摘要:
A discharge pumping circuit of spiker/sustainer type for the Excimer laser oscillator, wherein spiker unit is isolated from the sustainer unit by a switching device such as a magnetic isolator is disclosed. In the pumping circuit, the switching device shifts from its OFF state to its ON state, during the process of charging a spiker capacitor, before its terminal voltage reaches a voltage which initiates the discharge, and a sharp-rise pulse voltage is applied by a transfer of electric charge from said sustainer capacitor to said spiker capacitor, to initiate the discharge for the pumping. In another discharge-pumping circuit which also has a means for preionizing the laser gas, the timing for the preionization is set to start after the initiation of charging the sustainer capacitor and before the initiation of charging the spiker capacitor in a polarity opposite to that of the sustainer capacitor, and is controlled for maintaining the discharge initiating voltage constant for the repetition frequency. In another discharge-pumping circuit, a power source for charging the sustainer capacitor is structured to include a magnetic pulse compression circuit to reduce the stress on a high voltage switch such as a thyratron in the circuit to realize an excellent performance, a long service life and a high reliability.
摘要:
The laser transfer machining apparatus comprises a shaping unit for shaping the laser beam so that the laser beam has a beam pattern which corresponds to a desired pattern to be machined in the object to be machined and a generating unit disposed separately from the shaping unit for simultaneously generating a plurality of laser beams each having the beam pattern from the laser beam shaped by the shaping unit. The generating unit is adapted to emit the plural laser beams while simultaneously defining a plurality of radiation directions of the generated plural laser beams to the object to be machined. The laser transfer machining apparatus can provide a high efficiency of utilization of light and reduce the time required for machining. Furthermore, the laser transfer machining apparatus can utilize a laser with a relatively low spatially coherence such as an eximer laser.
摘要:
A saturable reactor comprising a magnetic core (1) having an annular or an elongated race-track configuration, an electrical insulator (6) disposed around the magnetic core and a conductor winding (3) wound around the insulator (6). A coolant duct (7) is provided in the insulator to extend radially transversely across the magnetic core and having a radially separated inlet and outlet (8,9). A saturable reactor may comprises an annular magnetic core (51), a conductor winding including a first conductor (55) surrounded by the magnetic core (51) and a second conductor (56) disposed around the magnetic core and connected to the first conductor (55) through a load. A control winding (54) extends through the first and second conductors (55,56), and at least one of the first and second conductors (55,56) has a notch or a through hole (57,59) for insulatingly receiving the control winding (54) therein. Also disclosed is a laser oscillator comprising a gas-filled laser chamber (81) in which a main electrode pair (82,83) is disposed in an opposing relationship to define a laser-excited discharge region therebetween. At least some of the components of an oscillation circuit for generating a laser oscillation are disposed within a first circuit component chamber (95) disposed adjacent to the laser chamber (81) and filled with an electrically insulating gas, and some other components are disposed within a second circuit component chamber (96) disposed adjacent to the first circuit component chamber (95) and filled with an electrically insulating oil.
摘要:
A switch device used for a laser device, includes series-parallel connected switch elements or modules. The switch elements or modules are simultaneously turned on by trigger signals from trigger circuits. The transmission lines for connecting the trigger circuits to respective switch elements are equal to one another in length. A protecting circuit is provided for the switch elements, and indicators are provided for indicating the shortcircuit of the switch elements. In the switch device, the number of wires for the switch elements is made small and heat generated from the switch elements is effectively radiated. The modules are easily stacked, and firmly connected to a control unit for controlling the switch elements. A discharge excited laser device using the switch device has a high efficiency and a long lifetime and is reliable.
摘要:
A thin film forming apparatus using laser includes a chamber (1), a target (5) placed therein, a laser light source (10) for emitting laser beam to target (5), and a substrate holder (3). When target (5) is irradiated with laser beam (16), a plume (15) is generated, and materials included in plume (15) are deposited on the surface of a substrate (2) held by substrate holder (3). The laser beam emitted from laser light source (10) has its cross section shaped to a desired shape when passed through a shielding plate (4804), for example, so that the surface of the target (5) is irradiated with the beam having uniform light intensity distribution. Therefore, a plume (15) having uniform density distribution of active particles is generated, and therefore a thin film of high quality can be formed over a wide area with uniform film quality, without damaging the substrate.
摘要:
A thin film forming apparatus using laser includes a chamber (1), a target (5) placed therein, a laser light source (10) for emitting laser beam to target (5), and a substrate holder (3). When target (5) is irradiated with laser beam (16), a plume (15) is generated, and materials included in plume (15) are deposited on the surface of a substrate (2) held by substrate holder (3). The laser beam emitted from laser light source (10) has its cross section shaped to a desired shape when passed through a shielding plate (4804), for example, so that the surface of the target (5) is irradiated with the beam having uniform light intensity distribution. Therefore, a plume (15) having uniform density distribution of active particles is generated, and therefore a thin film of high quality can be formed over a wide area with uniform film quality, without damaging the substrate.
摘要:
A discharge-excited laser apparatus includes a pair of discharge electrodes extending in a direction of an optical axis; a plurality of charging capacitors charged by a power source; a plurality of peaking capacitors arranged in parallel in a longitudinal direction of the discharge electrodes and receiving energy accumulated in the charging capacitors; and a plurality of semiconductor switches arranged with conductive plates in the longitudinal direction of the discharge electrodes and connected in series and in parallel to the peaking capacitors. The construction of the semiconductor switches enables uniform shift of the energy in the charging capacitors to the peaking capacitors and reduction of inductance of a loop for capacity shifting.
摘要:
A method of manufacturing an electrode for electrical-discharge surface treatment includes increasing oxygen content in the powder; mixing the powder, in which the oxygen content is increased, with an organic binder and a solvent to prepare a liquid mixture; granulating the powder in the liquid mixture to form granulated powder; and forming the granulated powder to prepare a compact in which an oxygen concentration ranges from 4 weight % to 16 weight %.
摘要:
A method of manufacturing an electrode for electrical-discharge surface treatment includes increasing oxygen content in the powder; mixing the powder, in which the oxygen content is increased, with an organic binder and a solvent to prepare a liquid mixture; granulating the powder in the liquid mixture to form granulated powder; and forming the granulated powder to prepare a compact in which an oxygen concentration ranges from 4 weight % to 16 weight %.
摘要:
The present invention relates to means for manufacturing micro-beads (polymer micro-particles) comprising thermoplastic polymer and having the average particle size of 10 μm or less, and extending into the nano-range. An original filament comprising a thermoplastic polymer is passed through an orifice under an air pressure (P1) and guided to a spray chamber under a pressure (P2; where P1>P2). The original filament having passed through the orifice is heated and melted under irradiation by an infrared beam, and is sprayed in microparticulate form from the orifice by the flow of air generated by the pressure differential between P1 to P2, whereby micro-beads comprising thermoplastic polymer micro-particles having an average particle size of 10 μm or less, and even less than 1 μm are manufactured.