Vacuum chamber
    91.
    发明授权
    Vacuum chamber 失效
    真空室

    公开(公告)号:US08532818B2

    公开(公告)日:2013-09-10

    申请号:US12712861

    申请日:2010-02-25

    IPC分类号: G06F7/00

    CPC分类号: H01L21/67766 H01L21/67778

    摘要: A vacuum chamber includes: a vacuum vessel arranged at the backward side, where a wafer of a processing subject is processed inside an internal processing chamber; a transfer chamber arranged at the forward side, where said wafer is transferred at the inside thereof under atmospheric pressure; a cassette stage arranged at the forward of this transfer chamber, where a cassette storing said wafer is mounted; a lock chamber connected with said transfer chamber at the backward of said transfer chamber; a robot arranged inside said transfer chamber, where said wafer is transferred between said cassette and said lock chamber; and an aligning machine for making position of said wafer fit with the predetermined position, wherein the wafer is transferred to said lock chamber, after performing alignment of said wafer on said aligning machine, in the case where displacement amount of position of this wafer is larger than the predetermined value.

    摘要翻译: 真空室包括:设置在后方的真空容器,处理对象的晶片在内部处理室内处理; 传送室,其布置在前侧,其中所述晶片在其大气压下在其内部传送; 设置在该传送室前方的盒级,其中安装有存储所述晶片的盒; 在所述传送室的后方与所述传送室连接的锁定室; 布置在所述传送室内部的机器,其中所述晶片在所述盒和所述锁定室之间传送; 以及用于使所述晶片的位置与所述预定位置配合的对准机,其中在所述晶片位于所述对准机器的位置的位移量较大的情况下,在将所述晶片对准所述对准机器之后,将所述晶片转移到所述锁定室 超过预定值。

    Rotation detector and direct-current motor
    93.
    发明授权
    Rotation detector and direct-current motor 有权
    旋转检测器和直流电机

    公开(公告)号:US08222776B2

    公开(公告)日:2012-07-17

    申请号:US12535968

    申请日:2009-08-05

    IPC分类号: H02K11/00

    摘要: A power supply unit superimposes alternating-current voltage on direct-current voltage and applies it to a motor. As a result, when the motor is rotated, a current containing an alternating-current component flows. Further, the motor includes a capacitor connected in parallel with one phase coil. Owing to this capacitor, the impedance of the motor circuit between brushes is varied according to the rotation of the motor. Variation in impedance appears as variation in the amplitude of the alternating-current component in motor current. A signal processing unit extracts an alternating-current component from the motor current detected by the current detection unit and generates a rotation pulse corresponding to variation in the amplitude. A rotation angle detection unit detects the rotation angle of the motor based on this rotation pulse.

    摘要翻译: 电源单元将交流电压叠加在直流电压上并将其施加到电动机。 结果,当马达旋转时,流过含有交流分量的电流。 此外,电动机包括与一相线圈并联连接的电容器。 由于该电容器,电刷之间的电动机电路的阻抗根据电动机的旋转而变化。 阻抗的变化表现为电机电流中交流分量振幅的变化。 信号处理单元从由电流检测单元检测到的电动机电流提取交流分量,并产生与振幅变化相对应的旋转脉冲。 旋转角度检测单元基于该旋转脉冲检测电动机的旋转角度。

    TANDEM SOLAR CELL
    94.
    发明申请
    TANDEM SOLAR CELL 审中-公开
    TANDEM太阳能电池

    公开(公告)号:US20110174367A1

    公开(公告)日:2011-07-21

    申请号:US13119833

    申请日:2009-09-28

    IPC分类号: H01L31/02

    摘要: The present invention provides a tandem solar cell constituted for the purpose of hole blocking or electron blocking so that holes are not injected from a front subcell or electrons are not injected from a rear subcell, into an intermediate layer arranged between these subcells. The tandem solar cell comprises a pair of electrodes, at least two or more subcells, and intermediate layers each arranged between two adjacent subcells, where at least one of the intermediate layers has a hole blocking layer or an electron blocking layer. In particular, holes or electrons can be blocked more completely by adjusting the thickness of the hole blocking layer or electron blocking layer to be equal to or greater than the maximum value of surface irregularity height of the subcell immediately before the hole or electron blocking layer so that the tandem solar cell can exhibit its performances sufficiently.

    摘要翻译: 本发明提供一种串联太阳能电池,其构造为空穴阻挡或电子阻挡,使得空穴不从前部子电池注入,或者电子不从后部子电池注入到布置在这些子电池之间的中间层。 串联太阳能电池包括一对电极,至少两个或更多个子电池和中间层,每个子电池和中间层各自布置在两个相邻的子电池之间,其中至少一个中间层具有空穴阻挡层或电子阻挡层。 特别地,通过将​​空穴阻挡层或电子阻挡层的厚度调整为等于或大于在空穴或电子阻挡层之前的子电池的表面不规则高度的最大值,可以更完全地阻挡空穴或电子,因此 串联太阳能电池可以充分展现其性能。

    Plasma processing apparatus
    95.
    发明申请
    Plasma processing apparatus 审中-公开
    等离子体处理装置

    公开(公告)号:US20100186672A1

    公开(公告)日:2010-07-29

    申请号:US12379643

    申请日:2009-02-26

    IPC分类号: C23C16/00

    摘要: A plasma processing apparatus composed of a processing chamber in a vacuum vessel to which a gas is fed to form a plasma, a sample stage in which a channel for a heat exchange medium is formed, beams for supporting the sample stage in the horizontal direction, a cylindrical space at atmospheric pressure formed below the channel in the sample stage, coupling paths for communicating the inner wall of the cylindrical space with the exterior of the vacuum vessel, a piping conduit for medium formed in the coupling path, a drive mechanism to drive pins for a wafer, and metal blocks covering junctions between the piping conduits for medium and the sample stage, whereby a gas at high temperature is supplied to between the metal blocks and is exhausted through the coupling path.

    摘要翻译: 一种等离子体处理装置,由真空容器内的供给气体而形成等离子体的处理室,形成有热交换介质用通道的样品台,水平方向支撑样品台的光束, 大气压下形成的圆柱形空间,形成在样品台的通道下方,用于将圆柱形空间的内壁与真空容器的外部连通的连接路径,形成在联接路径中的介质的管道导管,驱动机构 用于晶片的引脚和覆盖用于介质和样品台的管道导管之间的接合处的金属块,由此将高温气体供应到金属块之间并通过耦合路径排出。

    Optical module device
    98.
    发明申请
    Optical module device 审中-公开
    光模块设备

    公开(公告)号:US20080253720A1

    公开(公告)日:2008-10-16

    申请号:US12068896

    申请日:2008-02-13

    IPC分类号: G02B6/26

    摘要: An optical module device includes an optical module having leads, a print substrate and a flexible substrate including a first region having a center and a peripheral areas, a second and a third region, the flexible substrate including first through-holes corresponding to the leads in the center area, a terminal and a metalized trace formed in the second and third regions respectively, and a protection layer formed on its surface at the peripheral area and in the third region, wherein the flexible substrate further includes two second through-holes in the peripheral area, which is a location close to the third region, wherein the flexible substrate is bent along a line coupling the two second through-holes, and wherein the flexible substrate at it first region is fixed to the second end member by adhesive material injected into the second through-holes.

    摘要翻译: 光学模块装置包括具有引线,印刷基板和柔性基板的光学模块,该基板包括具有中心和周边区域的第一区域,第二和第三区域,柔性基板包括与引线对应的第一通孔 分别形成在第二和第三区域的中心区域,端子和金属化迹线,以及在其周边区域和第三区域的其表面上形成的保护层,其中柔性基板还包括在第二区域中的两个第二通孔 周边区域,其是靠近第三区域的位置,其中柔性基板沿着连接两个第二通孔的线弯曲,并且其中在其第一区域处的柔性基板通过注入的粘合材料固定到第二端部构件 进入第二个通孔。

    Accessing device
    99.
    发明授权
    Accessing device 有权
    访问设备

    公开(公告)号:US07404029B2

    公开(公告)日:2008-07-22

    申请号:US11366944

    申请日:2006-03-02

    摘要: To provide an accessing device which allows reliable protection of important data. A memory accessing device has a file system device which manages a logical memory space and a driver device which maintains a correlation information between the logical memory space and a physical memory space and which physically accesses a flash memory based on the correlation information. The flash memory is physically divided into a plurality of strings. The file system device manages the memory space by dividing the memory space into a plurality of partitions each of which is set to one of RO and RW. The driver device specifies a permission type to write the data in a string by correlating each string to a single logical partition.

    摘要翻译: 提供允许可靠保护重要数据的访问设备。 存储器访问设备具有管理逻辑存储器空间的文件系统设备和维护逻辑存储器空间和物理存储器空间之间的相关信息并且基于相关信息物理地访问快闪存储器的驱动器设备。 闪存被物理地分成多个字符串。 文件系统装置通过将存储空间划分成多个分区来管理存储器空间,每个分区被设置为RO和RW之一。 驱动程序设备通过将每个字符串与单个逻辑分区相关联来指定将数据写入字符串的许可类型。

    Plasma processing apparatus capable of adjusting pressure within processing chamber
    100.
    发明申请
    Plasma processing apparatus capable of adjusting pressure within processing chamber 审中-公开
    能够调节处理室内的压力的等离子体处理装置

    公开(公告)号:US20080066859A1

    公开(公告)日:2008-03-20

    申请号:US11512124

    申请日:2006-08-30

    IPC分类号: H01L21/306

    CPC分类号: H01J37/3244 H01J37/32834

    摘要: A vacuum pump exhausts gas within the processing chamber from a lower portion of a sample so as to reduce pressure within a processing chamber. The vacuum pump includes a rotary vane and a fixed vane which are arranged within a case of the vacuum pump and have a plurality of impeller blades in a coaxial manner; an exhausting port for exhausting the gas exhausted from the rotary vane outside the case; and a conducting port arranged along a lower direction of the rotary vane, into which inert gas is conducted, which are provided on a circumference thereof. An MFC (flow rate adjusting device) is arranged between a gas storage unit of the inert gas and the conducting port, for adjusting an amount of the inert gas.

    摘要翻译: 真空泵从样品的下部排出处理室内的气体,以减少处理室内的压力。 所述真空泵包括旋转叶片和固定叶片,所述旋转叶片和固定叶片布置在所述真空泵的壳体内并具有同轴的多个叶轮叶片; 用于将从旋转叶片排出的气体排出外壳的排气口; 以及沿其旋转叶片的下方向布置的导电口,惰性气体被引导入其周围。 在惰性气体的气体存储单元和导电口之间设置MFC(流量调节装置),用于调节惰性气体的量。