公开(公告)号：US10141214B2

公开(公告)日：2018-11-27

申请号：US14868689

申请日：2015-09-29

Applicant: Brooks Automation, Inc.

Inventor： Antonio F. Pietrantonio ,  Anthony Chesna ,  Hakan Elmali ,  Ulysses Gilchrist

IPC: H01L21/677 ,  B25J9/04 ,  H01L21/687 ,  B25J18/00

Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

公开(公告)号：US10134623B2

公开(公告)日：2018-11-20

申请号：US15209497

申请日：2016-07-13

Applicant: BROOKS AUTOMATION, INC.

Inventor： Bing Yin ,  Jairo T. Moura ,  Vincent Tsang ,  Aaron Gawlik ,  Nathan Spiker

IPC: G06F19/00 ,  H01L21/68 ,  H01L21/687

Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.

公开(公告)号：US20180308728A1

公开(公告)日：2018-10-25

申请号：US15889811

申请日：2018-02-06

Applicant: Brooks Automation, Inc.

Inventor： Alexander KRUPYSHEV ,  Leigh F. SHARROCK ,  Joseph HALLISEY

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677 ,  B25J15/06

CPC classification number: H01L21/67196 ,  B25J15/0616 ,  H01L21/67167 ,  H01L21/67742 ,  H01L21/68707

Abstract: A substrate processing apparatus includes a linearly elongated substantially hexahedron shaped substrate transport chamber having linearly elongated sides of the hexahedron and at least one end wall of the hexahedron substantially orthogonal to the linearly elongated sides. A plurality of process modules are linearly arrayed along the at least one of the linearly elongated sides. A substrate transport arm is pivotally mounted within the substrate transport chamber so that a pivot axis of the substrate transport arm is mounted, fixed relative to the substrate transport chamber. The substrate transport arm has a three link—three joint SCARA configuration, of which one link is an end effector with at least one substrate holder, that is articulate to transport the substrate, and held by the at least one substrate holder, in and out of the substrate transport chamber through the end and side substrate transport openings.

公开(公告)号：US10101352B2

公开(公告)日：2018-10-16

申请号：US15496989

申请日：2017-04-25

Applicant: Brooks Automation, Inc.

Inventor： Mark Borodkin ,  David Mejia ,  Werner Willemse ,  Robert K. Neeper

IPC: G01N35/02 ,  G01N35/00 ,  B65G1/137 ,  G01N35/04

Abstract: An apparatus includes a frame configured to hold sample holders in an array, a longitudinal axis of the sample holder extending outward of an array plane; a drive section connected to the frame; at least one transfer arm rotatably connected to the drive section so that each transfer arm rotates about a rotation axis oriented substantially parallel with the longitudinal axis and includes a sample holder gripper; and at least one push member movably connected to the drive section and being distinct from the sample holder gripper and configured for linear movement along the longitudinal axis, the at least one push member being configured so that engagement with at least a bottom or top surface of the sample holder effects longitudinal translation of the sample holder for one or more of capture and release of the sample holder by the respective transfer arm in the longitudinal direction.

公开(公告)号：US20180269094A1

公开(公告)日：2018-09-20

申请号：US15986710

申请日：2018-05-22

Applicant: Brooks Automation, Inc.

Inventor： Daniel Babbs ,  William Fosnight ,  Robert C. May ,  William Weaver

IPC: H01L21/677 ,  H01L21/673 ,  H01L21/67

CPC classification number: H01L21/67766 ,  H01L21/67201 ,  H01L21/67207 ,  H01L21/67213 ,  H01L21/67225 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67393 ,  H01L21/67742 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67778 ,  Y10S414/14

Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.

公开(公告)号：US20180138066A1

公开(公告)日：2018-05-17

申请号：US15849002

申请日：2017-12-20

Applicant: BROOKS AUTOMATION, INC.

Inventor： Robert T. CAVENEY ,  Jayaraman KRISHNASAMY ,  Ulysses GILCHRIST ,  Mitchell DREW ,  Jairo T. MOURA

IPC: H01L21/677 ,  B25J18/04 ,  B25J9/04 ,  B25J11/00

CPC classification number: H01L21/67706 ,  B25J9/042 ,  B25J9/043 ,  B25J11/0095 ,  B25J18/04 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20329

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

公开(公告)号：US09926919B2

公开(公告)日：2018-03-27

申请号：US15012399

申请日：2016-02-01

Applicant: Brooks Automation, Inc.

Inventor： Sergei Syssoev ,  Allen J. Bartlett ,  John J. Casello ,  Jeffrey A. Wells ,  Michael J. Eacobacci, Jr.

IPC: F04B37/08 ,  B01D8/00

CPC classification number: F04B37/08 ,  B01D8/00 ,  Y10T29/49236

Abstract: A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

公开(公告)号：US09895695B2

公开(公告)日：2018-02-20

申请号：US14316414

申请日：2014-06-26

Applicant: Brooks Automation, Inc.

Inventor： Robert K. Neeper ,  Rhett L. Affleck ,  Roger Howard

IPC: B32B38/10 ,  B01L9/00 ,  B29C63/00 ,  B67B7/00 ,  B01L99/00 ,  B32B43/00

CPC classification number: B01L9/00 ,  B01L99/00 ,  B29C63/0013 ,  B32B38/10 ,  B32B43/006 ,  B67B7/00 ,  Y10T156/1168 ,  Y10T156/1174 ,  Y10T156/19 ,  Y10T156/195 ,  Y10T156/1956 ,  Y10T156/1978 ,  Y10T156/1989

Abstract: A container or array of containers that is are sealed with a peelable seal is transported via a conveyor along a processing path toward a desealing station at which an adhesive surface having a width substantially the same as or greater than the width of the seal is pressed against the upper surface of the peelable seal. A collection rod applies a downward pressure on the adhesive surface, pressing it against the seal and keeping the container or container array in position on the conveyor as the plate moves with the conveyor. As the leading edge of the seal passes the collection rod, the adhesive surface is rolled upward, away from the plane of the seal, pulling up on the leading edge of the seal to separate it from the container or container array while the container or container array is held down by the roller. The removed seal is then discarded.

公开(公告)号：US09691651B2

公开(公告)日：2017-06-27

申请号：US14089439

申请日：2013-11-25

Applicant: Brooks Automation, Inc.

Inventor： Matthew W. Coady

IPC: H01L21/68 ,  H01L21/687

CPC classification number: H01L21/68 ,  H01L21/68707

Abstract: A system for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased. The system includes a robotic arm for moving a wafer from one station to a destination station, and an end-effector connected to an end of the robotic arm for receiving the wafer. The end-effector includes a mechanism for gripping the wafer, a direct drive motor for rotating the wafer gripping mechanism, and at least one sensor for sensing the location and orientation of the wafer. A control processor calculates the location of the center and the notch of the wafer based on measurements by the sensor(s) and generates an alignment signal for rotating the wafer gripping mechanism so that the wafer is oriented at a predetermined position on the end-effector while the robotic arm is moving to another station.

公开(公告)号：US20170087720A1

公开(公告)日：2017-03-30

申请号：US15376119

申请日：2016-12-12

Applicant: BROOKS AUTOMATION, INC.

Inventor： Jayaraman KRISHNASAMY ,  Martin HOSEK

IPC: B25J9/16 ,  H01L21/677 ,  H01L21/67

CPC classification number: B25J9/1664 ,  G05B19/416 ,  G05B2219/40449 ,  G05B2219/40466 ,  H01L21/67259 ,  H01L21/67742 ,  H01L21/67766

Abstract: A time-optimal trajectory generation method, for a robotic manipulator haying a transport path with at least one path segment, comprising generating a forward time-optimal trajectory of the manipulator along the at least one path segment from a start point of the at least one path segment towards an end point of the at least one path segment, generating a reverse time-optimal trajectory of the manipulator along the at least one path segment from the end point towards the start point of the at least one path segment, and combining the time-optimal forward and reverse trajectories to obtain a complete time optimal trajectory, where the forward and reverse trajectories of the at least one path segment are blended together with a smoothing bridge joining the time-optimal forward and reverse trajectories in a position-velocity reference frame with substantially no discontinuity between the time-optimal forward and reverse trajectories.