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公开(公告)号:US20240365535A1
公开(公告)日:2024-10-31
申请号:US18397014
申请日:2023-12-27
Applicant: SAMSUNG ELECTRONICS CO, LTD.
Inventor: Jongmin KIM , Kiseok LEE , Bongsoo KIM , Chan-Sic YOON
IPC: H10B12/00
CPC classification number: H10B12/488 , H10B12/315 , H10B12/482 , H10B12/485
Abstract: A semiconductor device includes a first active pattern including a first edge portion and a second edge portion, which are spaced apart from each other in a first direction; a first word line between the first edge portion of the first active pattern and the second edge portion of the first active pattern and extending in a second direction that crosses the first direction; a bit line on the first edge portion of the first active pattern and extending in a third direction that crosses the first direction and the second direction; and a storage node contact on the second edge portion of the first active pattern, wherein a top surface of the first edge portion is at a level higher than a top surface of the second edge portion.
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公开(公告)号:US20240315005A1
公开(公告)日:2024-09-19
申请号:US18388266
申请日:2023-11-09
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kiseok LEE , Sangjae PARK , Huijung KIM , Taejin PARK , Chansic YOON , Myeongdong LEE
IPC: H10B12/00
CPC classification number: H10B12/315 , H10B12/0335 , H10B12/482
Abstract: A semiconductor device includes an active pattern array including active patterns on a substrate; a first contact structure on a central portion of each active pattern; a bit line structure on the first contact structure; a second contact structure on an end of each active pattern; a third contact structure on the second contact structure; and a capacitor electrically connected to the third contact structure, wherein the active pattern array includes active pattern rows spaced apart from each other in a second direction parallel the substrate, the active pattern rows include active patterns spaced apart from each other in a first direction parallel to the substrate, the active patterns extend in a third direction having an acute angle with the first/second directions, the active patterns in the rows are aligned in the first direction, and the second contact structure has a rectangular shape in a plan view.
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公开(公告)号:US20240268129A1
公开(公告)日:2024-08-08
申请号:US18370940
申请日:2023-09-21
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hongjun LEE , Keunnam KIM , Hui-Jung KIM , Seokhan PARK , Kiseok LEE , Moonyoung JEONG , Jay-Bok CHOI , Hyungeun CHOI , Jinwoo HAN
IPC: H10B80/00 , H01L23/00 , H01L25/00 , H01L25/065 , H01L25/18
CPC classification number: H10B80/00 , H01L24/08 , H01L24/80 , H01L25/0657 , H01L25/18 , H01L25/50 , H01L2224/08145 , H01L2224/80895 , H01L2224/80896 , H01L2225/06541 , H01L2924/1431 , H01L2924/1436
Abstract: Disclosed are semiconductor devices and their fabrication methods. The semiconductor device comprises a lower substrate, a lower dielectric structure on the lower substrate, a memory cell structure between the lower substrate and the lower dielectric structure, a lower bonding pad in the lower dielectric structure, an upper dielectric structure on the lower dielectric structure, an upper substrate on the upper dielectric structure, a transistor between the upper substrate and the upper dielectric structure, and an upper bonding pad in the upper dielectric structure. A top surface of the lower bonding pad is in contact with a bottom surface of the upper bonding pad. The lower bonding pad and the upper bonding pad overlap the memory cell structure.
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公开(公告)号:US20240268102A1
公开(公告)日:2024-08-08
申请号:US18471583
申请日:2023-09-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kiseok LEE , Seung-Bo KO , Jongmin KIM , Hui-Jung KIM , SangJae PARK , Taejin PARK , Chan-Sic YOON , Myeong-Dong LEE , Hongjun LEE , Minju KANG , Keunnam KIM
IPC: H10B12/00
CPC classification number: H10B12/485 , H10B12/482 , H10B12/488
Abstract: A semiconductor device includes first and second active patterns extending in a first direction and arranged in a second direction intersecting the first direction, each of the first and second active patterns including first and second edge portions spaced apart from each other in the first direction, a first storage node pad and a first storage node contact sequentially provided on the first edge portion of the first active pattern, and a second storage node pad and a second storage node contact sequentially provided on the second edge portion of the second active pattern. Each of the first and second storage node contacts includes a metal material.
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公开(公告)号:US20230180456A1
公开(公告)日:2023-06-08
申请号:US18059492
申请日:2022-11-29
Applicant: Samsung Electronics Co., Ltd.
Inventor: Euichul JEONG , Kiseok LEE , Wonki ROH , Hyungeun CHOI
IPC: H10B12/00
CPC classification number: H01L27/10805 , H01L27/1085 , H01L27/10873 , H01L27/10885
Abstract: A semiconductor memory device including a transistor body extending in a first horizontal direction and including a first source/drain region, a single-crystal channel layer, and a second source/drain region sequentially arranged in the first horizontal direction, a gate electrode layer extending in a second horizontal direction orthogonal to the first horizontal direction and covering upper and lower surfaces of the single-crystal channel layer, a bit line connected to the first source/drain region, extending in a vertical direction, and having a first width in the second horizontal direction, a spacer covering upper and lower surfaces of the first source/drain region and having a second width greater than the first width, and a cell capacitor on a side opposite to the bit line with respect to the transistor body in the first horizontal direction and including lower and upper electrode layers and a capacitor dielectric layer therebetween may be provided.
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公开(公告)号:US20230055499A1
公开(公告)日:2023-02-23
申请号:US17805706
申请日:2022-06-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kiseok LEE , Keunnam KIM , Hui-Jung KIM , Wonsok LEE , Min Hee CHO
IPC: H01L27/11582 , H01L27/11556 , H01L27/11519 , H01L27/11526 , H01L27/11565 , H01L27/11573
Abstract: A semiconductor memory device may be provided. The semiconductor memory device may include a bit line, a channel pattern on the bit line, the channel pattern including a horizontal channel portion, which is provided on the bit line, and a vertical channel portion, which is vertically extended from the horizontal channel portion, a word line provided on the channel pattern to cross the bit line, the word line including a horizontal portion, which is provided on the horizontal channel portion, and a vertical portion, which is vertically extended from the horizontal portion to face the vertical channel portion, and a gate insulating pattern provided between the channel pattern and the word line.
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公开(公告)号:US20230044856A1
公开(公告)日:2023-02-09
申请号:US17873242
申请日:2022-07-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Taejin PARK , Kiseok LEE , Hui-Jung KIM , Yoosang HWANG
IPC: H01L29/423 , H01L21/768 , H01L21/762 , H01L21/02 , G11C5/06
Abstract: A semiconductor memory device including a substrate including an active pattern that includes a first source/drain region and a second source/drain region; an insulating layer on the substrate; a line structure on the insulating layer and extending in a first direction to cross the active pattern, the line structure penetrating the insulating layer on the first source/drain region and including a bit line electrically connected to the first source/drain region; and a contact spaced apart from the line structure and electrically connected to the second source/drain region, wherein the bit line includes a first portion vertically overlapped with the first source/drain region; and a second portion vertically overlapped with the insulating layer, and wherein a lowermost level of a top surface of the first portion of the bit line is at a level lower than a lowermost level of a top surface of the second portion of the bit line.
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公开(公告)号:US20220102352A1
公开(公告)日:2022-03-31
申请号:US17241860
申请日:2021-04-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kiseok LEE , Kyunghwan LEE , Dongoh KIM , Yongseok KIM , Hui-jung KIM , Min Hee CHO
IPC: H01L27/108
Abstract: A semiconductor memory device includes a bit line extending in a first direction, a channel pattern on the bit line, the channel pattern including first and second vertical portions facing each other and a horizontal portion connecting the first and second vertical portions, first and second word lines provided on the horizontal portion and between the first and second vertical portions and extended in a second direction crossing the bit line, and a gate insulating pattern provided between the first word line and the channel pattern and between the second word line and the channel pattern.
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公开(公告)号:US20210408008A1
公开(公告)日:2021-12-30
申请号:US17471824
申请日:2021-09-10
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kiseok LEE , Chan-Sic YOON , Augustin HONG , Keunnam KIM , Dongoh KIM , Bong-Soo KIM , Jemin PARK , Hoin LEE , Sungho JANG , Kiwook JUNG , Yoosang HWANG
IPC: H01L27/108 , H01L27/24
Abstract: A method of manufacturing a semiconductor memory device and a semiconductor memory device, the method including providing a substrate that includes a cell array region and a peripheral circuit region; forming a mask pattern that covers the cell array region and exposes the peripheral circuit region; growing a semiconductor layer on the peripheral circuit region exposed by the mask pattern such that the semiconductor layer has a different lattice constant from the substrate; forming a buffer layer that covers the cell array region and exposes the semiconductor layer; forming a conductive layer that covers the buffer layer and the semiconductor layer; and patterning the conductive layer to form conductive lines on the cell array region and to form a gate electrode on the peripheral circuit region.
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公开(公告)号:US20210057416A1
公开(公告)日:2021-02-25
申请号:US17090419
申请日:2020-11-05
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jiyoung KIM , Kiseok LEE , Bong-Soo KIM , Junsoo KIM , Dongsoo WOO , Kyupil LEE , HyeongSun HONG , Yoosang HWANG
IPC: H01L27/108 , H01L27/06 , H01L49/02
Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes a substrate. The semiconductor memory device includes a plurality of memory cell transistors vertically stacked on the substrate. The semiconductor memory device includes a first conductive line connected to a source region of at least one of the plurality of memory cell transistors. The semiconductor memory device includes a second conductive line connected to a plurality of gate electrodes of the plurality of memory cell transistors. Moreover, the semiconductor memory device includes a data storage element connected to a drain region of the at least one of the plurality of memory cell transistors.
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