Bonding device
    5.
    发明授权
    Bonding device 有权
    粘接装置

    公开(公告)号:US09508572B2

    公开(公告)日:2016-11-29

    申请号:US14288054

    申请日:2014-05-27

    摘要: A boding device includes a light guiding part that guides laser beam oscillated from a laser oscillator, a bonding head that heats a chip with the laser beam, and a bonding head moving part that moves the bonding head between a supply position and a bonding position. The laser oscillator is separated from the bonding head. The light guiding part includes an irradiation barrel that is provided in the vicinity of the bonding position and, a shutter part that is provided in the irradiation barrel, and a light receiving part that is provided in the bonding head and guides the laser beam to the chip. When the bonding head moving part moves the bonding head to the bonding position, the shutter part is opened so that the laser beam from the irradiation barrel is guided to the bonding head through the light receiving part.

    摘要翻译: 引导装置包括:导光部,其引导从激光振荡器振荡的激光束;激光束加热芯片的接合头;以及接合头移动部,其在接合位置和接合位置之间移动接合头。 激光振荡器与接合头分离。 导光部包括设置在接合位置附近的照射筒和设置在照射筒中的遮光部,以及设置在接合头中的光接收部,并将激光束引导到 芯片。 当接合头移动部分将接合头移动到接合位置时,打开快门部分,使得来自照射筒的激光束通过光接收部分被引导到接合头。

    BONDING APPARATUS
    10.
    发明公开
    BONDING APPARATUS 审中-公开

    公开(公告)号:US20240120311A1

    公开(公告)日:2024-04-11

    申请号:US18230825

    申请日:2023-08-07

    IPC分类号: H01L23/00

    摘要: A bonding apparatus includes: a chamber including a light transmission part configured to transmit light irradiated onto a substrate on which at least one chip is disposed; and a light generation part disposed on the chamber and configured to irradiate the light. The light transmission part may include an absorption prevention layer, in which a plurality of through-holes are defined, and a light diffusion layer that diffuses the light passing through the plurality of through-holes to reduce heat generation in the light transmission part and uniformly irradiate the light passing through the light transmission part onto the substrate on which at least one chip is disposed.