公开(公告)号：US20100038538A1

公开(公告)日：2010-02-18

申请号：US12551783

申请日：2009-09-01

Applicant: Volker Drexel

Inventor： Volker Drexel

IPC: H01J3/20 ,  H01J3/18 ,  G01N23/22

CPC classification number: H01J37/145 ,  H01J37/141 ,  H01J37/1471

Abstract: An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of the magnetic lens exhibits a diameter Da which is larger than a diameter Di of the bore of the inner pole piece of the magnetic lens. The following relationship is satisfied: 1.5·Di≦Da≦3·Di. The lower end of the inner pole piece is disposed in a distance of at least 2 mm offset from the inner end of the outer pole piece in a direction of the optical axis.

Abstract translation: 用于聚焦带电粒子的物镜包括磁性透镜和其组件相对于彼此移位的静电透镜。 磁性透镜的外极片的孔的直径Da大于磁性透镜的内极片的孔的直径Di。 满足以下关系：1.5·Di＆nlE; Da＆nlE; 3·Di。 内极靴的下端设置在距离外极极的内端至少2mm沿光轴方向的距离处。

公开(公告)号：US20100001202A1

公开(公告)日：2010-01-07

申请号：US12374892

申请日：2007-07-26

Applicant: Hiroyuki Matsuda ,  Horoshi Daimon

Inventor： Hiroyuki Matsuda ,  Horoshi Daimon

IPC: H01J3/18 ,  G01N23/00

CPC classification number: H01J37/12 ,  H01J37/252 ,  H01J2237/05 ,  H01J2237/153 ,  H01J2237/1532 ,  H01J2237/244 ,  H01J2237/2511 ,  H01J2237/2538

Abstract: A spherical aberration correction decelerating lens corrects a spherical aberration occurring in an electron beam or an ion beam (hereinafter, referred to as “beam”) emitted from a predetermined object plane position with a certain divergence angle, and said spherical aberration correction decelerating lens comprises at least two electrodes, each of which is constituted of a surface of a solid of revolution whose central axis coincides with an optical axis and each of which receives an intentionally set voltage applied by an external power supply, wherein at least one of the electrodes includes one or more meshes (M) which has a concaved shape opposite to an object plane (P0) and which is constituted of a surface of a solid of revolution so that a central axis of the concaved shape coincides with the optical axis, and a voltage applied to each of the electrodes causes the beam to be decelerated and causes formation of a decelerating convergence field for correcting the spherical aberration occurring in the beam. This makes it possible to provide a spherical aberration correction decelerating lens which converges a beam, emitted from the sample and having high energy and a large divergence angle, onto an image plane.

Abstract translation: 球面像差校正减速透镜校正从具有一定发散角的预定物平面位置发射的电子束或离子束（以下称为“光束”）中发生的球面像差，并且所述球面像差校正减速透镜包括 至少两个电极，每个电极由其中心轴与光轴重合的旋转实体表面构成，每个电极接收由外部电源施加的有意设定的电压，其中至少一个电极包括 一个或多个网格（M），其具有与物平面（P0）相反的凹形，并且由旋转实体的表面构成，使得凹形的中心轴与光轴重合，并且电压 施加到每个电极使得光束减速，并且形成用于校正球面像差的减速会聚场 在梁中发生。 这使得可以提供一种球面像差校正减速透镜，其将从样品发射并具有高能量和大发散角的光束会聚到图像平面上。

公开(公告)号：US20090321655A1

公开(公告)日：2009-12-31

申请号：US12513939

申请日：2007-11-07

Applicant: Alexander Makarov ,  Reinhold Pesch ,  Malek Robert ,  Viacheslav Kozlovskiy

Inventor： Alexander Makarov ,  Reinhold Pesch ,  Malek Robert ,  Viacheslav Kozlovskiy

IPC: H01J3/18 ,  H01J49/04

CPC classification number: H01J49/065

Abstract: An ion transfer arrangement for transporting ions between higher and lower pressure regions of a mass spectrometer includes an electrode assembly (120) with a first plurality of ring electrodes (205) arranged in alternating relation with a second plurality of ring electrodes (210). The first plurality of ring electrodes (205) are narrower than the second plurality of ring electrodes (210) in a longitudinal direction, but the first plurality of ring electrodes have a relatively high magnitude voltage of a first polarity applied to them whereas the second plurality of ring electrodes (210) have a relatively lower magnitude voltage applied to them, of opposing polarity to that applied to the first set of ring electrodes (205). In this manner, ions passing through the ion transfer arrangement experience spatially alternating asymmetric electric fields that tend to focus ions away from the inner surface of the channel wall and towards the channel plane or axis of symmetry.

Abstract translation: 用于在质谱仪的较高和较低压力区域之间输送离子的离子传递装置包括具有与第二多个环形电极（210）交替设置的第一多个环形电极（205）的电极组件（120）。 第一多个环形电极（205）在纵向方向上比第二多个环形电极（210）窄，但是第一多个环形电极具有施加到它们的第一极性的相对高的幅度电压，而第二个多个环形电极 环形电极（210）具有相对于施加到第一组环形电极（205）的相反极性的相对较低的施加到它们的幅度电压。 以这种方式，通过离子转移装置的离子经历空间交替的不对称电场，其倾向于将离子聚焦离开通道壁的内表面并朝向通道平面或对称轴线。

公开(公告)号：US07598498B2

公开(公告)日：2009-10-06

申请号：US11890968

申请日：2007-08-08

Applicant: Takatoshi Yamashita

Inventor： Takatoshi Yamashita

IPC: H01J3/18 ,  H01J37/12

CPC classification number: H01J37/12 ,  H01J37/3171 ,  H01J2237/004 ,  H01J2237/121

Abstract: An electric field lens includes an entrance electrode, an intermediate electrode, and an exit electrode that are arranged in a traveling direction of ion beams. The intermediate electrode is maintained in a positive potential, and the entrance electrode and the exit electrode are maintained in a ground potential. In addition, the electric field lens includes a first control electrode and a second control electrode that are disposed between the entrance electrode and the intermediate electrode and between the intermediate electrode and the exit electrode, respectively and maintained in a negative potential.

Abstract translation: 电场透镜包括沿离子束的行进方向布置的入口电极，中间电极和出射电极。 中间电极保持在正电位，并且入口电极和出射电极保持接地电位。 此外，电场透镜包括分别设置在入射电极和中间电极之间以及中间电极和出射电极之间并保持在负电位的第一控制电极和第二控制电极。

公开(公告)号：US07598495B2

公开(公告)日：2009-10-06

申请号：US11739934

申请日：2007-04-25

Applicant: Peter L. Kellerman ,  Victor M. Benveniste ,  Alexander S. Perel ,  Brian S. Freer ,  Michael A. Graf

Inventor： Peter L. Kellerman ,  Victor M. Benveniste ,  Alexander S. Perel ,  Brian S. Freer ,  Michael A. Graf

IPC: H01J3/18

CPC classification number: H01J37/3171 ,  H01J37/12 ,  H01J2237/022 ,  H01J2237/049

Abstract: A focusing particle trap system for ion implantation comprising an ion beam source that generates an ion beam, a beam line assembly that receives the ion beam from the ion beam source comprising a mass analyzer that selectively passes selected ions, a focusing electrostatic particle trap that receives the ion beam and removes particles from the ion beam comprising an entrance electrode comprising an entrance aperture and biased to a first base voltage, wherein the first surface of the entrance electrode is facing away from a center electrode and is approximately flat, wherein the second surface of the entrance electrode is facing toward the center electrode and is concave, wherein the center electrode is positioned a distance downstream from the entrance electrode comprising a center aperture and biased to a center voltage, wherein the center voltage is less than the first base voltage, wherein the first surface of the center electrode is facing toward the entrance electrode and is convex, wherein the second surface of the center electrode is facing away from the entrance electrode and is approximately flat, an exit electrode positioned a distance downstream from the center electrode comprising an exit aperture and biased to a second base voltage, and wherein the first surface of the exit electrode is facing toward the center electrode and is approximately flat, wherein the second surface of the exit electrode is facing away from the center electrode and is approximately flat, wherein a first electrostatic field is generated from the entrance electrode toward the center electrode and a second electrostatic field is generated from the exit electrode toward the center electrode; wherein the second base voltage is greater than the center voltage, and an end station that is downstream from the beam line assembly and receives the ion beam.

Abstract translation: 一种用于离子注入的聚焦粒子捕获系统，包括产生离子束的离子束源，接收来自离子束源的离子束的束线组件，该束束组件包括选择性地通过选定离子的质量分析器，接收 离子束并且从离子束中除去包含入口电极并且被偏置到第一基极电压的入口电极的颗粒，其中入口电极的第一表面背离中心电极并且近似平坦，其中第二表面 所述入口电极面向所述中心电极并且是凹形的，其中所述中心电极位于与所述入口电极的下游距离的位置，所述入口电极包括中心孔并被偏压到中心电压，其中所述中心电压小于所述第一基极电压， 其中所述中心电极的所述第一表面面向所述入口电极并且被连接 vex，其中所述中心电极的所述第二表面背离所述入口电极并且近似平坦，所述出口电极在所述中心电极的下游距离包括出口孔并且被偏压到第二基极电压，并且其中所述第一表面 所述出射电极的面向所述中心电极并且近似平坦，其中所述出射电极的所述第二表面背离所述中心电极并且近似平坦，其中从所述入射电极朝向所述中心电极产生第一静电场 并且从出射电极向中心电极产生第二静电场; 其中所述第二基极电压大于所述中心电压，以及在所述束线组件的下游并接收所述离子束的端站。

公开(公告)号：US20090121149A1

公开(公告)日：2009-05-14

申请号：US11937849

申请日：2007-11-09

Applicant: Svetlana Radovanov ,  Frank Sinclair ,  Peter L. Kellerman ,  Victor M. Benveniste ,  Robert Lindberg

Inventor： Svetlana Radovanov ,  Frank Sinclair ,  Peter L. Kellerman ,  Victor M. Benveniste ,  Robert Lindberg

IPC: H01J3/18

CPC classification number: H01J37/1477 ,  H01J37/12 ,  H01J37/1475 ,  H01J37/3171 ,  H01J2237/083 ,  H01J2237/0835 ,  H01J2237/24542 ,  H01J2237/31701

Abstract: Techniques for shaping an ion beam are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for shaping an ion beam. The apparatus may comprise an entrance electrode biased at a first voltage potential, wherein an ion beam enters the entrance electrode, an exit electrode biased at a second voltage potential, wherein the ion beam exits the exit electrode, and a first suppression electrode and a second suppression electrode positioned between the entrance electrode and the exit electrode, wherein the first suppression electrode and the second suppression electrode are independently biased to variably focus the ion beam.

Abstract translation: 公开了用于成形离子束的技术。 在一个特定的示例性实施例中，可以将技术实现为用于成形离子束的装置。 该装置可以包括偏置在第一电压电位的入口电极，其中离子束进入入口电极，偏置在第二电压电位的出射电极，其中离子束离开出射电极，并且第一抑制电极和第二抑制电极 位于所述入射电极和所述出射电极之间的抑制电极，其中所述第一抑制电极和所述第二抑制电极被独立地偏置以可变地聚焦所述离子束。

公开(公告)号：US20090008572A1

公开(公告)日：2009-01-08

申请号：US12177563

申请日：2008-07-22

Applicant: Takashi Ogawa ,  Hiroto Muto

Inventor： Takashi Ogawa ,  Hiroto Muto

IPC: G01N23/00 ,  H01J3/20 ,  H01J3/18

CPC classification number: H01J37/02 ,  H01J37/16 ,  H01J37/185 ,  H01J2237/022 ,  H01J2237/12 ,  H01J2237/31749

Abstract: Provided is a charged-particle beam apparatus capable of preventing a small amount of dust from being attached to an electrostatic lens serving as an objective lens to apply a high voltage to the electrostatic lens.The charged-particle beam apparatus 1 includes a chamber 2 which has an interior 2a evacuated by an intra-chamber evacuating means 4, and a lens-barrel 3 which emits a charged-particle beam B1 onto a sample S put in the interior 2a of the chamber 2. The lens-barrel 3 includes a cylindrical body 5 which includes an emission outlet 6 for emission of the charged-particle beam B1, a charged-particle supply part 7 which is housed at a side of a proximal end 5b in an interior 5a of the cylindrical body 5 and releases the charged-particle beam B1, and an objective lens 11 which is housed at a side of a distal end 5b in the interior 5b of the cylindrical body 5 and has an electrostatic lens for generating an electric field and converging the charged-particle beam B1 released from the charged-particle supply part 7. The cylindrical body 5 of the lens-barrel 3 is provided with a gas supplying means 12 capable of supplying a gas G to the interior 5b of the cylindrical body 5, and the gas supplying means 12 is provided at a side of a proximal end of the objective lens 11.

Abstract translation: 本发明提供一种能够防止少量灰尘附着在作为物镜的静电透镜上以对静电透镜施加高电压的带电粒子束装置。 带电粒子束装置1包括：腔室2，其具有通过室内排气装置4抽真空的内部2a;以及透镜筒3，其将带电粒子束B1发射到放置在内部2a的内部2a中的样品S上 透镜镜筒3包括圆柱体5，其包括用于发射带电粒子束B1的发射出口6，带电粒子供应部分7，其被容纳在基端部5b的一侧 圆筒体5的内部5a并释放带电粒子束B1，以及物镜11，其容纳在圆筒体5的内部5b中的远端5b的一侧，并具有用于产生电 并且使从带电粒子供应部件7释放的带电粒子束B1会聚。透镜镜筒3的圆柱体5设置有气体供给装置12，其能够将气体G供应到圆柱形 主体5和气体供应 g装置12设置在物镜11的近端的一侧。

公开(公告)号：US20080035856A1

公开(公告)日：2008-02-14

申请号：US11890968

申请日：2007-08-08

Applicant: Takatoshi Yamashita

Inventor： Takatoshi Yamashita

IPC: H01J3/18 ,  H01J37/12

CPC classification number: H01J37/12 ,  H01J37/3171 ,  H01J2237/004 ,  H01J2237/121

Abstract: An electric field lens includes an entrance electrode, an intermediate electrode, and an exit electrode that are arranged in a traveling direction of ion beams. The intermediate electrode is maintained in a positive potential, and the entrance electrode and the exit electrode are maintained in a ground potential. In addition, the electric field lens includes a first control electrode and a second control electrode that are disposed between the entrance electrode and the intermediate electrode and between the intermediate electrode and the exit electrode, respectively and maintained in a negative potential.

Abstract translation: 电场透镜包括沿离子束的行进方向布置的入口电极，中间电极和出射电极。 中间电极保持在正电位，并且入口电极和出射电极保持接地电位。 此外，电场透镜包括分别设置在入射电极和中间电极之间以及中间电极和出射电极之间并保持在负电位的第一控制电极和第二控制电极。

公开(公告)号：US20050266322A1

公开(公告)日：2005-12-01

申请号：US11174891

申请日：2005-07-01

Applicant: Sang Choi ,  Dae Kim

Inventor： Sang Choi ,  Dae Kim

IPC: G02B3/00 ,  H01J1/02 ,  H01J3/18 ,  H01J9/02 ,  H01J9/14 ,  H01J37/12

CPC classification number: H01J9/02 ,  H01J3/18 ,  H01J9/14 ,  H01J37/12 ,  H01J2237/1205 ,  H01J2237/3175 ,  H01J2237/31754 ,  Y10T29/49117

Abstract: Provided is an electron beam lens for a micro-column electron beam apparatus and a method of manufacturing the same. A photosensitive glass substrate is used as a base isolation substrate and a thin metal film is grown by a plating method. Holes through which electron beam passes are formed by a lift off method after forming a resist pattern shaped as a hole on a seed metal layer and plating the thin metal film.

公开(公告)号：US5977696A

公开(公告)日：1999-11-02

申请号：US848463

申请日：1997-05-08

Applicant: Akihiko Okamoto

Inventor： Akihiko Okamoto

IPC: H01J3/18 ,  H01J1/304 ,  H01J3/02 ,  H01J1/02

CPC classification number: H01J3/022

Abstract: In a field emission electron gun including emitters (104) on predetermined parts of a substrate (109), an insulator film (105) on a remaining part of the substrate, a first gate electrode (101) on the insulator film so as to surround the emitters with a space left between each emitter and the first gate electrode and to have an outer peripheral surface defining an emission region (E), a gate edge portion (106) of a conductor is formed on the insulator film to surround the outer peripheral surface of the first gate electrode in contact with the outer peripheral surface of the first gate electrode. A second gate electrode (102) is formed on the insulator film to surround the gate edge portion with a distance left between the gate edge portion and the second gate electrode applied with a second voltage less than a first voltage applied to the first gate electrode.

Abstract translation: 在包括在基板（109）的预定部分上的发射体（104）的场致发射电子枪中，在所述基板的剩余部分上的绝缘膜（105），所述绝缘膜上的第一栅电极（101） 所述发射体在每个发射极和第一栅电极之间留有空间，并且具有限定发射区域（E）的外周表面，导体的栅极边缘部分（106）形成在绝缘膜上以包围外周 所述第一栅电极的表面与所述第一栅电极的外周面接触。 第二栅电极（102）形成在绝缘膜上以围绕栅极边缘部分，栅极边缘部分和第二栅极电极之间留下的距离小于施加到第一栅电极的第一电压的第二电压。