通道,使得每个发射极元件和每个提取栅格可单独寻址。 在场发射极阵列系统中,电压控制通道的数量等于产品等于发射极元件数量的最接近值的一对整数之和。
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5.
公开(公告)号:US07652419B2
公开(公告)日:2010-01-26
申请号:US11702539
申请日:2007-02-06
申请人: Sang-Hyuck Ahn , Sang-Jo Lee , Byung-Gil Jea , Sang-Ho Jeon , Su-Bong Hong , Jin-Hui Cho
发明人: Sang-Hyuck Ahn , Sang-Jo Lee , Byung-Gil Jea , Sang-Ho Jeon , Su-Bong Hong , Jin-Hui Cho
IPC分类号: H01J1/62
CPC分类号: H01J31/127 , H01J1/304 , H01J3/021 , H01J29/467 , H01J29/481 , H01J2203/0204 , H01J2203/022 , H01J2203/0248 , H01J2329/041 , H01J2329/4617 , H01J2329/4647
摘要: An electron emission device includes a substrate, first electrodes formed on the substrate, electron emission regions electrically connected to the first electrodes, and second electrodes placed over the first electrodes such that the second electrodes are insulated from the first electrodes. The second electrodes have openings to expose the electron emission regions. A third electrode is placed over the second electrodes such that the third electrode is insulated from the second electrodes. The third electrode has openings communicating with the openings of the second electrodes. Each of the electron emission regions and the second electrodes simultaneously satisfy the following conditions: D2/D1≦0.579 (1), and D2≧1 μ (2) where D1 indicates the width of each of the openings of the second electrode, and D2 indicates the width of each of the electron emission regions.
摘要翻译: 电子发射装置包括基板,形成在基板上的第一电极,与第一电极电连接的电子发射区域,以及设置在第一电极上的第二电极,使得第二电极与第一电极绝缘。 第二电极具有露出电子发射区的开口。 第三电极放置在第二电极上,使得第三电极与第二电极绝缘。 第三电极具有与第二电极的开口连通的开口。 每个电子发射区和第二电极同时满足以下条件:D2 / D1和D2> =1μ(2)其中D1表示第二电极的每个开口的宽度,D2表示每个的宽度 的电子发射区域。
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公开(公告)号:US09508522B2
公开(公告)日:2016-11-29
申请号:US14207216
申请日:2014-03-12
发明人: Shang-hyeun Park , Paul R. Schwoebel , Il-hwan Kim , Do-yoon Kim , Yong-chul Kim , Chang-soo Lee , Tae-won Jeong
IPC分类号: H01J35/06 , H01J35/04 , H01J19/44 , H01J3/02 , H01J3/38 , H01J1/30 , H01J1/90 , A61B6/00 , H01J1/304 , H01J19/24 , H01J19/42 , B82Y30/00
CPC分类号: H01J35/065 , A61B6/40 , A61B6/4064 , A61B6/4488 , B82Y30/00 , H01J1/304 , H01J1/90 , H01J3/021 , H01J3/38 , H01J19/24 , H01J19/42 , H01J19/44 , H01J35/045 , H01J35/06 , H01J2201/304 , H01J2201/30469 , H01J2201/3195 , H01J2203/0204 , H01J2203/0208 , H01J2203/0212 , H01J2203/0216 , H01J2203/0236 , H01J2235/06 , H01J2235/1212 , H01J2235/1291 , H01J2235/1295 , Y10S977/742 , Y10S977/939 , Y10S977/95
摘要: An x-ray generator includes a housing, a cathode block that is arranged in the housing and emits electrons via a field emission scheme, an anode block that is arranged in the housing and generates x-rays in response to the electrons emitted from the cathode block and collide with the anode block, and a heat sink block that contacts the cathode block and dissipates heat generated therein to an outside of the housing.
摘要翻译: X射线发生器包括壳体,阴极块,其布置在壳体中并经由场致发射方案发射电子;阳极块,布置在壳体中并响应于从阴极发射的电子产生X射线 阻挡并与阳极块碰撞,以及散热块,其接触阴极块并将其中产生的热量散发到壳体的外部。
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公开(公告)号:US20110285271A1
公开(公告)日:2011-11-24
申请号:US12959592
申请日:2010-12-03
申请人: PENG LIU , DUAN-LIANG ZHOU , PI-JIN CHEN , ZHAO-FU HU , CAI-LIN GUO , BING-CHU DU , SHOU-SHAN FAN
发明人: PENG LIU , DUAN-LIANG ZHOU , PI-JIN CHEN , ZHAO-FU HU , CAI-LIN GUO , BING-CHU DU , SHOU-SHAN FAN
IPC分类号: H01J9/02
CPC分类号: H01J3/021 , H01J9/148 , H01J29/481 , H01J31/127 , H01J2201/30469 , H01J2203/0204 , H01J2329/0455 , H01J2329/46
摘要: A field emission device includes an insulative substrate, an electron pulling electrode, a secondary electron emission layer, a first dielectric layer, a cathode electrode, and an electron emission layer. The electron pulling electrode is located on a surface of the insulative substrate. The secondary electron emission layer is located on a surface of the electron pulling electrode. The cathode electrode is located apart from the electron pulling electrode by the first dielectric layer. The cathode electrode has a surface oriented to the electron pulling electrode and defines a first opening as an electron output portion. The electron emission layer is located on the surface of the cathode electrode and oriented to the electron pulling electrode.
摘要翻译: 场致发射器件包括绝缘衬底,电子牵拉电极,二次电子发射层,第一介电层,阴极电极和电子发射层。 电子牵引电极位于绝缘基板的表面。 二次电子发射层位于电子牵拉电极的表面上。 阴极通过第一介电层与电子牵拉电极分开。 阴极电极具有取向于电子牵引电极的表面,并且限定作为电子输出部分的第一开口。 电子发射层位于阴极表面并且定向到电子牵引电极。
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8.
公开(公告)号:US20110074744A1
公开(公告)日:2011-03-31
申请号:US12890395
申请日:2010-09-24
CPC分类号: H01J9/025 , H01J1/304 , H01J1/3046 , H01J3/021 , H01J31/127 , H01J2201/30423 , H01J2203/0204 , H01J2329/0423
摘要: Provided is an electron-emitting device including an insulating member and a gate stacked on a substrate. A cathode is disposed on a side surface of the insulating member. The cathode has a plurality of protrusions provided along a corner of the insulating member. The gate has a plurality of protrusions extending toward the cathode.
摘要翻译: 提供一种电子发射器件,其包括堆叠在衬底上的绝缘构件和栅极。 阴极设置在绝缘构件的侧面上。 阴极具有沿着绝缘构件的角部设置的多个突起。 门具有朝向阴极延伸的多个突起。
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公开(公告)号:US20090185661A1
公开(公告)日:2009-07-23
申请号:US12113726
申请日:2008-05-01
申请人: Yun Zou , Mark E. Vermilyea , Louis Paul Inzinna , Antonio Caiafa
发明人: Yun Zou , Mark E. Vermilyea , Louis Paul Inzinna , Antonio Caiafa
CPC分类号: H01J3/021 , H01J1/30 , H01J1/3048 , H01J3/027 , H01J35/065 , H01J35/14 , H01J2201/319 , H01J2203/0204 , H01J2235/062 , H01J2235/068
摘要: A system and method for addressing individual electron emitters in an emitter array is disclosed. The system includes an emitter array comprising a plurality of emitter elements arranged in a non-rectangular layout and configured to generate at least one electron beam and a plurality of extraction grids positioned adjacent to the emitter array, each extraction grid being associated with at least one emitter element to extract the at least one electron beam therefrom. The field emitter array system also includes a plurality of voltage control channels connected to the plurality of emitter elements and the plurality of extraction grids such that each of the emitter elements and each of the extraction grids is individually addressable. In the field emitter array system, the number of voltage control channels is equal to the sum of a pair of integers closest in value whose product equals the number of emitter elements.
摘要翻译: 公开了一种用于寻址发射极阵列中的各个电子发射体的系统和方法。 该系统包括发射器阵列,其包括以非矩形布局布置的多个发射体元件,并且被配置为产生至少一个电子束和邻近发射器阵列定位的多个提取栅格,每个提取栅格与至少一个 发射极元件从其中提取至少一个电子束。 场发射器阵列系统还包括连接到多个发射体元件和多个提取栅格的多个电压控制通道,使得每个发射极元件和每个提取栅格可单独寻址。 在场发射极阵列系统中,电压控制通道的数量等于产品等于发射极元件数量的最接近值的一对整数之和。
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公开(公告)号:US20090015133A1
公开(公告)日:2009-01-15
申请号:US12061818
申请日:2008-04-03
申请人: Woo-Hu TSAI , Tzung-Han Yang , Hsin-Ju Wu
发明人: Woo-Hu TSAI , Tzung-Han Yang , Hsin-Ju Wu
IPC分类号: H01J1/62
CPC分类号: H01J1/304 , H01J2201/30403 , H01J2201/30469 , H01J2203/0204 , H01J2203/0216
摘要: The present invention relates to a field emission device and an electrode structure thereof, comprising a starting base and a curved extending part formed on a surface of various shaped or dimensional structure. Therefore, the applied device and range is increased. The curved extending part is also for reducing the number of the contact point, as to simplify the procedure to design the peripheral circuit. Besides, a resisting section can be formed on the starting base. The resisting value of the resisting section is designed to provide various lighting effects.
摘要翻译: 本发明涉及一种场发射器件及其电极结构,其包括起始基座和形成在各种形状或尺寸结构的表面上的弯曲的延伸部分。 因此,应用的设备和范围增加。 弯曲的延伸部分也用于减少接触点的数量,以简化设计外围电路的过程。 此外,可以在起始基座上形成抵抗部分。 电阻部分的电阻值被设计成提供各种照明效果。
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