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    SUPPRESION OF VOLTAGE BREAKDOWN AND FIELD EMISSION FROM SURFACES
    119.
    发明申请
    SUPPRESION OF VOLTAGE BREAKDOWN AND FIELD EMISSION FROM SURFACES 无效

    公开(公告)号：US20010051209A1

    公开(公告)日：2001-12-13

    申请号：US08730475

    申请日：1996-10-11

    发明人： RICHARD SILBERGLITT ,  WILLIAM PETER

    IPC分类号： B05D005/12 ,  B05D001/36

    CPC分类号： C23C28/044 ,  C23C14/0641 ,  C23C14/0647 ,  C23C14/0652 ,  H01J5/08

    摘要： This invention consists of a coating applied to the metal surface which reduces the field emission levels of the surface. This coating could also decrease the secondary electron coefficient of the surface. The preferred embodiment described below is a hybrid coating consisting of two layers. However, a single-layer coating may also be used so long as it decreases field emission. Likewise, any number of coating layers may be used, so long as the resultant coating reduces field emission. The coating may also alter the properties of the interface between the metal surface and any macroparticle debris, in order to reduce field emission levels, but this is not essential, so long as the field emission from the surface is reduced. The invention is a coating which is not harmful to dc and rf vacuum system components, as for example, coatings which contain halogen atoms, such as CaF nullJ. N. Smith, Jr., J. Appl. Phys. 59, 283 (1986)null. This invention provides a means of raising breakdown thresholds in rf cavities even in non-multipactor parameter regimes. The coating can reduce emission from the electrodes by isolating the electrode surface whiskers from the cavity vacuum (FIG. 1). It can also absorb low-energy secondary or field-emitted electrons. We have obtained voltage holdoff data and dark current measurements for a variety of coatings, two of which far exceed the properties of the current state-of-the-art Titanium Nitride (TiN) coatings. For example, DC electrical breakdown is increased from a value of 40 MV/m for bare Copper to 115 MV/m for a copper electrode coated as described in the preferred embodiment. TiN-coated electrodes undergo DC breakdown at a much lower value of 50 MV/m. Dark current levels from the coating described in the preferred embodiment are over six orders of magnitude less than TiN-coated Copper even after arcing. These coatings have been demonstrated to have the properties required for use in high-voltage holdoff applications. For example, they can decrease the secondary emission yield, are mechanically stable, are not sensitive to radiation, are bakeable (important since most vacuum electronic systems are baked before use to eliminate contaminants), do not affect the cavity Q (the ability of the cavity to store energy), and will not poison a cathode. The present invention pertains to a method of suppressing electrical breakdown on a surface of an object to reduce field emission. The method comprises the steps of applying a first coating layer coating to the surface; and applying at least one subsequent coating layer which does not cause cathode contamination to the surface over the first coating layer. The present invention pertains to a device comprising a component having a surface, a first layer in contact and covering the surface which has a dark current emission less than that of bare copper and a voltage breakdown threshold higher than 40 MV/m DC.