SEMICONDUCTOR DEVICE CONNECTIONS WITH SINTERED NANOPARTICLES

    公开(公告)号:WO2020118300A1

    公开(公告)日:2020-06-11

    申请号:PCT/US2019/065242

    申请日:2019-12-09

    IPC分类号: H01L21/50 H01L23/48

    摘要: In a described example, a packaged device (100) includes a substrate (101) having a device mounting surface with conductive lands (103) having a first thickness spaced from one another on the device mounting surface. A first polymer layer (105) is disposed on the device mounting surface between the conductive lands (103) having a second thickness equal to the first thickness. The conductive lands (103) have an outer surface not covered by the first polymer layer (105). A second polymer layer (107) is disposed on the first polymer layer (105), the outer surface of the conductive lands (103) not covered by the second polymer layer (107). Conductive nanoparticle material (109) is disposed on the outer surface of the conductive lands (103). A third polymer layer (111) is disposed on the second polymer layer (107) between the conductive nanoparticle material (109) on the conductive lands (103). At least one semiconductor device die (121) is mounted to the third polymer layer (111) having electrical terminals (123) bonded to the conductive nanoparticle material (109).