公开(公告)号：US06931928B2

公开(公告)日：2005-08-23

申请号：US10488490

申请日：2002-09-02

Applicant: Hiroyuki Hashimoto ,  Takahiko Ooasa ,  Naoki Ikeuchi ,  Muneo Harada

Inventor： Hiroyuki Hashimoto ,  Takahiko Ooasa ,  Naoki Ikeuchi ,  Muneo Harada

IPC: B81B3/00 ,  B81B7/00 ,  G01C19/56 ,  G01C19/5719 ,  G01P15/08 ,  G01P15/12 ,  G01P15/18

CPC classification number: G01P15/18 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/0181 ,  B81B2203/053 ,  B81B2203/058 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0842

Abstract: A microstructure includes a mass; a base member in which the mass is movably contained. The mass includes a surface, which is exposed out of the base member, and a stopper wire, which is arranged above the surface of the mass so as to inhibit over move of the mass.

Abstract translation: 微结构包括质量; 其中质量块可移动地包含在其中的基部构件。 质量包括暴露在基部构件外的表面和布置在物体表面上方以阻止物料过度移动的止动丝。

公开(公告)号：US06835587B2

公开(公告)日：2004-12-28

申请号：US10639289

申请日：2003-08-11

Applicant: Randall L. Kubena ,  David T. Chang

Inventor： Randall L. Kubena ,  David T. Chang

IPC: H01L2100

CPC classification number: B81C3/002 ,  B81B2201/0242 ,  B81B2201/025 ,  B81C2201/019 ,  B81C2203/036 ,  B81C2203/058 ,  G01C19/5656 ,  G01P15/0802 ,  G01P15/0894 ,  G01P15/18 ,  G01P2015/084 ,  G01P2015/0842 ,  H01H1/0036 ,  H01H59/0009

Abstract: A first axis MEM tunneling/capacitive sensor and method of making same. Cantilever beam structures for at least two orthogonally arranged sensors and associated mating structures are defined on a first substrate or wafer, the at least two orthogonally arrange sensors having orthogonal directions of sensor sensitivity. A resonator structure of at least a third sensor is also defined, the third sensor being sensitive in a third direction orthogonal to the orthogonal directions of sensor sensitivity of the two orthogonally arranged sensors and the resonator structure having a mating structure thereon. Contact structures for at least two orthogonally arranged sensors are formed together with mating structures on a second substrate or wafer, the mating structures on the second substrate or wafer being of a complementary shape to the mating structures on the first substrate or wafer.

Abstract translation: 第一轴MEM隧道/电容传感器及其制造方法。 至少两个正交布置的传感器和相关联的配合结构的悬臂梁结构被限定在第一基板或晶片上，所述至少两个正交布置的传感器具有传感器灵敏度的正交方向。 还限定了至少第三传感器的谐振器结构，第三传感器在正交于两个正交布置的传感器的传感器灵敏度的正交方向的第三方向和在其上具有匹配结构的谐振器结构的灵敏度。 至少两个正交布置的传感器的接触结构与第二衬底或晶片上的配合结构一起形成，第二衬底或晶片上的配合结构与第一衬底或晶片上的配合结构互补形状。

公开(公告)号：US20040237626A1

公开(公告)日：2004-12-02

申请号：US10843139

申请日：2004-05-11

Inventor： A. Dorian Challoner ,  Roman C. Gutierrez ,  Tony K. Tang

IPC: G01P021/00

CPC classification number: G01C19/5719 ,  G01C19/56 ,  G01C25/00 ,  G01P2015/084 ,  G01P2015/0842

Abstract: A micro-gyroscope (10) having closed loop output operation by a control voltage (Vty), that is demodulated by a drive axis (x-axis) signal Vthx of the sense electrodes (S1, S2), providing Coriolis torque rebalance to prevent displacement of the micro-gyroscope (10) on the output axis (y-axis) Vthynull0. Closed loop drive axis torque, Vtx maintains a constant drive axis amplitude signal, Vthx. The present invention provides independent alignment and tuning of the micro-gyroscope by using separate electrodes and electrostatic bias voltages to adjust alignment and tuning. A quadrature amplitude signal, or cross-axis transfer function peak amplitude is used to detect misalignment that is corrected to zero by an electrostatic bias voltage adjustment. The cross-axis transfer function is either Vthy/Vty or Vtnx/Vtx. A quadrature signal noise level, or difference in natural frequencies estimated from measurements of the transfer functions is used to detect residual mistuning, that is corrected to zero by a second electrostatic bias voltage adjustment.

Abstract translation: 具有通过感测电极（S1，S2）的驱动轴（x轴）信号Vthx解调的控制电压（Vty）的闭环输出操作的微陀螺仪（10），提供科里奥利扭矩重新平衡以防止 输出轴（y轴）上的微陀螺仪（10）的位移Vthy〜0。 闭环驱动轴转矩，Vtx保持恒定的驱动轴振幅信号Vthx。 本发明通过使用单独的电极和静电偏置电压来提供微陀螺仪的独立对准和调谐，以调整对准和调谐。 使用正交幅度信号或交叉轴传递函数峰值振幅来检测通过静电偏置电压调整校正为零的未对准。 交叉轴传递函数为Vthy / Vty或Vtnx / Vtx。 使用正交信号噪声电平或由传递函数的测量估计的固有频率的差异来检测残余失谐，其通过第二静电偏置电压调整被校正为零。

公开(公告)号：US06201341B1

公开(公告)日：2001-03-13

申请号：US09325141

申请日：1999-06-03

Applicant: Katsumi Fujimoto

Inventor： Katsumi Fujimoto

IPC: G01C1956

CPC classification number: G01C19/56 ,  G01P2015/084 ,  G01P2015/0842

Abstract: A vibrator includes a vibratable body of a flat plate shape and four notches provided from four parts of the outer periphery of said vibrating body with approximately equal intervals to a center of said vibratable body. A vibrating gyroscope includes the vibrator, as well as a drive unit and a detecting unit.

Abstract translation: 振动器包括平板状的可振动体和从所述振动体的外周的四个部分提供的与所述可振动体的中心大致相等间隔的四个凹口。 振动陀螺仪包括振动器，以及驱动单元和检测单元。

公开(公告)号：US6079272A

公开(公告)日：2000-06-27

申请号：US130696

申请日：1998-08-07

Applicant: Christopher B. Stell ,  Vatche Vorperian ,  Roman C. Gutierrez ,  Tony K. Tang

Inventor： Christopher B. Stell ,  Vatche Vorperian ,  Roman C. Gutierrez ,  Tony K. Tang

IPC: G01C19/5649 ,  G01C19/5719 ,  G01P9/04

CPC classification number: G01C19/5649 ,  G01C19/5719 ,  G01P2015/084 ,  G01P2015/0842

Abstract: A gyroscope system can detect the amount of movement of the system. The gyroscope system includes a circuit that has a number of different features and detects movement independent of any circuit parameters. The first feature uses a feedback loop to compensate for difference in Q factors between the circuits. Another feature regulates the amplitude of the resonator. Yet another feature extracts the rotation rate signals from the gyroscope in a new way.

Abstract translation: 陀螺仪系统可以检测系统的移动量。 陀螺仪系统包括具有多个不同特征并且独立于任何电路参数来检测运动的电路。 第一个功能使用反馈回路来补偿电路之间Q因子的差异。 另一个特征调节谐振器的幅度。 另一个特征以新的方式提取来自陀螺仪的旋转速率信号。

公开(公告)号：US5567880A

公开(公告)日：1996-10-22

申请号：US60832

申请日：1993-05-14

Applicant: Yoshihiro Yokota ,  Shotaro Naito ,  Toshihiko Suzuki ,  Akira Koide

Inventor： Yoshihiro Yokota ,  Shotaro Naito ,  Toshihiko Suzuki ,  Akira Koide

IPC: G01P15/12 ,  G01P15/125 ,  G01P15/18 ,  H01L27/20 ,  G01P15/08

CPC classification number: H01L27/20 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0828 ,  G01P2015/084 ,  G01P2015/0842

Abstract: A semiconductor accelerometer includes a mass portion formed at a center of a silicon plate, a frame portion formed around the circumference of the silicon plate so as to surround the mass portion and a diaphragm portion formed in the silicon plate between the mass portion and the frame portion so as to bridge the mass portion with the frame portion, one of major surfaces of the silicon plate serving as a common continuous major surface for the mass portion, frame portion and diaphragm portion. Piezoresistance elements are formed on the common continuous major surface at the diaphraqm portion and an additional Au film is formed on the common continuous major surface at the mass portion. The additional Au film constitutes in combination with the mass portion a weight which responds to an acceleration acting thereon. The mass of the additional Au film is selected in such a manner that the center of gravity of the weight is located within an area in the mass portion having a depth corresponding to the thickness of the diaphragm portion.

Abstract translation: 半导体加速度计包括形成在硅板的中心的质量部分，围绕质量部分形成在硅板的周围的框架部分，以及形成在质量部分和框架之间的硅板中的膜部分 为了将质量部分与框架部分桥接，硅板的主表面之一用作质量部分，框架部分和隔膜部分的共同的连续主表面。 压电元件形成在引线部分的公共连续主表面上，并且在质量部分的公共连续主表面上形成附加的Au膜。 附加的Au膜与质量部分组合构成对作用在其上的加速度作出响应的重量。 选择附加Au膜的质量使得重量的重心位于质量部分中具有与膜部分的厚度相对应的深度的区域内。

公开(公告)号：US20170345948A1

公开(公告)日：2017-11-30

申请号：US15536716

申请日：2016-01-07

Applicant: DENSO CORPORATION

Inventor： Kiyomasa SUGIMOTO

IPC: H01L29/84 ,  G01P15/18 ,  G01P15/125 ,  B81B3/00 ,  G01P15/08

CPC classification number: H01L29/84 ,  B81B2201/0235 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/0842

Abstract: An acceleration sensor includes: a semiconductor substrate that includes a support substrate and a semiconductor layer; a first-direction movable electrode; a second-direction movable electrode; a first-direction fixed electrode; a second-direction fixed electrode; and a support member. The acceleration sensor is configured to detect acceleration in a first direction in the surface direction of the semiconductor substrate and acceleration in a second direction orthogonal to the first direction and parallel to the surface direction. The first-direction movable electrode and the first-direction fixed electrode are provided such that an angle formed by an extended direction of the first-direction movable electrode and the first-direction fixed electrode and the second direction is sin−1(d/L)[deg], and the second-direction movable electrode and the second-direction fixed electrode are provided such that an angle formed by an extended direction of the second-direction movable electrode and the second-direction fixed electrode and the first direction is sin−1(d/L)[deg].

公开(公告)号：US20150355220A1

公开(公告)日：2015-12-10

申请号：US14690839

申请日：2015-04-20

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Pil Joong KANG ,  Jung Won LEE ,  Hyun Kee LEE ,  Jong Hyeong SONG

IPC: G01P15/12 ,  G01P15/093 ,  G01P15/125 ,  G01P15/02

CPC classification number: G01P15/123 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81C1/00269 ,  B81C2203/0109 ,  B81C2203/035 ,  G01C19/56 ,  G01P15/09 ,  G01P15/093 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0842

Abstract: There are provided an inertial sensor module having a hermetic seal formed of metal and a multi-axis sensor employing the same. The inertial sensor module includes: a sensor main body including a plurality of wirings connected to any one of a driving electrode of a sensor and a sensing electrode of the sensor and formed on a substrate for a lower cap by a wafer level package (WLP) scheme to detect an inertial force; a substrate for an upper cap bonded on the sensor main body to protect the sensor main body; and a hermetic seal formed of metal isolated from the wiring and interposed into the sensor main body and the substrate for the upper cap by performing the bonding by metal bonding.

Abstract translation: 提供了一种惯性传感器模块，其具有由金属形成的气密密封件和使用其的多轴传感器。 惯性传感器模块包括：传感器主体，包括连接到传感器的驱动电极和传感器的感测电极中的任何一个的多个布线，并且通过晶片级封装（WLP）形成在用于下盖的基板上， 检测惯性力的方案; 用于上盖的基板，其接合在所述传感器主体上以保护所述传感器主体; 以及通过金属接合进行接合而由与配线隔离并插入到传感器主体和上盖的基板中的金属形成的气密密封。

公开(公告)号：US20150241215A1

公开(公告)日：2015-08-27

申请号：US14602031

申请日：2015-01-21

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Jong Woon KIM ,  Seung Hun HAN ,  Sung Jun LEE ,  Sung Wook KIM ,  Chang Hyun LIM

IPC: G01C19/5712 ,  B81B3/00

CPC classification number: B81B3/0072 ,  B81B2201/0235 ,  B81B2203/0163 ,  G01C19/5755 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/0831 ,  G01P2015/084 ,  G01P2015/0842

Abstract: Embodiments of the invention provide a MEMS sensor, including a mass body, a flexible beam coupled with the mass body, and a support part coupled with the flexible beam and floatably supporting the mass body. According to at least one embodiment, the flexible beam is provided with a sensing device configured to detect a physical amount depending on a displacement of the mass body, and a connection part between the flexible beam and the support part is provided with a reinforcement part to relax stress concentration in response to rigidity reinforcement.

Abstract translation: 本发明的实施例提供一种MEMS传感器，其包括质量体，与质量体耦合的柔性梁，以及与柔性梁耦合并支撑质量体的支撑部。 根据至少一个实施例，柔性梁设置有感测装置，其被配置为根据质量体的位移来检测物理量，并且柔性梁和支撑部之间的连接部分设置有加强部分 缓解应力集中反应刚性强化。

公开(公告)号：US20150059477A1

公开(公告)日：2015-03-05

申请号：US14462359

申请日：2014-08-18

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Jong Woon Kim ,  Sung Jun Lee ,  Chang Hyun Lim

IPC: G01P15/12 ,  H01L41/113

CPC classification number: G01P15/123 ,  G01P15/18 ,  G01P2015/0842

Abstract: Disclosed herein is an acceleration sensor including: a mass; a flexible beam on which an electrode or a piezoresistive element is disposed and the mass is coupled; and a support part connecting to and supporting the flexible beam and having therein a stress isolating slit facing the mass, wherein the mass, the flexible beam and the support part are formed by coupling first and second substrates, wherein the first substrate has a first masking pattern formed thereon corresponding to the flexible beam, the mass and the support part and the second substrate has a second masking pattern formed thereon corresponding to the mass and the support part.

Abstract translation: 本文公开了一种加速度传感器，包括：质量; 柔性梁，其上设置电极或压阻元件并且所述质量块被联接; 以及连接到所述柔性梁并支撑所述柔性梁并且在其中具有面向所述质量块的应力隔离狭缝的支撑部分，其中所述质量块，所述柔性梁和所述支撑部分通过联接第一和第二基板形成，其中所述第一基板具有第一掩蔽 形成在其上的图案对应于柔性梁，质量和支撑部分和第二基板具有形成在其上的与质量块和支撑部分对应的第二掩模图案。