摘要:
A vacuum chamber includes: a vacuum vessel arranged at the backward side, where a wafer of a processing subject is processed inside an internal processing chamber; a transfer chamber arranged at the forward side, where said wafer is transferred at the inside thereof under atmospheric pressure; a cassette stage arranged at the forward of this transfer chamber, where a cassette storing said wafer is mounted; a lock chamber connected with said transfer chamber at the backward of said transfer chamber; a robot arranged inside said transfer chamber, where said wafer is transferred between said cassette and said lock chamber; and an aligning machine for making position of said wafer fit with the predetermined position, wherein the wafer is transferred to said lock chamber, after performing alignment of said wafer on said aligning machine, in the case where displacement amount of position of this wafer is larger than the predetermined value.
摘要:
The present invention provides a process of producing an activated carbon for an electric double layer capacitor, which can produce easily and inexpensively an activated carbon free from fusing of carbon particles during activation and having a small diameter, a uniform particle diameter, and a relatively large specific surface area on a commercial scale. The process comprises the steps of calcining an easily graphitizable carbon material so that the reduction rates of the hydrogen/carbon atomic ratio (H/C) and the volatile components in the carbon material are 4 percent or more and 5 percent or more, respectively after calcination and activating the carbon material thereby producing an activated carbon for an electric double layer capacitor, having an average particle diameter of 0.5 to 7 μm and a BET specific surface area of 1500 to 3000 m2/g.
摘要:
A power supply unit superimposes alternating-current voltage on direct-current voltage and applies it to a motor. As a result, when the motor is rotated, a current containing an alternating-current component flows. Further, the motor includes a capacitor connected in parallel with one phase coil. Owing to this capacitor, the impedance of the motor circuit between brushes is varied according to the rotation of the motor. Variation in impedance appears as variation in the amplitude of the alternating-current component in motor current. A signal processing unit extracts an alternating-current component from the motor current detected by the current detection unit and generates a rotation pulse corresponding to variation in the amplitude. A rotation angle detection unit detects the rotation angle of the motor based on this rotation pulse.
摘要:
The present invention provides a tandem solar cell constituted for the purpose of hole blocking or electron blocking so that holes are not injected from a front subcell or electrons are not injected from a rear subcell, into an intermediate layer arranged between these subcells. The tandem solar cell comprises a pair of electrodes, at least two or more subcells, and intermediate layers each arranged between two adjacent subcells, where at least one of the intermediate layers has a hole blocking layer or an electron blocking layer. In particular, holes or electrons can be blocked more completely by adjusting the thickness of the hole blocking layer or electron blocking layer to be equal to or greater than the maximum value of surface irregularity height of the subcell immediately before the hole or electron blocking layer so that the tandem solar cell can exhibit its performances sufficiently.
摘要:
A plasma processing apparatus composed of a processing chamber in a vacuum vessel to which a gas is fed to form a plasma, a sample stage in which a channel for a heat exchange medium is formed, beams for supporting the sample stage in the horizontal direction, a cylindrical space at atmospheric pressure formed below the channel in the sample stage, coupling paths for communicating the inner wall of the cylindrical space with the exterior of the vacuum vessel, a piping conduit for medium formed in the coupling path, a drive mechanism to drive pins for a wafer, and metal blocks covering junctions between the piping conduits for medium and the sample stage, whereby a gas at high temperature is supplied to between the metal blocks and is exhausted through the coupling path.
摘要:
A liquid silicone rubber coating composition comprising (A) an organopolysiloxane containing silicon-bonded alkenyl radicals, (B) an organohydrogenpolysiloxane containing SiH radicals, (C) an addition reaction catalyst, (D) finely divided silica, (E) an organosilicon compound containing epoxy and alkoxy radicals, (F) an organic titanium, zirconium or aluminum compound, and (G) a silanol-containing silane or siloxane compound is coated on a surface of an airbag base fabric and cured to form a rubber coating layer thereon. The composition is suited for curtain airbags.
摘要:
An in-body information acquiring apparatus includes a function executing unit that realizes a predetermined function inside a body of a patient. A power-supply circuit includes a power unit that includes a cell and that outputs a first current and a first voltage; and a converter that converts the first current to a second current, which is a current required to operate the function executing unit for a predetermined time, and converts the first voltage to a second voltage, which is a voltage required to operate the function executing unit.
摘要:
An optical module device includes an optical module having leads, a print substrate and a flexible substrate including a first region having a center and a peripheral areas, a second and a third region, the flexible substrate including first through-holes corresponding to the leads in the center area, a terminal and a metalized trace formed in the second and third regions respectively, and a protection layer formed on its surface at the peripheral area and in the third region, wherein the flexible substrate further includes two second through-holes in the peripheral area, which is a location close to the third region, wherein the flexible substrate is bent along a line coupling the two second through-holes, and wherein the flexible substrate at it first region is fixed to the second end member by adhesive material injected into the second through-holes.
摘要:
To provide an accessing device which allows reliable protection of important data. A memory accessing device has a file system device which manages a logical memory space and a driver device which maintains a correlation information between the logical memory space and a physical memory space and which physically accesses a flash memory based on the correlation information. The flash memory is physically divided into a plurality of strings. The file system device manages the memory space by dividing the memory space into a plurality of partitions each of which is set to one of RO and RW. The driver device specifies a permission type to write the data in a string by correlating each string to a single logical partition.
摘要:
A vacuum pump exhausts gas within the processing chamber from a lower portion of a sample so as to reduce pressure within a processing chamber. The vacuum pump includes a rotary vane and a fixed vane which are arranged within a case of the vacuum pump and have a plurality of impeller blades in a coaxial manner; an exhausting port for exhausting the gas exhausted from the rotary vane outside the case; and a conducting port arranged along a lower direction of the rotary vane, into which inert gas is conducted, which are provided on a circumference thereof. An MFC (flow rate adjusting device) is arranged between a gas storage unit of the inert gas and the conducting port, for adjusting an amount of the inert gas.