摘要:
Methods for the design and fabrication of micro-electro-mechanical switches are disclosed. Two different switch designs with three different switch fabrication techniques are presented for a total of six switch structures. Each switch has a multiple-layer armature with a suspended biasing electrode and a conducting transmission line affixed to the structural layer of the armature. A conducting dimple is connected to the conducting line to provide a reliable region of contact for the switch. The switch is fabricated using silicon nitride as the armature structural layer and silicon dioxide as the sacrificial layer supporting the armature during fabrication. Hydrofluoric acid is used to remove the silicon dioxide layer with post-processing in a critical point dryer to increase yield.
摘要:
A wireless fetal and maternal monitoring system includes a fetal sensor unit adapted to receive signals indicative of a fetal heartbeat, the sensor optionally utilizing a Doppler ultrasound sensor. A short-range transmission unit sends the signals indicative of fetal heartbeat to a gateway unit, either directly or via an auxiliary communications unit, in which case the electrical coupling between the short-range transmission unit and the auxiliary communications unit is via a wired connection. The system includes a contraction actuator actuatable upon a maternal uterine contraction, which optionally is a EMG sensor. A gateway device provides for data visualization and data securitization. The gateway device provides for remote transmission of information through a data communication network. A server adapted to receive the information from the gateway device serves to store and process the data, and an interface system to permits remote patient monitoring.
摘要:
A system provides for mobile medical instrumentation for use with a body. The system includes a primary wireless communication device, such as a cell phone or tablet computer, and one or more cradles. The cradles provide an interface to the body which provides for input of signals from the body, and optionally, therapeutic outputs to the body. The cradle and the primary wireless communication device may be releasably joined together so as to form a unitary structure when contacting the body. Alternately, the cradle may interface with the body, and communicate wirelessly to the primary wireless communication device. A cradle adapted to provide for a portable electrocardiogram includes a plurality of electrodes adapted for contact or non-contact sensing of the body. In the preferred embodiment, three electrodes are arranged in a triangular arrangement, most preferably a Einthoven triangular arrangement, with the distance between electrodes being 4 centimeters or less.
摘要:
A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.
摘要:
Disclosed are MEMS accelerometers and methods for fabricating same. An exemplary accelerometer comprises a substrate, and a proof mass that is a portion of the substrate and which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension anus that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. Capacitive sensing is used to derive electrical signals caused by forces exerted on the proof mass, and the electrical signals are processed by the processing electronics to produce x-, y- and z-direction acceleration data. Electrostatic actuation is used to induce movements of the mass for force balance operation, or self-test and self-calibration. The fabrication methods use deep reactive ion etch bulk micromachining and surface micromachining to form the proof mass, suspension arms and electrodes. The anchor, suspension arms and electrodes are made in the same process steps from the same electrically conductive material, which is different from the substrate material.
摘要:
A method for forming a flow sensor having self-supported heat-carrying elements is disclosed. Self-supported heat-carrying elements are capable of operating with higher thermal efficiency, enabling lower power consumption and higher sensitivity, due to a lack of heat loss into a supporting membrane. Self-supported heat-carrying elements facilitate wider operating temperature range and compatibility with harsh media.
摘要:
A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.
摘要:
Released film structures are employed in measuring the mechanical properties of the film material. By measuring the deformation of thin film structures held under intrinsic tensile stress and then released, these mechanical properties can be accurately measured.
摘要:
The present invention provides a microfabricated microphone that can mitigate negative effects caused by residual stress in its sensing diaphragm. In particular, a center-supported diaphragm is provided to allow residual stress to relax through the radial expansion or contraction of the diaphragm. The diaphragm is suspended by an anchor that is attached to a supporting beam. The supporting beam is situated in between one or more sections of a back-plate electrode. The supporting beam is mechanically and electrically separated from the back-plate electrode. Various mechanical dimensions of the aforementioned components are also disclosed to optimize performance of a microfabricated microphone in different operational conditions. Further, a method and system for fabricating a microfabricated microphone with a center-supported diaphragm is also disclosed.
摘要:
The present invention provides a microfabricated microphone that can mitigate negative effects caused by residual stress in its sensing diaphragm. In particular, a center-supported diaphragm is provided to allow residual stress to relax through the radial expansion or contraction of the diaphragm. The diaphragm is suspended by an anchor that is attached to a supporting beam. The supporting beam is situated in between one or more sections of a back-plate electrode. The supporting beam is mechanically and electrically separated from the back-plate electrode. Various mechanical dimensions of the aforementioned components are also disclosed to optimize performance of a microfabricated microphone in different operational conditions. Further, a method and system for fabricating a microfabricated microphone with a center-supported diaphragm is also disclosed.