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    Slurry composition for chemical mechanical polishing, method of preparing the same, and method of fabricating semiconductor device by using the same
    5.
    发明授权
    Slurry composition for chemical mechanical polishing, method of preparing the same, and method of fabricating semiconductor device by using the same 有权

    公开(公告)号：US10829690B2

    公开(公告)日：2020-11-10

    申请号：US16502164

    申请日：2019-07-03

    申请人： Samsung Electronics Co., Ltd.

    发明人： Bo-yun Kim ,  Kenji Takai ,  Do-yoon Kim ,  Sang-kyun Kim ,  Bo-un Yoon

    IPC分类号： C09K13/00 ,  C09G1/06 ,  H01L21/321 ,  H01L29/66 ,  H01L21/28

    摘要： Disclosed is a slurry composition for chemical mechanical polishing (CMP) includes, as polishing particles, a complex compound of both fullerenol and alkylammonium hydroxide. The slurry composition, which exhibits excellent polishing properties, may be prepared at low cost in large quantities. Also disclosed is a method of preparing the slurry composition comprising obtaining a mixture of a fullerenol complex compound and unreacted hydrogen peroxide by reacting alkylammonium hydroxide, hydrogen peroxide, and fullerene, removing the unreacted hydrogen peroxide by adding hydrogen peroxide decomposition catalyst particles to the mixture, separating the hydrogen peroxide decomposition catalyst particles from the mixture by filtration, and adding a polishing additive to the mixture. Further disclosed is a method of fabricating a semiconductor device that includes providing a pattern defining a trench, forming a metal material film on the pattern to fill the trench, and performing CMP of the metal material film using the slurry composition.

    System and method for providing health data of peripheral device
    7.
    发明授权
    System and method for providing health data of peripheral device 有权

    公开(公告)号：US10849502B2

    公开(公告)日：2020-12-01

    申请号：US14618290

    申请日：2015-02-10

    申请人： SAMSUNG ELECTRONICS CO., LTD.

    发明人： Byung-hun Choi ,  Do-yoon Kim ,  In-young Lee ,  Jae-geol Cho

    IPC分类号： A61B5/00 ,  G06F19/00

    摘要： A peripheral device for providing a health information message to a host device includes a health data obtainer configured to obtain health data; a message generator configured to determine a type of the health data, a private message identification (ID) corresponding to the type of the health data, and an ID of the peripheral device, and generate the health information message to include the private message ID, the ID of the peripheral device, and the health data; and a message provider configured to transmit the health information message to the host device, the private message ID being configured to be interpreted differently according to the ID of the peripheral device.