公开(公告)号：US09897552B2

公开(公告)日：2018-02-20

申请号：US14805439

申请日：2015-07-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Tae-Joong Kim ,  Yong-Deok Jeong ,  Kwang-Soo Kim ,  Byeong-Hwan Jeon ,  Yu-Sin Yang ,  Sang-Kil Lee ,  Chung-Sam Jun

IPC: G01N21/47 ,  G01N21/95 ,  G02B26/08 ,  G02B3/00 ,  G02B21/00

CPC classification number: G01N21/9501 ,  G02B3/0006 ,  G02B21/0016 ,  G02B26/0808

Abstract: An optical transformation module includes a light generator generating a parallel light beam to be incident onto a surface of an inspection object and changing a wavelength of the parallel light beam, and a rotating grating positioned on a path of the parallel light beam and rotatable by a predetermined rotation angle such that the parallel light beam is transformed according to the wavelength of the parallel light beam and the rotation angle of the rotating grating to have a desired incidence angle and a desired incidence position onto the surface of the inspection object.

公开(公告)号：US20180144995A1

公开(公告)日：2018-05-24

申请号：US15702870

申请日：2017-09-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young-Duk Kim ,  Byeong-Hwan Jeon ,  Kyung-Sik Kang ,  Kang-Woong Ko ,  Soo-Ryong Kim ,  Tae-Joong Kim ,  Jun-Bum Park ,  Gil-Woo Song ,  Sung-Ho Jang ,  Hyoung-Jo Jeon ,  Jae-Chol Joo

IPC: H01L21/66 ,  H01L21/78 ,  G01B11/06 ,  G01B11/02 ,  G01N21/88 ,  G01N21/95

CPC classification number: H01L22/12 ,  G01B11/022 ,  G01B11/06 ,  G01B11/0633 ,  G01B2210/56 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/8845 ,  G01N2021/8848 ,  H01L21/78

Abstract: An optical inspection apparatus includes a broadband light source, a monochromator, an image obtaining apparatus, and an analysis device. The monochromator is configured to convert light from the broadband light source into a plurality of monochromatic beams of different wavelengths and sequentially output the monochromatic beams, where each beam has a preset wavelength width and corresponds to one of a plurality of different wavelength regions. The image obtaining apparatus is configured to allow each monochromatic beam output from the monochromator to be incident to a top surface of an inspection target without using a beam splitter, allow light reflected by the inspection target to travel in a form of light of an infinite light source, and generate 2D images of the inspection target. The analysis device is configured to analyze the 2D images of the inspection target in the plurality of wavelength regions.

公开(公告)号：US09425036B2

公开(公告)日：2016-08-23

申请号：US14151166

申请日：2014-01-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Wook-Rae Kim ,  Hashimoto Kohei ,  Won-Don Joo ,  Kwang-Soo Kim ,  Byeong-Hwan Jeon ,  Sue-Jin Cho

IPC: H01J61/02

CPC classification number: H01J61/025 ,  G03F7/70016 ,  G03F7/70175 ,  H01J61/545 ,  H01J61/86 ,  H01J65/042

Abstract: Provided are a light source device and a semiconductor manufacturing apparatus including the same. The light source device includes a light-emitting lamp. The light source device includes a laser generator configured to generate and direct a laser beam to the light-emitting lamp. The light source device includes a recycling optical element configured to redirect the laser beam to the light-emitting lamp. The recycling optical element includes a first recycling optical modulator configured to change the phase of the laser beam.

Abstract translation: 提供一种光源装置和包括该光源装置的半导体制造装置。 光源装置包括发光灯。 光源装置包括：激光发生器，被配置为产生并将激光束定向到发光灯。 光源装置包括被配置为将激光束重定向到发光灯的再循环光学元件。 回收光学元件包括被配置为改变激光束的相位的第一再循环光学调制器。

公开(公告)号：US10338370B2

公开(公告)日：2019-07-02

申请号：US15377070

申请日：2016-12-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jun-Bum Park ,  Kyung-Sik Kang ,  Tae-Joong Kim ,  Sang-Ok Seok ,  Byeong-Hwan Jeon

IPC: G02B21/36 ,  G01N21/95 ,  G01N21/88 ,  G02B26/10 ,  G02B21/00

Abstract: A clock signal generator includes an optic mirror rotatable to scan an incident light beam in a first direction, a grid plate including a plurality of grid arrays arranged in a second direction different from the first direction, wherein light reflected from the optic mirror is selectively passed through when the light beam is scanned on the grid plate in the first direction, the grid array being offset in the first direction by a particular distance with respect to an adjacent grid array, a light detector configured to detect a light passing through the grid arrays, and a pixel clock generator configured to generate a clock signal based on detection signals received from the light detector.

公开(公告)号：US09839110B2

公开(公告)日：2017-12-05

申请号：US15222571

申请日：2016-07-28

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Wook-Rae Kim ,  Won-Don Joo ,  Byeong-Hwan Jeon ,  Sung-Hwi Cho ,  Young-Kyu Park ,  Jung-Chul Lee ,  Jin-Woo Ahn

IPC: H01J5/16 ,  H01K1/30 ,  H05H1/46 ,  H05G2/00 ,  H05H1/24

CPC classification number: H05H1/46 ,  H01J61/025 ,  H01J61/30 ,  H01J61/54 ,  H01J65/04 ,  H05G2/00 ,  H05H1/24 ,  H05H2240/00

Abstract: A plasma light source apparatus includes a first laser generator configured to generate a first laser. A second laser generator is configured to generate a second laser. A chamber is configured to accommodate and seal a medium material for plasma ignition and to allow plasma to be ignited by the first laser and to be maintained by the second laser. An inner surface of the chamber includes two curved mirrors that face each other.

公开(公告)号：US20140239795A1

公开(公告)日：2014-08-28

申请号：US14151166

申请日：2014-01-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： WOOK-RAE KIM ,  Hashimoto Kohei ,  Won-Don Joo ,  Kwang-Soo Kim ,  Byeong-Hwan Jeon ,  Sue-Jin Cho

IPC: H01J61/02

CPC classification number: H01J61/025 ,  G03F7/70016 ,  G03F7/70175 ,  H01J61/545 ,  H01J61/86 ,  H01J65/042

Abstract: Provided are a light source device and a semiconductor manufacturing apparatus including the same. The light source device includes a light-emitting lamp. The light source device includes a laser generator configured to generate and direct a laser beam to the light-emitting lamp. The light source device includes a recycling optical element configured to redirect the laser beam to the light-emitting lamp. The recycling optical element includes a first recycling optical modulator configured to change the phase of the laser beam.

Abstract translation: 提供一种光源装置和包括该光源装置的半导体制造装置。 光源装置包括发光灯。 光源装置包括：激光发生器，被配置为产生并将激光束定向到发光灯。 光源装置包括被配置为将激光束重定向到发光灯的再循环光学元件。 回收光学元件包括被配置为改变激光束的相位的第一再循环光学调制器。

公开(公告)号：US09746430B2

公开(公告)日：2017-08-29

申请号：US14823343

申请日：2015-08-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Tae-Joong Kim ,  Young-Kyu Park ,  Ki-Jung Son ,  Byeong-Hwan Jeon ,  Chang-Hoon Choi

IPC: G01N21/00 ,  G01N21/956 ,  G01N21/958

CPC classification number: G01N21/956 ,  G01N21/958 ,  G01N2021/95676

Abstract: An optical inspecting apparatus includes a first light source, a beam splitter, a first lens, a first light detector, and pinhole plates. The first light source emits a first light beam. The beam splitter transmits or reflects the first light beam. The first lens provides the first light beam to transmit through a transparent substrate of a photomask and forms a first focusing spot on a first surface of the transparent substrate or a top surface of a photomask pattern formed on the transparent substrate. The first light detector detects a first reflection light beam generated by reflecting the first light beam from the first surface of the transparent substrate or the top surface of the photomask pattern. The pinhole plates are disposed in front of the first light detector to filter noise in the reflection light beam.

公开(公告)号：US09702826B2

公开(公告)日：2017-07-11

申请号：US14751477

申请日：2015-06-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kohei Hashimoto ,  Wook-Rae Kim ,  Byeong-Hwan Jeon ,  Chang-Hoon Choi

IPC: G01N21/00 ,  G01N21/88 ,  G01N21/95 ,  G01N21/958

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/958 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: A method of inspecting a surface of an object includes providing a laser beam irradiated in a first direction substantially parallel to the surface of the object, adjusting a diameter of the annular laser beam, reflecting the annular laser beam toward the surface of the object in a second direction substantially perpendicular to the first direction, in a primary reflection, and reflecting the primarily reflected laser toward an inspection region of the object, in a secondary reflection. An incident angle of the annular laser beam with respect to the surface of the object may be determined by the diameter of the annular laser beam.

公开(公告)号：US09374883B2

公开(公告)日：2016-06-21

申请号：US14560732

申请日：2014-12-04

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Young-Kyu Park ,  Wook-Rae Kim ,  Byeong-Hwan Jeon ,  Hashimoto Kohei

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H05G2/003

Abstract: A plasma light source apparatus is provided. The plasma light source apparatus includes a chamber, a laser generating part, and a curved mirror. The chamber includes a plasma source gas for generating laser induced plasma. The laser generating part is spaced apart from the chamber and generates a hollow laser beam. The curved mirror is disposed between the chamber and the laser generating part. The curved mirror is configured to reflect and to condense the generated hollow laser beam into the chamber to generate the laser induced plasma in the chamber, and to reflect light emitted from the generated laser induced plasma.

Abstract translation: 提供了一种等离子体光源装置。 等离子体光源装置包括腔室，激光产生部件和曲面镜。 腔室包括用于产生激光诱导等离子体的等离子体源气体。 激光产生部分与腔室间隔开并产生中空的激光束。 曲面镜设置在腔室和激光产生部件之间。 曲面镜被配置为反射并将产生的中空激光束冷凝到腔室中，以在腔室中产生激光感应等离子体，并且反射从产生的激光诱导等离子体发射的光。

公开(公告)号：US08841824B2

公开(公告)日：2014-09-23

申请号：US13667203

申请日：2012-11-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Woo-Seok Ko ,  Yu-Sin Yang ,  Sue-Jin Cho ,  Won-Don Joo ,  Min-Kook Kim ,  Sang-Kil Lee ,  Byeong-Hwan Jeon

IPC: H01J5/16 ,  H01J61/40 ,  H01K1/26 ,  H01K1/30

CPC classification number: H01J65/04

Abstract: A broadband light illuminator of an optical inspector for optically detecting defects of an inspection object may include an electrode-less chamber including a plasma area from which broadband light is generated; a first energy provider, exterior to the chamber, configured to provide first energy for ionizing high pressure gases to form ionized gases in the chamber; a second energy provider, exterior to the chamber, configured to provide second energy for transforming the ionized gases into a plasma state to form the plasma area at a central portion of the chamber; an elliptical reflector having a first focus at which the chamber is positioned and a second focus such that the broadband light is reflected from the elliptical reflector toward the second focus; and a lens unit focusing the reflected broadband light onto the inspection object to form an inspection light for detecting the defects of the inspection object.

Abstract translation: 用于光学检测检查对象的缺陷的光学检查器的宽带照明器可以包括：无电极室，包括产生宽带光的等离子体区域; 第一能量提供者，在室外，被配置为提供第一能量，用于离子化高压气体以在室中形成离子化气体; 第二能量供应器，室外，被配置为提供第二能量，用于将电离气体转换成等离子体状态，以在室的中心部分形成等离子体区域; 具有第一焦点的椭圆形反射器，室被定位，第二焦点使得宽带光从椭圆形反射器反射到第二焦点; 以及透镜单元，将反射的宽带光聚焦到检查对象上，以形成用于检测检查对象的缺陷的检查光。