-
公开(公告)号:JP5582879B2
公开(公告)日:2014-09-03
申请号:JP2010132160
申请日:2010-06-09
申请人: 株式会社東芝
发明人: 周輝 山田
IPC分类号: H01L21/3205 , H01L21/60 , H01L21/768 , H01L23/522
CPC分类号: H01L24/05 , H01L23/522 , H01L23/5222 , H01L23/53295 , H01L23/585 , H01L24/48 , H01L2224/02166 , H01L2224/03845 , H01L2224/04042 , H01L2224/05 , H01L2224/05184 , H01L2224/05567 , H01L2224/05624 , H01L2224/48247 , H01L2224/48463 , H01L2924/00013 , H01L2924/00014 , H01L2924/0002 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01029 , H01L2924/01033 , H01L2924/01074 , H01L2924/01082 , H01L2224/13099 , H01L2224/05099 , H01L2224/13599 , H01L2224/05599 , H01L2224/29099 , H01L2224/29599 , H01L2224/05552 , H01L2224/45099
-
公开(公告)号:JP5574639B2
公开(公告)日:2014-08-20
申请号:JP2009192022
申请日:2009-08-21
申请人: 三菱電機株式会社
IPC分类号: H01L21/3205 , H01L21/768 , H01L23/522 , H01L25/065 , H01L25/07 , H01L25/18
CPC分类号: H01L21/76898 , H01L23/481 , H01L23/49827 , H01L23/585 , H01L25/0657 , H01L25/50 , H01L2224/16 , H01L2225/06513 , H01L2225/06541 , H01L2924/13055 , H01L2924/00
-
公开(公告)号:JP5574073B2
公开(公告)日:2014-08-20
申请号:JP2014519111
申请日:2013-04-15
申请人: 株式会社村田製作所
CPC分类号: H05K1/185 , H01L21/4857 , H01L23/49822 , H01L23/49827 , H01L23/49838 , H01L23/49894 , H01L23/5389 , H01L23/562 , H01L23/585 , H01L23/66 , H01L24/19 , H01L25/165 , H01L25/18 , H01L2224/16225 , H01L2924/19105 , H01L2924/351 , H05K1/115 , H05K1/16 , H05K3/4632 , H05K3/4697 , H05K2201/032 , H05K2201/042 , Y10T29/49124 , Y10T29/49126 , Y10T29/4913 , Y10T29/49139 , Y10T428/24917 , H01L2924/00
-
公开(公告)号:JP2014135506A
公开(公告)日:2014-07-24
申请号:JP2014050609
申请日:2014-03-13
发明人: NAKASHIBA YASUTAKA
IPC分类号: H01L21/822 , H01L21/3205 , H01L21/768 , H01L23/522 , H01L27/04
CPC分类号: H01L23/585 , H01L23/522 , H01L23/5227 , H01L23/66 , H01L2924/0002 , H01L2924/00
摘要: PROBLEM TO BE SOLVED: To solve the problem that transmission characteristics in wiring becomes unstable in a conventional semiconductor device.SOLUTION: A semiconductor device 1 comprises: wiring 10; and a dummy conductor pattern 20. The wiring 10 is the wiring in which current having a frequency of 5 GHz or higher flows. The dummy conductor pattern 20 is disposed in the vicinity of the wiring 10. A planar shape of the dummy conductor pattern 20 is equal to a diagram having an interior angle of exceeding 180°.
摘要翻译: 要解决的问题:为了解决传统半导体器件中布线的传输特性变得不稳定的问题。解决方案:半导体器件1包括:布线10; 和虚设导体图案20.布线10是流过频率为5GHz以上的电流的布线。 虚设导体图案20配置在配线10的附近。虚设导体图案20的平面形状与内角超过180°的图形相同。
-
公开(公告)号:JP5518574B2
公开(公告)日:2014-06-11
申请号:JP2010121563
申请日:2010-05-27
IPC分类号: H01L25/065 , H01L21/66 , H01L23/52 , H01L25/07 , H01L25/18
CPC分类号: H01L23/3114 , H01L21/56 , H01L23/585 , H01L25/0657 , H01L2224/16 , H01L2225/06551
-
公开(公告)号:JP5334459B2
公开(公告)日:2013-11-06
申请号:JP2008142872
申请日:2008-05-30
申请人: ルネサスエレクトロニクス株式会社
IPC分类号: H01L21/3205 , H01L21/768 , H01L21/822 , H01L23/522 , H01L27/04
CPC分类号: H01L23/02 , H01L23/522 , H01L23/585 , H01L2924/0002 , H01L2924/00
摘要: A semiconductor device wherein destruction of a sealing ring caused by cracking of an interlayer dielectric film is difficult to occur, as well as a method for manufacturing the semiconductor device, are provided. A first laminate comprises first interlayer dielectric films having a first mechanical strength. A second laminate comprises second interlayer dielectric films having a mechanical strength higher than the first mechanical strength. A first region includes first metallic layers and vias provided within the first laminate. A second region includes second metallic layers and vias provided within the second laminate. When seen in plan, the second region overlaps at least a part of the first region, is not coupled with the first region by vias, and sandwiches the second interlayer dielectric film between it and the first region.
-
公开(公告)号:JP2013183120A
公开(公告)日:2013-09-12
申请号:JP2012047803
申请日:2012-03-05
申请人: Elpida Memory Inc , エルピーダメモリ株式会社
发明人: IDE AKIRA
IPC分类号: H01L23/522 , H01L21/3205 , H01L21/768 , H01L25/065 , H01L25/07 , H01L25/18
CPC分类号: H01L23/481 , H01L21/563 , H01L23/3128 , H01L23/3135 , H01L23/49816 , H01L23/562 , H01L23/585 , H01L25/0657 , H01L25/18 , H01L2224/16145 , H01L2224/16225 , H01L2225/06513 , H01L2225/06517 , H01L2225/06544 , H01L2924/15311
摘要: PROBLEM TO BE SOLVED: To enhance the bonding strength among semiconductor chips of a stacked semiconductor device.SOLUTION: A semiconductor device includes a plurality of through electrodes TSV provided so as to penetrate through semiconductor chips and arranged along an a-a line. The plurality of through electrodes TSV include dummy through electrodes TSVd nearest a side L23 of the semiconductor chips. The dummy through electrodes TSVd are not connected to an internal circuit and have a floating state. According to the present invention, providing the dummy through electrodes TSVd enhances the bonding strength among the plurality of stacked semiconductor chips. For this reason, the use of the semiconductor chips according to the present invention can enhance the reliability of a stacked semiconductor device.
摘要翻译: 要解决的问题:提高叠层半导体器件的半导体芯片之间的接合强度。解决方案:半导体器件包括多个穿过半导体芯片并沿着a-a线布置的贯穿电极TSV。 多个贯通电极TSV包括最靠近半导体芯片的侧面L23的虚设通孔电极TSVd。 虚拟通电极TSVd不连接到内部电路并具有浮置状态。 根据本发明,提供虚拟通孔电极TSVd提高了多个层叠半导体芯片之间的接合强度。 因此,根据本发明的半导体芯片的使用可以提高叠层半导体器件的可靠性。
-
公开(公告)号:JP2013530524A
公开(公告)日:2013-07-25
申请号:JP2013510369
申请日:2011-05-19
申请人: クアルコム,インコーポレイテッド
发明人: デイヴィッド・バン , トーマス・アンドリュー・マイヤーズ
IPC分类号: H01L21/822 , H01L23/02 , H01L27/04
CPC分类号: H01L23/585 , H01L23/564 , H01L2924/0002 , H01L2924/00
摘要: 半導体ダイは、半導体ダイの周辺に配置された複数の不連続な導電性部分と、複数の導電性部分の間の不連続部内の絶縁バリアとを有する。 導電性部分およびバリアは、半導体ダイの周辺に機械的に連続的なシールリングを形成する。
-
公开(公告)号:JP5174434B2
公开(公告)日:2013-04-03
申请号:JP2007297735
申请日:2007-11-16
申请人: ルネサスエレクトロニクス株式会社
IPC分类号: H01L21/822 , H01L21/8234 , H01L27/04 , H01L27/06 , H01L27/08
CPC分类号: H01L23/585 , H01L27/0248 , H01L27/092 , H01L2924/0002 , H01L2924/00
-
公开(公告)号:JP2013026624A
公开(公告)日:2013-02-04
申请号:JP2012159145
申请日:2012-07-18
发明人: GEORGE R LEAL , KEVIN J HESS , TRET S YULIN
IPC分类号: H01L21/3205 , H01L21/768 , H01L21/82 , H01L23/522
CPC分类号: H01L23/585 , H01L23/5256 , H01L24/03 , H01L24/05 , H01L2224/03001 , H01L2224/05556 , H01L2224/45124 , H01L2224/94 , H01L2924/00014 , H01L2924/01005 , H01L2924/01029 , H01L2924/01074 , H01L2924/12042 , H01L2924/00 , H01L2224/48 , H01L2224/03
摘要: PROBLEM TO BE SOLVED: To provide a method of electroplating a feature structure such as an interconnection part or a bond pad on a semiconductor die.SOLUTION: The method comprises the steps of: forming a plurality of fuses (208) over a semiconductor substrate; and forming a plurality of interconnection layers (400-408) over the semiconductor substrate and a plurality of interconnection pads (502) on upper surfaces of the plurality of interconnection layers. A seal ring (202) is formed around an active circuit formed in and on the semiconductor substrate (302), the plurality of interconnection pads (502), and the plurality of fuses (208, 320). Each fuse (208, 320) is electrically connected to a corresponding interconnection pad (502) and the seal ring (202). When each fuse (208) is in a conductive state, the fuse electrically connects the corresponding interconnection pad (502) to the seal ring (202).
摘要翻译: 要解决的问题:提供在半导体管芯上电镀诸如互连部件或接合焊盘的特征结构的方法。 解决方案:该方法包括以下步骤:在半导体衬底上形成多个保险丝(208); 以及在所述半导体衬底上形成多个互连层(400-408)和在所述多个互连层的上表面上的多个互连焊盘(502)。 密封环(202)围绕形成在半导体衬底(302)上的有源电路,多个互连焊盘(502)和多个保险丝(208,320)形成。 每个熔丝(208,320)电连接到相应的互连焊盘(502)和密封环(202)。 当每个熔断器(208)处于导通状态时,保险丝将相应的互连焊盘(502)电连接到密封环(202)。 版权所有(C)2013,JPO&INPIT
-
-
-
-
-
-
-
-
-