公开(公告)号：US20050062138A1

公开(公告)日：2005-03-24

申请号：US10668136

申请日：2003-09-22

Applicant: Kirt Williams

Inventor： Kirt Williams

IPC: B81B3/00 ,  H01L29/40 ,  H02N1/00

CPC classification number: H02N1/004 ,  B81B3/0018 ,  B81B2201/038

Abstract: A semiconductor structure with electrically isolated sidewall electrodes on one or more sides of the structure and a method for fabricating the structure are disclosed. The electrically isolated sidewall electrodes are composed of silicon-based conductive material, e.g., doped polysilicon, which allows the electrodes to be formed on one or more sides of the semiconductor structure by using stop-on-oxide deep reactive-ion etching (DRIE). The electrically isolated sidewall electrodes allow the semiconductor structure to generate electrostatic forces between a side surface of the semiconductor structure and a side surface of a similar semiconductor structure. Thus, the semiconductor structure may be used as a part of an electrostatic actuator in a microelectromechanical system (MEMS) device.

Abstract translation: 公开了一种在该结构的一侧或多侧上具有电隔离的侧壁电极的半导体结构以及用于制造该结构的方法。 电隔离的侧壁电极由硅基导电材料（例如掺杂多晶硅）组成，其允许通过使用停止氧化物深反应离子蚀刻（DRIE）在半导体结构的一侧或多侧上形成电极， 。 电隔离的侧壁电极允许半导体结构在半导体结构的侧表面和类似的半导体结构的侧表面之间产生静电力。 因此，半导体结构可以用作微机电系统（MEMS）装置中的静电致动器的一部分。

公开(公告)号：US20040251439A1

公开(公告)日：2004-12-16

申请号：US10863460

申请日：2004-06-09

Inventor： Young-Joo Yee ,  Chang-Hyeon Ji ,  Jung-Hoon Choi

IPC: F16K031/02

CPC classification number: F16K99/0001 ,  B81B7/04 ,  B81B2201/038 ,  F15C5/00 ,  F16K99/0009 ,  F16K99/0046 ,  F16K2099/0074 ,  F16K2099/008

Abstract: Disclosed are a micro-actuator, a fabrication method thereof, and a micro-actuating valve. The micro-actuating valve comprises: a first valve housing having a fluid entrance at the middle portion thereof; a second valve housing coupled to the first valve housing thus to form a space portion therein and having a fluid exit connected to the fluid entrance of the first valve housing; a plate installed at the space portion and having a micro-channel at one side thereof to be connected to the fluid exit; a plurality of micro-driving members installed to be near the plate for discharging a fluid introduced from the fluid entrance of the first valve housing to the fluid exit of the second valve housing by selectively opening and closing the micro-channel of the plate; a micro-mover suspension installed at the plate for supporting the micro-mover; a coil installed at the micro-mover; a magnet installed with a certain gap from the coil; and an electrode portion formed at the plate for is supplying a power source to the coil.

Abstract translation: 公开了微致动器，其制造方法和微致动阀。 微型致动阀包括：第一阀壳体，其中部处具有流体入口; 第二阀壳体，其联接到第一阀壳体，从而在其中形成空间部分，并具有连接到第一阀壳体的流体入口的流体出口; 安装在所述空间部分并且在其一侧具有与所述流体出口连接的微通道的板; 多个微型驱动构件安装成靠近板，用于通过选择性地打开和关闭板的微通道，将从第一阀壳体的流体入口引入的流体排放到第二阀壳体的流体出口; 安装在板上用于支撑微动员的微型悬架; 安装在微动机上的线圈; 安装有与线圈一定间隙的磁铁; 并且形成在所述板处的用于将电源供应到所述线圈的电极部分。

公开(公告)号：US06831765B2

公开(公告)日：2004-12-14

申请号：US10073304

申请日：2002-02-13

Applicant: Susumu Yasuda ,  Hidemasa Mizutani ,  Takayuki Yagi ,  Yasuhiro Shimada ,  Futoshi Hirose ,  Takahisa Kato

Inventor： Susumu Yasuda ,  Hidemasa Mizutani ,  Takayuki Yagi ,  Yasuhiro Shimada ,  Futoshi Hirose ,  Takahisa Kato

IPC: G02B2608

CPC classification number: G02B26/105 ,  B81B3/0051 ,  B81B3/0067 ,  B81B2201/038 ,  B81B2201/042 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C2201/0133 ,  G02B26/0841 ,  Y10S359/90 ,  Y10S359/904

Abstract: The tiltable-body apparatus including a frame member, a tiltable body, and a pair of torsion springs having a twisting longitudinal axis. The torsion springs are disposed along the twisting longitudinal axis opposingly with the tiltable body being interposed, support the tiltable body flexibly and rotatably about the twisting longitudinal axis relative to the frame member, and include a plurality of planar portions, compliant directions of which intersect each other when viewed along a direction of the twisting longitudinal axis. A center of gravity of the tiltable body is positioned on the twisting longitudinal axis of the torsion springs.

Abstract translation: 可倾斜体装置包括框架构件，可倾斜体和具有扭转纵向轴线的一对扭转弹簧。 扭转弹簧沿着与可倾斜主体相对的扭转纵向轴线布置，其相对于框架构件围绕扭转纵向轴线柔性地和可旋转地支撑可倾斜体，并且包括多个平面部分，顺应方向与每个 另外当沿着扭转纵向轴线的方向观察时。 可倾斜体的重心位于扭转弹簧的扭转纵向轴线上。

公开(公告)号：US20040218877A1

公开(公告)日：2004-11-04

申请号：US10835344

申请日：2004-04-29

Inventor： Huikai Xie

IPC: G02B006/36 ,  G06F009/40

CPC classification number: G02B26/0866 ,  B81B3/0018 ,  B81B2201/038 ,  B81B2201/06 ,  G02B6/3512 ,  G02B6/3526 ,  G02B6/3534 ,  G02B6/3584

Abstract: A MEMS vertical displacement device capable of moving one or more vertically displaceable platforms relative to a base. In particular, the vertical displacement device may be capable of moving a vertically displaceable platform so that the vertically displaceable platform remains generally parallel to a base. The vertically displaceable platform may be, but is not limited to, a microlens, a micromirror, micro-grating, or other device. The vertical displacement device may also be included in optical coherence and confocal imaging systems.

Abstract translation: 能够相对于基座移动一个或多个可垂直移位的平台的MEMS垂直位移装置。 特别地，垂直位移装置可以能够移动可垂直移动的平台，使得垂直移位的平台保持大致平行于基部。 可垂直移位的平台可以是但不限于微透镜，微镜，微光栅或其他器件。 垂直位移装置也可以包括在光学相干和共焦成像系统中。

公开(公告)号：US20040061414A1

公开(公告)日：2004-04-01

申请号：US10261087

申请日：2002-09-30

Inventor： Dennis S. Greywall

IPC: H02N001/00

CPC classification number: B81B3/0051 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  B81C1/00214 ,  G02B26/0841 ,  H02N1/006

Abstract: An integrated device has a spring having at least two split parts that are not in direct electrical contact with each other. The integrated device also has a substrate and a movable part, where both parts of the spring are configured between the substrate and the movable part to support the movable part on the substrate. The two or more split parts of the spring enable two or more independent voltages to be applied to the movable part. The split spring of the invention may be used in MEMS devices for optical switches in order to provide independent voltages to the movable part(s) in those devices.

Abstract translation: 集成装置具有至少两个彼此不直接电接触的分开部分的弹簧。 集成装置还具有基板和可动部，弹簧的两部分构造在基板和可动部之间，以支撑基板上的可动部。 弹簧的两个或多个分开部分能够将两个或多个独立电压施加到可动部件。 本发明的裂缝弹簧可以用于光学开关的MEMS装置中，以便为这些装置中的可移动部件提供独立的电压。

公开(公告)号：US20030132822A1

公开(公告)日：2003-07-17

申请号：US10185654

申请日：2002-06-27

Inventor： Jong Soo Ko ,  Dae Sik Lee ,  Myung Lae Lee ,  Chi Hoon Jun ,  Yun Tae Kim

IPC: H01H051/22

CPC classification number: H01H53/06 ,  B81B3/0021 ,  B81B2201/038 ,  B81B2203/0109 ,  B81B2203/051 ,  B81B2203/056 ,  B81B2203/058 ,  G02B6/266 ,  G02B6/3546 ,  G02B6/3572 ,  H01H1/0036 ,  H01H2001/0078

Abstract: The present invention relates to a micro-electromechanical actuator. An electromagnetic-type micro-electromechanical actuator of the present invention has a conductive beam formed in a micro electronic substrate on an upper side of a magnetic substance, so that the conductive beam can be moved toward an in-plane mode in parallel to the micro electronic substrate depending on a direction that current flows. Therefore, the micro-electromechanical actuator can be applied to most of electromagnetic micro-electromechanical systems that require an in-plane mode.

Abstract translation: 微机电致动器技术领域本发明涉及一种微机电致动器。 本发明的电磁型微机电致动器具有形成在磁性物质上侧的微电子基板中的导电束，使得导电束可以平行于微型平面移动 电子基板取决于电流流动的方向。 因此，微机电致动器可以应用于需要平面内模式的大多数电磁微机电系统。

公开(公告)号：US20020113281A1

公开(公告)日：2002-08-22

申请号：US10025974

申请日：2001-12-19

Inventor： Shawn Jay Cunningham ,  Dana R. DeReus

IPC: H01L029/82

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: MEMS Device having an Actuator with Curved Electrodes. According to one embodiment of the present invention, an actuator is provided for moving an actuating device linearly. The actuator includes a substrate having a planar surface and an actuating device movable in a linear direction relative to the substrate. The actuator includes at least one electrode beam attached to the actuating device and having an end attached to the substrate. The electrode beam is flexible between the actuating device and the end of the electrode beam attached to the substrate. Furthermore, the actuator includes at least one electrode attached to the substrate. The electrode has a curved surface aligned in a position adjacent the length of the electrode beam, whereby the actuating device is movable in its substantially linear direction as the electrode beam moves in a curved fashion corresponding substantially to the curved surface of the electrode.

Abstract translation: 具有带弯曲电极的致动器的MEMS器件。 根据本发明的一个实施例，提供了用于使致动装置线性移动的致动器。 致动器包括具有平面表面的基板和可相对于基板沿线性方向移动的致动装置。 致动器包括附接到致动装置的至少一个电极束，并且具有连接到基底的一端。 电极束在致动装置和连接到基板的电极束的端部之间是柔性的。 此外，致动器包括附接到基板的至少一个电极。 电极具有与电极束的长度相邻的位置对齐的弯曲表面，由此当电极束以基本上对应于电极的弯曲表面的弯曲方式移动时，致动装置可在其基本线性方向上移动。

公开(公告)号：US20020104823A1

公开(公告)日：2002-08-08

申请号：US10041696

申请日：2002-01-08

Inventor： Shawn J. Cunningham ,  Dana R. DeReus ,  Arthur S. Morris

IPC: B29D011/00 ,  G02B006/12

CPC classification number: G02B26/0866 ,  B81B2201/038 ,  B81B2201/047 ,  B81C3/002 ,  B81C3/008 ,  G02B6/353 ,  G02B6/3552 ,  G02B6/356 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858

Abstract: Fabrication Integration of Micro-Components. A method for manufacturing a first and second micro-component on a surface of a substrate, including fabricating a first and second constraint structure. The first and second constraint structures are substantially formed to fit a surface of the first and second micro-component, respectively, for positioning the first and second micro-components with respect to each other. The method includes fabricating the first and second micro-components in separate processes. The first and second micro-components have a surface substantially formed to fit the first and second constraint structures, respectively.

Abstract translation: 微元件的制造集成。 一种在基板的表面上制造第一和第二微型部件的方法，包括制造第一和第二约束结构。 第一和第二限制结构基本上形成为分别适合于第一和第二微型部件的表面，用于相对于彼此定位第一和第二微型部件。 该方法包括在单独的工艺中制造第一和第二微组件。 第一和第二微元件分别具有基本上形成为适合第一和第二约束结构的表面。

公开(公告)号：US06367252B1

公开(公告)日：2002-04-09

申请号：US09610047

申请日：2000-07-05

Applicant: Edward A. Hill ,  Vijayakumar Rudrappa Dhuler ,  Allen Cowen ,  Ramaswamy Mahadevan ,  Robert L. Wood

Inventor： Edward A. Hill ,  Vijayakumar Rudrappa Dhuler ,  Allen Cowen ,  Ramaswamy Mahadevan ,  Robert L. Wood

IPC: F01B2910

CPC classification number: B81B3/0051 ,  B81B2201/038 ,  B81B2203/0109 ,  B81B2203/056 ,  H01H1/0036 ,  H01H61/00 ,  H01H2061/006

Abstract: In embodiments of the present invention, a microelectromechanical actuator includes a beam having respective first and second ends attached to a substrate and a body disposed between the first and second ends having a sinuous shape. The body includes a portion operative to engage a object of actuation and apply a force thereto in a direction perpendicular to the beam responsive to at least one of a compressive force and a tensile force on the beam. The sinuous shape may be sinusoidal, e.g., a shape approximating a single period of a cosine curve or a single period of a sine curve. The beam may be thermally actuated or driven by another actuator. In other embodiments, a rotary actuator includes first and second beams, a respective one of which has first and second ends attached to a substrate and a body disposed between the first and second ends. Each body includes first and second oppositely inflected portions. The bodies of the first and second beams intersect one another at points at which the first and second oppositely inflected portions of the first and second bodies meet. The bodies of the first and second beams are operative to engage the object of actuation and rotate the object of actuation around the point of intersection responsive to at least one of compressive force and tensile force on the first and second beams. Related methods are also described.

Abstract translation: 在本发明的实施例中，微机电致动器包括具有附接到基板的相应的第一端和第二端的梁，以及设置在具有弯曲形状的第一端和第二端之间的主体。 主体包括可操作地接合致动对象的部分，该部分响应于梁上的压缩力和拉力中的至少一个，沿垂直于梁的方向施加力。 弯曲形状可以是正弦的，例如，近似于余弦曲线的单个周期或正弦曲线的单个周期的形状。 梁可以由另一致动器热致动或驱动。 在其他实施例中，旋转致动器包括第一和第二梁，其中相应的一个具有附接到基板的第一和第二端以及设置在第一和第二端之间的主体。 每个主体包括第一和第二相对弯曲的部分。 第一和第二梁的主体在第一和第二主体的第一和第二相对弯曲部分相交的点处彼此相交。 第一和第二梁的主体可操作以接合致动对象，并且响应于第一和第二梁上的压缩力和拉力中的至少一个而使作动点周围的相对点旋转。 还描述了相关方法。

公开(公告)号：US20240048899A1

公开(公告)日：2024-02-08

申请号：US18374993

申请日：2023-09-29

Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Inventor： Malte Florian NIEKIEL ,  Fabian STOPPEL ,  Bernhard WAGNER ,  Fabian LOFINK

IPC: H04R1/34 ,  B81B3/00

CPC classification number: H04R1/345 ,  B81B3/0021 ,  B81B2201/038 ,  B81B2203/0109 ,  H04R2201/003 ,  H04R31/00

Abstract: An MEMS sound transducer is provided, having: at least one actuator; a radiation structure coupled to the actuator and configured as a separate element; a structure surrounding the radiation structure, wherein the radiation structure is separated from the surrounding structure by one or more gaps; and at least one screen arranged along at least one of the one or more gaps.