公开(公告)号：US11874178B2

公开(公告)日：2024-01-16

申请号：US17354257

申请日：2021-06-22

Applicant: King Abdullah University of Science and Technology

Inventor： Congli Wang ,  Xiong Dun ,  Qiang Fu ,  Wolfgang Heidrich

IPC: G01J9/02 ,  G03F7/00 ,  G01J9/00

CPC classification number: G01J9/02 ,  G01J9/00 ,  G01J9/0215 ,  G03F7/001 ,  G01J2009/002

Abstract: A wavefront sensor includes a mask and a sensor utilized to capture a diffraction pattern generated by light incident to the mask. A reference image is captured in response to a plane wavefront incident on the mask, and another measurement image is captured in response to a distorted wavefront incident on the mask. The distorted wavefront is reconstructed based on differences between the reference image and the measurement image.

公开(公告)号：US11815402B2

公开(公告)日：2023-11-14

申请号：US17425646

申请日：2019-12-19

Applicant: ASML Netherlands B.V.

Inventor： Sietse Thijmen Van Der Post ,  Peter Danny Van Voorst

IPC: G01J9/00 ,  G01N23/207 ,  G02B3/00 ,  G02B5/18 ,  G03F7/00 ,  G21K1/06

CPC classification number: G01J9/00 ,  G01N23/207 ,  G02B3/0037 ,  G02B5/1819 ,  G02B5/1838 ,  G03F7/70616 ,  G21K1/065 ,  G01J2009/002

Abstract: Disclosed is a wavefront sensor for measuring a tilt of a wavefront at an array of locations across a beam of radiation, wherein said wavefront sensor comprises a film, for example of Zirconium, having an indent array comprising an indent at each of said array of locations, such that each indent of the indent array is operable to perform focusing of said radiation. Also disclosed is a radiation source and inspection apparatus comprising such a wavefront sensor.

公开(公告)号：US09423306B2

公开(公告)日：2016-08-23

申请号：US14587392

申请日：2014-12-31

Applicant: RAM Photonics, LLC

Inventor： Seung-Whan Bahk

IPC: G01B9/02 ,  G01J9/02 ,  G03F7/20

CPC classification number: G01J9/0215 ,  G01B9/02 ,  G01J9/02 ,  G01J2009/002 ,  G03F7/706

Abstract: A method of measuring characteristics of a wavefront of an incident beam includes obtaining an interferogram associated with the incident beam passing through a transmission mask and Fourier transforming the interferogram to provide a frequency domain interferogram. The method also includes selecting a subset of harmonics from the frequency domain interferogram, individually inverse Fourier transforming each of the subset of harmonics to provide a set of spatial domain harmonics, and extracting a phase profile from each of the set of spatial domain harmonics. The method further includes removing phase discontinuities in the phase profile, rotating the phase profile, and reconstructing a phase front of the wavefront of the incident beam.

Abstract translation: 测量入射光束的波前特性的方法包括获得与通过透射掩模的入射光束相关联的干涉图，并对干涉图进行傅里叶变换以提供频域干涉图。 该方法还包括从频域干涉图中选择一个谐波子集，单独逆傅里叶变换谐波子集中的每一个以提供一组空间域谐波，以及从该组空间域谐波中的每一个提取相位分布。 该方法还包括去除相位分布中的相位不连续性，旋转相位分布，以及重建入射光束的波前的相位前沿。

公开(公告)号：US20160061656A1

公开(公告)日：2016-03-03

申请号：US14784744

申请日：2014-03-20

Applicant: NATIONAL UNIVERSITY CORPORATION KYOTO INSTITUTE OF TECHNOLOGY

Inventor： Yasuhiro AWATSUJI ,  Peng XIA

IPC: G01J1/04 ,  G01J1/44

CPC classification number: G01J1/0429 ,  G01B11/24 ,  G01J1/44 ,  G01J2009/002 ,  G02B21/0016 ,  G02B21/14 ,  H01J2237/26

Abstract: A complex amplitude information measurement apparatus (10) according to the present invention includes pixel sensor groups for generating a difference from one pixel sensor group to another in the optical distance of object light traveling from a measurement object (100); a camera (15) provided with an image sensor for recording, with a single-shot exposure, the object light that has passed through or been reflected from the pixel sensor groups to obtain intensity information of the measurement object; and a computer (16) for computing, on the basis of the intensity information, phase information of the measurement object (100).

Abstract translation: 根据本发明的复振幅信息测量装置（10）包括像素传感器组，用于在从测量对象（100）行进的物体光的距离中产生从一个像素传感器组到另一个像素传感器组的差异; 具有图像传感器的相机（15），用于单次曝光，通过或者从像素传感器组反射的对象光，以获得测量对象的强度信息; 以及用于根据强度信息计算测量对象（100）的相位信息的计算机（16）。

公开(公告)号：US20140293274A1

公开(公告)日：2014-10-02

申请号：US13974024

申请日：2013-08-22

Applicant: HON HAI PRECISION INDUSTRY CO., LTD.

Inventor： LI-YING WANG HE

IPC: G01J9/00

CPC classification number: G01J9/00 ,  G01J2009/002

Abstract: A wavefront measuring system with large dynamic measuring range includes a measuring unit, a control unit, and a processing unit. The measuring unit includes a wavefront dividing component, a focusing component and a photosensor. The wavefront dividing component samples a part of a laser beam (a sampled light beam) in a measuring plane, the focusing component focuses the sampled light beam on a photosensitive surface of the photosensor to form a light spot, the photosensor detects the presence of the light spot, the data processing unit acquires the locational information of the light spot and calculates the direction of the sampled light beam beam. The control unit drives the measuring unit to a different position in the same measuring plane, the wavefront dividing component samples another sampled light beam. The data processing unit calculates the wavefront distribution on the measuring plane based on the direction determined sampled light beams.

Abstract translation: 具有大动态测量范围的波前测量系统包括测量单元，控制单元和处理单元。 测量单元包括波前分割组件，聚焦组件和光电传感器。 波前分割部件在测量平面中采样激光束（采样光束）的一部分，聚焦部件将采样的光束聚焦在光电传感器的感光表面上以形成光点，光电传感器检测到 光点，数据处理单元获取光点的位置信息并计算采样光束的方向。 控制单元将测量单元驱动到相同测量平面中的不同位置，波前分割组件对另一个采样光束进行采样。 数据处理单元基于确定的采样光束的方向来计算测量平面上的波前分布。

公开(公告)号：US20130250099A1

公开(公告)日：2013-09-26

申请号：US13795998

申请日：2013-03-12

Applicant: CANON KABUSHIKI KAISHA

Inventor： Hitoshi Iijima ,  Atsushi Maeda

IPC: G01B11/24

CPC classification number: G01B11/2441 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/70 ,  G01J2009/002 ,  G01J2009/0203 ,  G01M11/025 ,  G01M11/0271 ,  Y10T29/49826

Abstract: To eliminate influence of undesirable light component from an object when measuring optical characteristics such as shape and wavefront aberration of the object, light from light source (101) is separated by polarization beam splitter (103) into measuring light (L1) that irradiates and travels via the object (108) and is condensed on image plane (P) through microlenses (114a) of microlens array (114), and reference light (L2) that does not irradiate the object and is guided to the image plane by reference light optical system (109). A computer (113) acquires picked-up images sequentially from CCD image sensor (116) arranged on the image plane while changing optical path length of the reference light by movable stage (117), extracts interference light spots generated through interference between signal light component and the reference light from the picked-up images, calculates positions of the interference light spots, and calculates deviation amounts of positions from predetermined reference positions.

Abstract translation: 为了在测量物体的形状和波面象差等光学特性时，消除来自物体的不良光分量的影响，来自光源（101）的光被偏振分束器（103）分离成照射和行进的测量光（L1） 通过物体（108）通过微透镜阵列（114）的微透镜（114a）在像平面（P）上聚焦，并且通过参考光学光学被引导到图像平面的参考光（L2）不被照射到物体 系统（109）。 计算机（113）在通过移动台（117）改变参考光的光程长度的同时，从布置在图像平面上的CCD图像传感器（116）顺序地获取拾取图像，提取通过信号光分量 和来自拾取图像的参考光，计算干涉光斑的位置，并计算出与预定基准位置的偏移量。

公开(公告)号：US20050163365A1

公开(公告)日：2005-07-28

申请号：US11045703

申请日：2005-01-28

Applicant: Blair Barbour

Inventor： Blair Barbour

IPC: G01B11/24 ,  G01J3/28 ,  G01J3/36 ,  G01J3/447 ,  G01J4/04 ,  G01J9/00 ,  G06K7/00 ,  G06K9/00 ,  G06K9/36 ,  H01Q3/26

CPC classification number: G01B11/24 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/447 ,  G01J4/04 ,  G01J9/00 ,  G01J2009/002

Abstract: An apparatus for information extraction from electromagnetic energy via multi-characteristic spatial geometry processing to determine three-dimensional aspects of an object from which the electromagnetic energy is proceeding. The apparatus receives the electromagnetic energy. The received electromagnetic energy has a plurality of spatial phase characteristics. The apparatus separates the plurality of spatial phase characteristics of the received electromagnetic energy. The apparatus r identifies spatially segregated portions of each spatial phase characteristic, with each spatially segregated portion of each spatial phase characteristic corresponding to a spatially segregated portion of each of the other spatial phase characteristics in a group. The apparatus quantifies each segregated portion to provide a spatial phase metric of each segregated portion for providing a data map of the spatial phase metric of each separated spatial phase characteristic. The apparatus processes the spatial phase metrics to determine surface contour information for each segregated portion of the data map.

Abstract translation: 一种用于通过多特征空间几何处理从电磁能量提取信息以确定电磁能量正在进行的物体的三维方面的装置。 该装置接收电磁能。 所接收的电磁能具有多个空间相位特性。 该装置分离接收的电磁能的多个空间相位特性。 装置r识别每个空间相位特征的空间分离的部分，每个空间相位特征的每个空间分离的部分对应于一组中的每个其他空间相位特征的空间上分离的部分。 该装置对每个隔离部分进行量化以提供每个分离部分的空间相位度量，以提供每个分离的空间相位特性的空间相位度量的数据图。 该装置处理空间相位度量以确定数据图的每个分离部分的表面轮廓信息。

公开(公告)号：US5610707A

公开(公告)日：1997-03-11

申请号：US499325

申请日：1995-07-07

Applicant: Alan L. Duncan ,  Daniel S. Acton ,  Richard L. Kendrick

Inventor： Alan L. Duncan ,  Daniel S. Acton ,  Richard L. Kendrick

IPC: G01J9/00 ,  G02B26/06 ,  G01J1/20

CPC classification number: G01J9/00 ,  G02B26/06 ,  G01J2009/002 ,  G02F2203/18

Abstract: A wavefront sensor for use in a staring imaging system for generating focused and defocused images of an object scene that is being imaged by the imaging system from a single input optical beam impinged thereon. The wavefront sensor includes a beamsplitter for splitting an optical input beam into identical first and second half beam portions and for focusing the first and second half beam portions onto respective first and second focal planes. A phase plate is interposed between the beamsplitter and the second focal plane for inducing a known focus error in the second half beam portion. A photodetector is also provided and is effective to form a best focused image and a slightly out of focus image at the first and second focal planes, respectively. The focused and defocused images are combinable using phase diversity techniques to estimate wavefront aberrations present in the imaging system.

Abstract translation: 一种用于凝视成像系统中的波前传感器，用于产生由成像系统从入射到其上的单个输入光束成像的对象场景的聚焦和散焦图像。 波前传感器包括用于将光输入光束分成相同的第一和第二半光束部分并用于将第一和第二半光束部分聚焦到相应的第一和第二焦平面上的分束器。 在分束器和第二焦平面之间插入相位板，用于在第二半光束部分中引起已知的聚焦误差。 还提供了光电检测器，并且分别有效地在第一和第二焦平面处形成最佳聚焦图像和略微偏离焦​​点图像。 聚焦和散焦图像可使用相位分集技术来估计成像系统中存在的波前像差。

公开(公告)号：US5367375A

公开(公告)日：1994-11-22

申请号：US832282

申请日：1992-02-07

Applicant: Edward T. Siebert

Inventor： Edward T. Siebert

IPC: G01J9/00 ,  G01B9/02 ,  G01J1/00

CPC classification number: G01J9/00 ,  G01J2009/002

Abstract: A method, and apparatus for accomplishing the method, for determining a phase difference of a wavefront at a first (pupil) plane (P1), the wavefront propagating from the first plane to a second (image) plane (P2). The method includes the steps of providing an intensity of the wavefront at the first plane; measuring an intensity of the wavefront at the second plane; and determining the phase difference of the wavefront at the first plane in accordance with a transfer function that employs the provided intensity of the wavefront at the first plane and the measured intensity of the wavefront at the second plane. A single expression describing an Optical Transfer Function is developed and is shown to involve only the unknown aperture phase and known quantities. A solution to this expression, achieved by a polynomial expansion technique or by a sampling technique, is shown to yield the phase at the aperture and, together with the intensity at the aperture, to define the aperture wavefront.

Abstract translation: 一种用于实现该方法的方法和装置，用于确定在第一（瞳孔）平面（P1）处的波前相位差，该波前从第一平面传播到第二（图像）平面（P2）。 该方法包括以下步骤：在第一平面处提供波前的强度; 测量在第二平面处的波前的强度; 以及根据在第一平面处使用提供的波前强度和在第二平面处的波前的测量强度的传递函数来确定第一平面处的波前的相位差。 开发了描述光学传递函数的单个表达式，并且显示仅涉及未知孔径相位和已知量。 通过多项式展开技术或通过采样技术实现的该表达式的解决方案被显示为产生孔径处的相位以及孔径处的强度以限定孔径波前。

公开(公告)号：US12068778B2

公开(公告)日：2024-08-20

申请号：US18278250

申请日：2021-06-28

Applicant: PENG CHENG LABORATORY

Inventor： Shupeng Deng ,  Caiming Sun ,  Weiwei Liu ,  Aidong Zhang

IPC: H04B10/079 ,  G01J9/00

CPC classification number: H04B10/0795 ,  G01J2009/002

Abstract: An on-chip wavefront sensor, an optical chip, and a communication device are disclosed. The on-chip wavefront sensor includes an antenna array configured for separating received spatial light to obtain a plurality of sub-light spots; a reference light source module configured for generating a plurality of intrinsic light beams; a phase shifter array configured for performing phase shifting processing on the intrinsic light beams to obtain reference light; and an optical detection module configured for performing coherent balanced detection according to the reference light and the sub-light spots to obtain a photocurrent corresponding to each of the sub-light spots.