Thin film forming apparatus using laser
    3.
    发明授权
    Thin film forming apparatus using laser 失效
    使用激光的薄膜成形装置

    公开(公告)号:US5622567A

    公开(公告)日:1997-04-22

    申请号:US158844

    申请日:1993-11-29

    摘要: A thin film forming apparatus using laser includes a chamber (1), a target (5) placed therein, a laser light source (10) for emitting laser beam to target (5), and a substrate holder (3). When target (5) is irradiated with laser beam (16), a plume (15) is generated, and materials included in plume (15) are deposited on the surface of a substrate (2) held by substrate holder (3). The laser beam emitted from laser light source (10) has its cross section shaped to a desired shape when passed through a shielding plate (4804), for example, so that the surface of the target (5) is irradiated with the beam having uniform light intensity distribution. Therefore, a plume (15) having uniform density distribution of active particles is generated, and therefore a thin film of high quality can be formed over a wide area with uniform film quality, without damaging the substrate.

    摘要翻译: 使用激光的薄膜形成装置包括:室(1),放置在其中的靶(5),用于将目标物(5)发射激光的激光源(10)和基板保持器(3)。 当用激光束(16)照射靶(5)时,产生羽流(15),并且包含在羽流(15)中的材料沉积在由基板保持器(3)保持的基板(2)的表面上。 从激光光源(10)发射的激光束的横截面通过遮蔽板(4804)时成形为期望的形状,使得靶(5)的表面被均匀地照射 光强分布。 因此,产生具有均匀的活性粒子密度分布的羽流(15),因此可以在不损害基板的情况下,在宽的区域上形成具有均匀膜质量的高质量的薄膜。

    CIRCUIT CONNECTING METHOD
    7.
    发明申请
    CIRCUIT CONNECTING METHOD 有权
    电路连接方法

    公开(公告)号:US20100263208A1

    公开(公告)日:2010-10-21

    申请号:US12740801

    申请日:2008-02-06

    IPC分类号: H05K3/36

    摘要: The invention provides a circuit connecting method that can satisfactorily reduce connection resistance between circuit electrodes electrically connected via an anisotropic conductive film for circuit connection.The circuit connecting method comprises a step of preparing a circuit member 12 having circuit electrodes 12b formed on a glass substrate 12a, a step of preparing a flexible wiring board 14 having circuit electrodes 14b formed on a base 14a and provided with a solder resist 18 at the sections of the circuit electrodes 14b other than the sections that are connected to the circuit electrodes 12b, and a step of bonding the circuit member 12 to the flexible wiring board 14 via an anisotropic conductive film for circuit connection 16 so that part of the anisotropic conductive film for circuit connection 16 overlaps with part of the solder resist 18. The thickness h3 of the anisotropic conductive film for circuit connection 16 is no greater than the total of the height h1 of the circuit electrodes 12b and the height h2 of the circuit electrodes 14b.

    摘要翻译: 本发明提供一种电路连接方法,其可以令人满意地减小经由用于电路连接的各向异性导电膜电连接的电路电极之间的连接电阻。 电路连接方法包括制备具有形成在玻璃基板12a上的电路电极12b的电路部件12的步骤,制备柔性布线基板14的步骤,该柔性布线基板14具有形成在基座14a上的电路电极14b,并设置有阻焊剂18 除了连接到电路电极12b的部分之外的电路电极14b的部分,以及通过用于电路连接16的各向异性导电膜将电路部件12接合到柔性布线板14的步骤,使得部分各向异性 用于电路连接的导电膜16与阻焊剂18的一部分重叠。用于电路连接16的各向异性导电膜的厚度h3不大于电路电极12b的高度h1和电路电极的高度h2的总和 14b。

    Circuit connecting method
    9.
    发明授权
    Circuit connecting method 有权
    电路连接方式

    公开(公告)号:US08132319B2

    公开(公告)日:2012-03-13

    申请号:US12740801

    申请日:2008-02-06

    IPC分类号: H05K3/30

    摘要: The invention provides a circuit connecting method that can satisfactorily reduce connection resistance between circuit electrodes electrically connected via an anisotropic conductive film for circuit connection.The circuit connecting method comprises a step of preparing a circuit member 12 having circuit electrodes 12b formed on a glass substrate 12a, a step of preparing a flexible wiring board 14 having circuit electrodes 14b formed on a base 14a and provided with a solder resist 18 at the sections of the circuit electrodes 14b other than the sections that are connected to the circuit electrodes 12b, and a step of bonding the circuit member 12 to the flexible wiring board 14 via an anisotropic conductive film for circuit connection 16 so that part of the anisotropic conductive film for circuit connection 16 overlaps with part of the solder resist 18. The thickness h3 of the anisotropic conductive film for circuit connection 16 is no greater than the total of the height h1 of the circuit electrodes 12b and the height h2 of the circuit electrodes 14b.

    摘要翻译: 本发明提供一种电路连接方法,其可以令人满意地减小经由用于电路连接的各向异性导电膜电连接的电路电极之间的连接电阻。 电路连接方法包括制备具有形成在玻璃基板12a上的电路电极12b的电路部件12的步骤,制备柔性布线基板14的步骤,该柔性布线基板14具有形成在基座14a上的电路电极14b,并设置有阻焊剂18 除了连接到电路电极12b的部分之外的电路电极14b的部分,以及通过用于电路连接16的各向异性导电膜将电路部件12接合到柔性布线板14的步骤,使得部分各向异性 用于电路连接的导电膜16与阻焊剂18的一部分重叠。用于电路连接16的各向异性导电膜的厚度h3不大于电路电极12b的高度h1和电路电极的高度h2的总和 14b。