公开(公告)号：US20140151543A1

公开(公告)日：2014-06-05

申请号：US13884755

申请日：2011-11-08

申请人： Hisashi Nagano ,  Yasutaka Suzuki ,  Hideo Kashima ,  Yuichiro Hashimoto ,  Masuyuki Sugiyama ,  Masakazu Sugaya ,  Yasunori Doi ,  Koichi Terada

发明人： Hisashi Nagano ,  Yasutaka Suzuki ,  Hideo Kashima ,  Yuichiro Hashimoto ,  Masuyuki Sugiyama ,  Masakazu Sugaya ,  Yasunori Doi ,  Koichi Terada

IPC分类号： H01J49/00 ,  H01J49/04

CPC分类号： H01J49/0422 ,  G01N1/2211 ,  G01N1/2214 ,  G01N33/0057 ,  G01N2001/028 ,  H01J49/00 ,  H01J49/0036 ,  H01J49/04 ,  H01J49/0459 ,  H01J49/0468 ,  Y02A50/25

摘要： Provided is a technique of analyzing particles in real time while collecting and condensing the particles continuously. Gas and/or particles as a detection target substance that are attached to an authentication target 2 are removed by air flow from a blowing region 5. The removed sample is sucked and is condensed and sampled at a sampling region 10, and ions of the sample are generated at an ion source 21 and are then subjected to mass analysis at a mass analysis region 23. Determination of the obtained mass spectrum is made as to the presence or not of a mass spectrum derived from the detection target substance, and a monitor 27 displays a result thereof. Thereby, the detection target substance attached to the authentication target 2 can be detected continuously in real time, promptly and with a less error rate.

摘要翻译： 提供了一种在连续收集和冷凝颗粒时实时分析颗粒的技术。 作为检测对象物质的作为检测对象物质的气体和/或颗粒被从吹扫区域5的空气流除去。将取出的样品抽吸并在采样区域10被冷凝并取样，并且样品的离子 在离子源21处产生，然后在质量分析区域23进行质量分析。对获得的质谱进行测定，确定是否存在从检测目标物质得到的质谱，以及监测器27 显示其结果。 因此，可以实时，及时且误码率较小的连续检测附着于认证对象2的检测对象物质。

公开(公告)号：US09040905B2

公开(公告)日：2015-05-26

申请号：US13884755

申请日：2011-11-08

申请人： Hisashi Nagano ,  Yasutaka Suzuki ,  Hideo Kashima ,  Yuichiro Hashimoto ,  Masuyuki Sugiyama ,  Masakazu Sugaya ,  Yasunori Doi ,  Koichi Terada

发明人： Hisashi Nagano ,  Yasutaka Suzuki ,  Hideo Kashima ,  Yuichiro Hashimoto ,  Masuyuki Sugiyama ,  Masakazu Sugaya ,  Yasunori Doi ,  Koichi Terada

IPC分类号： H01J49/04 ,  G01N1/22 ,  G01N1/02 ,  H01J49/00 ,  G01N33/00

CPC分类号： H01J49/0422 ,  G01N1/2211 ,  G01N1/2214 ,  G01N33/0057 ,  G01N2001/028 ,  H01J49/00 ,  H01J49/0036 ,  H01J49/04 ,  H01J49/0459 ,  H01J49/0468 ,  Y02A50/25

摘要： Provided is a technique of analyzing particles in real time while collecting and condensing the particles continuously. Gas and/or particles as a detection target substance that are attached to an authentication target 2 are removed by air flow from a blowing region 5. The removed sample is sucked and is condensed and sampled at a sampling region 10, and ions of the sample are generated at an ion source 21 and are then subjected to mass analysis at a mass analysis region 23. Determination of the obtained mass spectrum is made as to the presence or not of a mass spectrum derived from the detection target substance, and a monitor 27 displays a result thereof. Thereby, the detection target substance attached to the authentication target 2 can be detected continuously in real time, promptly and with a less error rate.

公开(公告)号：US07071475B2

公开(公告)日：2006-07-04

申请号：US10941913

申请日：2004-09-16

申请人： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

发明人： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC分类号： H01J37/20

CPC分类号： G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A specimen fabrication apparatus including a movable sample stage on which a specimen substrate is mounted, a probe connector for firmly joining a tip of a probe to a portion of the specimen substrate in a vicinity of an area on the specimen substrate to be observed in an observation apparatus, a micro-specimen separator for separating from the specimen substrate a micro-specimen to which the tip of the probe is firmly joined, the micro-specimen including the area on the specimen substrate to be observed and the portion of the specimen substrate to which the tip of the probe is firmly joined, a micro-specimen fixer for fixing the micro-specimen separated from the specimen substrate to a specimen holder of the observation apparatus, and a probe separator for separating the tip of the probe from the micro-specimen fixed to the specimen holder.

公开(公告)号：US20050054029A1

公开(公告)日：2005-03-10

申请号：US10941913

申请日：2004-09-16

申请人： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

发明人： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC分类号： G01N1/02 ,  G01N1/04 ,  G01N1/28 ,  G01Q20/00 ,  H01J37/305 ,  G01N1/30 ,  C12M1/34 ,  G01N33/48

CPC分类号： G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A specimen fabrication apparatus including a movable sample stage on which a specimen substrate is mounted, a probe connector for firmly joining a tip of a probe to a portion of the specimen substrate in a vicinity of an area on the specimen substrate to be observed in an observation apparatus, a micro-specimen separator for separating from the specimen substrate a micro-specimen to which the tip of the probe is firmly joined, the micro-specimen including the area on the specimen substrate to be observed and the portion of the specimen substrate to which the tip of the probe is firmly joined, a micro-specimen fixer for fixing the micro-specimen separated from the specimen substrate to a specimen holder of the observation apparatus, and a probe separator for separating the tip of the probe from the micro-specimen fixed to the specimen holder.

摘要翻译： 一种试样制造装置，包括：安装有试样基板的可动试样台;探针连接器，用于将探针的前端牢固地接合到试样基板的一部分附近，以在待观察的样品基板上的区域 观察装置，用于从试样基板分离与探针的前端牢固接合的微型试样的微量试样分离体，包括待观察的试样基板上的区域的微量试样和试样基板的一部分 探针的尖端牢固地接合到其上的微型试样固定器，用于将从试样基板分离的微量样品固定到观察装置的试样支架上的探针分离器和用于将探针的尖端从微型 固定在样品架上。

公开(公告)号：US5336583A

公开(公告)日：1994-08-09

申请号：US161440

申请日：1993-12-06

申请人： Yasunori Uetani ,  Yasunori Doi ,  Kazuhiko Hashimoto ,  Haruyoshi Osaki ,  Ryotaro Hanawa

发明人： Yasunori Uetani ,  Yasunori Doi ,  Kazuhiko Hashimoto ,  Haruyoshi Osaki ,  Ryotaro Hanawa

IPC分类号： G03F7/022 ,  G03F7/004 ,  G03F7/039 ,  G03F7/22 ,  H01L21/027 ,  G03F7/023 ,  G03C1/61

CPC分类号： G03F7/0048 ,  G03F7/0226

摘要： A positive resist composition containing, in admixture, an alkali-soluble resin, a quinone diazide compound and a mixed solvent of ethyl lactate and at least one solvent selected from the group consisting of (a) n-amyl acetate and (b) 2-heptanone in a weight ratio of 5:95 to 80:20, which composition has a good coating properties and provides an improved profile and a large depth of focus.

摘要翻译： 一种正极抗蚀剂组合物，其包含碱溶性树脂，醌二叠氮化合物和乳酸乙酯与至少一种选自（a）乙酸正戊酯和（b）2- 庚酮，重量比为5:95至80:20，该组合物具有良好的涂层性能并提供改进的轮廓和较大的聚焦深度。

公开(公告)号：US5283324A

公开(公告)日：1994-02-01

申请号：US869968

申请日：1992-04-17

申请人： Jun Tomioka ,  Koji Kuwana ,  Hirotoshi Nakanishi ,  Hiroshi Takagaki ,  Yasunori Doi ,  Yasunori Uetani ,  Ryotaro Hanawa

发明人： Jun Tomioka ,  Koji Kuwana ,  Hirotoshi Nakanishi ,  Hiroshi Takagaki ,  Yasunori Doi ,  Yasunori Uetani ,  Ryotaro Hanawa

IPC分类号： C08G61/00 ,  C07C303/28 ,  C07C309/76 ,  C07D311/60 ,  G03F7/022 ,  H01L21/027

CPC分类号： G03F7/022 ,  C07C303/28 ,  C07D311/60

摘要： A radiation sensitive compound prepared by reacting a phenol compound with a quinone diazide sulfonyl halide in a mixture of a solvent having a relative dielectric constant of not larger than 10 and a solvent having a relative dielectric constant of at least 15, which compound is less colored and gives a positive resist composition having a good resolution.

摘要翻译： 通过使酚化合物与醌二叠氮磺酰卤在相对介电常数不大于10的溶剂和相对介电常数为至少15的溶剂的混合物中反应制备的辐射敏感化合物，该化合物较少着色 并得到具有良好分辨率的正性抗蚀剂组合物。

公开(公告)号：US20090008578A1

公开(公告)日：2009-01-08

申请号：US12168241

申请日：2008-07-07

申请人： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

发明人： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC分类号： H01J37/08

CPC分类号： G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A specimen fabrication apparatus, including: an ion beam irradiating optical system to irradiate a sample placed in a chamber, with an ion beam; a specimen holder to mount a specimen separated by the irradiation with the ion beam; a holder cassette to hold the specimen holder; a sample stage to hold the sample and the holder cassette; and a probe to move the specimen to the specimen holder, wherein the holder cassette is transferred to outside of the chamber in a condition of holding the specimen holder with the specimen mounted.

摘要翻译： 一种标本制造装置，包括：离子束照射光学系统，用离子束照射放置在室中的样品; 用于安装通过用离子束照射分离的样本的样本保持器; 用于保持样品架的保持器盒; 用于保持样品和保持器盒的样品台; 以及用于将样本移动到样本保持器的探针，其中，在保持样本保持器的状态下，保持器盒被转移到腔室的外部。

公开(公告)号：US20080296497A1

公开(公告)日：2008-12-04

申请号：US12168232

申请日：2008-07-07

申请人： Satoshi TOMIMATSU ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

发明人： Satoshi TOMIMATSU ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC分类号： G01N23/00

CPC分类号： G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A system for analyzing a semiconductor device, including: a first ion beam apparatus including: a sample stage to mount a sample substrate; a vacuum chamber in which the sample stage is placed; an ion beam irradiating optical system to irradiate the sample substrate; a specimen holder that accommodates a plurality of specimens separated from the sample substrate by the irradiation of the ion beam; and a probe to extract the separated specimen from the sample substrate, and to transfer the separated specimen to the specimen holder; a second ion beam apparatus that carries out a finishing process to the specimen; and an analyzer to analyze the finished specimen, wherein the first ion beam apparatus separates the specimen and the probe in a vacuum condition.

摘要翻译： 一种用于分析半导体器件的系统，包括：第一离子束装置，包括：样品台，用于安装样品基板; 其中放置样品台的真空室; 离子束照射光学系统照射样品基板; 样本保持器，其容纳通过离子束的照射与样品基板分离的多个样本; 以及从所述样品基材中提取分离出的试样并将分离的试样转移到所述试样保持器的探针。 对样品进行精加工的第二离子束装置; 以及用于分析成品样品的分析器，其中所述第一离子束装置在真空条件下分离所述样品和所述探针。

公开(公告)号：US20070145302A1

公开(公告)日：2007-06-28

申请号：US11701415

申请日：2007-02-02

申请人： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

发明人： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC分类号： H01J37/08

CPC分类号： G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A system for analyzing a semiconductor device, including: a first specimen fabricating apparatus including: a vacuum chamber in which a sample substrate is placed, an ion beam irradiating optical system for forming a specimen on the sample substrate, a specimen holder to mount the specimen, and a probe for removing the specimen from the sample substrate; a second specimen fabricating apparatus, and an analyzer to analyze the specimen, wherein said first specimen fabrication apparatus has a function to separate the specimen mounted on the specimen holder and the probe in a vacuum condition.

摘要翻译： 一种用于分析半导体器件的系统，包括：第一试样制造装置，包括：放置样品基板的真空室，用于在样品基板上形成试样的离子束照射光学系统，用于安装试样的试样保持器 以及用于从样品基板除去试样的探针; 第二试样制造装置和分析器，其中所述第一试样制造装置具有在真空条件下分离安装在试样架上的试样和探针的功能。

公开(公告)号：US06828566B2

公开(公告)日：2004-12-07

申请号：US10395237

申请日：2003-03-25

申请人： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

发明人： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC分类号： H01J3720

CPC分类号： G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A specimen fabrication apparatus including a movable sample stage on which a specimen substrate is mounted, a probe connector for firmly joining a tip of a probe to a portion of the specimen substrate in a vicinity of an area on the specimen substrate to be observed in an observation apparatus, a micro-specimen separator for separating from the specimen substrate a micro-specimen to which the tip of the probe is firmly joined, the micro-specimen including the area on the specimen substrate to be observed and the portion of the specimen substrate to which the tip of the probe is firmly joined, a micro-specimen fixer for fixing the micro-specimen separated from the specimen substrate to a specimen holder of the observation apparatus, and a probe separator for separating the tip of the probe from the micro-specimen fixed to the specimen holder.

摘要翻译： 一种试样制造装置，包括：安装有试样基板的可动试样台;探针连接器，用于将探针的前端牢固地接合到试样基板的一部分附近，以在待观察的样品基板上的区域 观察装置，用于从试样基板分离与探针的前端牢固接合的微型试样的微量试样分离体，包括待观察的试样基板上的区域的微量试样和试样基板的一部分 探针的尖端牢固地接合到其上的微型试样固定器，用于将从试样基板分离的微量样品固定到观察装置的试样支架上的探针分离器和用于将探针的尖端从微型 固定在样品架上。