Index guided VCSEL and method of fabrication
    93.
    发明授权
    Index guided VCSEL and method of fabrication 有权
    索引引导VCSEL和制造方法

    公开(公告)号:US07095768B2

    公开(公告)日:2006-08-22

    申请号:US10779894

    申请日:2004-02-17

    IPC分类号: H01S5/00

    摘要: A reliable high frequency VCSEL includes a lower distributed Bragg reflector (DBR), an active region, and an upper DBR. A cylindrical volume is etched from the upper DBR to define a mesa with a lower surface of the cylindrical volume forming an angle greater than ninety degrees with the side wall of the mesa. An isolation trench is etched in the lower surface of the cylindrical volume concentric with the mesa and extending through the active region. A portion of the side wall of the mesa and the lower surface of the cylindrical volume are proton implanted. The upper DBR is planarized using low-k dielectric materials and n and p electrical contacts are coupled to opposite sides of the active region for supplying operating current thereto.

    摘要翻译: 可靠的高频VCSEL包括较低分布式布拉格反射器(DBR),有源区和上DBR。 从上DBR蚀刻圆柱体,以限定具有圆柱体的下表面的台面,其与台面的侧壁形成大于九十度的角度。 在与台面同心并延伸穿过活动区域的圆筒体的下表面中蚀刻隔离沟槽。 台面的侧壁的一部分和圆柱体的下表面被质子注入。 上DBR使用低k电介质材料平面化,并且n和p电触点耦合到有源区的相对侧,以向其提供工作电流。

    High-speed optical data links
    94.
    发明授权
    High-speed optical data links 有权
    高速光数据链路

    公开(公告)号:US06947672B2

    公开(公告)日:2005-09-20

    申请号:US10681663

    申请日:2003-10-07

    摘要: A high-speed optical data link includes a system circuit board, a first ASIC coupled to convey electrical information to and from up level data management circuits, and a second ASIC electrically coupled to the first ASIC. A fiber optic module mounted on the system circuit board including a receiver, a transmitter and the second ASIC. The receiver includes a photo-diode positioned to receive optical signals, a trans-impedance amplifier electrically coupled to the photo diode, and a post-amplifier electrically coupled to the trans-impedance amplifier and to the second ASIC. The transmitter includes a laser positioned to convey optical signals to a remote optical receiver and a laser driver electrically coupled to the laser and to the second ASIC. Both the first and the second ASICs include clocking and equalization/retiming functions for recovering distorted data transmitted therebetween through electrical traces on the system circuit board so as to send electrical data at rates equal to or higher than 10-Gbps.

    摘要翻译: 高速光学数据链路包括系统电路板,耦合以向上层数据管理电路传送电信息的第一ASIC和与第一ASIC电耦合的第二ASIC。 安装在包括接收器,发射器和第二ASIC的系统电路板上的光纤模块。 接收器包括被定位成接收光信号的光电二极管,电耦合到光电二极管的跨阻放大器,以及电耦合到跨阻放大器和第二ASIC的后置放大器。 发射器包括定位成将光信号传送到远程光接收器的激光器和与激光器和第二ASIC电耦合的激光驱动器。 第一和第二ASIC都包括时钟和均衡/重新定时功能,用于通过系统电路板上的电迹线恢复其间传输的失真数据,以便以等于或高于10-Gbps的速率发送电子数据。

    Method and apparatus for vertical board construction of fiber optic transmitters, receivers and transceivers
    95.
    发明授权
    Method and apparatus for vertical board construction of fiber optic transmitters, receivers and transceivers 失效
    用于光纤发射器,接收器和收发器的垂直板结构的方法和装置

    公开(公告)号:US06840686B2

    公开(公告)日:2005-01-11

    申请号:US09745033

    申请日:2000-12-20

    摘要: Fiber optic transmitter and receiver electrical elements are implemented on separate vertical boards in fiber optic modules. A single optical block implements lenses and reflecting surfaces to minimize manufacturing costs. In one embodiment the receiver and transmitter are mounted to receive and transmit vertical boards respectively to nearly face each other but being offset to avoid optical cross talk. In a second embodiment, receiver and transmitter are mounted parallel with the printed circuit boards to save additional space. The vertical boards have ground planes to minimize electrical cross talk. A shielded housing provides further shielding for EMI. Manufacturing steps of the fiber optic transceiver are disclosed which provide reduced manufacturing costs.

    摘要翻译: 光纤发射器和接收器电气元件在光纤模块中的单独的垂直板上实现。 单个光学块实现透镜和反射表面以最小化制造成本。 在一个实施例中,接收器和发射器被安装成分别接收和发射垂直板,以使它们几乎彼此面对,但被偏移以避免光学串扰。 在第二实施例中,接收器和发射器与印刷电路板并联安装以节省额外的空间。 垂直电路板具有接地平面,以尽量减少电气串扰。 屏蔽外壳为EMI提供了进一步的屏蔽。 公开了提供降低的制造成本的光纤收发器的制造步骤。

    High-speed optical data links
    96.
    发明授权
    High-speed optical data links 有权
    高速光数据链路

    公开(公告)号:US06665498B1

    公开(公告)日:2003-12-16

    申请号:US10185091

    申请日:2002-06-28

    IPC分类号: H04B1000

    摘要: A high-speed optical data link includes a system circuit board, a first ASIC coupled to convey electrical information to and from up level data management circuits, and a second ASIC electrically coupled to the first ASIC. A fiber optic module mounted on the system circuit board including a receiver, a transmitter and the second ASIC. The receiver includes a photo-diode positioned to receive optical signals, a trans-impedance amplifier electrically coupled to the photo diode, and a post-amplifier electrically coupled to the trans-impedance amplifier and to the second ASIC. The transmitter includes a laser positioned to convey optical signals to a remote optical receiver and a laser driver electrically coupled to the laser and to the second ASIC. Both the first and the second ASICs include clocking and equalization/retiming functions for recovering distorted data transmitted therebetween through electrical traces on the system circuit board so as to send electrical data at rates equal to or higher than 10-Gbps.

    摘要翻译: 高速光学数据链路包括系统电路板,耦合以向上层数据管理电路传送电信息的第一ASIC和与第一ASIC电耦合的第二ASIC。 安装在包括接收器,发射器和第二ASIC的系统电路板上的光纤模块。 接收器包括被定位成接收光信号的光电二极管,电耦合到光电二极管的跨阻放大器,以及电耦合到跨阻放大器和第二ASIC的后置放大器。 发射器包括定位成将光信号传送到远程光接收器的激光器和与激光器和第二ASIC电耦合的激光驱动器。 第一和第二ASIC都包括时钟和均衡/重新定时功能,用于通过系统电路板上的电迹线恢复其间传输的失真数据,以便以等于或高于10-Gbps的速率发送电子数据。

    Semiconductor lasers
    97.
    发明授权
    Semiconductor lasers 失效
    半导体激光器

    公开(公告)号:US06556610B1

    公开(公告)日:2003-04-29

    申请号:US09834521

    申请日:2001-04-12

    IPC分类号: H01S3094

    摘要: Semiconductor lasers are formed by integrating an electrically pumped semiconductor laser, a beam steering element and a vertical cavity surface emitting laser (VCSEL) together. The electrically pumped semiconductor laser is modulated to modulate a pump beam of photons at a first wavelength. The beam steering element directs the pump beam to the VCSEL to provide optical pumping. The VCSEL receives the pump beam of photons at the first wavelength and is stimulated to emit photons of a laser beam at a second wavelength longer than the first. In embodiments, index guiding is provided in the VCSEL to improve the optical pumping and emission efficiencies when the pump beam is modulated at high frequencies. Embodiments of the beam steering element include a silicon bench, a polymer element, and a facet included in the edge emitting laser and an external mirror. Embodiments of index guiding include an air gap to form a mesa and an oxide confinement ring shaped layer.

    摘要翻译: 通过将电泵浦半导体激光器,光束操纵元件和垂直腔表面发射激光器(VCSEL)集成在一起来形成半导体激光器。 调制电泵浦的半导体激光器以调制第一波长的光束的泵浦光束。 光束操纵元件将泵浦光束引导到VCSEL以提供光泵浦。 VCSEL接收第一波长的光子束,并被激发以比第一波长长的第二波长发射激光束的光子。 在实施例中,在VCSEL中提供索引引导以在泵浦光束以高频调制时提高光泵浦和发射效率。 光束操纵元件的实施例包括硅台架,聚合物元件和包括在边缘发射激光器中的小面和外部反射镜。 折射率引导的实施例包括形成台面的气隙和氧化物限制环形层。

    Modulated integrated optically pumped vertical cavity surface emitting lasers

    公开(公告)号:US06553048B2

    公开(公告)日:2003-04-22

    申请号:US10032841

    申请日:2001-10-24

    IPC分类号: H01S500

    摘要: Modulated integrated optically pumped vertical cavity surface emitting lasers are formed by integrating an electrically pumped semiconductor laser and a vertical cavity surface emitting laser (VCSEL) together with a means of direct modulation of the electrically pumped semiconductor laser. In the preferred embodiments, the electrically pumped semiconductor laser is a type of folded cavity surface emitting laser (FCSEL). In a number of embodiments, the FCSEL is partitioned into two sections by a gap in material layers. In these embodiments, one section of the FCSEL is biased so as to maintain the generation of photons at a constant power level to pump the optically pumped VCSEL while the second section of the FCSEL is used for modulation and causes the optically pumped VCSEL to be modulated above the threshold. In another embodiment, an electric-absorption modulator is sandwiched between an electrically pumped FCSEL and an optically pumped VCSEL. The electric-absorption modulator acts similar to a camera shutter and allows photons to pass through from the electrically pumped FCSEL to the optically pumped VCSEL when in one state and attenuates photons before reaching the optically pumped VCSEL when in another state.

    Integrated optically pumped vertical cavity surface emitting laser
    99.
    发明授权
    Integrated optically pumped vertical cavity surface emitting laser 失效
    集成光泵浦垂直腔表面发射激光器

    公开(公告)号:US06424669B1

    公开(公告)日:2002-07-23

    申请号:US09430570

    申请日:1999-10-29

    IPC分类号: H01S500

    摘要: An integrated optically pumped vertical cavity surface emitting laser (VCSEL) is formed by integrating an electrically pumped in-plane semiconductor laser and a vertical cavity surface emitting laser together with a beam steering element formed with the in-plane semiconductor laser. The in-plane semiconductor laser can be a number of different types of in-plane lasers including an edge emitting laser, an in-plane surface emitting laser, or a folded cavity surface emitting laser. The in-plane semiconductor laser optically pumps the VCSEL to cause it to lase. The in-plane semiconductor laser is designed to emit photons of relatively short wavelengths while the VCSEL is designed to emit photons of relatively long wavelengths. The in-plane semiconductor laser and the VCSEL can be coupled together in a number of ways including atomic bonding, wafer bonding, metal bonding, epoxy glue or other well know semiconductor bonding techniques. The beam steering element can be an optical grating or a mirrored surface.

    摘要翻译: 通过将电泵浦的平面内半导体激光器和垂直腔表面发射激光器与形成有平面内半导体激光器的光束操纵元件一体化而形成集成的光泵浦垂直腔表面发射激光器(VCSEL)。 面内半导体激光器可以是许多不同类型的平面内激光器,包括边缘发射激光器,面内表面发射激光器或折叠空腔表面发射激光器。 平面内半导体激光器对VCSEL进行光泵浦使其发光。 面内半导体激光器被设计成发射相对较短波长的光子,而VCSEL被设计成发射相对较长波长的光子。 面内半导体激光器和VCSEL可以以多种方式耦合在一起,包括原子接合,晶片接合,金属接合,环氧胶或其他众所周知的半导体接合技术。 光束操纵元件可以是光栅或镜面。

    Method and apparatus for modulated integrated optically pumped vertical cavity surface emitting lasers
    100.
    发明授权
    Method and apparatus for modulated integrated optically pumped vertical cavity surface emitting lasers 失效
    用于调制集成光泵浦垂直腔表面发射激光器的方法和装置

    公开(公告)号:US06347108B2

    公开(公告)日:2002-02-12

    申请号:US09833368

    申请日:2001-04-12

    IPC分类号: H01S500

    摘要: Modulated integrated optically pumped vertical cavity surface emitting lasers are formed by integrating an electrically pumped semiconductor laser and a vertical cavity surface emitting laser (VCSEL) together with a means of direct modulation of the electrically pumped semiconductor laser. In the preferred embodiments, the electrically pumped semiconductor laser is a type of folded cavity surface emitting laser (FCSEL). In a number of embodiments, the FCSEL is partitioned into two sections by a gap in material layers. In these embodiments, one section of the FCSEL is biased so as to maintain the generation of photons at a constant power level to pump the optically pumped VCSEL while the second section of the FCSEL is used for modulation and causes the optically pumped VCSEL to be modulated above the threshold. In another embodiment, an electric-absorption modulator is sandwiched between an electrically pumped FCSEL and an optically pumped VCSEL. The electric-absorption modulator acts similar to a camera shutter and allows photons to pass through from the electrically pumped FCSEL to the optically pumped VCSEL when in one state and attenuates photons before reaching the optically pumped VCSEL when in another state.

    摘要翻译: 通过将电泵浦的半导体激光器和垂直腔表面发射激光器(VCSEL)与电泵浦的半导体激光器的直接调制装置一起集成来形成调制的集成光泵浦垂直腔表面发射激光器。 在优选实施例中,电泵浦的半导体激光器是一种折叠腔表面发射激光器(FCSEL)。 在多个实施例中,通过材料层中的间隙将FCSEL分割成两个部分。 在这些实施例中,FCSEL的一个部分被偏置,以便将光子的产生保持在恒定的功率水平以泵浦光泵浦的VCSEL,同时使用FCSEL的第二部分进行调制,并使光泵浦的VCSEL被调制 高于门槛。 在另一个实施例中,电吸收调制器夹在电泵FCSEL和光泵浦VCSEL之间。 电吸收调制器的作用类似于照相机快门,并且当处于一种状态时,光子能够从电泵浦的FCSEL通过光泵浦的VCSEL,并在另一状态下使光子到达光泵浦VCSEL之前被光子衰减。