公开(公告)号：US20160240418A9

公开(公告)日：2016-08-18

申请号：US14089439

申请日：2013-11-25

Applicant: Brooks Automation, Inc.

Inventor： Matthew W. Coady

IPC: H01L21/68 ,  H01L21/687

CPC classification number: H01L21/68 ,  H01L21/68707

Abstract: A system for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased. The system includes a robotic arm for moving a wafer from one station to a destination station, and an end-effector connected to an end of the robotic arm for receiving the wafer. The end-effector includes a mechanism for gripping the wafer, a direct drive motor for rotating the wafer gripping mechanism, and at least one sensor for sensing the location and orientation of the wafer. A control processor calculates the location of the center and the notch of the wafer based on measurements by the sensor(s) and generates an alignment signal for rotating the wafer gripping mechanism so that the wafer is oriented at a predetermined position on the end-effector while the robotic arm is moving to another station.

公开(公告)号：US09378995B2

公开(公告)日：2016-06-28

申请号：US14508974

申请日：2014-10-07

Applicant: Brooks Automation, Inc.

Inventor： Anthony C. Bonora

IPC: H01L21/677 ,  E06B7/32 ,  E06B3/50 ,  E06B5/00

CPC classification number: H01L21/67772 ,  E06B3/50 ,  E06B3/5009 ,  E06B5/00 ,  E06B7/32 ,  H01L21/67763 ,  H01L21/67766 ,  Y10S414/135

Abstract: A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door.

Abstract translation: 装载端口具有端口门和具有开口的框架，端口门通过该开口与用于保持半导体工件的容器的容器门相连接。 在一个实施例中，可移动关闭机构连接​​到端口门并且被限定为可相对于端口门和框架以受控的方式移动。 在该实施例中，固定的封闭机构设置在靠近开口的框架上。 在另一个实施例中，固定的闭合机构连接到端口门，并且可移动的闭合机构设置在靠近开口的框架上。 在两个实施例中，可动闭合机构限定为与静止闭合机构接合，使得可动闭合机构与静止闭合机构接合的运动在端口门和容器门之间施加关闭力。

公开(公告)号：US09147590B2

公开(公告)日：2015-09-29

申请号：US13768495

申请日：2013-02-15

Applicant: Brooks Automation, Inc.

Inventor： Antonio F. Pietrantonio ,  Anthony Chesna ,  Hakan Elmali ,  Ulysses Gilchrist

IPC: H01L21/677 ,  B25J9/04 ,  H01L21/687

CPC classification number: H01L21/67742 ,  B25J9/042 ,  B25J9/043 ,  B25J18/00 ,  H01L21/677 ,  H01L21/68707 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305

Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

Abstract translation: 一种基板输送装置，具有可操作地连接到驱动部分的驱动部分和sc ara臂，以移动sc臂。 镰刀臂有一个上臂和至少一个前臂。 前臂可移动地安装到上臂并且能够在其上保持基底。 上臂基本上是刚性的，并且可调节以改变上臂的预定尺寸。

公开(公告)号：US20150217446A1

公开(公告)日：2015-08-06

申请号：US14617052

申请日：2015-02-09

Applicant: Brooks Automation, Inc.

Inventor： Izya Kremerman

IPC: B25J9/04 ,  B25J9/12 ,  H01L21/677

CPC classification number: B25J9/044 ,  B25J9/042 ,  B25J9/126 ,  B25J15/0246 ,  H01L21/67739 ,  H01L21/67742 ,  Y10S901/17 ,  Y10S901/23 ,  Y10T74/20317 ,  Y10T74/20323 ,  Y10T74/20341

Abstract: A robot assembly for transporting a substrate is presented. The robot assembly having a first arm and a second arm supported by a column, the first arm further having a first limb, the first limb having a first set of revolute joint/line pairs configured to provide translation and rotation of the distal most link of the first limb in the horizontal plane. The assembly further having a second arm further having a second limb, the second limb comprising a second set of revolute joint/link pairs configured to provide translation and rotation of a distalmost link of the second limb in the horizontal plane. The first limb and second limb further having proximal revolute joints having a common vertical axis of rotation and a proximal inner joint housed in a common housing. The assembly further having an actuator assembly coupled to the first set of revolute joint/link pairs and to the second set of revolute joint/link pairs to effect rotation and translation of the distalmost links of the first limb and the second limb, each of the first limb and the second limb defining, in conjunction with the actuator assembly, at least three degrees of freedom per limb, whereby the distalmost links of the first limb and the second limb are independently horizontally translatable for extension and retraction.

Abstract translation: 提出了一种用于运输基板的机器人组件。 所述机器人组件具有由柱支撑的第一臂和第二臂，所述第一臂还具有第一臂，所述第一臂具有第一组旋转接头/线对，所述第一组旋转接头/线对被配置为提供所述第一臂的最远侧链节的平移和旋转 第一肢在水平面。 所述组件还具有进一步具有第二支腿的第二臂，所述第二支腿包括第二组旋转接头/连杆对，所述第二组构造成在所述水平平面中提供所述第二支腿的最远端连杆的平移和旋转。 第一肢体和第二肢体还具有具有共同的垂直旋转轴线的近端旋转关节和容纳在公共壳体中的近侧内部关节。 所述组件还具有联接到所述第一组旋转接头/连杆对的致动器组件和所述第二组旋转接头/连杆对，以实现所述第一肢体和所述第二肢体的最远端连杆的旋转和平移， 第一肢体和第二肢体与致动器组件一起限定每个肢体至少三个自由度，由此第一肢体和第二肢体的最远侧的连接件可独立地水平平移以用于伸展和缩回。

公开(公告)号：US20150204598A1

公开(公告)日：2015-07-23

申请号：US14600751

申请日：2015-01-20

Applicant: Brooks Automation, Inc.

Inventor： Rhett L. Affleck ,  Anthony C. Bonora ,  Etienne P. Croquette ,  Robert K. Neeper

IPC: F25D3/10 ,  F25D23/02 ,  G01F23/22 ,  G05D1/02 ,  G05B15/02 ,  F25D29/00 ,  B65B3/00

CPC classification number: F25D3/107 ,  A01N1/0257 ,  B65B3/003 ,  F25D23/02 ,  F25D29/001 ,  G01F23/22 ,  G01N35/0099 ,  G01N2035/00435 ,  G01N2035/00445 ,  G05B15/02 ,  G05D1/021

Abstract: A portable cryogenic workstation includes a housing having an internal cavity configured to hold one or more samples, a lid for sealing the internal cavity such that the portable cryogenic workstation is configured for transporting samples between about room temperature environments to about ultra-cold environments, at least one automation interface disposed on one or more of the housing and lid and configured for engagement with automated handling equipment, and a process data capture unit coupled to the housing and configured to capture process or ephemeral data corresponding to a predetermined processing characteristic(s) of at least one of the samples coincident with presence inside the portable cryogenic workstation.

Abstract translation: 便携式低温工作站包括具有被配置为容纳一个或多个样品的内部空腔的壳体，用于密封内部空腔的盖，使得便携式低温工作站被配置为将样品在约室温环境之间运送到大约超低温环境 至少一个自动化界面，其布置在所述壳体和盖中的一个或多个上并被配置为与自动化处理设备接合;以及过程数据捕获单元，其耦合到所述壳体并被配置为捕获对应于预定处理特性的过程或临时数据， 的至少一个样品与便携式低温工作站内的存在一致。

公开(公告)号：US20150147148A1

公开(公告)日：2015-05-28

申请号：US14089439

申请日：2013-11-25

Applicant: Brooks Automation, Inc.

Inventor： Matthew W. Coady

IPC: H01L21/68 ,  H01L21/687

CPC classification number: H01L21/68 ,  H01L21/68707

Abstract: A system for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased. The system includes a robotic arm for moving a wafer from one station to a destination station, and an end-effector connected to an end of the robotic arm for receiving the wafer. The end-effector includes a mechanism for gripping the wafer, a direct drive motor for rotating the wafer gripping mechanism, and at least one sensor for sensing the location and orientation of the wafer. A control processor calculates the location of the center and the notch of the wafer based on measurements by the sensor(s) and generates an alignment signal for rotating the wafer gripping mechanism so that the wafer is oriented at a predetermined position on the end-effector while the robotic arm is moving to another station.

Abstract translation: 一种用于在自动晶片处理过程中感测，定向和输送晶片的系统，其减少了颗粒和污染物的产生，从而提高了晶片产量。 该系统包括用于将晶片从一个站移动到目的地站的机器人臂，以及连接到机器人臂的端部用于接收晶片的端部执行器。 末端执行器包括用于夹持晶片的机构，用于旋转晶片夹持机构的直接驱动马达以及用于感测晶片的位置和取向的至少一个传感器。 控制处理器基于传感器的测量值来计算晶片的中心位置和凹口的位置，并产生用于旋转晶片夹持机构的对准信号，使晶片定向在末端执行器上的预定位置 而机器人手臂正在移动到另一个车站。

公开(公告)号：US20150139770A1

公开(公告)日：2015-05-21

申请号：US14540072

申请日：2014-11-13

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. MOURA ,  Ulysses GILCHRIST ,  Robert T. CAVENEY

IPC: H02K5/128 ,  B25J11/00 ,  H02K1/24 ,  H02K11/00 ,  H02K1/14

CPC classification number: H02K5/128 ,  B25J11/0095 ,  H02K1/14 ,  H02K1/141 ,  H02K1/148 ,  H02K1/24 ,  H02K1/246 ,  H02K11/21 ,  H02K19/103

Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.

Abstract translation: 一种运输装置，包括壳体，安装到壳体的驱动器和连接到驱动器的至少一个运输臂，其中驱动器包括至少一个转子，该转子具有至少一个磁性可渗透材料的凸极并设置在隔离的环境中， 至少一个定子具有至少一个具有相应线圈单元的凸极并且设置在隔离环境之外，其中至少一个定子的至少一个凸极和转子的至少一个凸极在其间形成闭合磁通电路， 所述至少一个转子和所述至少一个定子以及至少一个密封件构造成隔离所述隔离环境，其中所述至少一个密封件与所述至少一个定子成一体。

公开(公告)号：US09024488B2

公开(公告)日：2015-05-05

申请号：US13646282

申请日：2012-10-05

Applicant: Brooks Automation, Inc.

Inventor： Ulysses Gilchrist ,  Martin Hosek ,  Jairo Terra Moura ,  Jay Krishnasamy ,  Christopher Hofmeister

IPC: H02K7/09 ,  H02K41/02 ,  B25J17/00 ,  H02K29/03

CPC classification number: H02K7/09 ,  H02K29/03 ,  Y10S901/15 ,  Y10S901/23 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

Abstract: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.

Abstract translation: 一种用于基板输送臂的驱动部分，包括框架，至少一个定子，其安装在框架内，该定子包括第一马达部分和至少一个定子轴承部分和同轴主轴，所述至少一个定子轴承部分和基本上不被所述至少一个定子 其中所述同轴心轴的每个驱动轴包括转子，所述转子包括第二电动机部分和至少一个转子轴承部分，所述至少一个转子轴承部分构造成与所述至少一个定子轴承部分相接合，其中所述第一电动机部分被配置为接合 所述第二马达部分绕所述心轴绕预定轴线进行旋转，并且所述至少一个定子支承部分构造成通过与所述至少一个相互作用的至少一个相互作用来实现连接到所述同轴心轴的基底输送臂端部执行器的至少调平 转子轴承部分。

公开(公告)号：US20150057764A1

公开(公告)日：2015-02-26

申请号：US14530102

申请日：2014-10-31

Applicant: Brooks Automation, Inc.

Inventor： Pablo Gonzalez ,  Gary Roy Watts

IPC: G05B19/418

CPC classification number: G05B19/4189 ,  G05B2219/45031 ,  G06F21/44 ,  Y02P90/14 ,  Y02P90/18 ,  Y02P90/28

Abstract: An access arbitration module includes a plurality of active component communication ports for communicating with a plurality of active components, and includes a passive component communication port for communicating with a passive component. The access arbitration module also includes switching logic defined to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port, such that an authorized one of the plurality of active component communication ports is connected in communication with the passive component communication port at a given time, and such that non-authorized ones of the plurality of active component communication ports are prevented from communication with the passive component communication port at the given time.

Abstract translation: 访问仲裁模块包括用于与多个活动组件通信的多个活动组件通信端口，并且包括用于与被动组件进行通信的无源组件通信端口。 访问仲裁模块还包括被定义为控制多个有源组件通信端口和无源组件通信端口中的每一个之间的接入通信协议信号的传输的交换逻辑，使得多个有源组件通信端口中的授权的一个连接在 在给定时间与无源组件通信端口进行通信，并且使得在给定时间，防止多个活动组件通信端口中的未授权的有源组件通信端口与无源组件通信端口通信。

公开(公告)号：US20150040596A1

公开(公告)日：2015-02-12

申请号：US14523507

申请日：2014-10-24

Applicant: Brooks Automation, Inc.

Inventor： Paul E. Dresens ,  Gary S. Ash ,  Allen J. Bartlett ,  Bruce R. Andeen ,  Y. Roberto Than ,  Joseph Chopy, JR.

IPC: F04B37/08 ,  F17D3/18 ,  F17D1/04 ,  F17D3/01

CPC classification number: F04B37/08 ,  B01D8/00 ,  F17D1/04 ,  F17D3/01 ,  F17D3/18 ,  F24F11/30 ,  F24F2110/50 ,  F25B9/002 ,  F25B9/14 ,  F25B45/00 ,  F25B2309/001 ,  F25B2309/002 ,  F25B2309/1428 ,  F25B2345/001 ,  F25B2345/003 ,  F25J1/0007

Abstract: A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply. An appropriate supply of helium is distributed to each cryopump. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.

Abstract translation: 用于控制来自普通歧管的氦制冷剂供应的氦管理控制系统为具有适当氦气供应的低温冰箱供应。 该系统采用传感器来监测和调节整个制冷剂供应。 向每个低温泵分配适当的氦气供应。 如果总制冷供应超过需求或消耗，则过剩制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。 如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应减少，从而基于当前的冷却功能使有害或减速效果最小化。