中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

39 records (took 0.035 seconds)

    Energy efficient, laser-based method and system for processing target material
    2.
    发明授权
    Energy efficient, laser-based method and system for processing target material 有权
    高能效，基于激光的方法和处理目标材料的系统

    公开(公告)号：US07750268B2

    公开(公告)日：2010-07-06

    申请号：US11843229

    申请日：2007-08-22

    Applicant: Donald V. Smart

    Inventor： Donald V. Smart

    IPC: B23K26/36 ,  B23K26/38

    CPC classification number: B23K26/0736 ,  B23K26/0622 ,  B23K26/0624 ,  B23K26/361 ,  B23K26/40 ,  B23K2103/50 ,  H01L21/76894 ,  H01L23/5258 ,  H01L2924/0002 ,  Y10S438/94 ,  Y10T29/49156 ,  H01L2924/00

    Abstract: An energy-efficient method and system for processing target material such as microstructures in a microscopic region without causing undesirable changes in electrical and/or physical characteristics of material surrounding the target material is provided. The system includes a controller for generating a processing control signal and a signal generator for generating a modulated drive waveform based on the processing control signal. The waveform has a sub-nanosecond rise time. The system also includes a gain-switched, pulsed semiconductor seed laser for generating a laser pulse train at a repetition rate. The drive waveform pumps the laser so that each pulse of the pulse train has a predetermined shape. Further, the system includes a laser amplifier for optically amplifying the pulse train to obtain an amplified pulse train without significantly changing the predetermined shape of the pulses. The amplified pulses have little distortion and have substantially the same relative temporal power distribution as the original pulse train from the laser. Each of the amplified pulses has a substantially square temporal power density distribution, a sharp rise time, a pulse duration and a fall time. The system further includes a beam delivery and focusing subsystem for delivering and focusing at least a portion of the amplified pulse train onto the target material.

    Abstract translation: 提供了一种用于在微观区域中处理诸如微结构的目标材料而不引起围绕目标材料的材料的电气和/或物理特性的不期望的变化的能量效率方法和系统。 该系统包括用于产生处理控制信号的控制器和用于基于处理控制信号产生调制的驱动波形的信号发生器。 波形具有亚纳秒上升时间。 该系统还包括用于以重复率产生激光脉冲串的增益切换脉冲半导体种子激光器。 驱动波形泵浦激光器，使得脉冲串的每个脉冲具有预定的形状。 此外，该系统包括用于光学放大脉冲串以获得放大的脉冲串而不显着改变脉冲的预定形状的激光放大器。 放大的脉冲具有很小的失真，并且具有与来自激光器的原始脉冲串相当的相对时间功率分布。 每个放大的脉冲具有基本上正方形的时间功率密度分布，急剧上升时间，脉冲持续时间和下降时间。 该系统还包括用于将放大的脉冲序列的至少一部分传送和聚焦到目标材料上的束传递和聚焦子系统。

    Laser processing
    5.
    发明授权
    Laser processing 有权
    激光加工

    公开(公告)号：US06791059B2

    公开(公告)日：2004-09-14

    申请号：US10036431

    申请日：2002-01-07

    Applicant: Donald V. Smart

    Inventor： Donald V. Smart

    IPC: B23K2636

    CPC classification number: H01L21/76894 ,  B23K26/0622 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/361 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/42 ,  B23K2103/50

    Abstract: A controlled, switched laser system for vaporizing a target structure on a substrate includes a diode-pumped, solid-state laser for producing a laser output, a controllable switch for controlling the on/off state and power level of the laser, and a wavelength shifter. The wavelength shifter shifts the wavelength of the laser output from a conventional wavelength to a wavelength beyond the absorption edge of the substrate but shorter than 1.2 &mgr;m in order to obtain a decrease in absorption of the laser output by the substrate due to the shift in the wavelength of the laser output. The wavelength shifter is removably insertable into the switched laser system so as to enable the switched laser system to operate at the conventional wavelength and at the wavelength beyond the absorption edge of the substrate. Heating of the substrate and hence damage to the substrate is limited due to the wavelength being beyond the absorption edge of the substrate. Good depth of focus of the laser beam output is maintained relative to spot size of the laser beam output due to the wavelength being less than about 1.2 &mgr;m.

    Abstract translation: 用于蒸发衬底上的目标结构的受控切换激光系统包括用于产生激光输出的二极管泵浦固体激光器，用于控制激光器的开/关状态和功率电平的可控开关，以及波长 移位器 波长移位器将激光输出的波长从常规波长移动到超过基板的吸收边缘的波长但小于1.2μm，以便由于基板的偏移而获得基板的激光输出的吸收的降低 激光输出的波长。 波长移位器可移除地插入到切换的激光系统中，以便使切换的激光系统能够以常规波长和超过基板的吸收边缘的波长进行操作。 由于波长超过衬底的吸收边缘，衬底的加热和衬底的损坏受到限制。 由于波长小于约1.2μm，激光束输出的良好的焦深保持相对于激光束输出的光斑尺寸。

    Affecting laser beam pulse width
    6.
    发明授权
    Affecting laser beam pulse width 失效
    影响激光束的脉冲宽度

    公开(公告)号：US4483005A

    公开(公告)日：1984-11-13

    申请号：US305274

    申请日：1981-09-24

    Applicant: Donald V. Smart

    Inventor： Donald V. Smart

    IPC: G02F1/03 ,  H01S3/107 ,  H01S3/10

    CPC classification number: G02F1/03 ,  G02F1/0327 ,  H01S3/1075

    Abstract: Reducing the widths of pulses in a beam from a laser by passing the beam through means to rotate the plane of polarization of the beam when a voltage is applied and reflecting the beam back through the means to rotate to a polarizer, the voltage being applied for a length of time equal to the desired pulse width, the portions of the pulses that have passed through the means to rotate when the voltage was applied being deflected by the polarizer into an output beam, the portions of the pulses that have passed through the means to rotate when the voltage was not applied being passed directly through the polarizer without being deflected into the output beam.

    Abstract translation: 通过使光束通过装置来减小来自激光束的光束中的脉冲的宽度，以在施加电压时旋转光束的偏振平面，并将光束反射通过装置旋转到偏振器，将电压施加于 等于期望脉冲宽度的时间长度，当施加电压时已经通过要旋转的装置的脉冲的部分被偏振器偏转成输出光束，已经通过该装置的部分脉冲 当不施加电压时直接通过偏振器而旋转，而不会偏转到输出光束中。

    Energy-efficient, laser-based method and system for processing target material
    9.
    发明授权
    Energy-efficient, laser-based method and system for processing target material 失效
    节能，基于激光的方法和处理目标材料的系统

    公开(公告)号：US07679030B2

    公开(公告)日：2010-03-16

    申请号：US11969275

    申请日：2008-01-04

    Applicant: Donald V. Smart

    Inventor： Donald V. Smart

    IPC: B23K26/40 ,  H01L21/82

    CPC classification number: B23K26/0736 ,  B23K26/0622 ,  B23K26/0624 ,  B23K26/361 ,  B23K26/40 ,  B23K2103/50 ,  H01L21/76894 ,  H01L23/5258 ,  H01L2924/0002 ,  Y10S438/94 ,  Y10T29/49156 ,  H01L2924/00

    Abstract: An energy-efficient method and system for processing target material such as microstructures in a microscopic region without causing undesirable changes in electrical and/or physical characteristics of material surrounding the target material is provided. The system includes a controller for generating a processing control signal and a signal generator for generating a modulated drive waveform based on the processing control signal. The waveform has a sub-nanosecond rise time. The system also includes a gain-switched, pulsed semiconductor seed laser for generating a laser pulse train at a repetition rate. The drive waveform pumps the laser so that each pulse of the pulse train has a predetermined shape. Further, the system includes a laser amplifier for optically amplifying the pulse train to obtain an amplified pulse train without significantly changing the predetermined shape of the pulses. The amplified pulses have little distortion and have substantially the same relative temporal power distribution as the original pulse train from the laser. Each of the amplified pulses has a substantially square temporal power density distribution, a sharp rise time, a pulse duration and a fall time. The system further includes a beam delivery and focusing subsystem for delivering and focusing at least a portion of the amplified pulse train onto the target material. The rise time (less than about 1 ns) is fast enough to efficiently couple laser energy to the target material, the pulse duration (typically 2-10 ns) is sufficient to process the target material, and the fall time (a few ns) is rapid enough to prevent the undesirable changes to the material surrounding the target material.

    Abstract translation: 提供了一种用于在微观区域中处理诸如微结构的目标材料而不引起围绕目标材料的材料的电气和/或物理特性的不期望的变化的能量效率方法和系统。 该系统包括用于产生处理控制信号的控制器和用于基于处理控制信号产生调制的驱动波形的信号发生器。 波形具有亚纳秒上升时间。 该系统还包括用于以重复率产生激光脉冲串的增益切换脉冲半导体种子激光器。 驱动波形泵浦激光器，使得脉冲串的每个脉冲具有预定的形状。 此外，该系统包括用于光学放大脉冲串以获得放大的脉冲串而不显着改变脉冲的预定形状的激光放大器。 放大的脉冲具有很小的失真，并且具有与来自激光器的原始脉冲串相当的相对时间功率分布。 每个放大的脉冲具有基本上正方形的时间功率密度分布，急剧上升时间，脉冲持续时间和下降时间。 该系统还包括用于将放大的脉冲序列的至少一部分传送和聚焦到目标材料上的束传递和聚焦子系统。 上升时间（小于约1ns）足够快以有效地将激光能量耦合到目标材料，脉冲持续时间（通常为2-10ns）足以处理目标材料，并且下降时间（几ns） 足够快以防止对目标材料周围的材料的不期望的变化。

Patent Agency Ranking