公开(公告)号：US20060050369A1

公开(公告)日：2006-03-09

申请号：US11128614

申请日：2005-05-14

申请人： James Kafka ,  David Spence ,  Jianping Zhou ,  Ching-Yuan Chien ,  Juerg Aus der Au ,  Anton Krumm

发明人： James Kafka ,  David Spence ,  Jianping Zhou ,  Ching-Yuan Chien ,  Juerg Aus der Au ,  Anton Krumm

IPC分类号： H01S3/00

CPC分类号： H01S3/0057 ,  H01S3/0078 ,  H01S3/235

摘要： A pulse width reduction apparatus for an optical system is disclosed and includes at least one birefringent optical element configured to selectively adjust a spectral modulation depth of an optical signal while leaving a spectral transmission function of the optical signal substantially constant

摘要翻译： 公开了一种用于光学系统的脉冲宽度降低装置，并且包括至少一个双折射光学元件，其被配置为选择性地调节光信号的光谱调制深度，同时保留光信号的光谱传输函数基本上恒定

公开(公告)号：US20040202220A1

公开(公告)日：2004-10-14

申请号：US10696979

申请日：2003-10-30

发明人： Gongxue Hua ,  Tamas Nagy ,  Sergei V. Govorkov ,  Rainer Paetzel

IPC分类号： H01S003/22

CPC分类号： H01S3/2366 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/225 ,  H01S3/2325 ,  H01S3/2333 ,  H01S3/235

摘要： A Master Oscillator (MO)null Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. A MOPA-based laser system can provide both high pulse energies and high spectral purity. A MOPA system can utilize a multi-pass PA, as well as a special beam path capable of reducing the amount of ASE (Amplified Spontaneous Emission) and feedback to the MO. Lithography scanner optics are primarily fused silica, such that the peak pulse power must be kept low to avoid material compaction when a MOPA system is used with lithography applications. This conflict between the demand for high average power and the low peak power requirement of the pulsed excimer laser source can be resolved by using a novel beam path to generate a sufficiently long pulse length.

摘要翻译： 主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求 光刻扫描仪系统。 基于MOPA的激光系统可以提供高脉冲能量和高光谱纯度。 MOPA系统可以利用多通道PA，以及能够减少ASE（放大自发发射）量和向MO的反馈的特殊光束路径。 平版印刷扫描仪光学器件主要是熔融石英，使得峰值脉冲功率必须保持较低，以避免当MOPA系统与光刻应用一起使用时的材料压实。 可以通过使用新颖的光束路径来产生足够长的脉冲长度来解决脉冲准分子激光源的高平均功率需求和低峰值功率需求之间的这种冲突。

公开(公告)号：US06765947B2

公开(公告)日：2004-07-20

申请号：US10214427

申请日：2002-08-06

申请人： Malte Kumkar

发明人： Malte Kumkar

IPC分类号： H01S310

CPC分类号： H01S3/081 ,  H01S3/005 ,  H01S3/0604 ,  H01S3/117 ,  H01S3/2325 ,  H01S3/235

摘要： In order to improve a laser amplifying system comprising a solid-state member having a laser-active medium, a radiation field system determined by an optical guide means for the radiation field and an actively switchable, optical switching element arranged in the radiation field system for influencing the losses in the radiation field system in such a manner that this is suitable for low-amplification laser-active media, it is suggested that the solid-state member be designed like a thin plate, the radiation field system comprise an incoming branch and an outgoing branch which are coupled to one another, on the one hand, and between which, on the other hand, an amplifying radiation field is provided which is formed from a plurality of intermediate branches which extend between two optical beam reversing elements and, for their part, all penetrate the solid-state member in a direction transverse to its flat sides and within an active volume area, and that the active volume area have in directions transverse to beam axes of the intermediate branches an extension which corresponds at the most to three times the average extension of the radiation field cross sections of the volume sections of the intermediate branches located in the active volume area.

摘要翻译： 为了改进包括具有激光活性介质的固体元件的激光放大系统，由用于辐射场的光学引导装置确定的辐射场系统和布置在辐射场系统中的可主动切换的光学开关元件 以适合低放大激光介质的方式影响辐射场系统中的损耗，建议将固体元件设计成薄板，辐射场系统包括输入分支和 一方面彼此耦合的输出分支，另一方面，提供放大辐射场，该放大辐射场由在两个光束反转元件之间延伸的多个中间分支形成，并且为了 它们的部分全部在横向于其平坦侧面的方向上并且在有效体积区域内穿透固态构件，并且活动体积区域具有 横向于中间分支的光束轴的方向的延伸部分对应于位于有效体积区域中的中间分支的体积部分的辐射场横截面的平均延伸的三倍至三倍的延伸部分。

公开(公告)号：US06706036B2

公开(公告)日：2004-03-16

申请号：US09799412

申请日：2001-03-05

申请人： Shui T. Lai

发明人： Shui T. Lai

IPC分类号： A61B1818

CPC分类号： B23K26/0665 ,  A61B2017/00694 ,  A61F9/00804 ,  A61F9/00814 ,  A61F2009/00846 ,  A61F2009/00872 ,  A61F2009/00897 ,  B23K26/0096 ,  B23K26/03 ,  B23K26/032 ,  B23K26/04 ,  B23K26/043 ,  B23K26/06 ,  B23K26/0624 ,  B23K26/0648 ,  B23K26/0652 ,  B23K26/704 ,  G02B26/10 ,  G02F1/37 ,  H01S3/005 ,  H01S3/06 ,  H01S3/101 ,  H01S3/235

摘要： A laser-based method and apparatus for corneal surgery. The present invention is intended to be applied primarily to ablate organic materials, and human cornea in particular. The invention uses a laser source which has the characteristics of providing a shallow ablation depth (0.2 microns or less per laser pulse), and a low ablation energy density threshold (less than or equal to about 10 mJ/cm2), to achieve optically smooth ablated corneal surfaces. The preferred laser includes a laser emitting approximately 100-50,000 laser pulses per second, with a wavelength of about 198-300 nm and a pulse duration of about 1-5,000 picoseconds. Each laser pulse is directed by a highly controllable laser scanning system. Described is a method of distributing laser pulses and the energy deposited on a target surface such that surface roughness is controlled within a specific range. Included is a laser beam intensity monitor and a beam intensity adjustment means, such that constant energy level is maintained throughout an operation. Eye movement during an operation is corrected for by a corresponding compensation in the location of the surgical beam. Beam operation is terminated if the laser parameters or the eye positioning is outside of a predetermined tolerable range. The surgical system can be used to perform surgical procedures including removal of corneal scar, making incisions, cornea transplants, and to correct myopia, hyperopia, astigmatism, and other corneal surface profile defects.

摘要翻译： 一种基于激光的角膜手术方法和装置。 本发明旨在主要用于消融有机材料，特别是人角膜。 本发明使用具有提供浅消融深度（每个激光脉冲0.2微米或更小）和低消融能量密度阈值（小于或等于约10mJ / cm 2）的特征的激光源， 实现光学平滑的消融角膜表面。 优选的激光器包括每秒发射大约100-50,000激光脉冲的激光器，波长约为198-300nm，脉冲持续时间约为1-5,000皮​​秒。 每个激光脉冲由高度可控的激光扫描系统引导。 描述了分配激光脉冲和沉积在目标表面上的能量的方法，使得表面粗糙度被控制在特定范围内。 包括激光束强度监视器和光束强度调节装置，使得在整个操作中保持恒定的能量水平。 通过对外科手术束的位置进行相应的补偿来校正手术期间的眼睛运动。 如果激光参数或眼睛定位超出预定的可容许范围，则光束操作终止。 手术系统可用于执行外科手术，包括去除角膜瘢痕，制作切口，角膜移植物，并矫正近视，远视，散光和其他角膜表面轮廓缺陷。

公开(公告)号：US06373869B1

公开(公告)日：2002-04-16

申请号：US09364171

申请日：1999-07-29

申请人： James J. Jacob

发明人： James J. Jacob

IPC分类号： H01S310

CPC分类号： G02F1/3534 ,  H01S3/10092 ,  H01S3/2207 ,  H01S3/235 ,  H01S3/30

摘要： An optical system for producing ultraviolet radiation includes an optical source, an optical parametric oscillator (OPO), a frequency doubler, and a mixer. The optical source produces a first beam of radiation. The OPO receives a first portion of the first beam of radiation and produces a second beam of radiation therefrom. The frequency doubler receives a second portion of the first beam of radiation and produces the second harmonic thereof. The mixer mixes the second beam of radiation and the second harmonic of the first beam of radiation to produce an ultraviolet beam of radiation. In a preferred embodiment, the optical source includes a Nd:YAG laser which is frequency doubled to produce a first beam of radiation at a wavelength of approximately 532 nm; and the ultraviolet beam of radiation has a wavelength close to one of the excimer laser lines, typically either 193 nm or 157 nm.

摘要翻译： 用于产生紫外线辐射的光学系统包括光源，光参量振荡器（OPO），倍频器和混频器。 光源产生第一辐射束。 OPO接收第一辐射束的第一部分并从其产生第二辐射束。 倍频器接收第一辐射束的第二部分并产生其二次谐波。 混合器混合第二辐射束和第一辐射束的二次谐波以产生紫外线辐射。 在优选实施例中，光源包括Nd：YAG激光器，其频率加倍以产生波长约532nm的第一辐射束; 并且紫外线辐射具有接近一个准分子激光线的波长，通常为193nm或157nm。

公开(公告)号：US6122097A

公开(公告)日：2000-09-19

申请号：US293725

申请日：1999-04-16

申请人： Jeremy Weston ,  William Eugene White ,  Leigh John Bromley ,  Frank Godwin Patterson

发明人： Jeremy Weston ,  William Eugene White ,  Leigh John Bromley ,  Frank Godwin Patterson

IPC分类号： H01S3/0941 ,  H01S3/23 ,  H01S3/00 ,  H01S3/093

CPC分类号： H01S3/235 ,  H01S3/061 ,  H01S3/0625 ,  H01S3/08 ,  H01S3/083 ,  H01S3/0941 ,  H01S3/11 ,  H01S3/1625 ,  H01S3/2325

摘要： An efficient, powerful and reliable system for amplifying optical pulses. Seed-pulses are generated by a seed-pulse source and are transmitted to an optical amplifier for amplification. The power for the amplification is provided by a Q-switched, diode-pumped, extracavity frequency-doubled pump laser.

摘要翻译： 一种用于放大光脉冲的高效，强大和可靠的系统。 种子脉冲由种子脉冲源产生，并传输到光放大器进行放大。 用于放大的功率由Q开关，二极管泵浦，外腔倍频泵浦激光器提供。

公开(公告)号：US6016324A

公开(公告)日：2000-01-18

申请号：US58274

申请日：1998-04-09

申请人： Harry Rieger ,  Henry Shields ,  Richard Foster

发明人： Harry Rieger ,  Henry Shields ,  Richard Foster

IPC分类号： H01S3/098 ,  G03F7/20 ,  H01S3/00 ,  H01S3/0941 ,  H01S3/102 ,  H01S3/11 ,  H01S3/117 ,  H01S3/127 ,  H01S3/23 ,  H01S3/10

CPC分类号： H01S3/117 ,  H01S3/127 ,  H01S3/23 ,  H01S3/235 ,  H01S2301/08 ,  H01S3/005 ,  H01S3/0612 ,  H01S3/07 ,  H01S3/08072 ,  H01S3/094076 ,  H01S3/0941 ,  H01S3/09415 ,  H01S3/1024 ,  H01S3/1103 ,  H01S3/1109 ,  H01S3/1127 ,  H01S3/115 ,  H01S3/1611 ,  H01S3/1643 ,  H01S3/2333 ,  H01S3/2341

摘要： A laser system which generates short duration pulses, such as under five nanoseconds at an energy level of up to a few milli-Joules per pulse (mJ/p) with near diffraction limited beam quality. A laser crystal is pumped (excited) by diode lasers. A resonator having at least two mirror surfaces defines a beam path passing through the laser crystal. The beam path in the resonator is periodically blocked by a first optical shutter permitting pump energy to build up in the laser crystal, except for a short period near the end of each pumping period. While the first optical shutter is open a second optical shutter blocks the light in the resonator except for periodic short intervals, the intervals being spaced such that at least one light pulse traveling at the speed of light in the resonator is able to make a plurality of transits through the resonator, increasing in intensity by extracting energy from the excited laser crystal on each transit. After the light pulse has built up in intensity, an optical release mechanism releases the pulse from resonator.

摘要翻译： 一种产生短持续时间脉冲的激光系统，例如在高达几毫焦耳/脉冲（mJ / p）的能级下，具有接近衍射限制光束质量的五纳秒。 激光晶体被二极管激光器激发（激发）。 具有至少两个镜面的谐振器限定穿过激光晶体的光束路径。 除了在每个泵送周期结束附近的短时间内，谐振器中的光束路径被允许泵浦能量积聚在激光晶体中的第一光学快门周期性地阻挡。 当第一光学快门打开时，除了周期性短的间隔之外，第二光学快门阻挡谐振器中的光，间隔被间隔开，使得在谐振器中以光速行进的至少一个光脉冲能够使多个 通过谐振器过渡，通过在每次运输时从激发的激光晶体中提取能量而增加强度。 在光脉冲强度累积之后，光学释放机构从谐振器释放脉冲。

公开(公告)号：US5872804A

公开(公告)日：1999-02-16

申请号：US895923

申请日：1997-07-17

申请人： Hirofumi Kan ,  Yasukazu Izawa ,  Masanobu Yamanaka ,  Hiromitsu Kiriyama ,  Takuji Yoshida ,  Sadao Nakai ,  Chiyoe Yamanaka

发明人： Hirofumi Kan ,  Yasukazu Izawa ,  Masanobu Yamanaka ,  Hiromitsu Kiriyama ,  Takuji Yoshida ,  Sadao Nakai ,  Chiyoe Yamanaka

IPC分类号： H01S3/06 ,  H01S3/08 ,  H01S3/10 ,  H01S3/23 ,  H01S3/081

CPC分类号： H01S3/235 ,  H01S3/0606 ,  H01S3/07 ,  H01S3/08072 ,  H01S3/08095

摘要： A passive eight-pass solid-state laser amplifier is constructed using a quarter-wave plate (11), a total reflection mirror (12), a polarization beam splitter (5), and a total reflection mirror (6) while input/output faces of a hexagonal zigzag slab solid-state laser medium (15) optically pumped are kept nearly perpendicular to pulsed laser light. Thermal birefringence takes place in the laser medium (15) optically pumped with good symmetry by flash lamps or LDs (9) and is compensated for by a quartz 90.degree. rotator (10). Linearly s-polarized laser light reflected by a polarization beam splitter (3) is output as pulsed laser output light (13) to the outside. Owing to this, saturation laser amplification can be achieved using output laser light from a pulsed laser oscillator of relatively low output, as source light.

摘要翻译： 使用四分之一波片（11），全反射镜（12），偏振分束器（5）和全反射镜（6）构成无源八通道固体激光放大器，同时输入/输出 光泵浦的六角形之字形固态激光介质（15）的面保持与脉冲激光几乎垂直。 热激光双折射发生在用闪光灯或LD（9）以良好对称性光泵浦的激光介质（15）中，并由石英90°旋转器（10）补偿。 由偏振分束器（3）反射的线性s偏振激光被作为脉冲激光输出光（13）输出到外部。 由此，可以使用来自相对低输出的脉冲激光振荡器的输出激光作为源光来实现饱和激光放大。

公开(公告)号：US5818630A

公开(公告)日：1998-10-06

申请号：US882349

申请日：1997-06-25

申请人： Martin E. Fermann ,  Donald J. Harter

发明人： Martin E. Fermann ,  Donald J. Harter

IPC分类号： H01S3/10 ,  G02F1/37 ,  H01S3/06 ,  H01S3/067 ,  H01S3/08 ,  H01S3/094 ,  H01S3/23 ,  H04B10/02 ,  H04B10/18

CPC分类号： H01S3/067 ,  G02F1/37 ,  H01S3/06712 ,  H01S3/06729 ,  H01S3/06745 ,  H01S3/06754 ,  H01S3/08022 ,  H01S3/094003 ,  H01S3/235

摘要： To amplify and compress optical pulses in a multi-mode (MM) optical fiber, a single-mode is launched into the MM fiber by matching the modal profile of the fundamental mode of the MM fiber with a diffraction-limited optical mode at the launch end. The fundamental mode is preserved in the MM fiber by minimizing mode-coupling by using relatively short lengths of step-index MM fibers with a few hundred modes and by minimizing fiber perturbations. Doping is confined to the center of the fiber core to preferentially amplify the fundamental mode, to reduce amplified spontaneous emission and to allow gain-guiding of the fundamental mode. Gain-guiding allows for the design of systems with length-dependent and power-dependent diameters of the fundamental mode. To allow pumping with high-power laser diodes, a double-clad amplifier structure is employed. For applications in nonlinear pulse-compression, self phase modulation and dispersion in the optical fibers can be exploited. High-power optical pulses may be linearly compressed using bulk optics dispersive delay lines or by chirped fiber Bragg gratings written directly into the SM or MM optical fiber. High-power cw lasers operating in a single near-diffraction-limited mode may be constructed from MM fibers by incorporating effective mode-filters into the laser cavity. Regenerative fiber amplifiers may be constructed from MM fibers by careful control of the recirculating mode. Higher-power Q-switched fiber lasers may be constructed by exploiting the large energy stored in MM fiber amplifiers.

摘要翻译： 为了在多模（MM）光纤中放大和压缩光脉冲，通过在发射时匹配MM光纤的基本模式与衍射极限光学模式的模式，将单模发射到MM光纤中 结束。 通过使用具有几百种模式的相对较短长度的步进折射率MM纤维和通过最小化纤维扰动来最小化模式耦合，在MM光纤中保持基本模式。 掺杂被限制在光纤芯的中心以优先放大基模，以减少放大的自发发射并允许基模的增益引导。 增益引导允许设计具有基本模式的长度相关性和功率依赖直径的系统。 为了允许使用高功率激光二极管进行泵浦，采用双包层放大器结构。 对于非线性脉冲压缩应用，可以利用光纤中的自相位调制和色散。 高功率光脉冲可以使用体光学色散延迟线或直接写入SM或MM光纤的啁啾光纤布拉格光栅进行线性压缩。 通过将有效的模式滤波器结合到激光腔中，可以通过MM光纤构造以单个近衍射限制模式操作的大功率cw激光器。 再生纤维放大器可以通过仔细控制再循环模式由MM纤维构成。 高功率Q开关光纤激光器可以通过利用存储在MM光纤放大器中的大能量来构造。

公开(公告)号：US5652763A

公开(公告)日：1997-07-29

申请号：US508469

申请日：1995-07-28

申请人： Peter J. Delfyett, Jr.

发明人： Peter J. Delfyett, Jr.

IPC分类号： G02F1/21 ,  H01S3/098 ,  H01S5/022 ,  H01S5/024 ,  H01S5/062 ,  H01S5/065 ,  H01S5/14 ,  H01S5/50 ,  H01S3/08

CPC分类号： H01S5/0657 ,  G02F1/218 ,  H01S2301/08 ,  H01S3/08004 ,  H01S3/1118 ,  H01S3/235 ,  H01S3/2375 ,  H01S5/0057 ,  H01S5/0064 ,  H01S5/02236 ,  H01S5/02415 ,  H01S5/0622 ,  H01S5/141 ,  H01S5/50

摘要： A mode locked as a seed source for a solid state regenerative amplifier system is disclosed. The system includes components for forming an external cavity laser with a semiconductor amplifier, exciting and mode locking the cavity laser to emit optical pulses with a linearly time varying optical frequency, collecting and collimating the optical pulses, isolating the optical pulses and amplifying the optical pulses for a selected application. The selected applications include but are not limited to medical imaging, fuel diagnostics, ultrafast spectroscopic measurements, network synchronization, distributed optical clock network, electro-optic sampling, timing Jitter reduction, a source for inducing nonlinear optical effects, and optical time domain relectometry. A mount mechanism support for an optic system is also disclosed. The mount support includes an optic component such as a semiconductor laser diode, a semiconductor optical amplifier, and a fiber optical amplifier as well as mounts for the optic component. The mount further includes a stud for supporting the optic component, cooling and heat-sinking elements for the component, and an isolator for thermally isolating and separating the mounts from the elements. The thermal isolator includes material selected from teflon and double-panel glass. The mounts can further include a vertical mounting block with one side attached to the isolator and a second mounting block positioned perpendicular to and supporting the vertical mounting block.

摘要翻译： 公开了一种锁定为固态再生放大器系统的种子源的模式。 该系统包括用于形成具有半导体放大器的外腔激光器的部件，激励和模式锁定腔激光器以发射具有线性时变光频率的光脉冲，收集和准直光脉冲，隔离光脉冲并放大光脉冲 用于选定的应用程序。 所选择的应用包括但不限于医学成像，燃料诊断，超快光谱测量，网络同步，分布式光时钟网络，电光采样，定时抖动降低，用于诱导非线性光学效应的源和光时域反射测量。 还公开了一种用于光学系统的安装机构支撑。 安装支架包括诸如半导体激光二极管的光学部件，半导体光放大器和光纤放大器以及用于光学元件的安装件。 安装座还包括用于支撑光学部件的螺柱，用于部件的冷却和散热元件，以及用于将安装件与元件热隔离和分离的隔离器。 热隔离器包括选自聚四氟乙烯和双层玻璃的材料。 安装件还可以包括垂直安装块，其一侧连接到隔离器，以及垂直于并支撑垂直安装块定位的第二安装块。