Deposition of silicon germanium on silicon-on-insulator structures and bulk substrates
    7.
    发明专利
    Deposition of silicon germanium on silicon-on-insulator structures and bulk substrates 有权
    硅绝缘体结构和基体上的硅锗沉积

    公开(公告)号:JP2012231165A

    公开(公告)日:2012-11-22

    申请号:JP2012153053

    申请日:2012-07-06

    Inventor: MATTHIAS BAUER

    Abstract: PROBLEM TO BE SOLVED: To provide methods for producing SiGe-on-insulator structures and for forming strain-relaxed SiGe layers on silicon while minimizing defects.SOLUTION: Amorphous SiGe layers 600 are deposited on at least one monolayer of a dopant by CVD from trisilane and GeH. The amorphous SiGe layers 600 are recrystallized over silicon by melt or solid phase epitaxy (SPE) processes. The melt processes preferably also cause diffusion of germanium to dilute the overall germanium content and essentially consume silicon 500 overlying an insulator. The SPE process can be conducted with or without diffusion of germanium into the underlying silicon 500, and so is applicable to SOI as well as conventional semiconductor substrates.

    Abstract translation: 要解决的问题:提供用于制造绝缘体上硅结构并在硅上形成应变松弛SiGe层的方法,同时使缺陷最小化。 解决方案:非晶SiGe层600通过CVD从丙硅烷和GeH 4 沉积在掺杂剂的至少一个单层上。 非晶SiGe层600通过熔融或固相外延(SPE)工艺在硅上重结晶。 熔融方法优选还引起锗的扩散以稀释总锗含量,并且基本上消耗覆盖在绝缘体上的硅500。 SPE工艺可以在有或没有锗扩散到下面的硅500的情况下进行,因此也适用于SOI以及常规的半导体衬底。 版权所有(C)2013,JPO&INPIT

    Method and system for providing high speed multi-stream mpeg processor
    9.
    发明专利
    Method and system for providing high speed multi-stream mpeg processor 审中-公开
    用于提供高速多流MPEG处理器的方法和系统

    公开(公告)号:JP2012147457A

    公开(公告)日:2012-08-02

    申请号:JP2012046081

    申请日:2012-03-02

    Abstract: PROBLEM TO BE SOLVED: To provide an MPEG decoder capable of effectively handling video processing.SOLUTION: According to one aspect of an MPEG processor, multiple MPEG data streams for corresponding channels are individually stored in an off-chip memory. Corresponding data for a channel is then read from the off-chip memory for processing. The read data is then decoded, and decoded results and associated information are stored in the off-chip memory. Some or all of the associated information that can be used for decoding subsequent data is stored in an on-chip memory. When video images need to be displayed, the corresponding data that is needed for that purpose is read from the off-chip memory, provided to an analog encoder, and encoded in a format that is compatible with an analog display device.

    Abstract translation: 要解决的问题:提供能够有效处理视频处理的MPEG解码器。 解决方案:根据MPEG处理器的一个方面,用于相应通道的多个MPEG数据流被单独存储在片外存储器中。 然后从片外存储器中读出通道的对应数据进行处理。 然后对读取的数据进行解码,将解码结果和相关信息存储在片外存储器中。 可用于解码后续数据的部分或全部相关信息存储在片上存储器中。 当需要显示视频图像时,从芯片内存中读取为此目的所需的相应数据,提供给模拟编码器,并以与模拟显示设备兼容的格式进行编码。 版权所有(C)2012,JPO&INPIT

    Method of removal of free carbon
    10.
    发明专利
    Method of removal of free carbon 审中-公开
    去除碳的方法

    公开(公告)号:JP2012134535A

    公开(公告)日:2012-07-12

    申请号:JP2012047250

    申请日:2012-03-02

    Inventor: REN DAXING

    Abstract: PROBLEM TO BE SOLVED: To provide a silicon carbide part of a plasma processing apparatus which allows the reduction of particle contamination on a semiconductor substrate.SOLUTION: The method comprises: the step of heating a silicon carbide part at a temperature of about 750 or 1200°C or processing the part by oxygen plasma to remove a free carbon making a cause of particle contamination from at least the surface of the part produced by reaction between silicon vapor and carbon, provided that the silicon carbide part is used for a lower-side baffle plate 22a of a showerhead electrode 10 of a semiconductor substrate processing apparatus.

    Abstract translation: 要解决的问题:提供允许减少半导体衬底上的颗粒污染的等离子体处理装置的碳化硅部分。 解决方案:该方法包括:在约750℃或1200℃的温度下加热碳化硅部件或通过氧等离子体处理该部件以除去至少从表面引起颗粒污染的游离碳的步骤 通过硅蒸汽和碳之间的反应产生的部分,只要碳化硅部分用于半导体衬底处理装置的喷头电极10的下侧挡板22a即可。 版权所有(C)2012,JPO&INPIT

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